Agilent Technologies IDP 10 Bedienungsanleitung

DRAFT 1/13/17

Vacuum Products Division

INSTRUCTION MANUAL

IDP-10

Dry Scroll

Vacuum Pump

Manual No. X3810-90000

Revision B

January 2017

DRAFT 1/13/17

Agilent, Inc.

IDP-10

Dry Scroll Vacuum Pump

Slo-Blo and Littelfuse are registered trademarks of Littelfuse, Inc.

iii

IDP-10 Dry Scroll Vacuum Pump

DRAFT 1/13/17

Warranty

Products manufactured by Seller are warranted against

defects in materials and workmanship for twelve (12)

months from date of shipment thereof to Customer, and

Seller's liability under valid warranty claims is limited, at

the option of Seller, to repair, to replace, or refund of an

equitable portion of the purchase price of the Product.

Items expendable in normal use are not covered by this

warranty. All warranty replacement or repair of parts shall

be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in origi-

nal materials or workmanship. All obligations of Seller

under this warranty shall cease in the event of abuse,

accident, alteration, misuse, or neglect of the equipment.

In-warranty repaired or replaced parts are warranted only

for the remaining unexpired portion of the original war-

ranty period applicable to the repaired or replaced parts.

After expiration of the applicable warranty period, Cus-

tomer shall be charged at the then current prices for parts,

labor, and transportation.

Reasonable care must be used to avoid hazards. Seller

expressly disclaims responsibility for loss or damage

caused by use of its Products other than in accordance

with proper operating procedures.

Except as stated herein, Seller makes no warranty,

expressed or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein,

Seller shall have no liability under any warranty,

expressed or implied (either in fact or by operation of

law), statutory or otherwise. Statements made by any per-

son, including representatives of Seller, which are incon-

sistent or in conflict with the terms of this warranty shall

not be binding upon Seller unless reduced to writing and

approved by an officer of Seller.

Warranty Replacement

and Adjustment

All claims under warranty must be made promptly after

occurrence of circumstances giving rise thereto, and must

be received within the applicable warranty period by

Seller or its authorized representative. Such claims should

include the Product serial number, the date of shipment,

and a full description of the circumstances giving rise to

the claim. Before any Products are returned for repair

and/or adjustment, written authorization from Seller or its

authorized representative for the return and instructions

as to how and where these Products should be returned

must be obtained. Any Product returned to Seller for

examination shall be prepaid via the means of transporta-

tion indicated as acceptable by Seller. Seller reserves the

right to reject any warranty claim not promptly reported

and any warranty claim on any item that has been altered

or has been returned by non-acceptable means of trans-

portation. When any Product is returned for examination

and inspection, or for any other reason, Customer shall be

responsible for all damage resulting from improper pack-

ing or handling, and for loss in transit, notwithstanding

any defect or non-conformity in the Product. In all cases,

Seller has the sole responsibility for determining the cause

and nature of failure, and Seller's determination with

regard thereto shall be final.

If it is found that Seller's Product has been returned with-

out cause and is still serviceable, Customer will be noti-

fied and the Product returned at the Customer's expense;

in addition, a charge for testing and examination may be

made on Products so returned.

IDP-10 Dry Scroll Vacuum Pump

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DRAFT 1/13/17

IDP-10 Dry Scroll Vacuum Pump

DRAFT 1/12/17

Contents

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii

Warranty Replacement and Adjustment. . . . . . . . iii

Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

General Information . . . . . . . . . . . . . . . . . . . . . . . 1

Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

EMC Warnings . . . . . . . . . . . . . . . . . . . . . . . . 2

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

User Interface . . . . . . . . . . . . . . . . . . . . . . . . . 4

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Protection Features . . . . . . . . . . . . . . . . . . . . . . . . 5

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Environmental Conditions, Compliance and Utility

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Environmental Conditions . . . . . . . . . . . . . . . 7

Electromagnetic Compatibility . . . . . . . . . . . . 7

South Korean Class A EMC declaration . . . . . 7

ICES/NMB-001 . . . . . . . . . . . . . . . . . . . . . . . . 7

Instructions d'utilisation . . . . . . . . . . . . . . . . . . . . 8

Informations générales . . . . . . . . . . . . . . . . . . 8

Conditionnement . . . . . . . . . . . . . . . . . . . . . . 8

Avertissements CEM . . . . . . . . . . . . . . . . . . . . 9

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Utilisation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Interface de l'utilisateur . . . . . . . . . . . . . . . . 10

Opération . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Fonctions de protection . . . . . . . . . . . . . . . . . . . 12

Entretien . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Mise au rebut . . . . . . . . . . . . . . . . . . . . . . . . 12

Technical Information . . . . . . . . . . . . . . . . . . . . . 13

Unpacking and Inspection . . . . . . . . . . . . . . . . . 15

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Electrical Connections . . . . . . . . . . . . . . . . . 17

Start Current . . . . . . . . . . . . . . . . . . . . . . . . . 18

Mechanical Connections . . . . . . . . . . . . . . . 19

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Cleaning the Pump . . . . . . . . . . . . . . . . . . . . 20

