Strasbaugh 7AA Bedienungsanleitung
Version 1.2 - April 18, 1996
Model 7AA
Wafer Grinder
Operation
and
Maintenance
Manual
STRASBAUGH
825 Buckley Road
San Luis Obispo, CA 93401
Phone: (805) 541-6424
Fax: (805) 541-6425
Copyright © 1996 by Strasbaugh. All rights reserved.
Strasbaugh Table of Contents
Version 1.2 - April 18, 1996; Update 11/6/96 iii U
Table of Contents
Chapter 1 Introduction 1 - 1
About the 7AA Manual 3
About the Model 7AA Wafer Grinder 4
Guarantee/Warranty Certificate 5
Safety 7
General Operation 8
Visual Hazard Alerts 10
Hazard Magnitude Levels 10
Three-Panel Alert Graphics 11
Interlocks - Safety Interlock Door Switches 15
Sprayer Use 16
Slurry Compounds 16
Waste Disposal 16
Lockout Safety Procedure 17
Lockout Procedure 18
Appendix to Lockout Safety Procedure: 20
Training, Lockout/Tagout, Per 29 CFR 1910.147 20
Gallium Arsenide and Germanium Use 22
Material Safety Data Sheets for Products Used in Machine
Maintenance 30
Chapter 2 Installation 2 - 1
Receiving 4
Location 5
Leveling 5
Facilities Requirements 6
Operation and Maintenance Manual Model 7AA Wafer Grinder
iv U Version 1.2 - April 18, 1996; Update 11/6/96
Chapter 3 Machine Description 3 - 1
Control System Overview 3
Power Distribution 3
Servo Control Loop 4
24 VDC Inputs 4
24 VDC Outputs 5
AC Outputs 5
CRT Video 6
Mechanical Overview 7
Grind Assembly Bed 7
Work Spindle Carriage 7
Grind Spindle Support 7
Grind Spindle Feed Mechanism 8
Pneumatic/Fluid System Overview 9
Chapter 4 Operator Functions 4 - 1
Machine Operation Description 3
Overview - Machine Cycle Sequence With Wafer Transport System 3
Wafer Transport System 5
Machine Cycle Sequence Without Wafer Transport System 8
Control Panel 9
CRT Display Menus 10
Special Key Functions 11
Basic Operation 13
Summary 13
Step 1 - Machine Power Up 14
Step 2 - Machine Initialization 15
Step 3 - Grind Parameter Entry 17
Step 4 - Grind Mode Selection 22
Step 5 - Place Cassettes On Elevators 23
Step 6 - Start Machine Auto Cycle 24
Strasbaugh Table of Contents
Version 1.2 - April 18, 1996; Update 11/6/96 vU
Chapter 5 Machine Setup 5 - 1
Machine Parameter Entry 3
Adjust R.P.M.'S 5
Chapter 6 Preventive Maintenance 6 - 1
Daily Preventive Maintenance 3
Weekly Preventive Maintenance Schedule 4
Monthly Preventive Maintenance Schedule 6
Chapter 7 Mechanical Maintenance
Procedures 7 - 1
Manual Control Of Machine 4
Grind Operation Procedures 6
Spindle Speed Settings 6
Grind Wheel Replacement 7
Wheel Truing And Dressing 8
Grind Wheel Coolant 10
Work Chuck Replacement 11
Work Chuck Grinding 12
Chuck Grind Mode 12
Procedure 13
Grind Spindle Alignment 14
Spindle Pretravel Adjustment 17
Dynamic Offset 20
Wheel Wear Compensation 22
Determining Work Chuck Position 24
Elevator Calibration 25
Cassette In Place 25
Wafer In Slot 26
Cassette Slot Location 28
Lubrication 30
Operation and Maintenance Manual Model 7AA Wafer Grinder
vi U Version 1.2 - April 18, 1996; Update 11/6/96
Chapter 8 Software Calibration Procedures 8 - 1
Machine Diagnostics 4
Offline Storage Support Utilities 5
Installation 5
Operating Instructions 5
Transfer Grind Parameters From Machine To Disk 'F1' 5
Transfer Grind Parameters From Disk To Machine 'F2' 6
Edit/Create Single Grind Parameters 'F3' 6
Edit/Create Dual Grind Parameters 'F4' 7
Directory Of Grind Parameters 'F5' 7
Directory Of Wafer Data Files 'F6' 7
Active I/O Status Update 'F7' 8
Wafer Capturing Utilities 'F8' 8
Terminal Mode 'F9' 9
Exit To Dos 'F10' 9
Error Messages 9
Password And I.D. Numbers 9
Control Variables And Contacts 10
Chapter 9 Pneumatic Adjustments 9 - 1
Pneumatic Regulator Adjustment 4
Speed Controls 5
Air Bearing Spindle Maintenance 6
Vacuum Switch Adjustment 7
D.I. Water Flow Valves 9
Cooling Water Flow Valve 10
Strasbaugh Table of Contents
Version 1.2 - April 18, 1996; Update 11/6/96 vii U
Chapter 10 Troubleshooting 10 - 1
Frequently Encountered Problem Conditions 3
Error Conditions And Messages 5
Error Condition Lights 7
Servo Error Codes 8
Appendices
Engineering Drawings
Part Lists
Safety Reference
Manufacturers’ Data
Operation and Maintenance Manual Model 7AA Wafer Grinder
viii U Version 1.2 - April 18, 1996; Update 11/6/96
This page intentionally left blank.
Strasbaugh, Inc.
7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 4/18/96 Page - 1of 2
REVISION RECORD
for
Manual Update
Machine: Model 7AA Wafer Grinder
Manual Title, Volume (if
applicable), And Version: Operation and Maintenance
Manual; Version 1.1 - Undated
updated with this revision to
Version 1.2, 4/18/96
Revision Record No. and
Date: No. O/M-1.1; 4/18/96
Notes: Changes made in compliance with EC qualification safety requirements.
Summary of changes:
•Manual contents were reorganized and reformatted following organization, layout, and design
standard to current Strasbaugh manuals.
•Operator functions were isolated from maintenance procedures.
•Safety graphics were added to procedures.
•Strasbaugh “generic” safety information package was incorporated in Chapter 1
(Introduction).
•Multiple references were added directing users to Strasbaugh 7AA maintenance video three-
volume set and Giddings and Lewis PiC409 Family User’s Manual.
Strasbaugh, Inc.
7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 4/18/96 Page - 2of 2
DIRECTIONS:
1. Discard the manual pages listed in the left column below. Insert the replacement pages listed
in the right column.
2. File this notice after the Table of Contents.
Pages To Be Discarded Pages To Be Inserted
•pp. 1 through 66
(Version 1.1 - undated) •Version 1.2 - 4/18/96 (168 pp. of text -
title pages, detailed table of contents,
chapters 1 through 10, appendices)
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