Edwards iGx Bedienungsanleitung

A546–00–880
Issue E Original
Instruction Manual
iGX Dry Pumping Systems
Description Item Number
iGX100L 200 V – 230 V 50/60 Hz A546-10-958
iGX100L 380 V – 460 V 50/60 Hz A546-10-959
iGX100L 200 V – 230 V 50/60 Hz SS A548-10-958
iGX100L 380 V – 460 V 50/60 Hz SS A548-10-959
iGX600L 200 V – 230 V 50/60 Hz A546-30-958
iGX600L 380 V – 460 V 50/60 Hz A546-30-959
iGX600L 200 V – 230 V 50/60 Hz SS A548-30-958
iGX600L 380 V – 460 V 50/60 Hz SS A548-30-959
iGX100N 200 V – 230 V 50/60 Hz A546-11-958
iGX100N 380 V – 460 V 50/60 Hz A546-11-959
iGX100N 200 V – 230 V 50/60 Hz SS A548-11-958
iGX600N 200 V – 230 V 50/60 Hz A546-31-958
iGX600N 380 V – 460 V 50/60 Hz A546-31-959
Description Item Number
iGX1000N 200 V – 230 V 50 Hz A546-81-958
iGX1000N 380 V – 460 V 50 Hz A546-81-959
iGX1000N 200 V – 230 V 50/60 Hz SS A548-81-958
iGX1000N 200 V - 230 V 50/60 Hz SS A543-81-958
iGX100M 200 V – 230 V 50/60 Hz A546-12-958
iGX100M 380 V – 460 V 50/60 Hz A546-12-959
iGX100M 200 V – 230 V 50/60 Hz SS A548-12-958
iGX100MTi 200 V – 230 V 50/60 Hz A546-48-958
iGX100MTi 380 V – 460 V 50/60 Hz A546-48-959
iGX100MTi 200 V – 230 V 50/60 Hz SS A548-48-958
iGX100MTi 200 V – 230 V 50/60 Hz SS A543-48-958
iGX600M 200 V – 230 V 50/60 Hz A546-32-958
iGX600M 380 V – 460 V 50/60 Hz A546-32-959
iGX600M 200 V – 230 V 50/60 Hz SS A548-32-958
iGX600M 200 V – 230 V 50/60 Hz SS A543-32-958

This product has been manufactured under a quality system certified to ISO9001:2008
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
iGX100L 200-230V 50/60Hz A546-10-958 iGX1000N 200-230V 50/60Hz A546-81-958
iGX100L 380-460V 50/60Hz A546-10-959 iGX1000N 380-460V 50/60Hz A546-81-959
iGX100L 200-230V 50/60Hz SS A548-10-958 iGX1000N 200-230V 50/60Hz SS A548-81-958
iGX100 380-460V 50/60Hz SS A548-10-959 iGX100M 200-230V 50/60Hz A546-12-958
iGX600L 200-230V 50/60Hz A546-30-958 iGX100M 380-460V 50/60Hz A546-12-959
iGX600L 380-460V 50/60Hz A546-30-959 iGX100M 200-230V 50/60Hz SS A548-12-958
iGX600L 200-230V 50/60Hz SS A548-30-958 iGX100MTi 200-230V 50/60Hz A546-48-958
iGX600L 200-230V 50/60Hz SS A548-30-959 iGX100MTi 380-460V 50/60Hz A546-48-959
iGX100N 200-230V 50/60Hz A546-11-958 iGX100MTi 200-230V 50/60Hz SS A548-48-958
iGX100N 380-460V 50/60Hz A546-11-959 iGX600M 200-230V 50/60Hz A546-32-958
iGX100N 200-230V 50/60Hz SS A548-11-958 iGX600M 380-460V 50/60Hz A546-32-958
iGX600N 200-230V 50/60Hz A546-31-958 iGX600M 200-230V 50/60Hz SS A548-32-958
iGX600N 380-460V 50/60Hz A546-31-959
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.
VacuumPumps
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
UL61010A: 2002 Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
SEMI S2-0703 Environmental Health and Safety Guideline for semiconductor
Manufacturing Equipment.
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Mr Mark Hope, Global Technical Support Manage
r
Date and Place
P200-01-960 Issue C
21.10.2013, Burgess Hill

