MKS 901P Anleitung zur Verwendung

P/N: 100017411

Short form manual

REV: A, December 2009

Product: 901P-x1090-0072

Connector: 6 pin Hirschmann

Output: 19 (TPR280,TPR265)

RoHS Compliant

Measuring range (N2and Air): 1×10-5 to 1500 Torr

MP Accuracy 5×10-4 to 1×10-3 Torr: ± 10% of reading

1×10-3 to 100 Torr: ± 5% of reading

100 to Atm.: ± 25% of reading

PZd Accuracy(1) -760 to +100 Torr: ± 1-10 % of reading

MP Repeatability (2) 1×10-3 to 100 Torr: ± 2% of reading

Supply Voltage: 9 –30 VDC

Power consumption: < 1.2 Watt

Fuse (thermal recoverable): 200 mA

Analog output 1: (100 Ω impedance): 2.199 –8.625 VDC

Analog output 1 resolution: 16 bit

Materials exposed to vacuum: 304 Stainless steel, Silicon

SiO2, Si3N4, gold, Viton®

Low outgassing Epoxy resin

Internal volume: KF16 flange 2.8 cm3

KF16 long flange 6.7 cm3

KF25 flange 3.6 cm3

1/8” NPT , VCR8 3.1 cm3

VCR4 flange 1.9 cm3

Flange and Housing material: Stainless steel 304

Weight (901P with KF16): 170 g

Climate category: IP40

Operating temperature: 0 to 40 oC

Bakeout temperature (Power off): 85 oC

(1) Refer to Operation and Installation manual for Piezo accuracy details.

(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at

ambient temperature after zero adjustment.

MKS Instruments HPS Products

www.mksinst.com

The 901P transducer package contains these items:

1 pcs. 901P Transducer

1 pcs. Short form manual (P/N: 100017411)

1 pcs. Documentation & Software CD (P/N: 100017096)

If any items are missing contact MKS customer service.

This short form manual provides the basic information for simple use and

setup. For system integration and advanced setup refer to Operation and

Installation manual and demo software on the supplied Documentation &

Software CD.

The 901P Loadlock vacuum transducer offers a wide measuring range from

1×10-5 to 1500 Torr and atmospheric differential switching function.

It is based on the measurement of thermal conductivity in a small cavity on a

MEMS silicon chip sensor and a differential Piezo sensor.

RS232 or RS485 digital interface

Analog voltage output compatible with TPR265, TPR280

Standalone use or with PDR900 controller

The user switch can used to perform measurement adjustments. Refer to

Operation and Installation manual before pressing the user switch.

The transducer is factory calibrated when delivered. Additional adjustment is

normally not required. Refer to Operation and Installation manual for

calibration and adjustment recommendations.

Install the 901P away from pumps and gas sources and where vibration is

minimized to give the most representative pressure measurement.

The 901P can be mounted in any orientation, without compromising accuracy

and performance.

The 901P is not intended for use in corrosive or

explosive environments. Refer to materials exposed to

vacuum for process compatibility.

Refer to Operation and Installation manual for installation specifications and

recommendations.

Use a cable with a female 6-pin connector with strain reliefs to ensure proper

electrical connection and to reduce stress.



Ensure a low impedance electrical connection between the

901P transducer body and the grounded vacuum system to

shield the sensor from external electromagnetic sources.

To comply with EN61326-1 immunity requirements, use a braided, shielded

cable. Connect the braid to the metal hoods at both ends of the cable with

the end for power supply connected to earth ground.

925 I/O Connector (6 pin)

6 pin Hirschmann

Description

Identification resistor 3KΩ

Analog Output +

Analog Output –

Power + (9-30 VDC)

Power return -

Chassis

The analog pressure output (16 bit resolution) is based on the digital

pressure reading (PR1). Connect the signal to a differential input.



Do not connect the negative side of the analog output to

the power supply return or to any other ground. The

voltage drop from supply current will produce errors in the

analog output.

Converting voltage to pressure:

P = 10(Vout –c)

Vout = c + log10(P)

mbar

5.5

Torr

5.625

Pascal

3.5

Vout vs. Pressure (Torr / mbar, N2setup)

The transducer can provide other analog output characteristics than the

standard 1VDC/decade. Refer to Operation and installation manual.

Gas dependence

The combined sensor output provides gas independent measurement from

60 to 1500 torr. The MicroPirani™sensor is based on measurement of

thermal conductivity and consequently its reading depends on gas type and

gas concentration. Refer to Operation and installation manual for gas

dependency data.

US & ASIA:

MKS Instruments, Inc., HPS™

Products, Inc.,

5330 Sterling Drive, Boulder, CO

80301, USA,

Phone: (303) 449-9861

EUROPE:

MKS Denmark ApS

Ndr. Strandvej 119G

DK3150 Hellebaek, Denmark

Phone: +45 44 92 92 99,

Email: mksdenmark@mksinst.com

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