Edwards SCU-XL800 Bedienungsanleitung

MT-57E-101-A

Description Voltage

SCU-XL800 Control Unit 200 - 240 Va.c.

100 - 120 Va.c.

SCU-XL800 Control Unit

Instruction Manual (C)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A):

STP pump generic Instruction Manual

Supplied with STP pump

Instruction Manual (B):

STP pump specific information

Supplied with STP pump

Instruction Manual (C):

(This Instruction Manual)

STP control unit Instruction Manual

Supplied with STP control unit

This page intentionally blank

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

• Introduction

• Installation of the STP pump

• Installation of the STP control unit

• Operation

• Safety functions

• Maintenance and inspection

• Storage and disposal

• Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

• Technical data

• How to Secure the STP pump

• Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

• Introduction

• Technical data

• Installation

• Operation

• Serial communication protocol

• STP-Link (except for SCU-750)

• Maintenance

• Storage, transportation and disposal

• Service, spares, and accessories

Keep the manuals in an easily accessible location.

SCU-XL800 Control Unit for Turbomolecular Pump

July 08 i Issue 1-a

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 2

1.3.1 Warranty period 2

1.3.2 Item warranted 2

1.3.3 Disclaimer 2

1.3.4 Spare parts 3

1.4 Labels 3

1.5 Label affixing positions 6

1.6 General description 7

1.6.1 Cable sets 8

2 TECHNICAL DATA 9

2.1 SCU-XL800 specifications 9

3 INSTALLATION 13

3.1 Unpacking 13

3.2 Front panel 13

3.3 Rear panel 16

3.4 Precautions before installation 17

3.4.1 Operating environment 17

3.4.2 Insulation test 17

3.4.3 Installation area 18

3.5 Attaching the SCU-XL800 to a rack 19

3.6 Cable connection 20

3.6.1 STP connection cable 21

3.6.2 TMS connection cable 22

3.6.3 Power cable 23

3.7 Connecting to semiconductor equipment 25

3.7.1 Connecting to power 25

3.7.2 Emergency off circuit (EMO circuit) 25

3.8 Remote communication 26

3.8.1 Parallel communication 26

3.8.2 Serial communication 26

3.9 Adjustment methods 27

3.9.1 Tuning 27

3.9.2 Tuning method 27

3.9.3 Change of data after tuning 29

3.10 Confirmation mode 30

3.10.1 Confirmation method 30

3.11 Parameter set mode 32

3.11.1 Remote operation setting 32

3.11.2 Rotational speed setting 32

3.11.3 TMS setting 32

3.11.4 Rotational inhibit signal setting 32

SCU-XL800 Control Unit for Turbomolecular Pump

July 08 ii Issue 1-a

PAGE

CONTENTS (CONTINUED)

