Keysight Technologies M9602A Bedienungsanleitung

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M9602A and M9603A

PXIe Precision Source/Measure Units

15 MSa/s, 1 pA/100 fA, 60 V, 3.5 A DC/10.5 A pulse

Introduction

The Keysight M9602A and M9603A are PXIe precision SMUs which offer a best-

in-their-class narrow pulse width of 10 μs, a fast sampling rate of up to 15 MSa/s,

and a wide output range that enables dynamic/pulsed measurements for broad

emerging applications such as VCSEL optical devices and IC testing. This table

shows an overview of the M9602A and M9603A, product options, and associated

accessories. This guide provides step-by-step instructions to help you configure

the product to meet the desired test requirements.

Model number

M9602A

PXIe SMU, 15 MSa/s, 1 pA, 60 V, 3.5 A DC/10.5 A pulse

M9603A

PXIe Precision SMU, 15 MSa/s, 100fA, 60 V, 3.5 A DC/10.5 A

pulse

Accessories

PX0101A-001/002

BNC-to-ferrule terminal cable, 1.5 m/ 3 m

PX0103A-001/002

Triaxial to SMB cable, 1.5 m/ 3 m

PX0104A-001/002

High current triaxial cable, 4 A, 1.5 m/ 3 m

PX0105A-001/002

Low inductance BNC cable, 1.5 m/ 3 m

PX0108A-001/002

BNC-to-SMB cable, 1.5 m/ 3 m

Options

1A7

Calibration + uncertainties + guardbanding (not accredited)

A6J

ANSI Z540-1-1994 calibration

UK6

Commercial calibration certificate with test data

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Configuring Your Keysight M9602A/M9603A Precision SMU

Step 1. Define the required number of M9602A/M9603A modules

You need to define the required number of modules based on your application requirements.

Product

number

Required

slots

Number of

channels

Max.

Voltage

Max. Current

(DC/pulse)

Min. Voltage

resolution

Min. Current

resolution

Max. Sampling

rate

M9602A

60 V

3.5 A/10.5 A

6 μV

1 pA

15 MSa/s

M9603A

100 fA

The following items come as standard with each M9602A/M9603A PXIe precision SMU module:

Qty.

Additional information

Quick startup poster

1ea

Printed reference for quick startup (English)

Certificate of calibration

(without test data)

1ea

Certificate of calibration (without actual test data). If you

need the test data, please specify option UK6.

Short bar

1ea

Short bar to connect low terminals to chassis common;

orderable part number is M9601-87001 (includes 5 pcs.)

Connector-terminal block 2.5

mm 6-terminal

1ea

Connector-terminal block to connect external trigger

terminals and interlock terminal; orderable part number

is M9601-87002 (includes 5 pcs.)

Step 2. Select optional accessories

The following accessories are available for connection between M9602A and M9603A to your DUT.

Product number

Description

Note

PX0101A-001/002

BNC-to-ferrule terminal cable, 1.5 m/ 3 m

Trigger or interlock cable

PX0103A-001/002

Triaxial to SMB cable, 1.5 m/ 3 m

Low sense cable

PX0104A-001/002

High current triaxial cable, 4 A, 1.5 m/ 3 m

Standard high force and high sense

triaxial cable

PX0105A-001/002

Low inductance BNC cable, 1.5 m/ 3 m

High force cable for narrow pulse

less than 50 μs

PX0108A-001/002

BNC-to-SMB cable, 1.5 m/ 3 m

Low sense cable

N1254A-106

Triaxial(m) to BNC(f) adaptor

To connect PX0105A cable to high

force triaxial terminals of SMU.

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M9602A/M9603A front panel

As shown in Figure 1, the M9602A/M9603A has High force, Low force, High sense,

Low sense and Guard. It supports both two-wire and four-wire measurement, and low

current measurement with a guard.

Step 2-1. Select cable and accessories for connection between M9602A/M9603A and your DUT

You will need to select an appropriate accessory according to the connection type.

There are basically three types of connection configurations. The essential cables and

accessories are as follows:

Two-wire or

Four-wire

Pulse width

Recommended cable

High force

High sense

Low sense

Four-wire

<= 50 μs

Triaxial(m) to BNC(f)

+ Low inductance cable1

High current triaxial cable2

Triaxial-to-SMB cable3

> 50 μs or DC

High current triaxial cable

Triaxial-to-SMB cable

Two-wire

High current triaxial cable

1. A low i nductance c able does not have Guard, and is limited in low current measurement. Guard connection is

required for low current measurement (~ 10 nA or less measurement.)

