Aerotech ECO165SL Series Bedienungsanleitung

Revision 2.01

ECO165SL Series Mechanical Bearing,

Ball-Screw Stage

HARDWAREMANUAL

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Table of Contents

ECO165SL Series Mechanical Bearing, Ball-Screw Stage 1

Table of Contents 3

List of Figures 4

List of Tables 5

EU Declaration of Incorporation 6

Safety Procedures and Warnings 7

Installation and Operation 8

Electrical Warnings 9

Motor-Related Warnings 10

Pinch Points 11

Handling and Storage 12

Chapter 1: Overview 15

1.1. Environmental Specifications 17

1.2. Accuracy and Temperature Effects 17

1.3. Basic Specifications 18

1.4. Vacuum Operation 20

Chapter 2: Installation 21

2.1. Dimensions 21

2.2. Securing the Stage to the Mounting Surface 24

2.3. Attaching the Payload to the Stage 25

Chapter 3: Electrical Installation 28

3.1. Motor and Feedback Connectors 29

3.2. Motor and Feedback Wiring 34

3.3. Motor and Feedback Specifications 36

3.4. Limits, Marker, and Machine Direction 40

3.5. Motor and Feedback Phasing 41

Chapter 4: Maintenance 43

4.1. Service and Inspection Schedule 43

4.2. Cleaning and Lubrication 44

4.3. Motor Mounting 48

4.4. Belt Adjustment 51

4.5. Troubleshooting 54

Appendix A: Warranty and Field Service 55

Appendix B: Revision History 57

Index 59

ECO165SL Hardware Manual Table of Contents

www.aerotech.com 3

List of Figures

Figure 2-1: ECO165SL Dimensions 21

Figure 2-2: Tabletop Accessory Dimensions (-TT3 Option) 22

Figure 2-3: Z-Axis Bracket Dimensions 23

Figure 2-4: Stage Orientations 26

Figure 2-5: Cantilevered Load Capability 27

Figure 2-6: Load Torque Equation 27

Figure 2-7: Torque Required to Turn Ball Screw in Vertical Orientation 27

Figure 3-1: Brushless Motor and Feedback Wiring [-M1 through -M8 Options] 34

Figure 3-2: Stepper Motor and Feedback Wiring [-M9 and -M10 Options] 35

Figure 3-3: Machine Direction 40

Figure 3-4: Hall Phasing Diagram 41

Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) 42

Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) 42

Figure 4-1: Hardcover Screw Removal 46

Figure 4-2: Hardcover Removal 47

Figure 4-3: Motor Mounting Overview 48

Figure 4-4: Attach the Coupling Adapter to the Motor Shaft 49

Figure 4-5: Attach the Motor the Stage 49

Figure 4-6: Tighten the Shaft Coupling to the Drive Screw 50

Figure 4-7: Foldback Motor Cover Removal 52

Figure 4-8: Foldback Motor Part Callouts 53

Figure 4-9: Lubricate the Pulley Flanges 53

List of Figures ECO165SL Hardware Manual

4 www.aerotech.com

List of Tables

Table 1-1: Model Numbers and Ordering Options 15

Table 1-2: Environmental Specifications 17

Table 1-3: ECO165SL Series Specifications (-050 to -250) 18

Table 1-4: ECO165SL Series Specifications (-300 to -600) 19

Table 2-1: Stage Mounting Surface Flatness Requirement 24

Table 2-2: Stage to Mounting Surface Hardware 24

Table 3-1: Brushless Motor Connector Pinout [-M1 to -M8] 30

Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector 30

Table 3-3: Stepper Motor Connector Pinout [-M9 and -M10] 30

Table 3-4: Mating Connector Part Numbers for the Stepper Motor Connector 30

Table 3-5: Brushless Motor Feedback Connector Pinout [-M1 to -M8] 31

Table 3-6: Mating Connector Part Numbers for the Brushless Motor Feedback Connector 31

Table 3-7: Stepper Motor Feedback Connector Pinout [-M9 and -M10] 32

Table 3-8: Mating Connector Part Numbers for the Stepper Motor Feedback Connector 32

Table 3-9: Limit Connector Wiring 33

Table 3-10: Mating Connector Part Numbers for the Limit Connector 33

Table 3-11: Hall-Effect Sensor Specifications 36

Table 3-12: Thermistor Specifications (BMSMotor Options) 36

Table 3-13: Encoder Specifications 36

Table 3-14: Limit Switch Specifications 36

Table 3-15: Brake Specifications 36

Table 3-16: ECO165SL Motor Specifications (BMS100) 37

Table 3-17: ECO165SL Motor Specifications (BM130) 38

Table 3-18: ECO165SL Motor Specifications (SM100-VT2) 39

Table 3-19: Rotary Encoder Specifications for ECO165SLStages 39

Table 4-1: Hardware Requirements 48

ECO165SL Hardware Manual List of Tables

www.aerotech.com 5

EU Declaration of Incorporation

Manufacturer Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

herewith declares that the product:

ECO165SL Linear Stage

is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC

as amended;

and that the following harmonized European standards have been applied:

EN ISO 12100:2010

Safety of machinery - Basic concepts, general principles for design

EN 60204-1:2010

Safety of machinery - Electrical equipment of machines - Part 1:General

requirements

and further more declares that

it is not allowed to put the equipment into service until the machinery into which it is to

be incorporated or of which it is to be a component has been found and declared to

be in conformity with the provisions of the Directive 2006/42/EC and with national

implementing legislation, for example, as a whole, including the equipment referred

to in this Declaration.

