MKS HPQ3 Bedienungsanleitung

HPQ3 (S)

Hardware Manual

HPQ3 Hardware Manual –SP101019.101

October2012

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

As part of our continuous product improvement policy, we are always pleased to receive your comments

and suggestions about how we should develop our product range. We believe that the manual is an

important part of the product and would welcome your feedback, particularly relating to any omissions or

inaccuracies you may discover.

You can send your comments to:-

MKS Instruments UK Ltd - Spectra Products

Cowley Way

Weston Road

Crewe

Cheshire

CW1 6AG

U.K.

+44 (0)1270 250150 Tel. International

+44 (0)1270 251939 Fax. International

Email: manual_info@mksinst.com

MKS Products provided subject to the US Export Regulations.

Diversion or transfer contrary to U.S. law is prohibited.

HPQ3 is a registered trademark of MKS Instruments UK Limited.

Conflat® is a registered trademark of Varian Associates.

Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.

Windows® is a trademark of the Microsoft Corporation.

All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully

recognised.

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

Table of Contents

Overview 7

1. Specifications 9

1.1 Mechanical 9

HPQ3 9

24VDC Power Supply 9

Analyser 9

1.2 Electrical 10

Power Supply 11

1.3 Environmental 11

Temperature range 11

1.4 Safety 11

1.5 Connectors 11

1.6 Warning labels 12

1.7 Ventilation 12

2. Rear Panel Connections 17

2.1 X-Trip 18

2.2 Audio Socket 18

2.3 Emission Indicator 19

2.4 Multiplier Indicator –N/A 19

2.5 Power Indicator 19

2.6 Gauge Connector 20

2.7 Power 20

2.8 Analogue I/O Connector 21

2.9 Digital I/O Connector 22

2.10 Ethernet 24

3. Analyser Installation 25

3.1 Unpacking 25

3.2 Inspecting the analyser 25

3.3 Installing the analyser 27

3.4 Checking the system pressure 27

3.5 Mounting the analyser 29

4. HPQ3 Installation 30

4.1 Installation 30

4.2 Electrical connections 30

5. Connecting to the Ethernet Port 32

5.1 Adding the HPQ3 33

5.2 Directly connecting to the HPQ3 35

5.3 Assigning a static IP Address 39

6. Baking 42

7. Analyser Maintenance 43

7.1 Overview 43

7.2 Ohmmeter analyser checks 44

7.3 Checking filaments 45

7.4.1 Removing the filaments 47

7.4.2 Fitting filaments 51

7.5 Ion Source cleaning 52

7.5.1 Cleaning while fitted to the analyser

7.5.2 Removing the ion-source to clean or

replace 53

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

8. Exploded Views 56

Analyser pin-outs 56

9. Spare Parts 58

Filaments 58

Complete Ion-source 58

10. Returning Your Unit for Service 59

Support Contact Numbers 59

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

MKS Instruments UK Ltd

3 –4 Cowley Way

Crewe

Cheshire

CW16AG

United Kingdom

EC Declaration of Conformity

MKS Instruments UK Ltd declares that the:

HPQ3 RGA (MKS114) control electronics package

Is in accordance with the following directives:

I hereby declare that the equipment named above has been designed to comply with the relevant

sections of the above referenced specifications. The unit complies with all essential requirements

of the Directives.

2004/108/EEC Electromagnetic Compatibility Directive

EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.

2006/95/EC Low Voltage Directive

EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control &

laboratory use.

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

Signed:

J.M.Higgins

General Manager

10th October 2009

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

Overview

The HPQ3 is the latest innovation in RGA technology from MKS Instruments allowing operation far

beyond the 1e-4mbar of conventional RGA’s without the need for differential pumping.

The field proven analyser technology of the HPQ analyser coupled with the latest innovative

electronics technology derived from the Microvision2 family give data quality not previously seen in

this class of instrument. The resulting system is less complex, with reduced installation

requirements, offering a higher level of reliability at a substantially lower cost.

In addition, the HPQ3S uses application validated correction algorithms to compensate for the

sensitivity variation arising from ion-molecule interactions in the ion source at higher pressures.

This allows reliable data to be obtained for specific gas species including water, oxygen, nitrogen,

methane, helium and hydrogen in argon and other gas mixtures.

Features

Data acquisition through solid state, wide dynamic range, fast settling detector electronics.

Temperature stabilized critical components offering improved signal stability and drift.

Calibrations and configurations stored locally within the RGA.

Flexible I/O capability including a dedicated gauge port.

Further expandability of the I/O capabilities using add-in cards.

TCP/IP and ASCII protocol support

Operation

The HPQ3 is designed to be operated in several ways:

From a host computer –an IBM compatible PC or MAC running the MKS Process Eye

Professional or EasyView software package.

PC or MAC using a web browser such as Internet Explorer or Safari.

Integration into existing systems controlling through the use of the ASCII protocol command set.

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

This manual focuses on HPQ3hardware and should be used in conjunction with the relevant user

interface manual during installation.

Any required network communications cards should be installed and configured prior to installing

the HPQ3, or RGA software if supplied.

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

1. Specifications

1.1 Mechanical

HPQ3

Dimensions:

127mm wide x 127mm x 179mm deep, plus 46mm over analyser connector to face of CF flange.

Weight:

1.7 kg

24VDC Power Supply

Dimensions:

75mm wide x 45mm high x 146mm deep plus 30mm over strain relief.

Weight:

0.6 kg

Analyser

Max. Operating pressure

HPQ3 1e-3 Torr (1.3e-3 mbar)

HPQ3S 8e-3 Torr (1e-2 mbar) –Application

dependant

Maximum transient burst pressure

4e-2 Torr (5e-2 mbar) –gas dependant

MKS Instruments UK Ltd

HPQ3 Hardware Manual –SP101019.101 October 2012

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