Ulvac ULK-10A Bedienungsanleitung

SK00- 4802-DC-002-01

No.090317

Heater Replacement Procedure

Oil Diffusion Pump

Model

ULK-10A

ULK-14A

Components Division,

ULVAC, Inc.

http://www.ulvac.co.jp/

SK00- 4802-DC-002-01

No.090317

－i－

Preface

We thank you very much for purchasing our product.

This manual describes the rules of the description of this pump heater

replacement procedure and information for carrying out replacement according to

this manual.

Read this manual first.

• Worker’s requirements

• Before replacement of the heater

• Names of components of the pump

Worker’s requirements

This pump may be disassembled, reassembled and installed only by a person

experienced in disassembly and reassembly of high vacuum pumps.

If you are not experienced in disassembly and reassembly of high vacuum pumps,

contact your local ULVAC service station.

Before replacement of the heater

Disassembly of a pump used for exhausting toxic gas or active gas can be

dangerous. If a pump was used for exhausting such type of gas, seal it completely

simultaneously with removing the pump from the system and request a

professional for disassembly and cleaning.

Before starting heater replacement, prepare necessary parts and tools (refer to the

list of tools to use, list of major parts and list of replacement parts). Also replace

gaskets, which are subject to aging and may be easily damaged during

disassembly.

SK00- 4802-DC-002-01

No.090317

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Contents

Preface ..............................................................................................................................i

Worker’s requirements............................................................................................i

Before replacement of the heater ......................................................................i

1. Parts used ........................................................................................................... 1

1.1. Table of Major Parts..................................................................................1

1.2. Table of Replacement Parts ...................................................................1

1.3. Bolts used ......................................................................................................2

1.4. Miscellaneous...............................................................................................2

2. Tools to use .........................................................................................................3

2.1. Table of Working Tools .............................................................................3

3. Removing the Heater....................................................................................4

4. Installing the Heater ....................................................................................6

SK00- 4802-DC-002-01

No.090317

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1. Parts used

1.1. Table of Major Parts

No. Description Quantity Check

１． Heater 1 pc.



2.1 Boiler cover (with terminal box) 1 pc. 

2.2 Boiler cover 1 pc. 

3 Heater (terminal) cover 1 pc. 

4 Heat-resistant heat shrinkable tube

15mm ID ×40mm

2 pcs. 

5 Glass wool tube 5mm-dia. ×185mm

long (for heater lead wire)

1 pc. 

6 Glass wool tube 10mm-dia. ×45mm

long (for heater terminal)

2 pcs. 

7 Glass fiber tape 0.18 mm thick ×13

mm wide ×300 mm

long



8 Heater lead 2 pcs. 

9 Heat-transfer-cement 120 g 

1.2. Table of Replacement Parts

No. Description Quantity Check

1 Heater (see Note) 1 pc. 

2 Heat-resistant heat shrinkable tube

15mm ID ×40mm

2 pcs. 

3 Heat-transfer-cement 120 g 

Note : Use a heater with the wattage and voltage inscribed on the rating

plate.

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No.090317

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1.3. Bolts used

No. Description Quantity Check

For fixing heater (SUS304)

1 Allen screw M6 ×25 4 pcs. 

2 Hexagon nut M6 7 pcs. 

3 Spring washer M6 7 pcs. 

4 Plain washer M6 11 pcs. 

For heater terminal (SUS304)

5 Hexagon nut M4 2 pcs 

6 Spring washer M4 2 pcs. 

7 Plain washer M4 4 pcs. 

For fixing the boiler cover (SUS304)

8 Cross-recessed head machine screw

M5 ×10

4 pcs. 

9 Cross-recessed head machine screw

M5 ×15

1 pc. 

10 Spring washer M5 5 pcs. 

11 Plain washer M5 5 pcs. 

For fixing heater terminal cover

12 Cross-recessed head machine screw

M5 ×10

2 pcs 

13 Spring washer M5 2 pcs. 

14 Plain washer M5 2 pcs. 

1.4. Miscellaneous

Quantity or size

No. Description ULK-10A ULK-14A Check

1 Working fluid ULVOIL

D-11 or D-31 800 cc 1,500 cc 

2 Intake port gasket

(NBR or FPM)

8 mm ×8 mm

×275 mm ID

8 mm ×8 mm

×380 mm ID 

3 Exhaust port gasket

(NBR or FPM) 4 mm wide ×99 mm ID 

4 Molybdenum disulfide

(Dow Corning MOLKOT,etc) Appropriate amount 

SK00- 4802-DC-002-01

No.090317

－3－

2. Tools to use

2.1. Table of Working Tools

No. Photo Description No. Photo Description

Torque wrench

5 Nxm 7

Heat-resistant

gloves

Spanner

10: 2 pcs.

