Ulvac G-5DA Bedienungsanleitung
No．P8129-2-02-13
Instruction Manual
for
Direct-Drive Oil Sealed Rotary Vacuum Pump
Model
G-5DA,G-10DA
Before using the product, be sure to read this manual.
Keep this manual in a place where it can be referred to
at any time and look after it carefully.
The contents of this instruction manual are subject to
change without prior notice due to improvements in
performance and the functions of the product.
ULVAC KIKO,Inc.
1
０．Preface
0.1 Before using this pump
We, ULVAC KIKO,Inc. thank you for purchasing our vacuum pump. When receiving
our vacuum pump, please confirm the product is the same Model No. as you ordered.
Also, check to make sure there are no damages.
To ensure a long life for this pump, read this manual carefully prior to
installation, operation, and maintenance. Also, pay attention to
ascertain the details of safety, specification, and operational
precautions of this pump.
Copyright by ULVAC KIKO,Inc. All right reserved. All material in this
manual shall not be copied without permission by ULVAC KIKO ,Inc. Printed
in JAPAN.
2
0.2 Safety precautions (General expression)
Safety precautions are identified in this manual using headers DANGER, WARNING,
CAUTION, and NOTE.
"Danger" Indicates major hazardous situations, which present an immediate
threat of death or serious injury.
"Warning" Indicates hazardous situations, which may present a potential
to death or serious injury.
"Caution" Indicates hazardous situations where a potential hazard or
unsafe practice could cause personal injury or equipment damage.
"Note" Indicates undesirable situations where a potential hazard could
cause equipment damage or abnormal operation.
3
0.3 Safety precautions
When evacuating toxic or inflammable gas, there may be danger of leaking
gas from parts besides inlet port. Practice cautionary steps when working
any kind of gases.
After evacuating toxic gases, the inside of pump and pump oil is
contaminated and toxic. Therefore, handle pump with care during
maintenance.
Do not overhaul or repair this pump.0nly authorized maintenance personnel
should handle this pump to avoid ignition, abnormal action, and electric
shock.
Switch off power before checking or repairing the pump to avoid any
problems (electric shock or personal injury) caused by suddenly starting
up.
Connect an electrical wire cord to ground potential terminal tightly to
avoid electric shock caused by mechanical trouble or electrical leakage.
Do not plug exhaust port or place any materials inside of exhaust port,
because it will reduce pumping speed during operation. Pump explosion,
oil level gauge bursting, or motor over loading are consequences of
excessive pressure inside the pump. This pump is not a compressor. The
maximum pressure inside this pump is 0.03 MPa (GAUGE).
4
Do not use this pump in an explosive or flammable atmosphere. It may cause
personal injuries or fires.
Do not insert objects, fingers, or another pump body parts into the inlet
port. It may cause electric shock, personal injuries, or fires.
Do not touch the motor body, shaft, or shaft coupling joint during
operation. It may cause personal injuries.
Do not place flammable objects around the pump. It may cause fires. Also,
do not place obstacles around the pump so as to obstruct cooling air.
Abnormal temperature rising may cause burns or fires.
Do not touch the motor while the pump is in operation or when the pump
is still hot immediately after it stops. Touching it will result in burns.
Electric wiring should be carried out in accordance with Electric
Regulation and Instructions. Miswriting may cause fires.
Switch off electric power right away in case of a malfunction to prevent
any troubles. In the case of a malfunction, contact your local agent or
ULVAC KIKO,Inc. Sales and Service Center immediately.
Do not start the pump without pump-oil. Failing to do so will lead to pump
destruction.
5
0.4 Acceptance and store of product
0.4.1 Acceptance of product
We delivered the pump with the utmost care. After unpacking, please check
up and confirm items as shown below，
(1) The pump is what you ordered.
(2) Spare parts (single use of pump oil, optional parts)
(3) Any damages during transportation.
(4) Any loose screws and nuts.
If you find any abnormal circumstances, please contact your local ULVAC
KIKO,Inc. Sales or Service Center.
0.4.2 Store of product, Installation, Operating condition
This pump is a type of precision equipment; therefore, it is necessary
to satisfy the following items for store product.
(1) Operational temperature and humidity : 7～40°C , 85 % RH >
(2) Installation place should be at an altitude no higher than 1000m above
sea levels for storing or operation.
