Mindman MF01 Series Bedienungsanleitung
Digital Flow Sensor
MF01 series
INSTRUCTION
MANUAL
201012
II
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Contents
Product features..................................................................................................................................................................... 1
Application..................................................................................................................................................................................3
Thermal mass ow sensor principles.................................................................................................................4
Order example..........................................................................................................................................................................4
Specications...........................................................................................................................................................................5
Output type .................................................................................................................................................................................7
Pressure loss characteristics.....................................................................................................................................8
Installation instructions................................................................................................................................................... 9
● Piping ..................................................................................................................................................................................................9
● Mounting bracket.................................................................................................................................................................................9
● Wiring diagrams ................................................................................................................................................................................10
● Dimensions........................................................................................................................................................................................ 11
● Mounting accessories........................................................................................................................................................................12
How to use.................................................................................................................................................................................13
● Names and functions of individual parts ...........................................................................................................................................13
● Internal structure ...............................................................................................................................................................................14
● Functions instructions........................................................................................................................................................................15
Functions setting mode .................................................................................................................................................................15
Measurement mode ......................................................................................................................................................................16
● Operation setting instructions............................................................................................................................................................17
[F-01] OUT1 setting selection .......................................................................................................................................................17
[F-02] OUT2 setting selection .......................................................................................................................................................18
[F-03] LCD display color selection ................................................................................................................................................19
[F-04] Response time selection.....................................................................................................................................................19
[F-05] Display refresh time selection............................................................................................................................................. 20
[F-06] Unit selection ......................................................................................................................................................................20
[F-07] Flow reference standard selection...................................................................................................................................... 20
[F-08] Display rotation ...................................................................................................................................................................20
[F-09] Accumulated value hold selection.......................................................................................................................................21
[F-10] Flow sensor display mode selection ...................................................................................................................................21
[F-91] Power-save mode selection................................................................................................................................................ 22
[F-92] External input selection.......................................................................................................................................................22
[F-93] Modbus RTU setting ...........................................................................................................................................................23
[F-94] Fine adjustment setting.......................................................................................................................................................24
[F-95] Forced output function ........................................................................................................................................................24
[F-99] Reset to the default setting .................................................................................................................................................25
Instantaneous ow zero adjustment function ................................................................................................................................25
Reset accumulated ow function ..................................................................................................................................................25
Peak value display ........................................................................................................................................................................25
Bottom value display .....................................................................................................................................................................26
Key lock / Unlock mode.................................................................................................................................................................26
Modbus RTU instruction...............................................................................................................................................26
Error code instruction.....................................................................................................................................................28
Caution for safety................................................................................................................................................................ 29
1
Flow
Indicator accuracy ± 3% F.S.
Repeatability ± 1% F.S.
Digital display Switch output Analog output Accumulated pulse output
Instantaneous ow value
Accumulated ow value
NPN output
PNP output
Voltage output 1~5V
Current output 4~20 mA 50 ms pulse output
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Product features
Cost Control
User-friendly
High Performance
Multiple output function
High Precision
DRY AIR, N2
RS-485 MODBUS
CONTROL
30.0
OUT1 OUT2
L/min
2
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Product features
Screen Invertible
Display can be vertically
inverted. To set and watch
monitor easily.
Accumulated ow rate
display at a glance
Accumulated ow rate display
Flow rate (L/min)
MF01-005
MF01-010
MF01-050
MF01-100
MF01-500
MF01-101
MF01-201
Wide range of ow rates
0 0.5 1 5 10 50 100 200
30.0
OUT1 OUT2
L/min
8205
L
01
00
Screen invertible
3
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Application
Application
01
Paint and coating ow monitoring
Air ow and pressure management of paint and
coating processes.
Application
02
Laser welding monitoring
Precision management of shielding gas,
ow rate and pressure.
30.0
L/min
30.0
L/min
4
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Application
Application
03
Suction operation
Detect the suction state of micro-
electronic parts by ow rate.
Application
05
Leakage detect
Container with gas and inspect
whether it leaks.
Application
04
Electronic part installation
Control the tension of gold wire for
bonding electronic parts.
Application
06
Air consumption
monitoring
Monitor air consumption of devices.
5
MF01 – 005 – 010 – R6
MP – A26
MODEL
OPTION PARTS
PORT SIZE OUTPUT SPEC.
FLOW RATE
RANGE
R6: ø6 mm, for ow rate range
005, 010, 050, 100, 500.
R8: ø8 mm, for ow rate range
101, 201.
