Oxford Instruments OpAL Benutzerhandbuch

OpAL

OpenLoadAtomicLayerDepositionSystem

SystemManual

Works Order No.: 94-417919

Customer: Università di Pisa

Typical

OpAL system

WARNING

THIS SYSTEM INCORPORATES POTENTIALLY DANGEROUS COMPONENTS, WHICH CAN EXPOSE

PERSONNEL TO HAZARDS RESULTING IN DEATH OR SERIOUS INJURY.

BEFORE ATTEMPTING TO INSTALL, POWER UP OR OPERATE THIS SYSTEM, ENSURE YOU HAVE

READ AND UNDERSTOOD THE ENCLOSED SYSTEM MANUAL, ESPECIALLY SECTION 1 (HEALTH

AND SAFETY).

Issue 1: July 2010

OpAL

OpenLoadAtomicLayerDepositionSystem

SystemManual

Works Order No.: 94-417919

Customer:

Università di Pisa

Volume 1: Operation and Maintenance Manual

This manual, Volume 1, is one of a series for the machine as follows:

Volume 1 Operation and Maintenance Manual

Volume 2 System Drawings

Volume 3 OEM Manuals

Notes:

1. Please regard this manual as part of the system.

2. Ensure that any amendment received is incorporated in the text.

Oxford Instruments Plasma Technology

Yatton, Bristol, BS49 4AP

Tel: +44 1934 837000

Fax: +44 1934 837001

Issue 1: July 2010

OpAL OxfordInstrumentsPlasmaTechnology System Manual

Contents

Printed: 14 July 2010 08:52 Page (iii) Issue 1: July 2010

Contents

Title and inside front cover pages

Contents List.................................................................................................................(iii)

Preface..........................................................................................................................(iv)

Customer Support Facilities...........................................................................................(iv)

System Identification ......................................................................................................(v)

Quality Control Forms ...................................................................................................(vi)

Goods Return Form QCF 60

Certificate of Pre-Acceptance and Certificate of Acceptance QCF 61

System Readiness Form QCF 89

Declaration of Conformity QCF 185d

ASM Patent Rights

1. Health and Safety .................................................................................................. 1-1

2. Services (OpAL) ..................................................................................................... 2-1

3. Description ........................................................................................................... 3-1

4. Installation............................................................................................................ 4-1

5. Operating Instructions ......................................................................................... 5-1

6. Maintenance ......................................................................................................... 6-1

7. Troubleshooting ................................................................................................... 7-1

8. Process Guide and Glossary................................................................................... 8-1

9. Uninstallation and disposal ................................................................................... 9-1

Appendix A Measurement of radio frequency and microwave emissions

Appendix B Operation and maintenance of turbomolecular pumps

Appendix IDS Installation Data Sheets (OpAL)

Appendix PSP Precursor Source Pot

Appendix R Rotameter data

Appendix S Services Specifications for Plasmalab and Ionfab Systems

OIPT Automatch Unit Equipment Manual

Ozone Delivery System Equipment Manual

OpAL OxfordInstrumentsPlasmaTechnology System Manual

Preface

This manual is the OPERATION and MAINTENANCE MANUAL. It provides all the

information necessary for the operation and routine maintenance of the system. Certain

components within the system are supplied by other manufacturers. These components

have their separate manuals which are included, and should be referred to for detailed

operation, maintenance and repair information.

WARNING

SERVICE BY

QUALIFIED STAFF

ONLY

Refer to manual

Where this label is displayed (black text on a yellow

background), read the relevant manual before proceeding

to operate or maintain the labelled equipment.

CustomerSupportFacilities

Oxford Instruments Plasma Technology has global Customer Support Facilities to provide

a co-ordinated response to customer’s queries. All queries are recorded on our Support

Database and dealt with as quickly as possible. If we are not able to answer the query

immediately, we will contact you as soon as possible.

Before contacting a Customer Support Facility, please ensure that you have referred to the

appropriate section of your system manual, OEM manuals and electrical drawings.

Please direct all queries through your nearest support facility (see below) and have the

following details available.

System Type, e.g. OpAL etc.

Works Order No. – This can be found on the front cover of your system manual.

Contact Information – Your name, Company and how we can contact you.

Details of your query – nature of the problem, part numbers of spares required, etc.

You can contact us via any of the following:

China

Beijing

Tel: +86 106518 8160

Email: [email protected]

Shanghai

Tel: +8621 6360 8530

Email: [email protected]

Germany

Tel: +49 6122 937 161

Email: [email protected]

Japan

Tel: +81 3 5245 3591

Email: [email protected]

Singapore

Tel: +65 6337 6848

Email: [email protected]

Taiwan

Tel: +886 3 5788696

Email: [email protected]

Customer Support Hotline: +44(0) 1934 837070

(0800 – 2000 UK local time)

Fax: +44(0) 1934 837071

Email: [email protected]

USA

Oxford Instruments Inc.

