Edwards Barocel 7025M Bedienungsanleitung
W601100880_A Original Instructions
Barocel 7025M Gauge
INSTRUCTION MANUAL
edwardsvacuum.com
W601100880_A - Copyright notice
Page 2
Copyright notice
©Edwards Limited 2019. All rights reserved.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive,
Burgess Hill, West Sussex, RH15 9TW, UK.
VCR®Swagelok Marketing Co.
Disclaimer
The content of this manual may change from time to time without notice. Edwards accepts no
liability for any errors that may appear in this manual nor does it make any expressed or
implied warranties regarding the content. So far as is reasonably practicable Edwards has
ensured that its products have been designed and constructed so as to be safe and without
risks when properly installed and used in accordance with Edwards operating instructions.
Edwards accepts no liability for loss of profit, loss of market or any other indirect or
consequential loss whatsoever.
Product warranty and limit of liability are dealt with in Edwards standard terms and conditions
of sale or negotiated contract under which this document is supplied.
You must use the Barocel 7025M as described in this manual. Read this manual before you
install, operate and maintain the Barocel 7025M.
P20010230A
CE Declaration of Conformity
The following product
List products here including –
•Barocel 7025m Series Capacitance Manometer W6011*
•Barocel 7025 Series Capacitance Manometer W6021*
•Barocel 7045 Series Capacitance Manometer W6032*
•Barocel 7100 Series Capacitance Manometer W6033*
Is in conformity with the relevant requirements of European CE legislation:
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 60529:1991 +
A2:2013
Specification for degree of protection provided by enclosures (IP code)
– IP code 30
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class B Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 6th June 2019.
Larry Marini – Senior Technical Manager
Eastbourne
Andy Marsh – General Manager
Eastbourne
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU RoHS Directive: Material Exemption Information
This product is compliant with no Annex III or IV Exemptions
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance-based requirements.
Article 33 Declaration
This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww
by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.
ADDITIONAL INFORMATION
材料成分声明
China Material Content Declaration
表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
Indicates that the hazardous substance contained in all of the homogeneous materials for this part is
below the limit requirement in GB/T 26572.
Page 3
W601100880_A - Contents
Introduction 7
Product identification .................................................................................................... 7
Intended use .................................................................................................................. 7
Function ......................................................................................................................... 7
Before using this gauge .................................................................................................. 7
Safety symbols ............................................................................................................... 8
Safety precautions .........................................................................................................8
Liability and warranty .................................................................................................... 8
Technical data 9
Dimensions ................................................................................................................... 11
Analogue measurement signal versus pressure .......................................................... 12
Installation 13
Vacuum connection ..................................................................................................... 13
Electrical connection .................................................................................................... 15
FCC68, 8-pin connector ...................................................................................... 16
D-Sub, 9-pin connector ...................................................................................... 17
Operation 18
To zero the gauge ........................................................................................................ 18
<ZERO> Adjustment ........................................................................................... 18
Uninstallation 20
Maintenance and repair 21
Return the equipment for service 21
Disposal 22
Separating the components ......................................................................................... 22
Contents
This page has been intentionally left blank.
Page 4
W601100880_A - Contents
Page 5
W601100880_A - List of Figures
Figure 1: Dimensions (mm) .................................................................................................... 11
Figure 2: Analogue measurement signal versus pressure ...................................................... 12
Figure 3: Connect the gauge to the system ............................................................................ 15
Figure 4: FCC69 8-pin sensor cable ........................................................................................ 16
Figure 5: D-Sub 9-pin sensor cable ......................................................................................... 17
List of Figures
Page 6
W601100880_A - List of Tables
Table 1: General ....................................................................................................................... 9
Table 2: Output signal .............................................................................................................. 9
Table 3: Gauge identification ................................................................................................... 9
Table 4: Electrical ..................................................................................................................... 9
Table 5: Materials exposed to vacuum .................................................................................. 10
Table 6: Environmental .......................................................................................................... 10
List of Tables
Page 7
W601100880_A - Introduction
Introduction
Product identification
Specify the information given on the gauge nameplate in all communications with Edwards.
Intended use
The Barocel 7025M gauge is intended for absolute pressure measurement of gases in their
respective pressure ranges, see Installation on page 13. The unit is clean room compliant and
double protected against contamination.
The gauge can be operated in connection with an Edwards TIC controllers or another
applicable unit.
Function
The Barocel 7025M gauge has a capacitive sensor element made of aluminium oxide ceramics
and electronics which convert the capacitance into a direct current (d.c.) voltage output
signal.
The output signal is linear to the measured pressure and independent of the gas type.
Before using this gauge
Make sure that the model is the same as you ordered and no damage occurred during
shipment.
Read this instruction manual before you install, operate, inspect, or service this gauge to
familiarize yourself with safety precautions, specifications and operations.
Page 8
W601100880_A - Introduction
Safety symbols
Important safety information is highlighted as WARNING and CAUTION instructions. Obey the
safety instructions.
The use of warnings and cautions is defined as:
Safety precautions
Obey the applicable regulations and follow the necessary precautions for the process
media used. Reactions with the gauge materials are possible.
Obey the applicable regulations and follow the necessary precautions for the work
you do. Obey the safety instructions in this document.
Before you start work, find out if any vacuum components are contaminated. Obey
the applicable regulations and the necessary precautions when you handle
contaminated parts.
Ensure all other users are aware of the safety instructions.
Liability and warranty
Edwards accepts no liability and the warranty becomes non applicable if the end user or third
parties:
Ignore the information in this document
Use the gauge in a non-agreeable manner
Make any kind of interventions (modifications, alterations, etc.) on the gauge
Use the gauge with accessories not listed in this instruction manual.
The customer assumes the responsibility along with the process media used.
Gauge failures because of contamination are not included in the warranty.
WARNING:
Warnings are given where failure to obey the instruction could result in injury or death to
people. The symbol shown will change and refer to the applicable hazard.
CAUTION:
Cautions are given where failure to obey the instruction could result in minor injury or
damage to the equipment, associated equipment or process.
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