Agilent Technologies VHS-4 Bedienungsanleitung

DRAFT 8/7/02

INSTRUCTION MANUAL

vacuum technologies

VHS-4

Diffusion Pump

Part No. 699901021

Rev No. D

Date October 2000

NOTICE: This document contains references to Varian.

Please note that Varian, Inc. is now part of Agilent

Technologies. For more information, go to

www.agilent.com/chem.

DRAFT 8/7/02

Varian Vacuum Technologies

VHS-4 Diffusion Pump

October 2000

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, MA, 02421-3133 USA

declare under our sole responsibility that the product,

erklären, in alleniniger Verantwortung, daß dieses Produkt,

déclarons sous notre seule responsabilité que le produit,

declaramos, bajo nuestra sola responsabilidad, que el producto,

verklaren onder onze verantwoordelijkheid, dat het product,

dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity

Konformitätserklärung

Déclaration de Conformité

Declaración de Conformidad

Verklaring de Overeenstemming

Dichiarazione di Conformità

We/Wir/Nous/Nosotros/Wij/Noi: Varian, Inc.

to which this declaration relates is in conformity with the following standard(s) or other normative documents.

auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).

al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).

waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.

a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Frederick C. Campbell

Operations Manager

Varian Vacuum Technologies

Lexington, Massachusetts, USA

73/023/EEC. . . . . . . . . . . . . . . . . . . . . .Low Voltage Directive

EN 61010-1 . . . . . . . . . . . . . . . . . . . . . “Safety requirements for electrical equipment for measurement, control and

laboratory use”, incorporating amendments, numbers 1 and 2.

VMF-11 M-2 VHS-6 HS-16

AX-65 M-4 VHS-250 HS-20

AX-150 VHS-4 VHS-10 HS-32

HS-2 M-6 VHS-400 NHS-35

ara

on o

orm

ity

VHS-4 Diffusion Pump

DRAFT 8/7/02

Warranty

Products manufactured by Seller are warranted against

defects in materials and workmanship for twelve (12)

months from date of shipment thereof to Customer, and

Seller’s liability under valid warranty claims is limited, at

the option of Seller, to repair, replacement, or refund an

equitable portion of the purchase price of the Product.

Items expendable in normal use are not covered by this

warranty. All warranty replacement or repair of parts shall

be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in origi-

nal materials or workmanship. All obligations of Seller

under this warranty shall cease in the event of abuse,

accident, alteration, misuse, or neglect of the equipment.

In-warranty repaired or replaced parts are warranted only

for the remaining unexpired portion of the original war-

ranty period applicable to the repaired or replaced parts.

After expiration of the applicable warranty period, Cus-

tomer shall be charged at the then current prices for parts,

labor, and transportation.

When products are used with toxic chemicals, or in an

atmosphere that is dangerous to the health of humans, or

is environmentally unsafe, it will be the responsibility of

the Customer to have the product cleaned by an indepen-

dent agency skilled and approved in handling and clean-

ing contaminated materials before the product will be

accepted by Varian Associates for repair and/or replace-

ment.

Reasonable care must be used to avoid hazards. Seller

expressly disclaims responsibility for loss or damage

caused by use of its Products other than in accordance

with proper operating procedures.

Except as stated herein, Seller makes no warranty, express

or implied (either in fact or by operation of law), statutory

or otherwise; and, except as stated herein, Seller shall

have no liability under any warranty, express or implied

(either in fact or by operation of law), statutory or other-

wise. Statements made by any person, including repre-

sentatives of Seller, which are inconsistent or in conflict

with the terms of this warranty shall not be binding upon

Seller unless reduced to writing and approved by an

officer of Seller.

Disclaimer

Operation and maintenance of this equipment involves

serious risk. It is the responsibility of the user to maintain

safe operating conditions at all times. Varian assumes no

liability for personal injury or damage resulting from

operation or service of the equipment.

Varian has no control over the use of this equipment and

is not responsible for personal injury or damage resulting

from its use. The safe use and disposal of hazardous or

potentially hazardous materials of any kind is the sole

responsibility of the user. Observe all WARNINGS and

CAUTIONS to minimize the serious hazards involved.