Section Title Page

3.11.5 Emergency vent valve setting 32

3.11.6 Second Damage Limit setting 33

3.11.7 Pump air-cooling fan output setting 33

3.11.8 Warning function setting 34

3.11.9 Serial port COM1 setting 35

3.11.10 Serial port COM2 setting 35

3.11.11 Serial port COM3 setting 35

3.11.12 Date/Time setting 35

3.11.13 Factory setting 35

3.11.14 Parameter setting procedure 36

3.12 Manual operation mode 42

4 OPERATION 43

4.1 Before starting the STP pump 43

4.1.1 Confirmation before starting 43

4.1.2 Confirmation of vacuum system 43

4.2 Powering ON 44

4.2.1 Self test 44

4.2.2 "CAUTION" message in the self test state 44

4.3 How to start/stop the STP pump 45

4.4 Manual start/stop the STP pump 45

4.4.1 Starting the STP pump 45

4.4.2 Stopping the STP pump 45

4.4.3 Starting the STP pump after stopping 45

4.5 Remote operation 47

4.5.1 Input signal pins 47

4.5.2 Output signal pins 49

4.5.3 Remote setting 52

4.5.4 Starting/Stopping the STP pump 52

4.6 Rotation INHIBIT signal 53

4.6.1 Starting the STP pump after stopping 54

4.6.2 Starting the STP pump after a safety function operates 54

4.7 Powering OFF 54

4.8 Operating the TMS unit (for use with the TMS unit) 55

4.8.1 Before starting 55

4.8.2 Starting/Stopping 55

4.8.3 Setting the TMS unit function 55

4.8.4 Temperature control 55

SCU-XL800 Control Unit for Turbomolecular Pump

July 08 iii Issue 1-a

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

5 SERIAL COMMUNICATION PROTOCOL 57

5.1 Introduction 57

5.2 Connection and setting up 57

5.2.1 Signal connection 57

5.2.2 Connecting the RS485 60

5.2.3 Communication parameter setting 61

5.3 Protocol specifications 61

5.3.1 General description 61

5.3.2 Standard transmission frame

(in the RS232/RS485 single point connection) 62

5.3.3 Control command

(in the RS232/RS485 single point connection) 63

5.3.4 Query command

(in the RS232/RS485 single point connection) 64

5.3.5 Transmission data format 65

5.3.6 Frame control (checksum) 66

5.3.7 Error control 66

5.3.8 Transmission frame in the RS485 multi-point connection 66

5.3.9 Control command in the RS485 multi-point connection 68

5.3.10 Query command in the RS485 multi-point connection 69

5.3.11 Broadcasting command in the RS485 multi-point connection 70

5.4 Command specifications 71

5.4.1 Command list 71

5.4.2 ReadMeas 72

5.4.3 Command 72

5.4.4 ReadFailMess 73

5.4.5 ReadModFonct 76

5.4.6 ReadVersion 78

5.4.7 ReadCounters 79

5.4.8 ReadSetPoint 80

5.4.9 ReadMotorTemp 80

5.4.10 ReadStatus 81

5.4.11 ReadEvents 82

5.4.12 SetSpeedSetPoint 83

5.4.13 ReadSpeedSetPoint 84

5.4.14 ReadModFonctWithWarning 85

5.4.15 ReadMeasValue 88

6 STP-LINK 91

SCU-XL800 Control Unit for Turbomolecular Pump

July 08 iv Issue 1-a

PAGE

CONTENTS (CONTINUED)

Section Title Page

7 MAINTENANCE 93

7.1 Safety functions 93

7.1.1 Power failure 93

7.1.2 Operation after a power recovery 94

7.1.3 Abnormal state of magnetic bearing 94

7.1.4 Excessive vibration 95

7.1.5 Motor driver overload 95

7.1.6 Overheating inside the STP pump 95

7.1.7 Overheating inside the SCU-XL800 95

7.1.8 Overspeed 95

7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 96

7.1.10 Failure of the air-cooling fan 96

7.2 "WARNING" message function 97

7.2.1 "WARNING" message display function 97

7.3 "WARNING" message description 98

7.3.1 Damage point function 98

7.3.2 First damage limit 98

7.3.3 Second damage limit 98

7.3.4 Imbalance X_H, X_B, Z 99

7.3.5 Pump run time over 99

7.3.6 Pump overload 99

7.3.7 Low RTC battery 99

7.4 "WARNING" function setting 100

7.5 Error at self test state 101

7.5.1 Error after self test 102

7.5.2 Error messages 102

7.5.3 Troubleshooting immediately after power failure occurs 102

7.5.4 Troubleshooting immediately

after other abnormality/errors occur 103

7.6 When error message is not displayed on LCD 111

7.6.1 Abnormalities when powering ON 111

7.6.2 Abnormalities when performing rotational operation 111

7.6.3 Other abnormalities 112

7.7 "Error Record" message display function 112

7.8 Maintenance and inspection 113

7.8.1 Replacing the fuses 113

7.8.2 Cleaning 114

7.8.3 Overhaul 114

8 STORAGE, TRANSPORTATION AND DISPOSAL 115

8.1 Storage of the SCU-XL800 115

8.1.1 Transporting for repair or overhaul 115

8.2 Disposal 116

SCU-XL800 Control Unit for Turbomolecular Pump

July 08 v Issue 1-a

PAGE

CONTENTS (CONTINUED)

