Keithley 595 Bedienungsanleitung

Model 595 Quasistatic CV Meter

Quick Reference Guide

A GREATER MEASURE OF CONFIDENCE

Specifications are subject to change without notice.

All Keithley trademarks and trade names are the property of

Keithley Instruments, Inc. All other trademarks and trade names

are the property of their respective companies.

Keithley Instruments, Inc.

28775 Aurora Road • Cleveland, Ohio 44139

440-248-0400 • Fax: 440-248-6168

1-888-KEITHLEY (534-8453) www.keithley.com

Printed in the U.S.A. 04/2001

Model 595 Quasistatic CV Meter

Quick Reference Guide

A GREATER MEASURE OF CONFIDENCE

Specifications are subject to change without notice.

All Keithley trademarks and trade names are the property of

Keithley Instruments, Inc. All other trademarks and trade names

are the property of their respective companies.

Keithley Instruments, Inc.

28775 Aurora Road • Cleveland, Ohio 44139

440-248-0400 • Fax: 440-248-6168

1-888-KEITHLEY (534-8453) www.keithley.com

Printed in the U.S.A. 04/2001

595-903-01A 2UP Covers 2/19/03 2:02 PM Page 1

INTRODUCTION

Thisreferenceand programmingguide containscondensed

specifications, descriptionsof the variousfeaturesandin-

formationfor usingthe Model 595.

Also,

IEEE-488program-

minginformationandseveralexampleprogramswritten for

commonly used controllers are also included to get the

Model 595 "up and running" on the bus.

The Model 595Quasistatic

Metermeasurescapacitance

usingauniquefeedbackchargemethod.This methodcor-

rectscapacitancereadings for backgroundleakagecurrent.

built-inIEEE-488interface, plotterdriver andlabeledgrid

programenablethe Model 595to plot

or quasistatic

curves for

variety

semiconductor materials and

components.

01986, Keithley Instruments, Inc.

Instrument Division

Cleveland, Ohio,

U.S.A.

Document Number: 595-903-01 Rev.

TABLE

CONTENTS

CONDENSED SPECIFICATIONS

..................

MODEL

595

FEATURES

.....................

7-20

FRONT PANEL PROGRAMS

.................

21-26

MEASUREMENT CONNECTIONS

.............

29-34

IEEE PROGRAMMING

......................

35-49

PROGRAMS

................................

IBM

..........................

Applell

...............................

HP85

................................

HP9816

..............................

HP9825A

.............................

DEC

............................

PETICBM

2001

.........................

CONDENSED SPECIFICATIONS

CAPACITANCE

Maximum Allowable

at Half Range C

Reso- (1 bar) 18-28OC Delay Time=O.Oirsec

Accuracy'

Range lution +(%rdg+counts) Step

V=O.lV

200pF lOfF 1.0

10 9O.OOOpA

2nF lOOfF

0.8

2 0.900nA

20nF

0.6

2 9.000nA

*Exclusive of noise, for Step

0.05V

and

Delay Time

one second.

CURRENT

Temperature

Accuracy' Coefficient

Reso- (1 Bar) 18-28OC 0-18OC

28-4OoC

Range lution

(%rdg+counts)

(%rdg

counts)l°C

20pA 1fA

200pA lOfA

2nA 1OOfA

20nA 1pA

200nA lOpA

2pA 100pA

20pA 1nA

200pA lOnA

1.5

0.25

0.1

0.15

0.3

0.015

0.3

0.01

0.3

0.01

0.3

*When properly zeroed.

VOLTAGE SOURCE

OUTPUT:

-2O.OOV to 20.00V

0.01V increments.

ACCURACY (1 YEAR, 18-28OC):

2(0.2%

1OmV).

MAXIMUM OUTPUT CURRENT

k2mA; active currentlimit

at <4mA.

ANALOG OUTPUTS

C,l

OUTPUT LEVEL:

1V represents 10,000 display counts

VOLTAGEOUTPUT LEVEL

1V represents 1OV

voltage

MAXIMUM OUTPUT VOLTAGE:

k2V.

on X1 gain;

1000

display counts on X10 gain.

source output.

