MKS Microvision2 Bedienungsanleitung

Microvision2

Hardware Manual

Microvision2 Hardware Manual - SP101015.102

August 2010

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

As part of our continuous product improvement policy, we are always pleased to receive your comments

and suggestions about how we should develop our product range. We believe that the manual is an

important part of the product and would welcome your feedback, particularly relating to any omissions or

inaccuracies you may discover.

You can send your comments to:-

MKS Instruments UK Ltd - Spectra Products

Cowley Way

Weston Road

Crewe

Cheshire

CW1 6AG

U.K.

+44 (0)1270 250150 Tel. International

+44 (0)1270 251939 Fax. International

Email: manual_inf[email protected]

Microvision2 is a registered trademark of MKS Instruments UK Limited.

Conflat® is a registered trademark of Varian Associates.

Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.

Windows® is a trademark of the Microsoft Corporation.

All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully

recognised.

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

Table of Contents

Overview 5

1. Specifications 6

1.1 Mechanical 6

Microvision2 6

24VDC Power Supply 6

Analyser 6

1.2 Electrical 6

1.2 Electrical 7

Power Supply 7

1.3 Environmental 7

Temperature range 7

1.4 Safety 7

1.5 Connectors 7

1.6 Warning labels 8

1.7 Ventilation 8

4. Rear Panel Connections 11

4.1 X-Trip 11

4.2 Audio Socket 12

4.3 Emission Indicator 12

4.4 Multiplier Indicator 12

4.5 Power Indicator 12

4.6 Gauge Connector 13

4.7 Power 13

4.8 Analogue I/O Connector 14

4.9 Digital I/O Connector 15

4.10 Ethernet 16

4.11 External Multiplier Protection 16

5. Analyser Installation 17

5.1 Unpacking 17

5.2 Inspecting the analyser 17

5.3 Installing the analyser 18

5.4 Checking the system pressure 18

5.5 Mounting the analyser 19

6. Microvision2 Installation 20

6.1 Installation 20

6.2 Electrical connections 20

7. Connecting to the Ethernet Port 21

7.1 Adding the Microvision2 22

7.2 Directly connecting to the Microvision2 23

7.3 Assigning a static IP Address 26

8. Baking 28

9. Analyser Maintenance 29

9.1 Overview 29

9.2 Ohmmeter analyser checks 30

9.3 Checking filaments 31

9.4 Changing filaments 32

9.4.1 Removing the filaments 32

Open ion source 32

9.4.2 Fitting filaments 34

Open ion source 34

9.4.3 Removing the filaments 35

PVD / CVD ion source 35

9.4.4 Fitting filaments 37

PVD / CVD ion source 37

9.5 Ion Source cleaning 38

9.5.1 Cleaning while fitted to the analyser

9.5.2 Removing to clean or replace 39

Open Ion source 39

9.5.3 Refitting the open ion source 41

9.5.4 Removing to clean or replace 42

PVD / CVD Ion source 42

9.5.5 Refitting the PVD / CVD ion source 44

Analyser pin-outs 45

11. Spare Parts 46

Filaments 46

Ion source 46

Support Contact Numbers 47

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

MKS Instruments UK Ltd

3 – 4 Cowley Way

Crewe

Cheshire

CW16AG

United Kingdom

EC Declaration of Conformity

MKS Instruments UK Ltd declares that the:

Microvision2 RGA control electronics package

Is in accordance with the following directives:

I hereby declare that the equipment named above has been designed to comply with the relevant sections

of the above referenced specifications. The unit complies with all essential requirements of the Directives.

Signed:

J.M.Higgins

General Manager

10th October 2009

2004/108/EEC Electromagnetic Compatibility Directive

EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.

2006/95/EC Low Voltage Directive

EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control & laboratory use.

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

Overview

The Microvision2 is the latest innovation in RGA technology from MKS Instruments. Designed to meet all the

traditional requirements for an RGA sensor, plus data collection speeds in the milliseconds, even over the

full dynamic range - unachievable with previous technologies.

The Microvision2 is formed around two dedicated processors; an optimized, proprietary processor for data

acquisition and an industry standard CE processor handling external communications via TCP/IP

technology.

Analogue and digital interfaces are provided for integrated systems and future technologies.

Features

Data acquisition through solid state, wide dynamic range, fast settling detector electronics.

Temperature stabilized critical components offering improved signal stability and drift.

Calibrations and configurations stored locally within the RGA.

