Keysight Technologies B1500A Bedienungsanleitung

Keysight Technologies

B1500A Semiconductor Device Analyzer

Configuration Guide

Introduction

Keysight B1500A Semiconductor Device Analyzer of Precision Current-Voltage Analyzer Series

is an all in one analyzer supporting IV, CV, pulse/dynamic IV and more, which is designed for

all-round characterization from basic to cutting-edge applications. It provides a wide range of

measurement capabilities to cover the electrical characterization and evaluation of devices, materials,

semiconductors, active/passive components, or virtually any other type of electronic device with

uncompromised measurement reliability and efficiency. In addition, the B1500A’s modular architecture

with ten available slots allows you to add or upgrade measurement modules if your measurement

needs change over time.

Keysight EasyEXPERT group+ GUI based characterization software is available either on the

B1500A’s embedded Windows 7 platform with 15-inch touch screen or on your PC to accelerate

the characterization tasks. It supports efficient and repeatable device characterization in the entire

characterization process from measurement setup and execution to analysis and data management

either interactive manual operation or automation across a wafer in conjunction with a semiautomatic

wafer prober. EasyEXPERT group+ makes it easy to perform complex device characterization

immediately with hundreds of ready-to-use measurements (application tests) furnished, and allows

you the option of storing test condition and measurement data automatically after each measurement

in a unique built-in database (workspace), ensuring that valuable information is not lost and that

measurements can be repeated at a later date. Keysight B1500A provides the complete solution for

device characterization with these versatile capabilities.

Table of Contents

Introduction......................................................................................................... 02

Supported Plug-in Modules ............................................................................... 03

Maximum Module Configuration........................................................................ 04

B1500A Configuration Options and Contents.................................................... 05

B1500A Upgrade Options and Contents............................................................ 11

Accessories......................................................................................................... 13

CMU Accessories................................................................................................ 14

HV-SPGU Accessories..................................................................................... 16

WGFMU Accessories ....................................................................................... 17

Other Accessories............................................................................................ 18

B1500A Configuration ........................................................................................ 24

03 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Supported Plug-in Modules

The B1500A supports ten slots for plug-in modules.

Module Name

Slots

occupied Key Features

B1510A High power

source/monitor unit

(HPSMU)

2 –Range up to 200 V/1 A with 4-quadrant operation

–Minimum measurement resolution 10 fA/2 µV –Spot, sweep and more measurement

capabilities

–Sampling (time domain) measurement

from 100 μs

–Pulse measurement from 500 μs pulse

width

–Accurate Quasi-Static Capacitance

Voltage (QS-CV) measurement with

leakage current compensation

B1511B Medium power

source/monitor unit

(MPSMU)

1 –Range up to 100 V/0.1 A with 4-quadrant operation

–Minimum measurement resolution 10 fA/0.5 µV

–Optional ASU (atto-sense and switch unit) for 100

–aAresolution and IV/CV switching capability

B1517A High resolution

source/monitor unit

(HRSMU)

1 –Range up to 100 V/0.1 A with 4-quadrant operation

–Minimum measurement resolution 1 fA/0.5 µV

–Optional ASU (atto-sense and switch unit) for 100

–aAresolution and IV/CV switching capability

B1514A 50 µs Pulse

medium current source/

monitor unit (50 µs

Pulse MCSMU)

1 –Range up to 30 V/1 A pulsed (0.1 A DC) with 4-quadrant operation

–Pulse measurement from 50 μs pulse width with 2 μs resolution

–Oscilloscope view (voltage/current waveform viewer) is supported

–Minimum measurement resolution 10 pA/0.2 µV

B1520A Multi-frequency

capacitance measure-

ment unit (MFCMU)

1 –AC impedance measurement (C-V, C-f, C-t)

–1 kHz to 5 MHz frequency range with minimum 1 mHz frequency resolution

–25 V built-in DC bias and 100 V DC bias with SMU and SCUU (SMU CMU Unify Unit)