P601-00-700
IssueD
Product Information for China
Equipment types:
iH Vacuum Pump Range GX Vacuum Pump Range DiHxK Vacuum Pump Range
iF Vacuum Pump Range iHxK Vacuum Pump Range DiFxK Vacuum Pump Range
iGX Vacuum Pump Range iFxK Vacuum Pump Range EPX Vacuum Pump Range
iPX Vacuum Pump Range iQ/QDP/QMB Vacuum Pump Ranges iL Vacuum Pump Range
Product Label Overshipper Label Pallet Marking
2020
CBCB NWNW
Indicates toxic or hazardous substance contained
in at least one of the homogeneous materials used
for this part is above the limit requirement in
SJ/T11363-2006.
Environmental Protection Use Period is 20 years.
Recyclable Cardboard Recyclable Natural Wood
Materials Content Declaration & Environmental Protection Use Period
The Chinese regulatory requirement on the Control of Pollution Caused by Electronic Information Products No. 39
(also known as ‘China RoHS’) mandates that manufacturers of certain categories of electronic products sold in
China after 1st March 2007 –
Mark the product and packaging
Define the Product’s Environment Protection Use Period (EPUP)
Provide a Materials Content Declaration.
Environmental Protection Use Period (EPUP)
This is the period in years during which the toxic or hazardous substances or elements contained in this product
will not leak or mutate under normal operating conditions so that the use of such electronic information products
will not result in any severe environmental pollution, any bodily injury or damage to any assets.
The Environmental Protection Use Period is 20 years for this product.
For the purposes of EPUP, normal operating conditions are considered to be use in accordance with the product’s
instruction manual.
Materials Content Declaration
Toxic or Hazardous Substances and Elements
Part name Lead
(Pb) Mercury
(Hg) Cadmium
(Cd)
Hexavalent
Chromium
(Cr VI)
Polybrominated
biphenyls (PBB)
Polybrominated
diphenyl ethers
(PBDE)
Cartridge O O X XOO
Enclosure O OXXOO
Electronics and
Controls XOXXOO
Cooling system O OXXOO
Purge system O OXXOO
O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this
part is below the limit requirement in SJ/T11363-2006.
X: Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials
used for this part is above the limit requirement in SJ/T11363-2006.
Note 1. Table applies to all product types listed above.

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© Edwards Limited 2014. All rights reserved. Page i
Edwards and the Edwards logo are trade marks of Edwards Limited.
Contents
A546–00–880 Issue E
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 The iGXL system ......................................................................................................... 2
1.4 Priority of control ........................................................................................................ 4
1.5 Active utility control .................................................................................................... 5
2 Technical Data ....................................................................................7
2.1 General technical data .................................................................................................. 7
2.2 Electrical Data ........................................................................................................... 8
2.3 Loading .................................................................................................................... 8
2.4 Connections ............................................................................................................... 9
2.5 General Data ............................................................................................................10
3 Installation ....................................................................................... 11
3.1 Locate the dry pumping system ......................................................................................12
3.2 Lubrication ...............................................................................................................13
3.3 Connect the iGX system to the vacuum/exhaust system and interstage connection (if fitted) ............13
3.4 Connect to the factory extraction system (optional) .............................................................14
3.5 Connect the nitrogen supply (if provided) ..........................................................................14
3.5.1 Flammable/pyrophoric materials ....................................................................................14
3.5.2 Gas Purges ...............................................................................................................15
3.6 Leak-test the iGX system ..............................................................................................15
3.7 Connect the electrical supply .........................................................................................16
3.8 Connect an additional RF earth (ground) (optional) ..............................................................18
3.9 Connect to the emergency stop circuit .............................................................................18
3.10 Connect the cooling water hoses .....................................................................................19
3.11 Accessories ...............................................................................................................19
3.12 Commission the iGX system ...........................................................................................20
3.13 Install additional safety equipment ..................................................................................22
4 Operation ........................................................................................ 23
4.1 Start-up ..................................................................................................................23
4.2 Status indicators ........................................................................................................24
4.3 Manual shut-down ......................................................................................................24
4.4 Automatic shut-down ..................................................................................................25
4.5 Unplanned shutdown and alarms .....................................................................................25
4.6 Emergency stop .........................................................................................................25
4.7 Restart the pump after an emergency stop or automatic shut-down ..........................................26
4.8 Single equipment monitor (SEM) .....................................................................................26
5 Maintenance ..................................................................................... 27
5.1 Safety and maintenance frequency ..................................................................................27
5.2 Relocate the system for maintenance ...............................................................................28
5.3 Draining the cooling water ............................................................................................29
5.4 Cleaning the pump ......................................................................................................30
6 Transportation, Storage and Disposal ....................................................... 31
6.1 Transportation ..........................................................................................................31
6.2 Storage ...................................................................................................................31
CG 01/14