F1C: Rc1/8", with internal threads,
for ow rate range
005, 010, 050, 100, 500
F4C: Rc1/4", with internal threads,
for ow rate range 101, 201
010: 2 NPN output +
Analog output 1 ~ 5 V
011: 2 NPN output +
Analog output 4 ~ 20 mA
02 : 2 NPN output + RS485
030: 2 PNP output +
Analog output 1 ~ 5 V
031: 2 PNP output +
Analog output 4 ~ 20 mA
04 : 2 PNP output + RS485
005: 500 (ml/min)
010: 1000 (ml/min)
050: 5 (l/min)
100: 10 (l/min)
500: 50 (l/min)
101: 100 (l/min)
201: 200 (l/min)
Thermal mass wo sensor principles
Order example
Mounting accessories
Symmetric
temperature prole
(a) No ow
In the absence of ow, the heat
from the heater spreads evenly
left and right, so the temperature
distribution is like (a).
(b) Small ow
When ow begins, the inlet side
is cooled by the ow, the outlet
side is warmed by the heat of the
inlet side of the heater, and the
temperature distribution is like (b).
(c) Large ow
When the ow increases, it
becomes a distribution like (C).
Since the temperature distribution
before and after the heater is
proportional to the ow rate, the
ow rate can be determined from
the ratio.
Temperature
Sensor 1
Temperature
Sensor 1
Temperature
Sensor 1
Temperature
Sensor 2
Temperature
Sensor 2
Temperature
Sensor 2
Heating
Element
Heating
Element
Heating
Element
Skewed
temperature prole
Small Flow
Skewed
temperature prole
Large Flow
MODEL
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Thermal mass ow sensor principles / Order example
A26: Mounting bracket (BT-26)
B4: Panel adapter (PA-G)
C4: Panel adapter + Front protective lid (PA-H)
A26 B4 C4
6
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Specications
Model 005 010 050 100 500 101 201
Fluid Dry air, N2, Non-corrosive / Non-ammable gas
Measured ow rate range 0 ~ 500 mL/min 0 ~ 1000 mL/min 0 ~ 5 L/min 0 ~ 10 L/min 0 ~ 50 L/min 0 ~ 100 L/min 0 ~ 200 L/min
Flow direction Unidirection
Display
Display 4 digital (Flow) × 8 digital (Accumulated ow), 7 segment LCD display ( Red / Green / Orange )
Instant ow
rate
Display range 0 ~ 525 mL/min 0 ~ 1050 mL/min 0 ~ 5.25 L/min 0 ~ 10.50 L/min 0 ~ 52.5 L/min 0 ~ 105.0 L/min 0 ~ 210 L/min
Min. setting
scale
LPM 1 mL/min 0.01 L/min 0.1 L/min 1 L/min
CFM *1 0.01 ft3/min 0.1 ft3/min 1 ft3/min
Accumulated
Flow
Display range 99999999 mL 999999.99 L 9999999.9 L 99999999 L
Min. Setting Scale *1 1 mL 0.01 L 0.1 L 1 L
0.01 ft30.1 ft31 ft3
Accuracy
Guaranteed range 2 ~ 100 % F.S.
Indicator accuracy ± 3 % F.S. ± 1 digit *2
Analog output accuracy ± 5 % F.S. *2
Repeatability ± 1 % F.S. ± 1 digit *3
Linearity ± 3 % F.S. *3
Temp. characteristic ± 2 % F.S. ( 15 ~ 35 °C ) ; ± 5 % F.S. ( 0 ~ 15°C, 35~ 50°C ) ( compare with *3 )
Pressure characteristic ± 5 % F.S. ± 1 digit *4
Switch output
Switch output
2 NPN : open collector 2 outputs
Max. Load Current : 125 mA
Max. Supply Voltage : 28 V DC
Voltage Drop : ≤ 1.5 V
2 PNP : open collector 2 outputs
Max. Load Current : 125 mA
Max. Supply Voltage : 24 V DC
Voltage Drop : ≤ 1.5 V
Response time 800 ms ( 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 1500 ms selectable )
Output mode Hysteresis Mode, Window Comparator Mode, Accumulated Output, Accumulated Pulse Output
Hysteresis Adjustable
Output short circuit proterction Yes
Accumulated pulse output *1 5 mL/Pulse 10 mL/Pulse 0.05 L/Pulse 0.1 L/Pulse 0.5 L/Pulse 1 L/Pulse 2 L/Pulse
0.02 ft3/Pulse 0.04 ft3/Pulse 0.2 ft3/Pulse 0.4 ft3/Pulse 2 ft3/Pulse 4 ft3/Pulse 7 ft3/Pulse
Analog
output
Voltage output Voltage output range : 1 ~ 5 V ; Output impedance : 1 KΩ
Current output Current output range : 4 ~ 20 mA ; Load impedance : ≤ 300 Ω
Response time ≤ 100 ms
External input Non-voltage input, < 0.4 V, ≥ 30 ms
Communication interface RS-485 *5
Power supply voltage 12 ~ 24 V DC ± 10 %, Ripple ( P-P ) ≤ 10 %
Current consumption ≤ 50 mA
Environment
Working pressure range -0.09 ~ 0.8 MPa
Withstand pressure 1 MPa
Enclosure IP40
Working Fluid Temp. 0 ~ 50°C ( No condensation or freezing )
Ambient Temp. Range Operation : 0 ~ 50°C ; Storage : -10 ~ 60°C ( No condensation or freezing )
Ambient Humidity Range Operation / Storage : 35 ~ 85 % R.H. ( No condensation )
Insulation Resistance ≥ 50 MΩ ( 500 V DC, between case and lead wire )
Withstand Voltage 1000 V AC in 1-min ( between case and lead wire )
Vibration Total amplitude 1.5 mm or 10 G, 10 Hz ~ 55 Hz ~ 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z
Shock 100 m/s² ( 10 G ), 3 times each in direction of X, Y and Z
EMC IEC 61000-6-2, IEC 61000-6-4
Lead wire ø4 Oil-resistance cable (PVC) - 26 AWG ( 0.15 mm2 ) - 6 cores
Port
Size
R6, F1C
R8, F4C
Weight (with 2 meter lead wire) Approx. 109.3 g ( ø6 port ) ; Approx. 112.7 g ( ø8 port ); Approx. 118 g (Rc1/4 port); Approx. 128.5 g (Rc1/8 port)
*1. CFM ( ft3/min*10-2 ) and ft3*10-2.