–Easy and fast yet accurate IV and CV automated connection change by SCUU

B1525A High voltage

semiconductor pulse

generator unit

(HV-SPGU)

1 –High voltage output up to ±40 V applicable for non-volatile memory testing

–Two-level and three-level pulse capability by single channel

–Flexible arbitrary waveform generation with 10 ns resolution (arbitrary linear waveform generation

function)

–Two channels per module

B1530A Waveform

generator/fast measure-

ment unit (WGFMU)

1 –Ultra-fast IV measurement capability for the pulsed IV and transient IV such as NBTI/PBTI,

RTN, etc.

–Waveform generation with 10 ns programmable resolution

–Simultaneous high-speed IV measurement capability (200 MSa/s, 5 ns sampling rate) 10 V peak-to-peak

output

–No load line effect accurate pulsed IV measurement by dynamic SMU technology

04 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Maximum Module Configuration

The total power consumption of all SMU modules cannot exceed 84 W. Under this rule,

the B1500A can contain any combination of the following SMUs:

– Up to 10 MPSMUs

– Up to 10 HRSMUs

– Up to 4 HPSMUs

– Up to 4 MCSMUs

Only one single-slot MFCMU can be installed per B1500A mainframe. Up to five single-

slot HV-SPGUs can be installed per mainframe. Up to five single-slot WGFMUs can be

installed per mainframe.

When one or more WGFMU modules are installed in the B1500A mainframe, the

following table applies. Multiply the values given below by the number of installed

modules of that type and add the products together. The sum of the products must be

less than or equal to 59 for the configuration to be permissible.

MPSMU 2

HRSMU 2

HPSMU 14

MCSMU 5

MFCMU 7

HV-SPGU 12

WGFMU 10

VGA video

output port

GPIB port

B1514A MCSMU

B1520A MFCMU

B1511B MPSMU

B1517A HRSMU

B1510A HPSMU

B1530A WGFMU

B1525A HV-SPGU

Built-in ground unit (GNDU)

LAN, USB, external trigger

in/out and digital I/O ports

05 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents

Model/Option Description Contents Qty Additional Information

B1500A Semiconductor Device Analyzer

Mainframe

B1500A mainframe 1

USB keyboard and

mouse

Stylus pen 1

Interlock cable 1

Triaxial cable 2 Triaxial cable x 1, GNDU cable x 1

GNDU Kelvin adapter 1

Miscellaneous 1 Power cable, CR-ROMs, software license entitlement document, etc.

Select the cable length (mandatory)

B1500A-015 1.5 m cable length - - Length of cable bundled in the mainframe and package options is

specified by option 015 (1.5 m) or 030 (3.0 m).

B1500A-030 3 m cable length - -

Select the power line frequency (mandatory)

B1500A-050 50 Hz power line frequency - - Power line frequency is specified by option 050

(50 Hz) or 060 (60 Hz).

B1500A-060 60 Hz power line frequency - -

Select package options (mandatory and mutually exclusive)

B1500A-A00 Standard Pack 0 - Empty

Package for Custom Solution

(No module is included.)

- - -

B1500A-A01 Standard Pack 1 -Standard

Package (Mid PWR unit 4ea,

Cables)

MPSMU 4 Installed MPSMU module

Triaxial cable 8 Cable length is 1.5 m or 3.0 m

B1500A-A02 Standard Pack 2 -High

Resolution Package (High

Resolution unit 4ea, Cables)

HRSMU 4 Installed HRSMU module

Triaxial cable 8 Cable length is 1.5 m or 3.0 m

B1500A-A03 Standard Pack 3 -High Power

Package(High PWR unit 2ea,

Mid PWR unit 2ea, Cables)

HPSMU 2 Installed HPSMU module

MPSMU 2 Installed MPSMU module

Triaxial cable 8 Cable length is 1.5 m or 3.0 m

06 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select package options (mandatory and mutually exclusive) - continued