Startup Procedure . . . . . . . . . . . . . . . . . . . . . 20

Shutdown Procedure . . . . . . . . . . . . . . . . . . 20

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . 21

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Kits and Service Options . . . . . . . . . . . . . . . 22

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Tip Seal Replacement . . . . . . . . . . . . . . . . . . 22

Request for Return Health and Safety Certification

List of Figures

Figure Caption Page

1 DSUB9 Pin Connections . . . . . . . . . . . . . . . . 4

2 RPM. vs. 0-10 V Speed Control Signal. . . . . . 4

3 Raccordements des broches DSUB9 . . . . . . 10

4 Outline Drawing with Dimensions . . . . . . . 14

5 Pumping Speed Curves . . . . . . . . . . . . . . . . 14

6 Outline Drawing and Principal Items . . . . . 15

7 Feet Label . . . . . . . . . . . . . . . . . . . . . . . . . . 15

8 Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . 19

9 ON/OFF Power Switch . . . . . . . . . . . . . . . . 20

10 Exploded View of Pump Body . . . . . . . . . . 23

List of Tables

Table Title Page

1 Impedance Characteristic . . . . . . . . . . . . . . . 2

2 DSUB9 Pin Connections . . . . . . . . . . . . . . . . 4

3 Caractéristique de l'impédance . . . . . . . . . . . 8

4 Raccordements des broches DSUB9 . . . . . . 10

5 Specifications . . . . . . . . . . . . . . . . . . . . . . . 13

6 IDP-10 Power Cord Selection . . . . . . . . . . . 18

7 Typical IDP-10 Maximum Starting

Current (A) . . . . . . . . . . . . . . . . . . . . . . . . . 18

8 Troubleshooting Chart. . . . . . . . . . . . . . . . . 21

9 Accessories and Replacement Kits. . . . . . . . 22

10 Service Options. . . . . . . . . . . . . . . . . . . . . . 22

IDP-10 Dry Scroll Vacuum Pump

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DRAFT 1/12/17

IDP-10 Dry Scroll Vacuum Pump

DRAFT 1/13/17

Instructions for Use

General Information

This equipment is designed for use by trained personnel.

The user should read this instruction manual and any

other additional information supplied by Agilent before

operating the equipment. Agilent will not be held respon-

sible for any events that occur due to non-compliance

with these instructions, improper use by untrained per-

sons, non-authorized interference with the equipment, or

any action contrary to that provided for by specific

national standards.

The IDP-10 is a hermetic, dry scroll vacuum pump. This

pump is suitable for pumping air or inert gases. The pump

is not intended to pump corrosive, explosive, or particu-

late-forming gases.

The following paragraphs contain all the information nec-

essary to guarantee the safety of the operator when using

the equipment. Detailed information is supplied in

“Technical Information” on page 13.

This manual uses the following standard safety protocol:

Storage

When transporting and storing the pump, the following

environmental requirements should not be exceeded:

Preparation for Installation

The pump is supplied in a special protective packing. If

this shows signs of damage, which may have occurred

during transport, contact your local sales office.

Total weight of the packing, IDP-10 pump included, is

approximately 28.1 kg (62 lbs).

WARNING The warning messages are for attracting

the attention of the operator to a partic-

ular procedure or practice which, if not

followed correctly, could lead to serious

injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important informa-

tion taken from the text.

Temperature: 20 °C to +60 °C (4 °F to 140 °F)

Relative humidity: 0 to 95% (non-condensing)

WARNING The IDP-10 pump itself weighs 24.7 kg

(55 lbs). To avoid injury, use lifting aids

and proper lifting techniques when

moving the pump.

WARNING When unpacking the pump, be sure not

to drop it and avoid any kind of sudden

impact or shock vibration to it.

NOTE Normal exposure to the environment

cannot damage the pump. Neverthe-

less, it is advisable to keep the pump

inlet closed until the pump is installed

in the system.

IDP-10 Dry Scroll Vacuum Pump

DRAFT 1/13/17

EMC Warnings

EN 55011 Class A Warning

This is a Class A product. In a domestic environment this

product may cause radio interference in which case the

user may be required to take adequate measures.

The IDP-10 was tested with an I/O cable (for remote con-

trol) employing a clamp-on ferrite bead combined

foil-braid shields and metal shell connectors with the

shields connected to the IDP-10 chassis. Compliance

with FCC Part 15 rules and the European Union's EMI

requirements cannot be assured unless this type of I/O

cable and ferrite bead is used.

Failure to install the unit in this way may result in the fail-

ure to meet the requirements for radiated emissions and

susceptibility.

The ferrite bead must have the following characteristics:

❑Ferrite type: Broadband

❑Impedance characteristic (Table 1).

❑Large enough to fit over the cable being used.

FCC

This device complies with Part 15 of the FCC rules. Oper-

ation is subject to the following two conditions: (1) This

device may not cause harmful interference, and (2) this

device must accept any interference received, including

interference that may cause undesirable operation.

