Agilent Technologies VS Series Bedienungsanleitung

D R A F T 4 / 1 8 / 11

FIELD INSTALLATION

INSTRUCTIONS

Vacuum Products Division

FilamentReplacement

forVS Series Leak

Detector

Part Number 699909994

Rev. A

February 2006

Part Number 699909994

Rev. C

May 2018

Agilent Field Instruction Sheet

Prepared by Checked by Approved by Document No. Revision

Date Date Date

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Filament Replacement for VS Series Leak Detector

Preface

Documentation Standards

This manual uses the following documentation standards:

NOTE Notes contain important information.

CAUTION Cautions appear before instructions, which if not followed, could cause damage to

the equipment or data loss.

WARNING Warnings appear for a particular procedure or practice which, if not followed

correctly, could lead to serious injury or death.

Hazard and Safety Information

The common international symbols used in this manual and on the equipment are defined below.

OFF Supply (Power) Earth (Ground) Terminal

ON Supply (Power) Caution, Hot Surface

AC – Alternating Current Caution, Risk of Electrical

Shock

Warning, Risk of danger Protective Conductor Terminal

Frame or chassis Terminal

Filament Replacement for VS Series Leak Detector

699909994 A

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Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to

recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of

unskilled, improper, or careless operation of the equipment can be serious. Every operator or service person must read

and thoroughly understand operation/maintenance manuals and any additional information provided by Agilent. All

warning and cautions must be read carefully and strictly observed. Consult local, state, and national agencies

regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your

nearest Agilent office.

Solvents

WARNING The mechanical components of leak detectors may be cleaned with one of the

recommended solvents. When heated, sprayed, or exposed to high-temperature

equipment, these solvents become flammable and explosive, causing serious

injury or death. Do not use these solvents near a high-temperature source. Ventilate

the working area with a blower and work in a large, well-ventilated room.

Solvents are irritants, narcotics, depressants and/or carcinogens. Their inhalation

and/or ingestion may produce serious side effects. Prolonged or continued contact

with the skin results in absorption through the skin and moderate toxicity. Always

ensure that cleaning operations are carried out in large, well-ventilated rooms, and

wear eye shields, gloves, and protective clothing.

Due to the effective cleaning nature of VacuSolv solvent and its residue-free

properties, Agilent’ Component and Spectrometer Cleaning Kit (Part Number

670029096), used in accordance with the kit instructions, is recommended for

cleaning spectrometer components. The kit can also be used for fine cleaning of

other parts in the leak detector’s vacuum system such as valves and fittings. No

rinsing steps or high-temperature drying is required following cleaning with

VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible

with most materials and does not contain toxic chemicals or CFCs

(chlorofluorocarbons). Other acceptable solvents are isopropyl alcohol (IPA) or

Dow Corning

OS-20.

To clean the leak detector plastic enclosure, the LCD display and Front Panel

buttons, use only a soft cloth slightly dampened with water or a mild soap.

Do NOT use excess water or cleaning solvents of any kind.

Avoid splashing any cleaning solvents into the unit through the ventilation

openings or Front Panel buttons. Wipe the surface with a dry lint-free cloth.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques that are

more important in leak detector servicing than in general vacuum work:

CAUTION Wear non-powdered, ESD-safe Nitride or equivalent gloves to prevent skin oils from

getting on spectrometer internal components.

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O-ring Care

When removing, checking or replacing O-rings, keep in mind the following:

NOTE Agilent recommends replacing all O-rings during routine maintenance or during

any maintenance procedure requiring that O-rings be removed.

CAUTION Remove O-rings carefully with your fingers. Do not use metal tools for this task; this

prevents scratching of any sealing surfaces.

• Wipe all O-rings clean with a lint-free cloth before installation to ensure that no

foreign matter is present to impair the seal.

• Do not use grease or any other substance on O-rings that will come in contact

with the vacuum surfaces.

• Do not use alcohol, methanol or other solvents on O-rings. Doing so causes

deterioration and reduces their ability to hold a vacuum.

• Agilent does not recommend the use of vacuum grease. If applicable, apply a

small amount of Apiezon

L grease and wipe the O-rings shiny dry.

Metal Seal Care

CAUTION Metal Seals must be replaced any time a spectrometer is opened. All fasteners must

be installed and torqued per assembly procedure specifications. Remove Metal

Seals carefully with your fingers or a soft tool. Metal tools scratch sealing surfaces.

• Metal Seals are supplied in pre-cleaned condition. No cleaning is required. If

necessary, Metal Seals can be cleaned using the recommended solvents. Wipe

Metal Seals clean with a lint-free cloth before installation to ensure that no for-

eign matter impairs the seal.

• Do not use grease or any other substance on Metal Seals that will come in con-

tact with the spectrometer.

Spectrometer

CAUTION Store the Ion Source/Preamplifier sub-assembly in a cool, dry area in a tightly

sealed, ESD protected container. Wear non-powdered, ESD-safe Nitride or

equivalent gloves when handling the spectrometer. Wash hands thoroughly after

handling the spectrometer filaments and especially before smoking or eating.

