Agilent Technologies TriScroll 300 Bedienungsanleitung

INSTALLATION AND

OPERATION MANUAL

Vacuum Products Division

TriScroll

300

Inverter

Dry Scroll

Vacuum Pump

Manual No. 699904355

Revision C

October 2009

Agilent, Inc.

TriScroll

™

300 Inverter

Dry Scroll Vacuum Pump

TriScroll is a trademark of Agilent, Inc.

iii

TriScroll 300 Inverter Vacuum Pump

Table of Contents

Declaration of Conformity

Warranty ...................................................................viii

Warranty Replacement and Adjustment..............viii

Instructions for Use ..................................................... 1

General Information ................................................. 1

Storage ................................................................. 1

Unpacking and Inspection........................................ 1

Installation Requirements ......................................... 2

Safety ................................................................... 2

Operation................................................................. 4

Startup Procedure ................................................. 4

Shutdown Procedure ............................................ 4

Maintenance ............................................................ 4

Technical Information ................................................. 5

Pump Electrical Controller........................................ 8

Technical Specifications....................................... 9

Serial Interface Specification RS485 and RS232.. 10

Gas Ballast ............................................................. 12

Bearing Purge......................................................... 12

Purge Kit ................................................................ 12

Isolation Valve Kit .................................................. 12

CT-100 Speed Control Kit....................................... 14

VPI and CT100 Speed Control Kit........................... 15

Exhaust Silencer Kit ................................................ 16

Vibration Isolation Kit............................................. 16

HEPA Inlet filter...................................................... 16

Troubleshooting ..................................................... 17

Maintenance .......................................................... 18

General Information ........................................... 18

Related TriScroll Manuals................................... 18

Maintenance and Tooling Kits ............................ 19

Factory Service Options...................................... 20

Accessories......................................................... 20

Contacting Agilent.............................................. 20

TriScroll 300 Inverter Vacuum Pump

This page intentionally left blank.

TriScroll 300 Inverter Vacuum Pump

List of Figures

Figure Caption Page

1 Interface Drawing with Dimensions . . . . . . . 6

2 Pumping Speed Curves . . . . . . . . . . . . . . . . . 6

3 TriScroll 300 Inverter Vacuum Pump . . . . . . . 7

4 Inverter Interface . . . . . . . . . . . . . . . . . . . . . . 7

5 Driving Frequency vs. Analog Input . . . . . . . . 9

6 T+ Pumps List . . . . . . . . . . . . . . . . . . . . . . . 11

7 T-Unknown Pump . . . . . . . . . . . . . . . . . . . . 12

8 Isolation Valve Position . . . . . . . . . . . . . . . . 13

9 Pumping Speed Percentage Drop . . . . . . . . . 14

10 VPI and CT100 Kit . . . . . . . . . . . . . . . . . . . 15

11 Serial Number Location . . . . . . . . . . . . . . . 15

List of Tables

Table Title Page

1 Power Cord Selection .................................... 3

2 Circuit Breaker Requirements......................... 3

3 Specifications ................................................ 5

4 P1 Interlock ................................................... 8

5 J2-Serial Port.................................................. 8

6 T-Plus Software Variables .............................. 8

7 Status LEDs .................................................... 9

8 Troubleshooting Chart ................................. 11

9 Other Related Manuals ................................ 12

10 Maintenance and Tooling Kits ..................... 13

11 Factory Service Options............................... 14

12 Accessories .................................................. 14

TriScroll 300 Inverter Vacuum Pump

This page intentionally left blank.

declare under our sole responsibility that the product,

erklären, in alleniniger Verantwortung, daß dieses Produkt,

déclarons sous notre seule responsabilité que le produit,

declaramos, bajo nuestra sola responsabilidad, que el producto,

verklaren onder onze verantwoordelijkheid, dat het product,

dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity

Konformitätserklärung

Déclaration de Conformité

Declaración de Conformidad

Verklaring de Overeenstemming

Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.

auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).

al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).

waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.

a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Wir

Nous

Nosotros

Wij

Noi

Agilent, Inc.

John Ehmam

Operations Manager

March 2003

121 Hartwell Avenue

Lexington, MA, 02421-3133 USA

Agilent, Inc.

Vacuum Products Division

Lexington, Massachusetts, USA

TriScroll Inverter Vacuum Pumps (PTS03001INV, PSS06001INV)

98/37/EEC, Machinery Directive

EN 1012-2:1996 Compressors and vacuum pumps safety reqmts; Part 2 vacuum pumps

EN 1050:1996 Safety of machinery - principles for risk assessment

EN 60204-1 Electrical equipment of industrial machines; general requirements

73/023/EEC, Low Voltage Directive

EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance

EN 61010-1:2001 Safety requirements for electrical equipment for measurement, control and

laboratory use

89/336/EEC, Electromagnetic Compatibility Directive

EN 61000-4-2 Testing and measurement techniques - Electrostatic discharge immunity test

EN 61326:1997/A3:2003 Electrical equipment for measurement, control and laboratory use

Declaration of Conformity

TriScroll 300 Inverter Vacuum Pump

viii

Warranty

Products manufactured by Seller are warranted against

defects in materials and workmanship for twelve (12)

months from date of shipment thereof to Customer, and

Seller’s liability under valid warranty claims is limited, at

the option of Seller, to repair, to replace, or refund of an

equitable portion of the purchase price of the Product.

Items expendable in normal use are not covered by this

warranty. All warranty replacement or repair of parts shall

be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in

original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of

abuse, accident, alteration, misuse, or neglect of the

equipment. In-warranty repaired or replaced parts are

warranted only for the remaining unexpired portion of the

original warranty period applicable to the repaired or

replaced parts. After expiration of the applicable warranty

period, Customer shall be charged at the then current

prices for parts, labor, and transportation.