A546–00–880 Issue E
Page ii © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.
Contents
6.3 Disposal ...................................................................................................................31
7 Service, Spares and Accessories .............................................................. 33
7.1 Introduction .............................................................................................................33
7.2 Service ....................................................................................................................33
7.3 Ordering accessories ...................................................................................................34
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 iGX Applications chart .................................................................................................. 2
2 The controls/connectors ................................................................................................ 3
3 The rear status panel LED indicators ................................................................................. 4
4 The front panel controls ................................................................................................ 4
5 Priority of control ........................................................................................................ 5
6 Centre of gravity and levelling foot loads ........................................................................... 8
7 System arrangment to reduce effective footprint (if required) .................................................12
8 High and low volt coding pin arrangement .........................................................................17
9 Method for connecting phase wires ..................................................................................18
10 Connections to emergency stop circuit (systemable) .............................................................18
11 Installing 3/8" quick connect fittings (provided) ...................................................................20
12 Gas module access panel ..............................................................................................21
13 Flow tube (14 slm) ......................................................................................................21
14 Flow tube (4 slm) .......................................................................................................22

© Edwards Limited 2014. All rights reserved. Page iii
Edwards and the Edwards logo are trade marks of Edwards Limited.
Contents
A546–00–880 Issue E
Tables
Table Page
1 Technical data ........................................................................................................... 7
2 Technical data ........................................................................................................... 7
3 Electrical data ............................................................................................................ 8
4 Centre of gravity and levelling foot loads (Refer to Figure 6) .................................................... 8
5 iGX connector types ..................................................................................................... 9
6 Technical data ..........................................................................................................10
7 Safety sensors ...........................................................................................................25
8 Accessories ...............................................................................................................34
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400–40–100
Trademark credits
Fomblin®is a registered trademark of Ausimont SpA.

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A546–00–880 Issue E
Page iv © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.

© Edwards Limited 2014. All rights reserved. Page 1
Edwards and the Edwards logo are trade marks of Edwards Limited.
Introduction
A546–00–880 Issue E
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards iGX dry pumping systems.
The pump must be used as specified in this manual. Read this manual before installing and operating the pump.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The units used throughout this manual conform to the SI international system of units of measurement
The following warning labels are on the pump:
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning – refer to accompanying
documentation. Warning – risk of electric shock.
Warning – hot surfaces. Warning – moving parts present.
Warning – heavy object. Warning - pressurised.
RF earth (ground). Protective earth (ground).
Warning - use protective equipment. Warning - Risk of explosion.

A546–00–880 Issue E
Page 2 © Edwards Limited 2014. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.
Introduction
The pressurised and risk of explosion warnings only appear in this manual.
Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards.
1.2 Applications
If using the iGX system on an application for which it is not suitable (refer to Figure 1), the warranties may invalidate.
If in doubt, contact Edwards for advice as to the suitability of the iGX system for any particular application.
Figure 1 - iGX Applications chart
1.3 The iGXL system
Pumping a chemical that will attack the materials in contact with these process materials may, over time, result in
the internal contents of the pump becoming exposed to the external environment, which may constitute a safety
hazard. If in doubt, contact Edwards for advice as to the suitability of this pump for any particular application.
It is also a feature of this pump design that process gases are contained within the gearbox. This pump is not suitable
for use with flammable, hazardous, toxic or corrosive gases or material.
Dieses Handbuch passt für folgende Modelle
53
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