Keysight Technologies B1500A Bedienungsanleitung

Keysight Technologies B1500A

Semiconductor Device Analyzer

Configuration and

Connection Guide

Notices

©Keysight Technologies 2005-2019

No part of this manual may be repro-

duced in any form or by any means

(including electronic storage and

retrieval or translation intoa foreign

language) without prior agreement and

written consent from Keysight Tech-

nologies as governed byUnited States

and international copyright laws.

Manual Part Number

B1500-90090

Edition

Edition 1, May 2005

Edition 2, July 2007

Edition 3, June 2010

Edition 4, October 2011

Edition 5, June 2013

Edition 6, February 2015

Edition 7, June 2015

Edition 8, August 2019

Edition 9, December 2019

Published by:

Keysight Technologies Japan K.K.

9-1, Takakura-cho, Hachioji-shi, Tokyo

192-0033 Japan

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Limited Rights as defined in FAR

52.227-14 (June 1987) or DFAR

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as applicable in any technical data.

In This Document

This document provides the following information about Keysight B1500A

Semiconductor Device Analyzer.

1. B1500A Product Configuration

Describes the product configuration of the B1500A.

2. B1500A Accessories

Describes the available accessories for the B1500A.

3. Connection Guide for Wafer Prober

Describes how to connect the B1500A, accessories, and a DUT interface such as

wafer prober and your own test fixture.

4. Connection and Ordering Examples

Describes fixture/prober connection and ordering examples.

Contents

Keysight B1500A Configuration and Connection Guide Contents - 1

1. B1500A Product Configuration

Product line up of the B1500A series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Options of B1500A series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Furnished accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Upgrade products for the B1500A series. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

Option of B1500AU upgrade kit . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . 1-20

About Plug-in modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25

Module type and locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26

Maximum Module Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27

Limitation by installing B1500AU-030 WGFMU. . .. . . . . . . . . . . . . . . . . . . 1-27

EasyEXPERT group+ software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28

Functions and capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28

Operation mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28

Application library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29

Oscilloscope view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29

Workspace and data management. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30

External instrument control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30

Furnished Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30

EasyEXPERT group+ Software for PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31

System requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33

License Management Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-35

2. B1500A Accessories

Accessories for the B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

SMU cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

CMU accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

HVSPGU accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

WGFMU accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

Test fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Other accessories and interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

Rack mount kit for Keysight standard cabinet . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Accessories for the wafer prober / connector plate . . . . . . . . . . . . . . . . . . . . . . . 2-19

3. Connection Guide for Wafer Prober

SMU/GNDU connection with prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

GNDU connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Non-Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Contents - 2 Keysight B1500A Configuration and Connection Guide

Contents

SMU connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

Non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Kelvin to non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

MCSMU connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

Connection for low current measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

To make connection to reduce leakage current . . .. . . . . . . . . . . . . . . . . . . . . 3-12

Guarding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Connection for low resistance measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

To make connection to measure low resistance. . . . . . . . . . . . . . . . . . . . . . . . 3-14

Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

SCUU and ASU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

SCUU positioner-based probing connection . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

ASU connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

WGFMU and RSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

Connecting RSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21

Connecting DC Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24

Interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

Installing the interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

To connect interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28

4. Connection and Ordering Examples

Two terminal device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

General IV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

General IV/CV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

High resolution IV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Four terminal device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

General IV characterization, Migration from 4155 . . . . . . . . . . . . . . . . . . . . . . 4-8

General IV/CV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

High resolution IV characterization, Migration from 4156. . . . . . . . . . . . . . . 4-12

High resolution IV characterization (ASU). . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

High power IV characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

50 ms Pulse IV characterization (MCSMU) . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

50 ms Pulse IV characterization (Two MCSMU) . . . . . . . . . . . . . . . . . . . . . . 4-20

Flash memory cell characterization (2 pulse channels) . . . . . . . . . . . . . . . . . . 4-22

Flash memory cell characterization (3 or 4 pulse channels) . . . . . . . . . . . . . . 4-24

Configuration example of WGFMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

Ultra-fast 1 us NBTI characterization using the B1530A WGFMU module . 4-26

1 B1500A Product Configuration

1-2 Keysight B1500A Configuration and Connection Guide

B1500A Product Configuration

Product line up of the B1500A series

1.1 Product line up of the B1500A series

The Keysight B1500A Semiconductor

Device Analyzer is the new generation one

box solution for the semiconductor device

DC/AC parametric measurement and

analysis application. The B1500A provides

the DC voltage/current output capability,

DC voltage/current measurement

capability, and AC signal output and

impedance measurement capability. So you

can perform a current-voltage sweep

measurement and a capacitance-voltage

sweep measurement for example by one

instrument.

The B1500A also provides an intuitive graphical user interface, touch screen LCD panel,

keyboard, and mouse for easy and effective measurement and analysis on the Windows

environment. You can analyze a measurement result characteristics graph for example by

using several tools such as markers, cursors, and lines.

The EasyEXPERT remote control function supports the remote execution of application

tests via the LAN interface.