B1500A-A04 Standard Pack 4 - Flash Pack(Mid

PWR unit 2ea, Hi-Res unit 2ea, PG,

Accessories)

MPSMU 2 Installed MPSMU module

HRSMU 2 Installed HRSMU module

HV-SPGU 1 Installed HV-SPGU module

SPGU cable 2 SPGU Cable (SMA to Coaxial)

SPGU synchronous

cable

2 SPGU synchronous cable (16493Q, SMA to SMA, 8 cm).

16440A 1 16440A SMU/PGU pulse generator selector

Control cable 1 Control cable (40 cm) between 16445A and 16440A (16440A-003)

16445A 1 16445A Selector adapter for 16440A

Control cable 1 Digital I/O cable, 1.5 m, between B1500A and 16445A (16445A-001)

Triaxial cable 2 Triaxial cable (1.5 m) bundled in 16440A

Triaxial cable 8 Cable length is 1.5 m or 3.0 m

Select add-on packages (optional)

B1500A-A10 Add-on Package - High Power Source

Monitor Unit (B1510A) 1ea, Cables

HPSMU 1 Installed HPSMU module

Triaxial cable 2 Cable length is 1.5 m or 3.0 m

B1500A-A11 Add-on Package - Mid Power Source

Monitor Unit (B1511B) 1ea, Cables

MPSMU 1 Installed MPSMU module

Triaxial cable 2 Cable length is 1.5 m or 3.0 m

B1500A-A17 Add-on Package - High Resolution

Source Monitor Unit (B1517A) 1ea,

Cables

HRSMU 1 Installed HRSMU module

Triaxial cable 2 Cable length is 1.5 m or 3.0 m

B1500A-A1A Add-on Package - B1514A Medium

current source/monitor unit 1ea w/

connection box

MCSMU 1 Installed MCSMU module

Triaxial cable 2 Cable length is 1.5 m or 3.0 m

N1255A 1 N1255A Connection box for B1514A MCSMU

B1500A-A1B Add-on Package - B1514A Medium

current source/monitor unit 2ea w/

connection box

MCSMU 2 Installed MCSMU module

Triaxial cable 4 Cable length is 1.5 m or 3.0 m

N1255A 1 N1255A Connection box for B1514A MCSMU

B1500A-A20 Add-on Package - Capacitance

Measurement Unit (B1520A) 1ea,

Cable 1ea

MFCMU 1 Installed MFCMU module

CMU cable 1 CMU cable. Cable length is 1.5 m or 3.0 m

07 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select add-on packages (optional) - continued

B1500A-A25 Add-on Package - Pulse

Generator Unit (B1525A) 1ea,

Cables

HV-SPGU 1 Installed HV-SPGU module

SPGU cable 2 SPGU Cable (SMA to Coaxial)

SPGU synchronous

cable

2 SPGU synchronous cable (16493Q, SMA to SMA, 8 cm).

B1500A-A28 Add-on Package - Atto Sense

Unit 1ea for High Resolution

Source Monitor Unit

ASU 1 Atto sense switch unit (E5288A ASU), 1 ea.

Triaxial and D-sub

cable for ASU

1 A set of triaxial D-sub Cable for ASU (16493M).

Cable length is 1.5 m or 3.0 m

B1500A-A29 Add-on Package - Atto Sense

Unit 1ea, for Mid Power Source

Monitor Unit (only for B1511B)

ASU 1 Atto sense switch unit (E5288A ASU), 1 ea.

Triaxial and D-sub

cable

1 A set of triaxial D-sub Cable for ASU (16493M).

Cable length is 1.5 m or 3.0 m

B1500A-A30 Add-on Package - B1530A 1ea,

Remote Sense Unit 2ea, Cables

WGFMU 1 Installed WGFMU module

RSU 2 Remote-sense and switch unit (RSU)

RSU cable 2 RSU cable between WGFMU and RSU.