It is the sole responsibility of the users of Varian equip-

ment to comply with all local, state and federal safety

requirements (laws and regulations) applicable to their

system. Employ the services of an industrial hygienist

and/or a qualified chemical safety engineer in order to

ensure safe installation and use.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after

occurrence of circumstances giving risethereto, and must

be received within the applicable warranty period by

Seller or its authorized representative. Such claims should

include the Product serial number, the date of shipment,

and a full description of the circumstances giving rise to

the claim. Before any Products are returned for repair

and/or adjustment, written authorization from Seller or its

authorized representative for the return and instructions

as to how and where these Products should be returned

must be obtained. Any Product returned to Seller for

examination shall be prepaid via the means of

transportation indicated as acceptable by Seller. Seller

reserves the right to reject any warranty claim not

promptly reported and any warranty claim on any item

that has been altered or has been returned by

non-acceptable means of transportation. When any

Product is returned for examination and inspection, or for

any other reason, Customer shall be responsible for all

damage resulting from improper packing or handling, and

for loss in transit, notwithstanding any defect or

non-conformity in the Product. In all cases, Seller has the

sole responsibility for determining the cause and nature of

failure, and Seller’s determination with regard thereto

shall be final.

If it is found that Seller’s Product has been returned

without cause and is still serviceable, Customer will be

notified and the Product returned at its expense; in

addition, a charge for testing and examination may be

made on Products so returned.

3/1/00

VHS-4 Diffusion Pump

DRAFT 8/7/02

Instructions for Use

This equipment is designed for use by professionals. The user should read this instruction manual and any other additional

information supplied by Varian before operating the equipment. Varian will not be held responsible for any events that

occur due to non-compliance with these instructions, improper use by untrained persons, non-authorized interference

with the equipment, or any action contrary to that proved for by specific national standards.

This manual uses the following standard safety protocol:

WARNING The warnings are for attracting the

attention of the operator to a particular

procedure or practice which, if not

followedcorrectly,could leadto serious

injury.

CAUTION The cautions are displayed before

procedures, which if not followed,

could cause damage to the equipment.

NOTE The notes contain important

information taken from the text.

VHS-4 Diffusion Pump

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DRAFT 8/7/02

vii

VHS-4 Diffusion Pump

DRAFT 8/7/02

Contents

Declaration of Conformity. . . . . . . . . . . . . . . . . . . . . iii

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iv

Disclaimer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iv

Instructions for Use. . . . . . . . . . . . . . . . . . . . . . . . . . . v

Diffusion Pump Hazards . . . . . . . . . . . . . . . . . . . . . . .ix

Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . x

Pressurization Hazards . . . . . . . . . . . . . . . . . . . .xi

Dangerous Substances . . . . . . . . . . . . . . . . . . . . .xi

High Temperatures . . . . . . . . . . . . . . . . . . . . . . xii

High Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . xii

Section I Installation . . . . . . . . . . . . . . . . . . . . . . . . . 1

Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Pump Oil Installation . . . . . . . . . . . . . . . . . . . . . . 4

Vacuum System Connections . . . . . . . . . . . . . . . . 4

Cooling Water Connections . . . . . . . . . . . . . . . . . 5

Electrical Connections . . . . . . . . . . . . . . . . . . . . . 5

Thermal Switch . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Section II Operation. . . . . . . . . . . . . . . . . . . . . . . . . 7

Startup Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Shutdown Procedure. . . . . . . . . . . . . . . . . . . . . . . . 8

Section III Maintenance and Service . . . . . . . . . . . . 9

General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Periodic Inspection . . . . . . . . . . . . . . . . . . . . . . . . . 9

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Cold Cap Removal/Installation . . . . . . . . . . . . . . . 10

Jet Assembly Removal/Installation . . . . . . . . . . . . . 11

Heater Replacement . . . . . . . . . . . . . . . . . . . . . . . 12

Adding Pump Fluid . . . . . . . . . . . . . . . . . . . . . . . . 12

Section IV Troubleshooting . . . . . . . . . . . . . . . . . . 15

Leakage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Outgassing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Poor Pump or System Performance . . . . . . . . . . . . 15

Section V Replacement Parts . . . . . . . . . . . . . . . . . 17

VHS-4 Diffusion Pump

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DRAFT 8/7/02

VHS-4 Diffusion Pump

DRAFT 8/7/02

Diffusion Pump Hazards

Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be

designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety

features, and interlocks as recommended.

Refer to Table 1 for a list of general hazards and recommended actions, Table 2 on page x for a list of prohibited actions

that can result in explosions, and Table 3 on page xi for a list of pressurization hazards that can result in damage to

equipment.

THE INSTALLATION, OPERATION, AND SERVICING OF DIFFUSION PUMPS INVOLVES ONE OR MORE OF

THE FOLLOWING HAZARDS, ANY ONE OF WHICH IN THE ABSENCE OF SAFE OPERATING PRACTICES AND

PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL.