2. A low induc tance cable can be used, though it is limited in low current measu rement.

3. An SMB-BNC cabl e can be used, however, do not connect the outer shield, Low Force, to the chassis /frame ground

of the DUT when M9603A is grounded.

Figure 1. M9602A/M9603A Front panel

Two external trigger lines —

PXIe trigger lines are available on the

backplane

Interlock

One SMB terminal for Low sense

Two triaxial terminals for high force / sense

Low terminals

floating

grounded —attach a short bar

High force

Guard

High sense

Low force

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Four-wire connection for narrow pulse (<= 50 us)

Figure 2 shows the connection for 4-wire connections for narrow pulse (<= 50 us). For this configuration,

select the items shown in Table 1.

Note the following points for this connection:

•The low inductance cable does not have Guard, and is limited to low current measurement.

Guard connection is required for low current measurement (~ 10 nA or less measurement.)

•Do not connect the outer shield or Low Force to the chassis/frame ground of the DUT when

M9603A is grounded

Figure 2. Connection for 4-wire connection for narrow pulse (<= 50 us)

DUT Interface

DUT

In the case of

Low force = floating

If you perform grounded measurement,

attach the short bar.

Or if you perform floating measurement,

remove the short bar.

N1254A-106

Triaxial(m) to BNC(f)

PX0105A

Low inductance BNC cable

PX0104A

High current triaxial cable

PX0103A

Triaxial to SMB cable

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Table 1. Required items for 4-wire connection for narrow pulse (<= 50 us)

Product number

Description

Qty.

Note

PX0103A-001/002

Triaxial to SMB cable

1.5 m/ 3 m

Low sense

If your DUT interface is BNC, you can use a

PX0108A BNC-to-SMB cable, instead.

PX0104A-001/002

High current triaxial cable,

4 A 1.5 m/ 3 m

High sense

If your DUT interface is BNC, you can use a

PX0105A Low inductance BNC cable with

N1254A-106 Triaxial(m) to BNC(f) adaptor,

instead.

PX0105A-001/002

Low inductance BNC cable

1.5 m/ 3 m

High force

N1254A-106

Triaxial(m) to BNC(f)

adaptor

Used with PX0105A

Four-wire connection for pulse (> 50 µs) or DC

Figure 3 shows the connection for 4-wire connection for pulse (> 50 µs) or DC. For this configuration,

select the items shown in Table 2.

Figure 3. Connection for a 4-wire connection for pulse ( > 50 µs) or DC

DUT Interface

DUT

In the case of

Low force = floating

If you perform grounded measurement,

attach the short bar.

Or if you perform floating measurement,

remove the short bar.

PX0104A

High current triaxial cable

PX0104A

High current triaxial cable

PX0103A

Triaxial to SMB cable

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Table 2. Required items for 4-wire connection for pulse (> 50 µs) or DC

Product number

Description

Qty.

Note

PX0103A-001/002

Triaxial to SMB cable

1.5 m/ 3 m

Low sense

PX0104A-001/002

High current triaxial cable, 4 A

1.5 m/ 3 m

High force, High sense

Two-wire connection

Figure 4 shows the connection for 2-wire connection. For this configuration, select the items shown in

Table 3.

Table 3. Required items for 2-wire connection

Product number

Description

Qty.

Note

PX0104A-001/002

High current triaxial cable, 4 A

1.5 m/ 3 m

High Force

Figure 4. Connection for 2-wire connection.

DUT Interface

DUT

In the case of

Low force = floating

If you perform grounded measurement,

attach the short bar.

Or if you perform floating measurement,

remove the short bar.

PX0104A

High current triaxial cable

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Step 2-2. Select the cable if you utilized an interlock circuit

The M9602A/M9603A is equipped with an interlock safety feature to protect against exposure to

voltages above a user-specified value. You can engage the safety lock using interlock pins on the

connector located at the front panel. Normally, these pins are routed to a shielding box or test fixture

that must be closed to complete the interlock circuit.

You can install an interlock circuit as shown in Figure 3. If your shielding box has a BNC connector for

the interlock circuit, you can use the PX0101A-001 or 002 BNC to ferrule terminal cable with a

connector-terminal block to connect the M9602A/M9603A’s interlock pins to it. For more detailed

information, please refer to the Keysight M9602A/M9603A Startup Guide.

