Ulvac GLD-051 Bedienungsanleitung

No.17200-2-02-8

Instruction Manual

for

Direct-Drive Oil Sealed Rotary Vacuum Pump

Model

GLD-051

GLS-051

Before using the product, be sure to read this manual.

Keep this manual in a place where it can be referred to at any time

and look after it carefully.

The contents of this instruction manual are subject to change

without prior notice due to improvements in performance and the

functions of the product.

ULVAC KIKO,Inc.

- 01 -

0. Introduction

0.1 Before using the vacuum pump

Thank you for purchasing our vacuum pump (hereinafter called “pump”). When you have received

the pump, check that the delivered pump is as per your order and that it has not been damaged in

transportation, etc.

In order to use the pump for as long as possible, read this instruction manual

thoroughly before performing installation, operation, inspection and

maintenance, and sufficiently understand the cautions for safety, the

specifications and operation methods of the pump.

No part of this instruction manual may be copied for use by a third party

without our permission.

Warning

Note

- 02 -

0.2 Safety symbols

In this instruction manual and on warning labels attached to the pump, the following symbols

are used so that matters which must be strictly adhered to can be readily understood.

These symbols are divided as shown below.

When mishandled, there is an imminent danger of the operator suffering a fatal

accident or serious injury.

When mishandled, there is a possibility of the operator suffering a fatal

accident or serious injury.

When mishandled, there is a possibility of the operator suffering an injury

(light or medium injury) or of damage occurring to property.

When mishandled, there is a possibility of the pump being damaged or

malfunctioning.

Caution

Note

Warning

Danger

- 03 -

0.3 Cautions for safety

When toxic or flammable gases are exhausted from the pump, they m a y l e a k n o t

only from the pump outlet but also from the pump unit itself. Take proper

measures suitable for the type of gas.

After the pump has been used for exhausting toxic gasses, not only the pump

itself but also vacuum pump oil (hereinafter called “pump oil”) get toxic.

Keep this in mind when performing the maintenance.

Never allow people other than repair engineers to disassemble or repair the

pump. Failure to do so may result in ignition or malfunction, leading to injury

or electric shock.

Before performing inspection or repair, always turn off the power switch.

Failure to do so may result in electric shock or the unexpected start of the

pump, leading to injury.

Connect the earth wire correctly. It is recommended that a dedicated earth

leakage breaker should be installed. If the earth wire is not connected, there

is a possibility of electric shock occurring in the case of a malfunction

or electrical leakage.

There is a risk of explosion. Never block the outlet or operate the pump with

equipment mounted at the outlet side which blocks the passage of gas.

Otherwise, the internal pump pressure increases causing the pump to explode,

the oil level gauge to protrude or the motor to be overloaded.

This pump is not resistant to pressure. The internal pump pressure is limited

to 0.03 MPa (gauge pressure).

Warning

Danger

Warning

- 04 -

Do not use the pump in an explosive atmosphere. Failure to do so will result

in injury or fire.

Do not insert fingers or objects into the opening of the motor. Doing so may

result in electric shock, injury, or fire.

Never touch the rotating section of the motor, shaft or coupling while the

pump is in operation. Failure to do so will result in injury.

Never place combustible materials around the motor or pump. There is a risk

of fire.

Also, do not place objects which block ventilation around the motor. Abnormal

heat generation may result in burns or fire.

Do not touch the motor while the pump is in operation or when the pump is

still hot immediately after it stops. Touching it will result in burns.

Arrange wires correctly in accordance with the “Electrical Equipment

Technical Standard” and “Wiring Regulations.” Incorrect wiring may result

in fire.

If the pump ceases operation or malfunctions, turn off the power switch

immediately to prevent accidents, and ask the company from which you purchased

the pump or the manufacturer for inspection and repair.

Do not operate the pump without adding pump oil. If it is operated in an

oil-less condition, the pump will be damaged.

Caution

Warning

Caution

Note

Caution

- 05 -

0.4 Acceptance and storage of the pump

0.4.1 Acceptance of the pump

Although the pump is delivered with great care, check the following after unpacking.

①The delivered pump is in accordance with your request.

②The specified accessories (enough pump oil to use the pump once; optional equipment) have

been provided.

③No parts have been damaged in transportation.

④Neither screws nor nuts have become loose nor were lost in transportation.

If there are any problems, contact the company from which you purchased the pump or the sales

department of the manufacturer.

0.4.2 Environmental conditions for storage, installation and operation

Since this pump is precisely engineered, ensure that the following conditions be satisfied during

storage, installation and operation.

①Ambient temperature, relative humidity: 7°C ~ 40°C, 85% RH or less

②Height above sea level during storage and installation: 1,000 m or less

③Other conditions for storage and operation

a) Free from corrosive and explosive gases

b) No condensation

c) Dust-free environment

d) Indoors

e) Do not place pumps on top of each other or place a pump on its side.

f) Not subject to direct sunlight

g) Far from heat sources

h) When you keep it for a long period of time, put pump oil into a pump and seal a inlet

port with a cap.

i) Don't keep it, where moisture is attracted.