300 Baker Avenue, Suite 150

Concord, MA 01742

Phone: +1 978-369-9933

Toll Free: +1 800-447-4717

Fax: +1 978-369-8287

Email: [email protected]

Preface

Printed: 14 July 2010 08:52 Page (iv) Issue 1: July 2010

OpAL OxfordInstrumentsPlasmaTechnology System Manual

SystemIdentification

This system, Works Order No. for Customer: ,is identified

by a label attached to the rear of the power box. An image of this label is shown below:

94-417919 Università di Pisa

NOTE: Refer to the label attached to the system power box for the measured maximum

rated input current value.

QualityControlforms

The following Quality Control Forms (QCF) are attached:

Goods Return Form QCF 60 – To be completed and attached to the outside of the

package of any returned parts.

Certificate of Pre-Acceptance and Certificate of Acceptance QCF 61 – To be completed

and returned if the customer is absent from acceptance.

System Readiness Form QCF 89 – To be completed and returned prior to the

commissioning visit.

Declaration of Conformity QCF 185d - CE Certificate.

Preface

Printed: 14 July 2010 08:52 Page (v) Issue 1: July 2010

QCF 60 Issue 5 15/06/07

Environmental Agency Producer

Registration Number for WEEE:

WEE/AE0116XU

Returns No :

GOODSRETURNFORM

• This form must be completed and a copy sent to Oxford Plasma Technology Service Department by fax or

mail before return of any goods to the factory. (Fax No : + 44 (0) 1934 837071)

• If return to the factory is approved a Returns Authorisation Number will be issued. This should be written in the box

provided on this form and the completed form returned with the goods as part of the shipping documentation. It

must be possible to read this form without opening the packaging containing the goods, therefore the

form should not be enclosed within the packaging but affixed to the container.

• Once the Returns Authorisation Number is issued goods should be returned within one month.

OIPT reserve the right to invoice the full value of parts if not returned.

• All sections below must be completed. If any section does not apply, mark that section "not

applicable". If the information requested is not known, mark that section "not known".

• Any goods returned to the factory without a copy of this form carrying a Returns Authorisation Number

will be considered hazardous and may be disposed of at the sender's expense. Mark the returns number

on all packages and supporting shipping documentation.

Equipment description.

Serial number or identifying marking

Original OIPT order No :

Date of order :

Reason for return of part/s.

Description of fault/s.

Chemical names of all materials which have come into

contact with the goods.

Precautions which must be taken when handling these

materials.

Nature of hazard(s) presented by contact with these

materials.

Action to be taken in the event of human contact or

spillage of these materials.

Details of any decontamination carried out prior to

shipping

Levels of residual substances left in or on the returned

goods.

Name and address of person to be contacted in case of

query.

Tel No : Ext :

Fax No :

Declaration

Please strike through the section a) or b) which does not apply and sign the declaration.

a) I hereby confirm that the equipment detailed above has not come into contact with any hazardous substance

and has been drained of any lubricant.

b) I hereby confirm that the only hazardous materials to which the equipment detailed above has been exposed

are listed above and that the following precautions have been taken.

1. The equipment has been drained of any lubricant

2. All ports have been sealed and the equipment has been securely packed and labelled in accordance with

Oxford Instruments Plasma Technology recommendations (available on request)

3. The carrier has been informed of the nature of the consignment.

Signed. . . . . . . . . . . . . . . . . . . . . . . . . . . . Date. . . . . . . . . . . . . . . . . . . . . . . . . . . .

Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . Position. . . . . . . . . . . . . . . . . . . . . . . . . .

QCF 61 Issue 8

Date: 15/06/07

Oxford Instruments Plasma Technology

North End, Yatton Sheet 1/2

Bristol, BS49 4AP

England.

Telephone : +44 (0) 1934 837000

Fax: +44 (0) 1934 837001

E mail: [email protected]

Environmental Agency Registration Number for WEEE: WEE/AE0116XU

CERTIFICATEOF PRE-ACCEPTANCE

This form is to be completed in accordance with the guidelines stated in QCF 61a.

The above equipment has been examined / tested in my presence, at Oxford Plasma Technology. The

following list defines items that need to be actioned prior to final acceptance being given.

Brief description of the system:

Customer

Project number:

Equipment serial number/s:

Accepted by: Representative of the end user.