Step 2-3. Select the cables if you use an external trigger

There are trigger lines in the PXIe chassis available to synchronize the M9602A/M9603A with the other

PXIe modules. In addition, there are two external trigger lines available if you need to synchronize it with

an external instrument. You can use the PX0101A-001 or 002 BNC to ferrule terminal cable with a

connector-terminal block to connect the M9602A/M9603A’s external trigger lines to the external

instrument.

Figure 5. An example of interlock circuit installation

PX0101A-001 or 002 BNC

to ferrule terminal cable

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Step 3. Select software license type (Optional)

The PX0109A Quick I/V Measurement Software For PXIe Precision SMU is recommended for easy and

quick I/V measurement. Because it supports various license type, select the appropriate one for your

purpose. Please visit: www.keysight.com/find/px0109a in detail.

Product

License type

License term (36 months subscription)

License & support

PX0109A

Node-locked (fixed)

R-X45-001-Y

Transportable

R-X45-004-Y

USB Portable1

R-X45-005-Y

Floating (single site)

R-X45-002-Y

Floating (single region)

R-X45-006-Y

Node-locked (fixed)

R-X45-001-Y

1. USB portable license requires a certified USB dongle (availabl e for additional purchase. Keysight part number

PX0100-D10)

Step 4. Select a calibration plan

Step 4-1. Select a relevant calibration services plan (optional)

Factory calibration and certification of calibration comes as standard. The optional ISO 17025 (not

accredited), ANSI Z540, and commercial calibration certificate with test data are available as follows:

Description

Product number

Additional information

Calibration + uncertainties + guardbanding

(not accredited)

M9602A-1A7/

M9603A-1A7

Calibration certificate with

measurement results are available

only at time of purchase

ANSI Z540-1-1994 calibration

M9602A-A6J/

M9603A-A6J/

Calibration certificate with

measurement results are available

only at time of purchase

Commercial calibration certificate with test

data

M9602A-UK6/

M9603A-UK6

Calibration certificate with

measurement results are available

only at time of purchase

Step 4-2. Select recalibration service plans (optional)

The following options are available. If you need other options —for example, the standard compliant

calibration option —please contact your local Keysight office for availability.

Description

Product number

Calibration plan —return to Keysight —3 years

R-50C-011-3

Calibration plan —return to Keysight —5 years

R-50C-011-5

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Related Literature

Publication Title

Publication number

M9602A and M9603A PXIe Precision Source/Measure Unit, Data Sheet

3120-1427EN

PX0109A Quick I/V Measurement Software for PXIe Precision SMU, Technical

Overview

3121-1317EN

Keysight PXI and AXIe Products and Solutions, Catalog

5992-0600EN

Keysight PXI & AXIe Instruments, Software, Reference Solutions, and Services

5990-6379EN

Appendix. Tips for Connection between M9602A/M9603A and your DUT

Two-wire connection or four-wire connection

If you are measuring very small resistances or applying a very large current, you should use the four-

wire measurement method (also known as the Kelvin method). This technique uses both force and

sense terminals. Performing the measurement through the sense terminals (in which no current is

flowing) eliminates the undesirable effects of cable resistance.

Figure 6. Two-wire connection and four-wire connection configuration

4-wire connection

2-wire connection

DUT

High force

Low force

High sense

Low sense

DDUTU

High force

Low force

DUT

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This information is subject to change without notice. © Keysight Technologies, 2020 - 2021, Published in USA, September 14, 2021, 3120-1530.EN

Learn more at: www.keysight.com

For more information on Keysight Technologies’ products, applications, or services,

please contact your local Keysight office. The complete list is available at:

www.keysight.com/find/contactus

Guarding connections

Low current measurements (< 1 nA) requires a guarding to prevent leakage through the measurement

cable. Figure 7 illustrates a simplified overview of the guarding technique. Guarded measurements

require the use of triaxial cables. A follower (x1) buffer amplifier maintains the same potential between

the guard conductor and the center conductor. Since there is no voltage difference, there is no current

from the center conductor to the guard.

Note: in this example, the device interface also has a guarded shield to prevent leakage at the device

interface.

Figure 7. Guarding technique

DUT

Guard shield

Shield

Low force

Guard

High force

M9602A/M9603A

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