Flexible I/O capability including a dedicated gauge port.

Further expandability of the I/O capabilities using add-in cards.

TCP/IP and ASCII protocol support

Operation

The Microvision2 is designed to be operated in several ways:

From a host computer – an IBM compatible PC or MAC running the MKS Process Eye Professional or

EasyView software package.

PC or MAC using a web browser such as Internet Explorer or Safari.

Integration into existing systems controlling through the use of the ASCII protocol command set.

This manual focuses on Microvision2 hardware and should be used in conjunction with the relevant user

interface manual during installation.

Any required network communications cards should be installed and configured prior to installing the

Microvision2, or RGA software if supplied.

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

1. Specifications

1.1 Mechanical

Microvision2

Dimensions:

127mm wide x 127mm x 179mm deep, plus 46mm over analyser connector to face of CF flange.

Weight:

1.7 kg

24VDC Power Supply

Dimensions:

75mm wide x 45mm high x 146mm deep plus 30mm over strain relief.

Weight:

0.6 kg

Analyser

Max. Operating pressure

7.6x10-5 (1x10-4 mbar)

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

1.2 Electrical

Power Supply

100 to 120, 200 to 240 VAC rms 47- 63Hz @ 2.1A rms

Installation category (over voltage category) II to IEC664

Fuses Internal, not user replaceable

Insulation Class I to IEC536

1.3 Environmental

Temperature range

0 to 400C, 80%RH non-condensing, operating and storage

Pollution degree 2 to EN61010

Enclosure IP20 to EN60529

1.4 Safety

IP20 to EN60529

The protective earth conductor of the power cord must be connected to the power source protective earth

terminal.

There are no operator replaceable parts within the 24VDC power supply unit or the Microvision2 unit.

1.5 Connectors

The connectors for external circuits are for use only with MKS equipment, or equipment which has no

accessible hazardous live parts.

The external circuits must comply with the requirements of EN61010-1 section 6.6.1.

Ports for connection of accessories do not carry hazardous potentials.

Do not position the 24VDC power supply so that it is difficult to unplug the supply power cord.

Installation Category II comprises mains powered, local level appliances.

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

1.6 Warning labels

Refer to:

a. Accessible hazardous voltages on analyser connector, when not mated to the analyser, which may result

in a non-hazardous electric stock if touched.

b. Tuning adjustment holes, which are not for operator use.

On the rear panel refers to:

a. Read all instructions carefully before use.

b. The control unit and signal ports are designed for connection to MKS accessories via MKS supplied

cables.

There are no accessible hazardous voltages or currents on these ports.

MKS must be consulted before any non-MKS supplied cables or accessories are connected to these ports.

1.7 Ventilation

The openings in the sides and rear panels must not be obstructed.

Allow a minimum clearance of 50mm all round.

Do not exceed the maximum operating ambient temperature.

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

Additional Installation Maintenance and Operating Instructions

In order to comply with European regulations, the following procedures must be followed:

A) INSTALLATION

1. The installation procedures given in the operating and technical manuals must be followed in addition to

these instructions.

2. The mains power cable must conform to local regulations and must have a protective earth (PE)

conductor securely connected to the power plug protective earth contact.

3. The short earthing braid supplied with some products, must be fitted between the terminal on the RF

head and one of the CF40 vacuum flange bolts.

4. Only cables supplied with the equipment may be used for interconnections. If extension cables are

required to obtain a greater separation between control unit and RF head, or if longer serial

communications cables are required, they must be supplied by MKS Instruments Ltd.

5. Cables attached to all other ancillary signal and control ports must have a length of less than 3 meters. If

greater length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible

EMC and safety issues.

6. The vacuum system on which the analyser/RF head is mounted must be earthed, to a protective earth,

preferably to the same protective earth as the control unit.

B) OPERATION

1. The equipment is not authorised for use as a critical component in a life support or safety critical system

without the express written approval of MKS Instruments Ltd.

2. All instructions given in the operating manual must be followed.

3. Adjustments are strictly limited to those accessible from the control panel and computer keyboard and

only when running software supplied by MKS Instruments Ltd.

MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

C) MAINTENANCE

WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE

EQUIPMENT

1. Maintenance functions must only be carried out by competent persons.

2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products

Ltd., unless special arrangements are made.

3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and

safety critical and must not be substituted. Replacement parts are available from MKS Instruments UK Ltd.

4. Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and

safety performance. These must be correctly re-fitted after servicing.

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