The spectrometer and PCB’s are static sensitive devices. Wear a grounding strap

when performing any maintenance on these units and especially when performing

maintenance of static sensitive parts.

CAUTION The spectrometer operates at a very high vacuum produced by the high vacuum

turbomolecular pump. Service of the spectrometer requires that this vacuum be

vented to the atmosphere.

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Equipment Required

• Filament Service Kit (PN: VSFLDFR)

• Extended Length M5 Allen Wrench

• Metric Allen Wrench Set

• Needle nose pliers or tweezer

• M3 Phillips Head Screw Driver

• 1.5 mm Hex Driver

• 5 mm Hex Driver

• Torque Wrench (must be adjustable to 40 in-lbs (4.5 N-m) and 90 in-lbs (10.2 N-m))

• Digital Multimeter (Fluke 187 or equivalent)

Installation Procedure

For clarity, some items have been omitted from views.

Figure 1: Rear Screws

1. Turn off the power switch located on the back of the unit and unplug.

2. Wait 30 seconds for the high voltage to dissipate.

3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 1: Rear

Screws).

4. Detach the rear plastic cover from the unit.

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Figure 2: Fan Assembly

5. Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap

screw (Figure 2: Fan Assembly).

Figure 3: Cable Locations

CAUTION Static sensitive device, ensure that personnel are properly grounded before

proceeding.

6. Disconnect the spectrometer ground cable, the preamp signal cable and the ion source cable from the spectrometer

(Figure 3: Cable Locations).

NOTE Cables not shown for clarity.

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7. Using an M3 Phillips screw driver, remove the spectrometer cover.

Figure 4: Spectrometer Exploded View

CAUTION Wear non-powdered, ESD-safe Nitride or equivalent gloves (not included in kit) to

prevent skin oils from getting on vacuum surfaces.

8. Loosen screws (item 1) and carefully remove the spectrometer header from the body. The vacuum system vents to

atmosphere as the screws are loosened. Retain the socket head cap screws (item 1) and the Belleville washers

(item 2). See line item 21 for correct orientation of the Belleville washers (Figure 10: Direction of Cone).

9. Remove the metal gasket (item 3) and discard. Do not scratch the mating surface when removing the gasket. Do

not attempt to reuse the gasket (Figure 4: Spectrometer Exploded View).

10.Examine the spectrometer cavity for discolored areas. If present, refer to the service manual for cleaning

instruction.

Figure 5: Coupler Screws

11.On a clean work surface, remove the defective filament(s) (item 4) from the spectrometer by loosening the two

coupler screws. Then loosen the M2 screw and washer and remove the defective filament (Figure 5: Coupler

Screws).

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Figure 6: Coupler and Filament Assembly

12.Inspect the new filament assembly for deformation, damage and flaking of the coating prior to installation. Do not

install if damaged.

13.Insert new filament assembly into the coupler.

14.Guide the ceramic against the bottom and side ribs of the ion source support block (Figure 6: Coupler and Filament

Assembly and Figure 7: Filament Position). Correct positioning of filament is critical for proper spectrometer

operation.

15.While holding the filament in position, insert the M2 screw and washer and tighten (Figure 7: Filament Position).

16.Tighten the coupler screws onto the filament posts (Figure 7: Filament Position).

17.Verify ceramic is tight against the bottom and right side ribs. Ensure that the filament is positioned in the slot of the

ion source as shown (Figure 7: Filament Position and Figure 8: Filament Alignment).

Figure 7: Filament Position

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Figure 8: Filament Alignment

18.Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol and a clean lint free wipe.

NOTE Agilent recommends that you use the Vac-u-solv spectrometer cleaning kit

(PN: 670029096).

19.Center replacement metal gasket inside the bolt pattern and outside of the body cavity. To prevent scratching of any

sealing surface do not use metal tools for this task.

Figure 9: Spectrometer Alignment

20.Guide the spectrometer header into pocket with the detector housing closest to the inlet (Figure 9: Spectrometer

Alignment).

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Figure 10: Direction of Cone

21.Insert a screw with three Belleville washers into each hole and finger tighten (Figure 10: Direction of Cone).

NOTE The cones of the Belleville washers should all point to the head of the screw.

22.Following the pattern shown in Figure 10: Direction of Cone, torque screws to 40 in-lbs (4.5 N-m).

23.Re-torque screws to 90 in-lbs (10.2 N-m) following the same pattern. Go through the entire torque pattern twice to

ensure the metal gasket is firmly compressed.

24.Wait a minimum of five minutes then torque the screws shown in pattern (Figure 10: Direction of Cone) to 90 in-lbs

(10.2 N-m).

Figure 11: Ion Source Header Pin Schematic

25.On the PCB, use the resistance meter to verify an open circuit between any two of the six ion source header pins

(except FIL-1 to FIL-1 and FIL-2 to FIL-2 which should be 0.3 Ohms or less). Also verify an open circuit between the

body of the spectrometer and any of the ion source header pins (Figure 11: Ion Source Header Pin Schematic).

If there is continuity (short circuit) at any of the points, remove the header and inspect for shorting.

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