Table 1 General Hazards

Hazard Suggested Corrective Action

Loss of utility: water and/or electricity Provide sufficient backup water and power supply as

necessary to effect a safe shutdown under worst case

conditions

Overpressure in foreline Provide an interlock to ensure that the power supply to the

pump heater cannot be activated if the foreline pump is not

running and/or the pressure in foreline is above 0.5 Torr

(0.38 mbar)

Overtemperature Fit temperature sensors and pump fluid level sensors with

feedback to an interlock on the heater power supply

Insufficient water flow through the main cooling coils Use water flow sensor and feedback to interlock the heater

power supply

Water trapped between inlet and outlet of Quick Cool coil,

or liquid nitrogen trapped between inlet and outlet of

liquid nitrogen trap

Provide vent or pressure relief valves for both Quick Cool

coil and liquid nitrogen trap

Loss of electrical ground integrity Incorporate ground fault interrupt circuit into heater power

supply

Positive pressure in pumping system Integrate pressure relief valve in vacuum system

High voltage Prevent personnel contact with high voltages; design and

attach warnings

Toxicity and Corrosivity Toxic and/or corrosive gases must be vented to a safe

location, ensuring adequate dilution or scrubbing to safe

levels, taking all action required to meet air quality

standards

Explosion Integrate pressure relief valves in all systems using

pumps 10 inches or larger in diameter.

Do not use hydrocarbon-based pumping oils

VHS-4 Diffusion Pump

DRAFT 8/7/02

Explosion

❑Operation of the diffusion pump without continuous

evacuation below 0.5 Torr (0.67 mbar), or without

coolant and introducing a strong oxidizer (such as

air) or explosive vapors or powders or materials

which may react with pumping fluids in a hot pump

(above 300 °F or 150 °C) can cause an explosion.

Such an explosion can violently expel valves and

other hardware, slam open doors that are not

designed for appropriate pressure relief, or burst other

components of the vacuum system. Serious injury or

death may result from expelled parts, doors, shrapnel,

and shock waves.

❑Three elements are required for explosion: fuel, oxi-

dizer, and an ignition. A combination of temperature

and pressure can be a source of ignition. Most diffu-

sion pump fluids, except mercury, are fuels. Hydro-

carbon oils are more prone to oxidize and explode

than synthetic silicone-based oil. The oxidizer can be

air, which is a strong oxidizer that is introduced by a

leak, deliberately brought in via a process, or inad-

vertently admitted by operator or by a process con-

troller error.

❑Explosion and Fire from Acetone and Alcohol: Diffu-

sion pumps are typically cleaned with acetone and

alcohol. When combined with air, oxygen, and other

oxides, alcohol and most other solvents are very

flammable and explosive. Never permit any trace of

these cleaners to remain in or on the pump. Always

remove all traces of alcohol and acetone and other

cleaners with clean, dry, oil-free compressed air.

Oxygen and other strong oxidizers are even more

dangerous than air. Certain conditions of temperature

and pressure can cause a combustible mixture to

explode. The larger the diffusion pump, the greater

the risk of explosion and the greater the risk of dam-

age and injury. Never operate large diffusion pumps

utilizing hydrocarbon oils without a complete safety

analysis for the entire system and for the application.

Never operate a large diffusion pump under the condi-

tions listed in Table 2. Any of these situations increases

the probability of an explosion.

Table 2 Explosive Conditions

Prohibited Action Explosion-Causing Condition

Do not run pump without

cooling water Overtemperature

Do not run pump with low

level of pump fluid Overtemperature

Do not run pump without

proper backing or holding

pump

Overpressure

Do not run pump when

not evacuated below

0.5 Torr (0.38 mbar)

Overpressure

Do not admit air to, or

rough through, a pump

with hot boiler

Overpressure plus strong

oxidizer

Do not open drain or fill

plug while pump is under

vacuum, especially when

it is hot

Overpressure plus strong

oxidizer

Do not contaminate pump

with explosive vapors Lower explosive threshold

of gas mixtures

Do not remove, defeat, or

override safety

counter-measures such as

pressure and thermal

switches and valve

sequencer interlocks

Overtemperature,

overpressure, more

combustible mixtures

Do not machine or weld

any part of the pump

without removing all oil or

solvent residue in pump in

large pumps

Source of ignition

Do not use unsuitable

pumping fluid, especially

hydrocarbon oil

Lower explosive threshold

of gas mixture

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