TELEVAC CC-10 Bedienungsanleitung

TELEVAC

A DIVISION OF THE FREDERICKS COMPANY

2400 PHILMONT AVE.

HUNTINGDONVALLEY, PA 19006

CC-10

INSTRUMENT MANUAL

Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:[email protected] web site:www.televac.com

CC-10 MANUAL REV D

Page 1 of 40

Y

TELEVA

TABLE OF CONTENTS

SECTION TITLE PAGE

1 Introduction and Safety Instructions

2 User Controls

3 Specifications

4 Operation

5 Analog Output

6 Digital Interface

7 Maintenance

8 I / O Connector

9 Dimensions

10 Error Message List

11 Troubleshooting

CC-10

INSTRUMENT MANUAL

Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:[email protected] web site:www.televac.com

CC-10 MANUAL REV D

Page 2 of 40

Y

TELEVA

1.0

I

n

t

r

odu

c

t

i

on

a

nd

Sa

f

e

t

y

I

n

s

t

r

u

c

t

i

on

s

1.0.1

Product

Overview:

The

CC-10

is

a

self-contained,

compact

wide

range

vacuum

gauge

and

controller

employing

the latest

sensor

technology.

The

CC-10

is

able

to

replace

multiple

traditional

gauges

and

provides the

user

with

measurement

capability

from

atmospheric

pressure

to

10

-9

Torr.

The

gauge

requires

22-26

VDC

input

power

and

provides

the

user

with

a

digital

pressure

indication,

analog

output and

RS485

digital

communications.

Three

independent

set

points

can

be

addressed

from

the instrument‟s

control

panel,

from

a

tethered

remote

display

module

or

via

RS485.

1.2

Sensor

Technology:

The

CC-10

uses

two

sensor

types

to

seamlessly

measure

a

pressure

range

of

12

decades.

An crystal

sensor

is

used

to

measure

from

atmospheric

pressure

to

10

-4

Torr

and

a

double

inverted magnetron

cold

cathode

is

used

to

measure

from

10

-2

to

10

-9

Torr.

1.2.1

Crystal

Sensor

Operating

Principle

The

crystal

sensor

is

a

simple

tuning-folk

shaped

quartz

oscillator

that‟s

similar

to

the

oscillators commonly

used

in

wrist

watches.

The

electrical

impedance

of

the

oscillation

depends

upon

the pressure

of

the

gas

that

surrounds

the

quartz

oscillator,

because

the

resistance

to

the

oscillation

(as

caused

by

friction

between

the

quartz

surface

and

gas

molecule),

varies

as

the

pressure changes.

The

crystal

sensor

measures

the

electrical

impedance

of

the

quartz

oscillator

and

its circuitry

converts

it

to

the

pressure

value.

Crystal

Sensor

1.2.2

Cold

Cathode

Operating

Principle

The

double

inverted

magnetron

cold

cathode

sensor

measures

pressure

by

ionizing

the

residual gases

in

a

magnetron

discharge.

The

body

of

the

sensor

serves

as

the

cathode

ands

is

at

ground potential.

The

anode

operates

at

as

much

as

4000

volts.

A

permanent

magnet

traps

electrons

in the

sensor

to

sustain

the

discharge

at

a

very

low

pressure.

This

type

of

sensor;

like

all

ionization sensors,

is

sensitive

to

gas

type,

but

unlike

conventional

ionization

gauges,

has

no

filaments

to burn

out,

can

operate

continuously

at

higher

pressure

and

is

considerably

more

rugged

and reliable.

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CC-10 MANUAL REV D

Page 3 of 40

Y

TELEVA

1.3

Safety

Instructions

ST

A

RT

B

Y

RE

A

DING

THESE

IMPORT

A

NT

S

A

FETY

INSTRUCTIONS

A

ND

NOTES

T

h

e

s

e

s

a

f

e

t

y

a

l

e

r

t

sy

m

bo

l

s

i

n

t

h

i

s

m

a

nu

a

l

o

r

on

t

h

e

p

r

oduc

t

r

ea

r

p

a

n

e

l

m

ea

n C

a

u

t

io

n

s

-

p

e

r

so

n

a

l

s

a

fe

t

y,

p

r

o

p

e

r

t

y

d

a

m

a

ge

o

r

d

a

n

ge

r

f

r

o

m

elec

t

r

ic

a

l

s

h

oc

k

.