Also, in the GPIB remote control mode, you can control the B1500A from an external

computer by using Keysight FLEX command set that is the common language for Keysight

semiconductor DC measurement instruments. So you can reuse the measurement program

created for Keysight 4155/4156/E5260/E5270 series.

•B1500A Semiconductor device analyzer mainframe

Mainframe that provides the ground unit (GNDU) and ten empty slots for the

measurement facilities, and Keysight EasyEXPERT group+ software for the operating

environment. The EasyEXPERT group+ is the GUI based measurement control and

analysis software runs on the Windows.

The B1500A is equipped with the 15 inch LCD with touch panel, solid-state drive

(SSD) DVD-RW/DVD-ROM/CD-RW/CD-ROM drive, and USB/LAN/GP-IB

interfaces. The USB keyboard, the USB mouse, and the stylus pen are available as

option.

•HPSMU module (B1500A-A10)

High power source/monitor unit module. Occupies two slots.

•MPSMU module (B1500A-A11)

Medium power source/monitor unit module. Occupies one slot. Needs Keysight

E5288A ASU(option A29) to perform atto level current measurement or automatic

switching of the measurement resources connection. ASU is effective for the B1511B

MPSMU. ASU cannot be connected to the B1511A MPSMU.

•HRSMU module (B1500A-A17)

High resolution source/monitor unit module. Occupies one slot. Needs Keysight

E5288A ASU (option A28) to perform atto level current measurement or automatic

switching of the measurement resources connection.

Keysight B1500A Configuration and Connection Guide 1-3

B1500A Product Configuration

Product line up of the B1500A series

•MCSMU module (B1500A-A1A or A1B)

50 μs pulse Medium current source/monitor unit module. Occupies one slot.

•MFCMU module (B1500A-A20)

Multi frequency capacitance measurement unit module. Occupies one slot. Needs

Keysight N1301A-100 SCUU to perform automatic switching of the measurement

resources connection.

•HVSPGU module (B1500A-A25)

High voltage semiconductor pulse generator unit module. Occupies one slot. Up to five

modules can be installed in one B1500A mainframe. One module provides two output

channels. Needs Keysight 16440A (B1500A-A04) and 16445A to perform automatic

switching of the measurement resources connection.

•WGFMU module and RSU (B1500A-A30, A31)

Waveform generator/fast measurement unit module and the remote-sense and switch

unit. Occupies one slot. Up to five modules can be installed in one B1500A mainframe.

One module provides two channels.

•16440A SMU/PGU pulse generator selector (B1500A-A04)

Used to switch the measurement resource connected to the DUT. The measurement

resource can be HV SPGU or SMU. Needs the 16445A adapter to use the selector. One

selector provides two switching channel.

•16442B test fixture (B1500A-A5F)

Test fixture for semiconductor parameter analyzers and device analyzers. Provides

three Kelvin triaxial connectors (six non-Kelvin triaxial connectors) for connecting

SMU, six BNC connectors for connecting HV SPGU, MFCMU, or other instruments, a

GNDU connector, and an Intlk connector. Furnished with the dual-in-line package

socket module, universal socket modules (two types), blank PTFE on board, and

connection wires for device connection.

•16445A selector adapter (B1500A-A04)

Used to connect the 16440A selector (B1500A-A04) to the B1500A. Two selectors can

be connected.

•E5288A ASU (B1500A-A28 or A29)

Atto sense and switch unit (ASU). Used to enable the 1 pA range for the atto level

current measurement, also switch the measurement resource connected to the DUT.

The measurement resource can be HRSMU/MPSMU or the instrument connected to

the AUX terminal.

•N1255A 2 channel connection box for MCSMU

Connection box to make the MCSMU connection easy. Supports two MCSMU.

•N1301A-100 SCUU

SMU CMU unify unit (SCUU). Used to switch the measurement resource connected to

the DUT. The measurement resource can be CMU or one of two SMUs connected to

the SCUU.

1-4 Keysight B1500A Configuration and Connection Guide

B1500A Product Configuration

Product line up of the B1500A series

•N1302A-200 GSWU

Guard switch unit (GSWU). Needs the SCUU to use the GSWU. Effective for the

accurate impedance measurements by connecting the guard lines between CMU high

and low near the DUT.

Table 1-1 Mainframe Specification

Table 1-2 SMU Module Variation

Available Slots 10

Ground Unit (GNDU) sink capability 4.2 A

Instrument control GPIB

External trigger inputs / outputs 1 BNC Trigger in, 1 BNC Trigger out, 8

Programmable Trigger In/Out

Networking 100 BASE-TX / 10 BASE-T LAN Port

Module

Key specification

Max.

Current Max.

Voltage

Current

means.

Resolu-

tion

Voltage

means.

Resolu-

tion

Req’d

slots

HPSMU

(High Power SMU) ±1 A ±200 V 10 fA 2 μV2

MPSMU

(Medium Power SMU) ±100 mA ±100 V 10 fA 0.5 μV1

HRSMU

(High Resolution SMU) ±100 mA ±100 V 1 fA 0.5 μV1

ASU

(Atto Sense and Switch Unit) ±100 mA ±100 V 0.1 fA 0.5 μVNA

MCSMU

(50 μs pulse Medium Current SMU) ±1 A ±30 V 10 pA 0.2 μV1

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