Reasonable care must be used to avoid hazards. Seller

expressly disclaims responsibility for loss or damage

caused by use of its Products other than in accordance

with proper operating procedures.

Except as stated herein, Seller makes no warranty, express

or implied (either in fact or by operation of law), statutory

or otherwise; and, except as stated herein, Seller shall

have no liability under any warranty, express or implied

(either in fact or by operation of law), statutory or

otherwise. Statements made by any person, including

representatives of Seller, which are inconsistent or in

conflict with the terms of this warranty shall not be

binding upon Seller unless reduced to writing and

approved by an officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after

occurrence of circumstances giving rise thereto, and must

be received within the applicable warranty period by

Seller or its authorized representative. Such claims should

include the Product serial number, the date of shipment,

and a full description of the circumstances giving rise to

the claim. Before any Products are returned for repair

and/or adjustment, written authorization from Seller or its

authorized representative for the return and instructions

as to how and where these Products should be returned

must be obtained. Any Product returned to Seller for

examination shall be prepaid via the means of

transportation indicated as acceptable by Seller. Seller

reserves the right to reject any warranty claim not

promptly reported and any warranty claim on any item

that has been altered or has been returned by

non-acceptable means of transportation. When any

Product is returned for examination and inspection, or for

any other reason, Customer shall be responsible for all

damage resulting from improper packing or handling, and

for loss in transit, notwithstanding any defect or

non-conformity in the Product. In all cases, Seller has the

sole responsibility for determining the cause and nature of

failure, and Seller’s determination with regard thereto

shall be final.

If it is found that Seller’s Product has been returned

without cause and is still serviceable, Customer will be

notified and the Product returned at its expense; in

addition, a charge for testing and examination may be

made on Products so returned.

3/1/00

TriScroll 300 Inverter Vacuum Pump

DRAFT 6/5/11

Instructions for Use

General Information

This equipment is designed for use by professionals. The

user should read this instruction manual and any other

additional information supplied by Agilent before

operating the equipment. Agilent will not be held

responsible for any events that occur due to

non-compliance with these instructions, improper use by

untrained persons, non-authorized interference with the

equipment, or any action contrary to that provided for by

specific national standards.

The TriScroll™ 300 is a dry, scroll vacuum pump. This

pump is suitable for pumping air or inert gases. The pump

is not intended to pump toxic, corrosive, explosive, or

particulate-forming gases.

The following paragraphs contain all the information

necessary to guarantee the safety of the operator when

using the equipment. Detailed information is supplied in

“Technical Information” on page 5.

This manual uses the following standard safety protocol:

Storage

When transporting and storing the pump, the following

environmental requirements should not be exceeded:

Unpacking and Inspection

The shipping container is a double carton.

1. After opening the outer box, remove the foam packing.

2. Slit open the inner box.

3. Lift the pump with the plywood base out of the inner

box.

4. Remove the four bolts securing the pump frame to

the plywood base.

5. Locate the NW16 exhaust fitting and set it aside.

6. Inspect the pump for damage.

If there is shipping damage, contact the freight carrier

and your local Agilent sales office immediately.

7. Save the carton and packing materials.

Total weight of the package, including the pump, is

approximately 33.6 kg (74 lbs).

WARNING The warning messages are for

attracting the attention of the opera-

tor to a particular procedure or prac-

tice which, if not followed correctly,

could lead to serious injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important

information taken from the text.

Temperature: –20 °C to 60 °C (–4 °F to 140 °F)

Relative humidity: 0 to 95% (non-condensing)

WARNING When unpacking the pump, be sure

not to drop it, and avoid any kind of

sudden impact or shock vibration

to it.

WARNING The TriScroll 300 weighs 26 kg

(57 lbs). To avoid injury, use proper

lifting techniques when moving the

pump.

NOTE Normal exposure to the environ-

ment cannot damage the pump.

Nevertheless, it is advisable to keep

the pump inlet closed until the

pump is installed in the system.

DRAFT 6/5/11

TriScroll 300 Inverter Vacuum Pump

Installation Requirements

Safety

Do not remove or modify any safety or insulating

equipment from the pump. To do so may create a serious

safety hazard and may void the warranty.

During operation, the following environmental

conditions should not be exceeded:

WARNING

❑

This pump is designed to pump

air and inert gases only; it is not

designed to pump explosive, flam-

mable, toxic, or corrosive gases.

They can cause bodily injury,

explosion, or fire.

❑

Install in an area that is not

exposed to rain, steam, or excessive

humidity. They can cause electric

shock, short circuits, and severe

bodily injury.

❑

Before inspecting or servicing the

pump, be sure the electrical supply

is disconnected.

❑

Consult a qualified electrician

whenever wiring the pump.

CAUTION Although the pump can pump trace

particulates normally found in the

atmosphere, it is not designed for

process solids, chemicals, powders,

solvents, condensates, or other par-

ticulates. They can damage the

equipment, degrade its performance,

or shorten its useful life.

Single and three phase pumps oper-

ate in a clockwise direction when

viewed from the motor end. (Note

the arrow on the pump frame.)

Improper rotation can cause perma-

nent damage to the pump.

Temperature: +5 °C to +40 °C (+41 °F to +104 °F)

Relative humidity: 0 to 95% (non-condensing)

CAUTION Do not block the fan ducts because

the pump can become overheated.

A pump surface temperature in

excess of 55 °C (131 ° F) is poten-

tially damaging. If such conditions

are observed, turn pump off and

allow to cool. Disassemble, inspect

for damage, and repair if necessary.

CAUTION To reduce the risk of electric shock,

do not expose to rain; store indoors.

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