R

e

a

d

t

h

ese

i

n

s

t

r

u

c

t

io

n

s

c

a

r

ef

u

lly.

In

these

instructions

the

word

“product”

refers

to

the

CC-10

and

all

of

its

approved

parts

and

accessories.

NOTE

:

T

h

e

s

e

i

ns

t

r

uc

t

i

ons

do

no

t

a

nd

c

a

nno

t

p

r

ov

i

d

e

f

o

r

e

v

e

r

y

con

t

i

ng

e

ncy

t

h

a

t

m

a

y

a

r

i

s

e

i

n

conn

e

c

t

i

on

w

i

t

h

t

h

e

i

ns

t

a

ll

a

t

i

on

,

op

e

r

a

t

i

on

,

o

r

m

a

i

n

t

e

n

a

nc

e

o

f

t

h

i

s

p

r

oduc

t

.

S

hou

l

d

you

r

e

qu

i

r

e

f

u

r

t

h

e

r

a

ss

i

s

t

a

nc

e,

p

l

ea

s

e

con

t

a

c

t

Te

l

e

v

a

c

a

t

h

e

a

dd

r

e

ss

on

t

h

e

t

i

t

l

e

p

a

g

e

o

f

t

h

i

s

m

a

nu

a

l

.

This

product

has

been

designed

and

tested

to

offer

reasonably

safe

service

provided

in

it‟s

installed,

operated

and

serviced

in

strict

accordance

with

these

safety

instructions.

F

a

il

u

r

e

t

o

co

m

p

ly

wi

t

h

t

h

ese

i

n

s

t

r

u

c

t

io

n

s

m

a

y

r

es

u

l

t

i

n

se

r

io

u

s

p

e

r

so

n

a

l

i

n

j

u

r

y,

i

n

cl

ud

i

n

g

d

e

a

t

h

,

o

r

p

r

o

p

e

r

t

y

d

a

m

a

ge.

These

safety

precautions

must

be

observed

during

all

phases

of

operation,

installation,

and

service

of

this

product.

Failure to

comply

with

these

precautions

or

with

specific

warnings

elsewhere

in

this

manual

violates

safety

standards

of

design,

manufacture,

and

intended

use

of

the

instrument.

Televac

disclaims

all

liability

for

the

customer‟s

failure

to

comply

with these

requirements.

Th

e

se

r

vice

a

nd

r

e

p

a

i

r

i

n

fo

r

m

a

t

io

n

i

n

t

h

is

m

a

nu

a

l

is

fo

r

t

h

e

u

se

of

Q

u

a

lifie

d

Se

r

vice

P

e

r

so

nn

el.

T

o

a

voi

d

s

h

oc

k

,

d

o

n

o

t

p

e

r

fo

r

m

a

n

y

p

r

oce

du

r

es

i

n

t

h

is

m

a

nu

a

l

o

r

p

e

r

fo

r

m

a

n

y Se

r

vici

n

g

o

n

t

h

is

p

r

o

du

c

t

un

less

yo

u

a

r

e

qu

a

lifie

d

t

o

d

o

so.

√

RE

A

D

I

n

s

t

r

u

c

t

i

on

s

–

Read

all

safety

and

operating

instructions

before

operating

the

product.

√

RET

A

IN

i

n

s

t

r

u

c

t

i

on

s

–

Retain

the

Safety

and

Operating

Instructions

for

future

reference.

√

HEED

w

a

r

n

i

ng

s

–

Adhere

to

all

warnings

on

the

product

and

in

the

operating

instructions.

√

FO

LL

OW

i

n

s

t

r

u

c

t

i

on

s

–

Follow

all

operating

and

maintenance

instructions.

√

A

CCESORIES

–

Do

not

use

accessories

not

recommended

in

this

manual

as

they

may

require

a

technician

to

restore

the

product

to

its

normal

operation.