*2. Condition: Inlet pressure: 300 kPa , Outlet pressure: 1 atmospheric pressure, 25 °C.
*3. Condition: Outlet pressure: 1 atmospheric pressure, 25 °C.
*4. -0.09 ~ 0.8 MPa, Outlet pressure: 1 atmospheric pressure, 25 °C.
*5. This function only available for Output Specication -02 and -04.
Specications
7
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Output type
Normal open mode
● Hysteresis Mode
FH-1
(FH-2)
FH-1
(FH-2)
FH-1
(FH-2)
FH-1
(FH-2)
FL-1
(FL-2)
FL-1
(FL-2)
AdH1
AdL1
AdH2
AdL2
AdH1
AdL1
AdH2
AdL2
FL-1
(FL-2)
FL-1
(FL-2)
ON
ON
ON
ON
ON
ON
ON
OFF
OFF
OFF
OFF
OFF
0 L 0 L Time
HysHys
50ms
HysHys
Time
OFF
OFF
FlowFlowFlow
FlowFlowFlow
● Window Comparator Mode
● Accumulated Output Mode ● Accumulated Output Mode
● Accumulated Pulse Output Mode
● Window Comparator Mode
● Hysteresis Mode
Normal close mode
NOTE
*1. In case hysteresis is set at less than or equal to 2 digits, switch output may chatter if input
detected uctuates near the set point.
*2. When using window comparator mode, the difference between two set points must be greater
than the xed hysteresis, otherwise will cause the switch output to malfunction.
Flow Range 500mL 1000mL 5L 10L 50L 100L 200L
Pulse Output Rate 5mL 10mL 0.05L 0.1L 0.5L 1L 2L
Time
8
DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )
MF01 Pressure loss characteristics
Pressure loss (kPa)
Flow rate (mL/min)
100 200 300 400 500
0.006
0.005
0.004
0.003
0.002
0.001
0
0.1 MPa
0.2
0.3
0.35
0.4
0.5
Pressure loss (kPa)
Flow rate (mL/min)
200 400 600 800 1000
0.018
0.015
0.012
0.009
0.006
0.003
0
0.1 MPa
0.2
0.3 / 0.35 / 0.4
0.5
Pressure loss (kPa)
Flow rate (L/min)
1 2 3 4 5
0.08
0.07
0.06
0.05
0.04
0.03
0.02
0.01
0
0.1 MPa
0.2
0.3
0.35
0.4
0.5
Pressure loss (kPa)
Flow rate (L/min)
10 20 30 40 50
5
4
3
2
1
0
0.1 MPa
0.2
0.3
0.35
0.4
0.5
Pressure loss (kPa)
Flow rate (L/min)
50 100 150 200
20
16
12
8
4
0
0.3 MPa
0.35
0.4
0.5
Pressure loss (kPa)
Flow rate (L/min)
2 4 6 8 10
0.25
0.20
0.15
0.10
0.05
0
0.1 MPa
0.2
0.3
0.35
0.4
0.5
Pressure loss (kPa)
Flow rate (L/min)
20 40 60 80 100
12
10
8
6
4
2
0
0.2 MPa
0.3
0.35
0.4
0.5
MF01-005 MF01-010
MF01-050
MF01-500
MF01-500
MF01-100
MF01-101
Dieses Handbuch passt für folgende Modelle
7
Inhaltsverzeichnis
Andere Mindman Zubehör Handbücher