(3) Required conditions while storing or operating
a. Do not use corrosive or explosive gases.
b. No areas with high moisture.
c. No areas with dust particles.
d. Use indoors only.
e. Do not pile up, or lay on its side.
f. Keep out of direct sun light.
g. Keep away from heat source.
Do not treat with force, or lay on its side. It may cause damage.
6
0.5 Protective precautions
・100 volt ,single phase,50/60 Hz motor is used for this pump.
・A built-in type thermal protector is equipped for the motor.
・Additional(leakage, etc)protectors are recommended.
Do not apply any voltages other than specifically rated for the motor of
this pump. The over-load protector does not operate normally,
consequently it may cause burning the motor or firing.
7
CONTENTS
0.Preface ・・・・・・・ 1
0.1 Before using this pump ・・・・・・・ 1
0.2 Safety precautions (General expression) ・・・・・・・ 2
0.3 Safety precautions ・・・・・・・ 3
0.4 Acceptance and store of product ・・・・・・・ 5
0.4.1 Acceptance of product ・・・・・・・ 5
0.4.2 Store of product, Installation, Operating condition
・・・・・・・ 5
0.5 Protective precautions ・・・・・・・ 6
1.For safety operation ・・・・・・・10
1.1 Hazardous of product and safety precautions ・・・・・・・10
1.1.1 DANGER Leakage of hazardous gases and materials ・・・・・・・10
1.1.2 WARNING Electric shock ・・・・・・・10
1.1.3 WARNING Warning explosion ・・・・・・・11
1.1.4 CAUTION High temperature ・・・・・・・11
1.2 Safety data sheet(SDS) ・・・・・・・12
2. General description of the pump ・・・・・・・13
2.1 Principal features ・・・・・・・13
2.2 Dimensional drawings ・・・・・・・14
3. Setting up ・・・・・・・15
3.1 Installation ・・・・・・・15
3.2 Oil charging ・・・・・・・15
3.3 Vacuum tubing ・・・・・・・17
3.4 Electric wiring ・・・・・・・17
3.5 Fluctuations in the power voltage and frequency ・・・・・・・18
8
4. Operational instructions ・・・・・・・20
4.1 Operational precautions ・・・・・・・20
4.2 Start up operation ・・・・・・・21
4.3 Shut down operation ・・・・・・・22
4.4 Start up procedures in cold climate ・・・・・・・22
4.5 Thermel protector ・・・・・・・23
4.6 Setup oil mist trap (option) ・・・・・・・23
4.7 The restriction in an operation of
oil mist trap (option) ・・・・・・・24
5. Specification ・・・・・・・25
5.1 Ultimate pressure ・・・・・・・25
5.2 Pumping speed ・・・・・・・25
5.3 Required electricity ・・・・・・・25
6. Maintenance, inspection, repair ・・・・・・・27
6.1 Maintenance ・・・・・・・27
6.2 Scheduled inspection ・・・・・・・27
6.3 Oil change ・・・・・・・29
6.4 Replacement of the coupling ・・・・・・・31
6.5 Trouble shooting list ・・・・・・・32
7. Product disposal ・・・・・・・34
8. Maintenance parts ・・・・・・・35
8.1 Maintenance parts list ・・・・・・・35
8.2 Disassembly drawing ・・・・・・・36
Warranty
Safety Data Sheet(SDS)
Check sheet for repair
Sales and Service Centers
9
DRAWING AND TABLE LIST
Fig-1 General assembly drawing of G-5DA ・・・・・・・14
Fig-2 General assembly drawing of G-10DA ・・・・・・・14
Fig-3 Oil charge to rotary vacuum pump ・・・・・・・16
Fig-4 Vacuum pumping system diagram ・・・・・・・17
Fig-5 Change region of the voltage and frequency ・・・・・・・18
Fig-6 Characteristics of vacuum pumping speed ・・・・・・・26
Fig-7 Characteristics of motor power ・・・・・・・26
Fig-8 Replacement of the coupling ・・・・・・・31
Fig-9 Disassembly drawing of G-5DA ・・・・・・・36
Fig-10 Disassembly drawing of G-10DA ・・・・・・・37
Table-1 Specification ・・・・・・・13
Table-2 Characteristics of the thermal protector ・・・・・・・23
Table-3 Scheduled inspection ・・・・・・・28
Table-4 Trouble shooting list ・・・・・・・32
Table-5 G-5DA Maintenance parts list ・・・・・・・35
Table-6 G-10DA Maintenance parts list ・・・・・・・35
Dieses Handbuch passt für folgende Modelle
1
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