T

o

r

e

du

ce

r

is

k

of

fi

r

e

o

r

elec

t

r

ic

s

h

oc

k

,

d

o

n

o

t

ex

p

ose

t

h

is

p

r

o

du

c

t

o

r

a

i

n

o

r

m

ois

t

u

r

e.

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INSTRUMENT MANUAL

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CC-10 MANUAL REV D

Page 4 of 40

Y

TELEVA

Safety

Instructions

(cont.)

O

b

j

ec

t

s

a

nd

L

i

qu

i

d

En

t

r

y

–

Neve

r

pu

s

h

o

b

j

ec

t

s

of

a

n

y

k

i

nd

i

n

t

o

t

h

is

p

r

o

du

c

t

h

r

o

u

g

h

o

p

e

n

i

n

gs

a

s

t

h

ey

m

a

y

t

o

u

c

h

d

a

n

ge

r

o

u

s

vol

t

a

ge

p

oi

n

t

s

o

r

s

h

o

r

t

o

u

t

p

a

r

t

s

t

h

a

t

co

u

l

d

r

es

u

l

t

i

n

a

fi

r

e

o

r

elec

t

r

ic

s

h

oc

k

.

Be

c

a

r

ef

u

l

n

o

t

o

s

p

ill

li

qu

i

d

of

a

n

y

k

i

nd

o

n

t

o

t

h

e

p

r

o

du

c

t

s.

D

o

no

t

subs

t

i

t

u

t

e

p

a

r

t

s

o

r

m

od

i

f

y

i

ns

t

r

u

m

e

n

t

.

B

e

c

a

us

e

o

f

t

h

e

d

a

ng

e

r

on

i

n

t

r

oduc

i

ng

a

dd

i

t

i

on

a

l

h

aza

r

ds

,

do

no

t

i

ns

t

a

ll

subs

t

i

t

u

t

e

p

a

r

t

s

o

r

p

e

r

f

o

r

m

a

ny

un

a

u

t

ho

r

i

ze

d

m

od

i

f

i

c

a

t

i

ons

t

o

t

h

e

p

r

oduc

t

.

Re

t

u

r

n

t

h

e

p

r

oduc

t

o

Te

l

e

v

a

c

f

o

r

s

e

r

v

i

c

e

a

nd

r

e

p

a

i

r

t

o

e

nsu

r

e

t

h

a

t

s

a

f

e

t

y

f

ea

t

u

r

e

s

a

r

e

m

a

i

n

t

a

i

n

e

d

.

D

o

no

t

us

e

t

h

i

s

p

r

oduc

t

i

f

i

t

h

a

s

un

a

u

t

ho

r

i

ze

d

m

od

i

f

i

c

a

t

i

ons

.

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CC-10 MANUAL REV D

Page 5 of 40

Y

TELEVA

2.0

U

s

e

r

C

on

t

r

o

l

s

2.1

F

r

on

t

p

a

n

e

l

1. Pressure indicator

2. Set point status indicator

3. High Voltage status indicator

4. Function key

5. Up key

6. Shift key

7. Enter key

8. I/O connector

2

5

4

1

7

8

3

6

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CC-10 MANUAL REV D

Page 6 of 40

Y

TELEVA

2.2

Rea

r

p

a

n

e

l

2.3

Se

nso

r

1. Sensor access

screws

1. Anti rotation slot

2. Anode pin

3. Crystal sensor pins

4. Ground pins

1

4

2

3

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CC-10 MANUAL REV D

Page 7 of 40

Y

TELEVA

3.0

S

p

e

c

i

f

i

c

a

t

i

on

s

Measurement range

760 Torr to 1 X 10-9 Torr

Accuracy

±0.2 of decade 10E-9 to 10E-3 Torr

±15% 2 X 10E-3 to 1 X 10E-1

±10% 2 X 10E-1 to 1 X 10E Torr

±5% 10 to 760

Pressure display

Digital display of two mantissa digits and two exponent digits

Pressure unit

Torr / Pascal selectable

Set point

Three set points

(one independent set point and two common ground set points)

Setting method: 1 By local switches

2. Through communication interface

Contact rating: DC50V 0.12A

Analog output

Log or combined output selectable

Voltage: 0 –10V

Ambient temperature & Humidity

(operating)

0-50C / 10-90% RH

Power requirement

22-26vdc

Power consumption

8w maximum

Weight

1.54 lbs. (NW25 model)

Size

3.7” wide X 2/78” deep X 6.3” high (NW25 model)

NOTE: Bake temperature: Max. 150°C (with electronics module removed).