Section Title Page

9 SERVICE, SPARES AND ACCESSORIES 117

9.1 Introduction 117

9.2 Service 117

9.3 Spares 117

9.4 Accessories 118

SCU-XL800 Control Unit for Turbomolecular Pump

July 08 vi Issue 1-a

PAGE

vi ILLUSTRATIONS

Figure Title Page

1 High voltage device caution label 3

2 Voltage caution label 4

3 Safety instruction label 4

4 Connector caution label 4

5 Voltage rating label 5

6 Label affixing positions 6

7 SCU-XL800 control unit 7

8 Configuration of the STP pump with the TMS 8

9 SCU-XL800 dimensions (mm) 11

10 SCU-XL800 front panel 13

11 SCU-XL800 rear panel 16

12 Installing the SCU-XL800 18

13 Example of securing the SCU-XL800 19

14 STP pump connection cable 21

15 TMS connection cable (standard) 22

16 Power cable 23

17 Connecting method of the power cable without plug 24

18 REMOTE X7 connector 26

19 Connector X3A, X3B, X6 (D-sub 9) 26

20 Tuning procedures 28

22 Parameter setting method 37

23 Parameter setting method (continued) 38

24 Parameter setting method (continued) 39

25 Parameter setting method (continued) 41

26 Manual operation method 42

27 Operational procedures 46

28 REMOTE X7 input signal pins 49

29 REMOTE X7 output signal pins 51

30 Serial communication 57

31 Connector X3A/X3B (D-sub 9) 58

32 Connector X6 (D-sub 9) 58

33 RS485 connections 60

34 PC to SIM communication 61

Inhaltsverzeichnis

Andere Edwards Steuereinheit Handbücher

Edwards

Edwards SCU-1600 Bedienungsanleitung

Edwards

Edwards CTM City Tie Module Montageanleitung

Edwards

Edwards SCU-350 Series Bedienungsanleitung

Edwards

Edwards GSA-CC1 Montageanleitung

Edwards

Edwards A528-44-404 Bedienungsanleitung

Edwards

Edwards PVEK Series Bedienungsanleitung

Edwards

Edwards SCU-801 Bedienungsanleitung

Edwards

Edwards IPVA10EK Bedienungsanleitung

Edwards

Edwards SIGA-IM2 Montageanleitung

Edwards

Edwards PV16EKA Bedienungsanleitung

Edwards

Edwards Speedivalve SP5 Bedienungsanleitung

Edwards

Edwards IPVA10EK Bedienungsanleitung

Edwards

Edwards QSB63 Bedienungsanleitung

Edwards

Edwards SIGA-CC2A Bedienungsanleitung

Edwards

Edwards IBV16MKS Bedienungsanleitung

Edwards

Edwards QSB63 Bedienungsanleitung

Edwards

Edwards HemoSphere ClearSight HEMCSM10 Bedienungsanleitung

Edwards

Edwards TIC Bedienungsanleitung

Edwards

Edwards GXS Bedienungsanleitung

Edwards

Edwards CTM Montageanleitung

Edwards

Edwards SCU-1601 Bedienungsanleitung

Edwards

Edwards TCU 40/80 Bedienungsanleitung

Edwards

Edwards LCPVEK Series Bedienungsanleitung

Edwards

Edwards 3-ASU Montageanleitung

Beliebte Steuereinheit Handbücher anderer Marken

Festo

Festo Compact Performance CP-FB6-E Stücklistenhandbuch

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Bedienungsanleitung

JS Automation

JS Automation MPC3034A Bedienungsanleitung

JAUDT

JAUDT SW GII 6406 Series Kurzanleitung

Spektrum

Spektrum Air Module System Bedienungsanleitung

BOC Edwards

BOC Edwards Q Series Bedienungsanleitung

KHADAS

KHADAS BT Magic Bedienungsanleitung

Etherma

Etherma eNEXHO-IL Bedienungsanleitung

PMFoundations

PMFoundations Attenuverter Bedienungsanleitung

GEA

GEA VARIVENT Bedienungsanleitung

Walther Systemtechnik

Walther Systemtechnik VMS-05 Bedienungsanleitung

Altronix

Altronix LINQ8PD Montageanleitung

Eaton

Eaton Powerware Series Bedienungsanleitung

WAGO

WAGO 750-407/040-000 Bedienungsanleitung

Sony

Sony CCU-590 Bedienungsanleitung

Graco

Graco 25D614 Bedienungsanleitung

Task Force Tips

Task Force Tips YE-RF-900 Programmierhandbuch

Shini

Shini SPV-U Series Bedienungsanleitung