Table 1 Impedance Characteristic

Frequency (Mhz) Nominal Impedance (Z)

25 25

100 250

300 420

NOTE The equipment has been tested and

found to comply with the limits for a

Class A digital device, pursuant to Part

15 of the FCC rules. These limits are

designed to provide reasonable protec-

tion against harmful interference when

the equipment is operated in a commer-

cial environment. This equipment gen-

erated, uses, and can radiate radio

frequency energy and, if not installed

and used in accordance with the

instruction manual, may cause harmful

interference to radio communications.

Operation of this equipment in a resi-

dential area is also likely to cause harm-

ful radio communications interference

in which case the user will be required

to correct the interference at his own

expense.

IDP-10 Dry Scroll Vacuum Pump

DRAFT 1/13/17

Installation

The IDP-10 is designed and certified for operation

indoors (installation category II) in relatively clean, dry

environments (pollution degree 2). Refer to Table 5 for

specifications. It is not designed nor certified for opera-

tion outdoors. The IDP-10 is NOT intrinsically safe and

should never be used in dusty environments or with cor-

rosive or flammable gases.

Connect the pump to the power supply using an IEC-320

style power cord.

Use

The IDP-10 employs an inverter driven 3-phase motor so

that pump speed is independent of AC mains frequency.

The pump has the following features:

❑Local On/Off control via a user accessible slide switch

❑Remote On/Off control via switch closure to ground

though the Dsub9 I/O connector.

❑LED hour meter which displays run time in hours

❑Remote user control of pump speed through an analog

input via the Dsub9 I/O connector.

❑Automatic AC mains voltage sensing and selection for

worldwide application.

❑Automatic thermal sensing and shutdown for excessive

temperature.

❑Automatic power control under high pump loads.

❑An optional inlet valve to protect vacuum systems from

accidental venting should the pump shutdown unex-

pectedly.

CAUTION During operation the following environ-

mental conditions must be respected:

❑Temperature:+5 °C to +40 °C (41 °F

to 104°F)

❑Relative humidity:0 to 95%

(non-condensing)

Connect the pump to the power supply

using an IEC-320 style power cord of at

least 10 A capacity (See Table 6 on

page 17).

CAUTION When installing the vacuum pump it is

recommended that the pump be posi-

tioned in a way that the power switch

and power cord connection remain eas-

ily accessible to the user in order to be

available as an option to disconnect

power to the pump quickly if needed.

IDP-10 Dry Scroll Vacuum Pump

DRAFT 1/13/17

User Interface

There is a slide switch, used for local manual operation of

the pump, and a DSUB9 type connector with male pin

contacts for both remote control and to allow you to vary

the speed of the pump. The mating DSUB9 connector

may be purchased from an external vendor. The specifi-

cations of the connector are as follows: Metal shell 9

Position D-Sub Receptacle with Female Socket contacts.

See “EMC Warnings” on page 2 for information about

required back-shells, cable, and ferrite bead.

The slide switch has two positions labeled as:

❑0: This is the OFF position, the pump and fan. When in

this position, the pump and fan are off and the optional

inlet valve will be closed. The switch MUST be in this

position to allow remote ON/OFF operation

❑I: This is the ON position, the pump and the fan oper-

ates when in this position.

The DSUB9 connector (Figure 1) has pins for both remote

ON/OFF control and to vary the pump speed. The pin

assignments are inTable 2.

Figure 1 DSUB9 Pin Connections

Description of Pin Functions

❑Pin#1: This pin can be used to control the speed of the

pump by applying an analog voltage between 1 and

either of the signal ground pins. The speed varies con-

tinuously from full speed of 1900 RPM at 10 VDC to

1350 RPM at 6.9 VDC. The pump runs at 1350 RPM

for all voltages between 1.0 and 6.9 V. For voltages

below 1 V or without an input the pump runs at full

speed. Over speed is not provided. This pin has an

input impedance of 10 Kohms.

❑Pin#2: This is a TTL compatible logic input. Either a

switch closure to signal ground, or a logic LO (refer-

enced to signal ground) on this pin allows the pump to

run. An open or logic HI turns the pump OFF. An inter-

nal pull-up resistor to +5 V is provided. Note: that the

slide switch MUST be in the 0position when using this

input.

❑Pin#5 and Pin#9: These two pins are connected to sig-

nal ground.

❑Pin#7: This pin outputs a 10 VDC signal used when

using a potentiometer for the speed control. When

connecting the top of a potentiometer to this pin, the

wiper to pin#1, and the other side of the potentiometer

to one of the ground pins, you can easily vary the

speed of the pump. A 5 Kohm potentiometer is recom-

mended.

❑Pin#8: Do not make any connection to this pin.

❑Pin#9: Shell: Chassis ground. (The shell is NOT con-

nected to the signal ground pins).

Figure 2 RPM. vs. 0-10 V Speed Control Signal

Table 2 DSUB9 Pin Connections

Pin # Function

1 Analog speed control input voltage 0-10 VDC

2 External pump On/Off input, active LO

3NC

4NC

5 Ground

6NC

7 +10VDC output

8 Reserved for Factory use

9 Ground

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