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CC-10 MANUAL REV D

Page 8 of 40

Y

TELEVA

4.0

O

p

e

r

a

t

i

on

4.1

Starting

the

measurement

Connect

D

sub-connector

to

the

instrument

and

supply

power

after

installing

CC-10

to

the vacuum

system

and

properly

connecting

necessary

wires. When

the

power

is

supplied

the

unit

runs

an

internal

check

program

for

several

seconds

then goes

to

measurement

mode.

Pressure

display

will

appear

on

the

display.

4.2

Locking

parameters In

order

to

prevent

unintended

parameter

changing

the

“parameter

lock”

function

is

provided.

To switch

this

function

between

enabled

and

disabled

follow

the

procedure

below.

When

shipped,

it

is

set

to

disabled.

4.3

Display

modes

and

mode

changing

There

are

nine

modes

that

are

changed

by

pushing

[FUNC]

key

and

[ENT]

key.

Those

are;

1.

Measurement

mode

2.

SP1

setting

mode

(SP1L

setting,

SP1H

setting)

3.

SP2

setting

mode

(SP2L

setting,

SP2H

setting)

4.

SP3

setting

mode

(SP3L

setting,

SP3H

setting)

5.

Crystal

gauge

ATM

(atmospheric

pressure)

adjustment

mode

(Manual

operation)

6.

Crystal

gauge

Zero

adjustment

mode

(Manual

operation)

7.

Analog

output

setting

mode

8.

Pressure

unit

selection

mode

9. Communications

set

mode

10.

Crystal sensor property mode

When in the measure mode, push “ ⁭ “ key, and “→” key,

“ENT” key simultaneously.

SP1

SP2

SP3

HV

FUNC

X 10

Torr

ENT

All LEDs are lit for a moment, then established status

will alter.

PUSH

SIMULTANEOUSLY

SP3

SP2

SP1

X 10

Torr

ENT

FUNC

Lit

HV

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Page 9 of 40

Y

TELEVA

Changing

modes

(1)

By

pushing

[FUNC]

key

the

mode

moves

cyclically

as;

1

→

2

→

3

→

4

→

5

→

6→7

→

8

→9→1

(2)

When

the

mode

moves

to

SPx(x

is

1,2

or

3)

set

mode,

SPxL

set

is

selected

first.

Pushing

[ENT]

key

stores

the

value

and

moves

to

SPxH

set

mode.

In

SPxH

mode

by

pushing

[ENT]

key the

value

is

stored

then

it

returns

to

measure

mode.

*If

[FUNC]

key

is

pushed

instead

of

[ENT]

button

in

either

SPxL

or

SPxH

mode

the

value

is

not stored

and

the

mode

moves

to

the

(3)

In

any

other

mode

than

SPx

set

modes,

by

pushing

[ENT]

key

the

value

is

stored

and

the mode

returns

to

the

measure

mode.

(If

[FUNC]

key

is

pushed

instead,

the

value

is

not

stored and

the

mode

moves

to

the

(4)

If,

in

any

program

mode,

there

are

no

operation

for

30

seconds

it

automatically

moves

back to

measure

mode. (There are some exceptions)

MEASURE MODE

SP1 SET MODE

SP1L

SP1H

ENT

SP2 SET MODE

SP2L

SP2H

FUNC

SP3 SET MODE

SP3L

SP3H

ATM ADJUST MODE

XTAL ZERO ADJUST MODE

ANALOG OUTPUT SET MODE

PRESSURE UNIT SELECT MODE

COMMUNICATION SET MODE

ADDRESS

BAUD RATE

ENT

PARITY RATE

STOP BIT

ENT

CRYSTAL SENSOR PROPERTY SET MODE

O6on

ENT

XXXX*

YYYY*

ENT

FUNC

*4 digit numbers specific to the sensor

FUNC

ENT

1

2

3

4

5

6

7

8

9

10

TELEVAC CC-10 Bedienungsanleitung

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