Cable length is 1.5 m or 3.0 m

08 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select add-on packages (optional) - continued

B1500A-A31 Add-on Package - B1530A 1ea,

Connector Adaptor, Remote

Sense Unit 2ea, Cables

WGFMU 1 Installed WGFMU module

RSU 2 Remote-sense and switch unit (RSU)

RSU cable (2.4 m) 2 RSU cable (2.4 m) between WGFMU and connector adapter.

Cable length can’t be selected by option 015/030.

RSU cable (0.6 m) 2 RSU cable (0.6 m) between connector adapter and RSU.

Cable length can’t be selected by option 015/030.

Connector adapter 2 Connector adapter for RSU cable, female - female (16493R-801).

This can be used for a shield box to hook up the RSU cable.

B1500A-A3P Add-on Package - Probe cable

kit for B1530A(8 probe cables.

B1530A not included)

SSMC cable,

50 mm

2 SSMC short-open cable for current return path, 50 mm (16493R-101)

SSMC cable,

75 mm

2 SSMC short-open cable for current return path, 75 mm (16493R-102)

SMA-SSMC cable,

200 Mm

2 SMA-SSMC cable between RSU and DC probe, 200 mm (16493R-202)

SMA cable,

200 mm

2 SMA-SMA cable between RSU and RF probe, 200 mm (16493R-302)

09 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select add-on packages (optional) - continued

B1500A-A5F Add-on Pack - Test Fixture for

packaged device (16442B 1ea)

Test Fixture 1 Test fixture for packaged device (16442B)

Accessory case 1Accessory case for furnished accessories.

Blank PTFE board 1 Blank PTFE board for DUT stage

28-pin socket module 1 28-pin DIP (dual-in-line) package socket

module

Universal socket

module

1 Universal socket module, 0.075 inch pitch

Universal socket

module

1 Universal socket module, 0.05 inch pitch

Connection pin 10 Connection pin set for universal socket

module

Mini-banana to

pin-plug

12 4ea per each color (black, red, blue)

Pin-plug to pin-plug 9 3ea per each color (black, red, blue)

Mini-banana to clip 9 3ea per each color (black, red, blue)

Mini-banana to

mini-banana

9 3ea per each color (black, red, blue)

Select calibration options (optional)

B1500A-A6J ANSI Z540-1-1994 Calibration - - ANSI Z540 compliant calibration

B1500A-UK6 Commercial Calibration

Certificate with Test Data

- - Test Data for ISO 9001/2 Commercial

Calibration. This option provides measurement

test data for the standard commercial calibration

and test equipment trace information.

Select manual options (mandatory)

B1500A-0B0 Download the Product Manual

from the Keysight website

- - Select if no printed manual is needed.

B1500A-ABA English Documentation Printed manuals 1 Printed manuals in the selected language.

B1500A-ABJ Japanese Documentation

Optical disk drive (optional)

B1500A-DR1 Replace a built-in DVD-R drive

with a read-only DVD drive

DVD drive (read only) 1 DVD-R drive of the mainframe is replaced with DVD drive (ready-only)

Optical disk drive (optional)

B1500A-1CM Rack Mount Kit for B1500A Rack mount kit 1 Rack mount flange kit 310.4mm H (7U) - two flange brackets

(1CM033A)

10 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

WGFMU learning kit (optional)

B1530A-0KN Self-paced Sample Program

Learning Kit for B1530A

WGFMU

Sample devices 4 Sample device is the assembly made from two SMA (female)

connectors, a printed circuit board, and a discrete device. (1kΩ, 1MΩ,

N-MOS FET and blank board)

SMA cable 2 SMA (m) – SMA (m) cable (20 cm) for connecting to the sample device

Printed manual 1 Sample Program Learning Kit User’s Guide

Startup assistance

PS-S20-01 Recommended Startup

Assistance

- - Startup assistance & product training

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