GENERAL

MAXIMUM INPUT:

30V peak,

60Hz

sine wave.

MAXIMUM

COMMON

MODE VOLTAGE

30Vmaximum,

60Hz

sine wave.

ENVIRONMENT:

Operating:

4OoC,

relative humidity

70%

non-condensing up to 35OC. Storage: -25O to

65OC.

WARM UP

2 hours to rated accuracy except input bias

current

(

10fA after 2 hours,

5fA after

hours, at

23OC)

POWER

105-125V or 210-250V (internalswitchselected).

50Hz

60Hz.

15VA max. 90-11OV and 180-220V ver-

sion available upon request.

Thefollowingsafetyprecautionsshould

observedbefore

using

this

product and any associatedinstrumentation

Al-

though some instruments and

accessoria

would normally

used with non-hazardous voltages, there are situations

where

hazardousconditionsmay

he.

present.

This

productisintendedfor

use

by qualifiedpersonnelwho

recognize

shock

hazards and are

familiar

with the safety

precautions

required

avoidpossibleinjury.Readandfol-

low

all

installation,operation,andmaintenance

information

carefullybefore using the product.Refer to the mauualfor

completeproductspecificatiom.

the product

used in a manner not specified,the protec-

tionprovidedby the productmay

impaired.

The

types

of productusen

are:

Responsiblebody

the individual

group

responsiblefor

the

use

and

maintenance

of equipment, for

ensuring

that

the

equipment

operated

with

its

specifcations

and

operating

limits,

andforensuring

that

operators

are

adeqatelytrained.

Operators

use

the product for

its

intended function. They

must

trained

electricalsafety

procedures

andproper

use

of the instrument. They must

protected

from electric

shock

and

contact

with hazardouslive

Circuits.

Maintenance

personnel

performroutine

procedures

the

productto

keep

operating

properly,forexample,

setting

the

line

voltage

replacing

collsumable

materials.

Maintenance

procedms are described in the manual.Theproceduresex-

plicitly

state

the operatormay perform them.

othenvise,

they shouldbe performed onlyby

service

personnel.

Service

personnel

are trained

work

on livecircuits, and

perform safe installations and repairs of products. Only

properlytrainedservicepersonnelmay performinstallation

and serviceprocedws.

Keithleyproducts

are

designed for

use

with electrical

sig-

nals that are rated Installation

Category

sources

unless

otherwise

marked

described

inthe

Manual.

Exercise extremecaution when

shock

hazard

present.

Lethal

voltage

may

present on cable connectorjacks

test fixtures. The American

National

Standards

Institute

(ANSI)

states

that

shockhazard existswhen voltagelevels

greater

than

30V

RMS,

42.4V

peak,

6OVDC

are

present.

good

safety

practice

expect

that

hazardous

voltage

present

any

unknown

circuit

before

meamring.

Operators

this

product must

protected

from

electric

shock

all

times. The responsible

body

must

ensure

that

operators

are

prevented access

and/or

insulated

from

every

connection point.

some cases, connectionsmust

ex-

posed

potentialhuman contact.Product

operators

in these

circumstancesmust

trained to

protect

themselves from

the

risk

electric shock.

the circuitis capable

operat-

ing at

above

loo0

volts,

conductive

part

the

cir-

cuit

maybe

exposed.

Donot

COMect

switching

cards

directly

lmlialite4lpowercir-

cuits.

They

are

intended to be

used

witb

impedance

limited

sources.

NEVER

connect

switching

cards

directly

mains.

When

connecting

so-

switch

cards,

install

proteCrivedevices tolimitfaultCUlTent andvoltage

the

card.

Before

operating

instrument,make

sure

the linecord

connected to

properlygroundedpowerreceptacle.

Inspect

the connectingcables,test leads, and jumpers for possible

wear, cracks,

breaks

before

each

use.

When

installing

equipment

where

access

the

main

power

cord

restricted,

such

rack mounting,a separate

main

in-

put power disconnectdevicemust be provided,

closeprox-

imity

the equipmentand

within

easyreachof the

operator.