This is to certify that the aforementioned product is in accordance with the applicable requirements of the

following directive(s):

2011/65/EU RoHS 2 Directive

EU 2015/863 Amendment RoHS 3 Directive

Authorized

Representative / Simon Smith, European Director

Aerotech Ltd

The Old Brick Kiln, Ramsdell, Tadley

Hampshire RG26 5PR

Engineer Verifying

Compliance / Alex Weibel

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

Date 4/14/2022

EU Declaration of Incorporation ECO165SL Hardware Manual

6 www.aerotech.com

Safety Procedures and Warnings

IMPORTANT: This manual tells you how to carefully and correctly use and operate the

stage.

lRead all parts of this manual before you install or operate the stage or before you do

maintenance to your system.

lTo prevent injury to you and damage to the equipment, obey the precautions in this

manual.

lAll specifications and illustrations are for reference only and were complete and

accurate as of the release of this manual. To find the newest information about this

product, refer to www.aerotech.com.

If you do not understand the information in this manual, contact Aerotech Global

Technical Support.

IMPORTANT: This product has been designed for light industrial manufacturing or

laboratory environments. If the product is used in a manner not specified by the

manufacturer:

lThe protection provided by the equipment could be impaired.

lThe life expectancy of the product could be decreased.

Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the

moment of the safety note or if you fail to obey the safety note.

Shock/Electrocution Hazard Pinch, Shear, or Crush Hazard

General/Conditional Awareness Rotational Machinery Hazard

Hot Surface Hazard Pinch/Entanglement Hazard

Magnetic Field Hazard Trip Hazard

Heavy, Bulky Lifting Hazard Appropriate Equipment Required

Pressure/Explosive Atmosphere

Hazard Electrostatic Discharge Hazard

A blue circle symbol is an action or tip that you should obey. Some examples include:

General tip Read the manual/section

Wear personal protective equipment

(PPE): Safety Glasses If applicable, do not lift unassisted

Wear personal protective equipment

(PPE): Gloves

Wear personal protective equipment

(PPE): Hearing Protection

ECO165SL Hardware Manual Safety Procedures and Warnings

www.aerotech.com 7

Installation and Operation

To decrease the risk of damage to the equipment, you must obey the precautions that follow.

DANGER: General Hazard Warning!

This product can produce high forces and move at velocities that could cause injury.

The user is responsible for its safe operation. The following general equation is

provided to assist with risk assessments in regards to contact and pinch points:

WARNING: General Hazard Warning!

lOnly trained operators should operate this equipment.

lAll service and maintenance must be done by approved personnel.

lUse this product only in environments and operating conditions that are approved in

this manual.

lNever install or operate equipment that appears to be damaged.

lOn stages with BMSmotors: the motor over-temperature sensor must be monitored

by the drive. Use it to shut down the drive if the motor overheats.

lMake sure that the product is securely mounted before you operate it.

lMake sure that all pneumatic lines are securely connected.

lUse care when you move the ECO165SL or you could negatively affect the per-

formance of it.

WARNING:Trip Hazard!

Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could

introduce trip hazards around the system that could result in physical injury or could

damage the equipment.

Installation and Operation ECO165SL Hardware Manual

8 www.aerotech.com

Electrical Warnings

To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the

precautions that follow.

DANGER: Electrical Shock Hazard!

lStage motor phase voltage levels could be hazardous live.

lPersonnel are protected from hazardous voltages unless electrical interconnections,

protective bonding (safety ground), or motor/stage enclosures are compromised.

lDo not connect or disconnect stage/motor interconnections while connected to a live

electrical power source.

lBefore you set up or do maintenance, disconnect electrical power.

lIt is the responsibility of the End User/System Integrator to make sure that stages are

properly connected and grounded per Engineering Standards and applicable safety

requirements.

lIt is the responsibility of the End User/System Integrator to configure the system

drive or controller within the Aerotech motor/stage electrical and mechanical

specifications.

ECO165SL Hardware Manual Electrical Warnings

www.aerotech.com 9

Motor-Related Warnings

Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all

applicable codes and standards when you operate a system that incorporates Aerotech motors.

DANGER: Mechanical Hazard!

Personnel must be made aware of the mechanical hazards during set up or when you

do service to the stage.

lUnintentional manual movement into the stage "end-of-travel" stops, could damage

the stage or undo precision alignments.

lStage movement could create pinch points, entanglement hazards, or rotational

mechanical hazards.

DANGER: Hot Surface Hazard!

lThe stage/motor frame temperature could exceed 70°C in some applications.

lDo not touch the stage/motor frame while it is in operation.

lWait until the stage/motor has cooled before you touch it.

Figure 1: Motor Location

DANGER:Risk of Explosive Atmosphere!

lStandard Aerotech stage/motors are not rated for applications with explosive

atmospheres such as air-born dust or combustible vapors.

lDo not operate stage/motors outside of Aerotech environmental specifications.

DANGER: Magnetic Field Hazard!

Aerotech stage/motors contain magnets which can present a Magnetic Field Hazard.

lDo not disassemble a stage motor under any circumstances.

lStrong magnetic fields could interfere with external/internal medical devices.

lStrong magnetic fields could present mechanical hazards such as pinch points.

Motor-Related Warnings ECO165SL Hardware Manual

10 www.aerotech.com

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