Ulvac UTM1600 Series Bedienungsanleitung

Model

UTM1600 Series

UTM1200 Series

YK17-0012-101-00 (263-43467)

INSTRUCTION MANUAL

Turbo Molecular Pump

ULVAC, Inc.

Components Division

http://www.ulvac.co.jp/

Before using this product, be sure to read this operation manual.

Keep this manual with care to use at any time.

This page is intentionally left blank.

Introduction

Thank you for choosing the ULVAC Turbo Molecular Pump.

This instruction manual has been described for the customer who uses this product and the

technician who are trained by ULVAC.

Please read the instruction manual carefully before using turbo molecular pump, and save the

instruction manual for future reference.

Copyrights and Disclaimers

This document is copyrighted by ULVAC, Inc. Please refrain from reproducing or copying part or all

of this document without permission from ULVAC.

An original language of this manual is English. The manuals of the same model described in other

languages are the translations of the English manual.

In an effort to improve the product, this document may be revised in the future without notice.

Every effort has been made to prepare an accurate and complete manual, but if an error or omission

should be discovered, revisions might not be possible immediately.

ULVAC does not take responsibility for any effects that may result from the use of this manual.

Precautions for Safe Operation

The instruction manual's nomenclature for warnings and precautions complies with

the following safety warning symbols.

WARNING

CAUTION

NOTICE

WARNING

Turbo molecular pump repair and/or power supply repair can be very hazardous.

Only trained technicians who are authorized by ULVAC may do service of

products.

WARNING

Neither overhaul nor modify the pump proper and power supply unit without

admission. Doing so would impair safety of the pump proper, or cause injury by

electrical shock.

WARNING

Decisions on system compatibility should be made by the system designer or the person

deciding the specifications after conducting tests as necessary. The responsibility for

guaranteeing the expected performance and safety of the system lies with the person who

decides system compatibility.

Indicates a potentially hazardous situation which, if not avoided, could

result in serious injury or possibly death.

Indicates a potentially hazardous situation which, if not avoided, may

result in minor to moderate injury or equipment damage.

Emphasizes additional information that is provided to ensure the proper

use of this product.

iii

WARNING

Do not operate the turbo molecular pump until safety is confirmed.

・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown

torque should be generated when abnormality occurs in the pump by any chance. Incidental

accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by

insufficient method.

・Fix the pump to host equipment according to Section 5.1.2.2 and 5.1.2.3. The method to fix the

pump is different depending on the pump model and the size of inlet flange of the pump.

・Host equipment should be fixed to the floor so as not to move. Host equipment should be

designed to have enough margins in strength, in preparation for an emergency accident.

WARNING

Ensure that no oil mist or hazardous substances are present in process line as safe ducting

procedure when turbo molecular pump is installed to host equipment.

WARNING

Do not remove or do maintenance the turbo molecular pump, before safety has been

confirmed.

・Improper turbo molecular pump use may be hazardous to operator's health in applications not

recommended or approved by ULVAC. In the event removal of the turbo molecular pump from

an application is required, full protective measures including purging of the turbo molecular

pump with an inert gas and/or apparel are recommended when the turbo molecular pump has

been used in applications that required the use of corrosive, reactive, stimulative, or toxic

gasses.

・Please take an adequate safety precaution based on the result of risk assessment of

explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.

・Please execute the maintenance task of the turbo molecular pump after shutting power off by

following proper procedure and confirming that the rotor has stopped completely.

WARNING

If the equipment is used in a manner not specified by the manufacturer, the protection provided

by the equipment may be impaired.

WARNING

Pacemaker wearers must stay away.

・Pacemaker may malfunction when pacemaker wearers

approach the area whose magnitude of the magnetic field

is more than 5 gauss.

・The area filled with slanted lines in the drawing on the right

shows the area where the magnitude of the magnetic field

is beyond 5 gauss. Two-dot chain line indicates the limit

line of 5 gauss.

CAUTION

After having operated the turbo molecular pump for evacuation of corrosive gas, keep the

pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump

internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may

result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by

stopping the pump and dispersal of parts.

CAUTION

Avoid to install the pump at the following places.

(1) Place where the pump is inevitably exposed to significant vibration and impact.

(2) Unstable place.

(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.

The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/

impact to it during transportation. This pump is not an explosion-proof product. This pump is not

intended to be used in a potentially explosive atmosphere.

CAUTION

The pump surface may get hot, there are risk of burn.

Prevent the installation, operation, maintenance, and service personnel from contacting the

pump surface easily in all tasks that they are intended to perform.

CAUTION

The standard power input voltage is 200 to 240 VAC ± 10 %. Connection of the control system

to the incorrect input voltage can cause damage to the equipment. Supply the power via a circuit

breaker (rating 15 A). Please provide PE (Protective Earth) connection to the terminal of a "PE"

marked wire in final application. Please provide PE (Protective Earth) connection to the chassis of

pump in final application.

CAUTION

When pump is removed from a equipment, drain the water from water pipe during pump power

on and water valve open. If remained water leak from water pipe, pump body will be corroded.

After the water drained, shut water pipe by the cap which is attached at shipment.

CAUTION

This turbo molecular pump has the integrated power supply.

Do not separate the power supply from the pump, or the pump cannot be operated even if the

power supply is connected again.

CAUTION

The following "CAUTIONS" are to prevent operation anomalies.

○ Operating Precautions

(1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo

molecular pump is in operation.

(2) Protect the pump from any and all types of impact during operation. Impacts can also be

transmitted via the flange, so be careful of impacts near the pump as well.

(3) Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces

electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo

molecular pumping system ((1) pump, (2) cables, etc).

(4) This turbo molecular pump is not approved for use in applications exhausting process gas

containing gallium (Ga, e.g., triethyl gallium, etc.).

(5) Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical

components.

(6) Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or

fluorine.

(7) When using the variable speed function to change the pump rotation rate, use a rotation

rate that does not cause resonance with other devices installed at the site.

(8) Be careful to prevent a rapid pressure rise or air rush during operation.

NOTICE

Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without

fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump

would cause deterioration of adequate vacuuming performance.

When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum

pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G/

50 Hz max at the outlet connection port of the turbo molecular pump.)

This pump is a precision pump. To protect the pump from torsion due to external piping load,

use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.

vii

○Explanation of Label

(1) HOT SURFACE Label

Risk of burn. Keep off from touching surface of the

pump as it is heated.

(2) Pump Securement Label

If the pump is not secured properly, it could

become detached and cause injury or damage to

surrounding equipment. Be sure to secure the

pump according to Section 5.1.2 "Installation of

the Pump".

(3) Magnetic Field Label

Pacemaker may malfunction.

Pacemaker wearers must stay away.

Refer to WARNING of "Precautions for Safe

Operation" (P. iv) for 5 gauss lines.

(3) Remove Label

Do not remove cover, or else it may cause some

changes inside and it is failed.

(4) Cable Label

Be sure to use specified cable for this power

supply. If not, it may cause connector be broken

and power supply itself failed.

(5) Heavy Equipment Label

Be sure to lift by two or more people or use the

lifter or the crane etc. when lifting because this

product is a heavy lift.

(6) SECURITY Seal

This label certificates that the product was made

or maintained by ULVAC or by ULVAC authorized

facility. In case "this label is removed" or "there is

a mark showing once this label has been

removed", ULVAC warranty shall not be applied to

the product.

(7) Name Plate

viii

○Location of Label

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