For

maximum safety, donot touch the product, test cables,

anyotherinstrumentswhilepower

appliedtothecircuit

under

test

ALWAYS

removepowerfromtheenfiretest

sys-

tem and dischargeanycapacitorsbefore: connectingor

dis-

connecting cables

jumpers,

installing

removing

switching

cards,

ormakinginternalchanges,such

install-

ing

removing

jumpers.

not

touch

any

object

that

couldpruvideacurrent

path

the

common

side of

the

circuit

under

test

power line

(earth)

ground. Always make

measllrements

with

dry

hands

while

standing

dry,

insulated

slnface

capableof withstanding

the

voltage

bkng

measured

Theinstrumentand accessoriesmust

usedin accordance

withits specificationsandoperatinginstructions

the safe-

of the equipmentmay

impaired.

notexceedthe

maximum

signal

levelsof theinstruments

and

accessories,

definedin the specificationsand

operat-

ing

information,

and

shown

ontheinstrumentor test

fix-

ture

panels,

switchingcard.

When fuses

are

used in a product, replace with same ty-pe

and

rating

for continuedprotectionagainst

fire

hazard.

Chassis connections must only

used

shield connec-

tions

for measuring circuits,

N(TT

safety earth ground

connections.

you

are

using

test

fixture,

keepthelidclosedwhilepow-

appliedtothedevice

under

test.Safeoperation

requires

the

use

of a lidinterlock.

@orb

ispresent,connectittosafetyearthgromd

usingthe

wire

recommendedinthe

user

documentation.

The

symbolon an instrumentindicatesthat the user

shouldrefertotheoperatinginstructionslocatedin theman-

ual.

The

symhol

aninstrumentshows that it can

source

measure

lo00

voltsormm,including

the

combinedeffect

normal

and common mode voltages.

Use

standad

safety

pmtionstoavoid

personal

contact

with

thesevoltages.

The

WARNING

headingin a

manual

explains

dangers

that

mightresultin personalinjury

death.

Always

read

the

as-

sociated

information

very carefullybefore

performing

the

indicatedprocedure.

The

CAUTION

beadingin a

manual

explainshazardsthat

coulddamagethe instrument. Such damage may invalidate

the warranty.

Instrumentation and accessories

shall

not

connectedto

humans.

Before

performing

any maintenance, disconnect the

line

cord and

all

test cables.

maintain

protectionfromelectricshockand

lire,

replace-

ment components in mains circuits, including the power

transformer,

test

leads,

and input

jacks,

must

purchased

fromKeithleyInstruments.

Standard

fuses,

with

applicable

nationalsafetyapprovals,may

used

the

rating

and

type

are

the

same.

Other

componentsthat

are

not safety related

may

purchasedfrom other suppliers

long

they

are

equivalent to the

original

component. (Note

that

selected

parts should

purchased

only

through

Keithley

Instru-

ments to

maintain

accuracy and functionalityof the prod-

uct.) If you

are

unsure about the applicability of a

replacementcomponent,call a Keithley Instrumentsoffice

for

information.

To clean

instnunent,

use

dampcloth

mild,

water

based

cleaner.

Clean

theexteriorof the instrumentonly.

not ap

ply cleanerdirectlytothe instrument

allowliquidstoenter

or spill

the

instrument.products

that

consist of a circuit

board

with

caseorchassis(e.g.,

data

acquisition

board

for

installationintoa computer)shouldnever

requhe

cleaning

handledaccording

instructions.

the

board

becomes

con-

taminated

and

operation

is affected,the

board

should

re-

turned

tothe factoryforpropercleaning/servicing.

SAFETY

PRECAUTIONS

Before operation, groundthe instrument through a prop-

erly earth-grounded power receptacle.

Before servicing, disconnect the instrument from the

power line and all other equipment. Consult the Model

595

Instruction Manual for service information.

nottouch anyterminals whilethe instrumentisturned

on or connected to any test equipment.

WARNING

The maximumcommonmode

input

voltage(the

voltagebetweeninput

low

andchassisground)

30V

peak. Exceedingthis value may createa

shock hazard.

CAUTION

The maximumvoltage betweeninput highand

input lowis

30V

peak. Exceedingthisvaluemay

causedamage

the instrument. Current inputs

that exceed3mA maybeerroneouslydisplayed

as an on-scale reading.

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