5 : 1 pc.

Protective gloves

Philips

screwdriver 9

Box 10 mm

Shockless

hammer 10

Spatula

Scraper 11

Pliers

(or cutting pliers)

Wire brush

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No.090317

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3. Removing the Heater

Power Supply wiring <Dismantling>

Cooling water piping＜Detaching＞

Intake port and exhaust port piping<Dismantling>

Transfer

●Be sure to cut off the electricity before starting install or dismantling

operation.

WARNING

●Should you remove the Coolant joint immediately after having

stopped the Pump, there is a risk that the coolant remained inside

the Pump comes to a boil and jets out. Keep flowing the Coolant

as far as the Pump temperature cools down.

●The Pump is and remains very hot during and while after having

stopped operation. You have a risk of getting burned if a part of the

body touched it.

Keep flowing the Coolant as far as the Pump temperature cools down.

●Use a flow meter (HWFM: for example Flow sight) applicable to

visually check the Coolant supply source that no water is flowing.

WARNING

●Take off the piping following the Install Manual of the system.

●Make airtight completely the Pump exhaust outlet with a blank

flange.

WARNING

●You have a risk of giving damage to your back as the load larger than

safety standard shall be required to transfer the product.

●Be sure to use the loading machinery (such as mobile crane) to lift up

the Pump or load it on the pallet and fix it with Jack and run the

Pallet truck for its transfer.

WARNING

SK00- 4802-DC-002-01

No.090317

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(1) Move the pump to a place suited to working.

(2) Before removing the heater, make sure on a surface

thermometer or the like that the working fluid

temperature has lowered to near ambient temperature.

(3) Drain working fluid and remove the jet.

For the disassembly and reassembly of the jet, refer to the instruction manual.

(4) Protect the flange surface with a closing flange or the like so that the intake

port and exhaust port are not damaged when the pump is turned upside down.

Here, see to it that the pump interior is not closed.

(5) Turn the pump upside down to set the boiler cover side in the up position.

(6) Remove all connecting terminals of the heater connection in the terminal box.

(7) Remove the heater terminal cover to remove the heater leads.

(8) Remove the screws that fix the boiler cover to remove the boiler cover.

(9) Remove the bolts and nuts that are used to fix the heater to remove the heater.

If the heater and pump are fixed with heat-transfer-cement, lightly strike

them with a shock-absorbing hammer.

(10) Wear protective gloves and remove heat-transfer-cement from the heater

installed surface and the pump using a scraper or wire brush.

This completes removal of the heater.

SK00- 4802-DC-002-01

No.090317

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Disassemble the heater in decreasing order of the numbers in the figure below.

For reassembly, reverse the order.

Fig.Removing the heater

4. Installing the Heater

(1) Take care against electric shock and burn.

Energize the heater with 100V power to preheat it to

90°C.

Check the temperature on a surface thermometer.

(2) Take 120 grams of heat-transfer-cement and apply

it to the surface on which the heater is installed on

the pump side.

Here, apply a uniform coat of heat-transfer-cement about 1 cm inside the

end.

SK00- 4802-DC-002-01

No.090317

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(3) Take care against electric shock and burn.

Wearing heat-resistant gloves, install the heater that has been preheated to

90°C.

Turn off the power before installing the heater.

Place the heater in a position where it is at approximate middle of the oil

filling/draining port and fix the bolts and nuts.

Apply a coat of molybdenum disulfide to bolts and nuts against scuffing.

(4) Wear heat-resisting gloves and tighten the bolts and nuts for fixing the

heater.

The tightening torque is 10 Nxm.

①First, tighten the 3 bolts and nuts inside with a uniform torque of 10

Nxm.

②Then tighten the 4 bolts on the outside with a uniform torque of 10 Nxm.

③Retighten the 3 bolts inside with increased torque of 10 Nxm.

④ Finally, retighten the 3 bolts outside with increased torque of 10 Nxm.

(5) Take care against electric shock and burn

Energize the heater with 100V power to heat it up to 170°C.

Here, check the temperature on the surface thermometer.

(6) Take care against electric shock and burn

Heat-transfer-cement will gush out from the 3

nuts inside and heater outer periphery during

heating to 170°C. Remove the thermo-element

while taking care against burn.

(7) Turn off the power when the heater has cooled

down to 170°C and wait until the heater temperature comes down to

ambient.

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