Do not subject the pump to shocks or place the pump on its side. Doing so

may damage the pump.

0.5 Protective device

The pump is provided with a single-phase 100V (50/60Hz) motor.

An overload protector (manually reset thermal protector) is incorporated.

The use of another protective device (such as an earth leakage breaker) in addition to the

overload protector is recommended.

Use the pump only at the rated voltage. Use at other than the rated voltage

will interfere with correct operation of the overload protector, and result

in the motor burning out, or fire.

Note

Contents - 1

Contents

0. Introduction ·························· 01

0.1 Before using the vacuum pump ·························· 01

0.2 Safety symbols ·························· 02

0.3 Cautions for safety ·························· 03

0.4 Acceptance and storage of the pump ·························· 05

0.4.1 Acceptance of the pump ·························· 05

0.4.2 Environmental conditions for storage, installation and operation ·· 05

0.5 Protective device ·························· 05

1. For Safe Operation ·························· 1

1.1 Hazards peculiar to the pump and safety measures ······················· 1

1.1.1 Danger Leakage of hazardous gases and substances ············ 1

1.1.2 Warning Electric shock ·························· 1

1.1.3 Warning Explosion ·························· 2

1.1.4 Caution High temperature ·························· 2

1.2 Safety Data Sheet (SDS) ·························· 2

2. Outline of the Pump ·························· 3

2.1 Specification ·························· 3

2.2 Dimensional drawing ·························· 4

3. Installation ·························· 5

3.1 Installation ·························· 5

3.2 Lubrication ·························· 5

3.3 Vacuum piping ·························· 6

3.4 Electric wiring ·························· 7

3.5 Fluctuation in the power voltage and frequency ························· 7

4. Operation ·························· 9

4.1 Cautions for operation ·························· 9

4.2 Start of operation ·························· 10

4.3 Stopping the operation ·························· 10

4.4 Operation in cold climates ·························· 11

4.5 Backflow preventer ·························· 11

4.6 Gas ballast valve ·························· 12

4.7 Installation of the oil mist trap (Option) ·························· 13

4.8 Restriction on operation when the oil mist trap is installed ·········· 13

Contents - 2

5. Pump Performance ·························· 14

5.1 Ultimate pressure ·························· 14

5.2 Pumping speed ·························· 14

5.3 Power requirement ·························· 14

6. Maintenance, Inspection and Repair ·························· 16

6.1 Maintenance ·························· 16

6.2 Periodic inspection ·························· 16

6.3 Replacement of the pump oil ·························· 18

6.4 Replacement of the coupling spider ·························· 20

6.5 Trouble check list ·························· 21

7. Disposal ·························· 23

8. Maintenance parts ·························· 24

8.1 Maintenance parts list ·························· 24

8.2 Disassembly drawing ·························· 26

Warranty

Safety Data Sheet (SDS)

Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)

Contact address of sales and service departments

Contents - 3

Figures and Tables

Fig. 1 Dimensional drawing of GLD-051 oil sealed rotary vacuum pump ········· 4

Fig. 2 Dimensional drawing of GLS-051 oil sealed rotary vacuum pump ········· 4

Fig. 3 Lubrication of the oil sealed rotary vacuum pump ······················ 5

Fig. 4 Basic piping diagram to the vacuum chamber ·························· 6

Fig. 5 Change region of the voltage and frequency ·························· 7

Fig. 6 Pumping speed curve ·························· 15

Fig. 7 Characteristics of Motor power ·························· 15

Fig. 8 Replacement of the coupling spider ·························· 20

Fig. 9 Disassembly drawing of GLD-051 oil sealed rotary vacuum pump ········· 26

Fig. 10 Disassembly drawing of GLS-051 oil sealed rotary vacuum pump ········· 27

Table 1 Specification ·························· 3

Table 2 Periodic inspection table ·························· 17

Table 3 Trouble check list ·························· 21

Table 4 GLD-051 Maintenance parts list ·························· 24

Table 5 GLS-051 Maintenance parts list ·························· 25

Attached table: Safety Data Sheet for Vacuum Pump Oil SMR-100

-1-

1. For Safe Operation

1.1 Hazards peculiar to the pump and safety measures

Before operating or inspecting the pump, read this section carefully to fully understand potential

hazards and prevention methods.

1.1.1 Danger Leakage of hazardous gases and substances

Cause Prevention method and measures

Leakage of toxic and

flammable gases

⇒Dilute hazardous gases to a safe concentration before they

enter the pump inlet.

Injury due to touching toxic

pump oil in the pump or

harmful substances attached

to the pump during

inspection or disposal

⇒ ① Wear protective equipment suitable for toxic substances

when carrying out inspection.

②Before overhauling and disposing of the pump, ask a

waste disposal specialist to make it safe.

③Ask an authorized waste disposal specialist to carry out

disposal.

1.1.2 Warning Electric shock

Cause Prevention method and measures

The energized part of the

motor was touched.

⇒ ① When connecting electric wires, always turn off the

power and be sure to connect the earth wire.

②When inspecting and transferring the pump, always turn

off the power.

③Never insert hands, fingers, or thin objects through the

motor opening.

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