Signature: Date: / / 0

Witnessed by: Oxford Instruments Plasma Technology representative

Signature: Date: / / 0

OIPT circulation:

Service Manager

Design Manager

QCF 61 Issue 8

Date: 15/06/07

Oxford Instruments Plasma Technology Sheet 2/2

North End, Yatton

Bristol, BS49 4AP

England.

Telephone :+44 (0) 1934 837000

Fax: +44 (0) 1934 837001

E mail: [email protected]

Environmental Agency Registration Number for WEEE: WEE/AE0116XU

CERTIFICATEOFACCEPTANCE

Brief description of the system:

Pre-acceptance form completed at OIPT ? Yes / No

Customer:

Project number:

Equipment serial number/s:

The equipment supplied has been examined and tested as an assembled system in my presence,

and has given satisfactory results where shown. (Tick as appropriate)

Operational Process

I am satisfied with the results that this system has produced and I accept that the technical

specifications have been achieved.

Comments:-

Accepted by: Representative of the end user.

Signature: Date: / / 0

Please ask our representative for a copy of our Customer feedback form, in order that you may record

your opinions of the service given by Oxford Plasma Technology Ltd.

Witnessed by: Oxford Instruments Plasma Technology representative

Signature: Date: / / 0

OIPT circulation:

Service Manager

Design Manager

Environmental Agency Producers Registration Number for WEEE: WEE/AE0116XU

Page 9 of 13

QCF89 issue 8

09/11/07

This form is provided in order for us to record the level of wo

The system should be installed, within the parameters listed be

signifies that you have completed the insta

Installation Data Document (Appendix IDS in

documents.

Should this form be received, an engineer

the right to

SYSTEM READINESS FORM

rk that you have conducted, to support the installation of your new Oxford Instruments system.

low and the form returned to your supporting Oxford Instruments office. Returning this form

llation of the system, in accordance with the Services Specifications (Appendix S in this System Manual) the

this System Manual) and that the installation conforms with all of the requirements listed within these

dispatched to start commissioning and any of the facilities requirements not be met, Oxford Instruments reserves

terminate that commissioning visit and charge the customer for a return visit, once the facilities have been fully completed.

Company Name :

Company Contact Name:

System Serial

Number :

System Type:

Please tick appropriate box YES NO Detail

1. Has the system been sited ? Attach site plan if available.

2. Has the system been installed in a clean room ?

3. Are there any special requirements for gaining access into the clean room

? ie. clearance, training, citizenship etc.. If so please list below.

4. Have pumps been sited and the cables between each pump and system

power box been connected?

5. Has the gas pod been sited, connected to the system and connected in to

the appropriate gas delivery and exhaust extraction systems, in accordance

with local safety regulations?

6. If the system has a heater chiller, has this been sited, connected to the

lower electrode cooling circuit and filled with Hexid A40?

7. Has AC power been connected to the system? Measure the voltages

between each phase and neutral.

Phase 1 to

Neutral

Phase 2 to

Neutral

Phase 3 to

Neutral

8. Has compressed air been connected to the system? Inlet pressure must

be 6 Bar (90PSI). Note Pressure.

Compressed Air Inlet Pressure

9. Has cooling water been connected to the system? Differential pressure Inlet Water Outlet Water

Environmental Agency Producers Registration Number for WEEE: WEE/AE0116XU

Page 10 of 13

QCF89 issue 8

09/11/07

between inlet and outlet must be 3 - 4 Bar (45 – 60PSI). Water supply

should be connected to each inlet/outlet on the system in parallel and not

series. Note Inlet and Outlet Pressure.

Pressure Pressure

10. Has N2 vent been connected to the system? Inlet must be able to

maintain a pressure of 3 Bar (45psig). Note Pressure.

Vent Nitrogen Inlet Pressure

11. Has N2 purge been connected to the system? Inlet must be able to

maintain a pressure of 3 Bar (45psig). Note Pressure.

Purge Nitrogen Inlet Pressure

12. If the system is configured with cryogenic cooling, is an LN2 Dewar,

filled with LN2 available? Is the Dewar connected to the system via 3/8”

Swagelock connections and is the pipe work adequately insulated to prevent

a safety hazard?

Is the pipe work adequately

insulated to prevent a safety

hazard?

13. Have all of the gas pod connections been made to the appropriate gas

supply or system connection. Have they been leak checked?

14. All process gasses should be available for the system

commissioning. Please verify that each gas, as it is laid out

Name

of Gas

Inlet

Pressure

Heated? Leak

Rate

Name

of Gas

Inlet

Pressure

Heated? Leak

Rate

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