Aerotech PRO165SLE Series Bedienungsanleitung

Revision 2.01

PRO165SL and SLEMechanical Bearing,

Ball-Screw Stage

HARDWAREMANUAL

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Table of Contents

PRO165SL and SLEMechanical Bearing, Ball-Screw Stage 1

Table of Contents 3

List of Figures 4

List of Tables 5

EU Declaration of Incorporation 6

UKCADeclaration of Incorporation 7

Safety Procedures and Warnings 8

Installation and Operation 9

Electrical Warnings 10

Motor-Related Warnings 11

Pinch Points 12

Handling and Storage 13

Chapter 1: Overview 15

1.1. Environmental Specifications 17

1.2. Accuracy and Temperature Effects 18

1.3. Basic Specifications 19

1.4. Vacuum Operation 21

Chapter 2: Installation 23

2.1. Dimensions 23

2.2. Securing the Stage to the Mounting Surface 28

2.3. Attaching the Payload to the Stage 29

Chapter 3: Electrical Installation 33

3.1. Motor and Feedback Connectors 34

3.2. Motor and Feedback Wiring 39

3.3. Motor and Feedback Specifications 41

3.4. Limits, Marker, and Machine Direction 45

3.5. Motor and Feedback Phasing 46

Chapter 4: Maintenance 49

4.1. Service and Inspection Schedule 49

4.2. Cleaning and Lubrication 50

4.3. Motor Mounting 54

4.4. Side Seal Belt Replacement 57

4.5. Foldback Motor Belt Adjustment 65

4.6. Troubleshooting 68

Appendix A: Warranty and Field Service 69

Appendix B: Revision History 71

Index 73

Hardware Manual PRO165SL/SLE

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List of Figures

Figure 2-1: PRO165SL Dimensions 23

Figure 2-2: PRO165SL Tabletop Dimensions (-TT2/-TT3 Option) 24

Figure 2-3: PRO165SLE Dimensions 25

Figure 2-4: PRO165SLETabletop Dimensions (-TT3 Option) 26

Figure 2-5: Z-Axis Bracket Dimensions 27

Figure 2-6: Stage Orientations 30

Figure 2-7: Cantilevered Load Capability 31

Figure 2-8: Load Torque Equation 31

Figure 2-9: Torque Required to Turn Ball Screw in Vertical Orientation 31

Figure 3-1: Brushless Motor and Feedback Wiring [-SL Option] 39

Figure 3-2: Brushless Motor and Feedback Wiring [-SLE Option] 40

Figure 3-3: Machine Direction 45

Figure 3-4: Hall Phasing Diagram 46

Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) 47

Figure 3-6: Digital Encoder Phasing Reference Diagram (Sine Wave) 47

Figure 4-1: Hardcover Rear End Plate Removal 52

Figure 4-2: Hardcover Screw Removal 52

Figure 4-3: Hardcover Removal 53

Figure 4-4: Motor Mounting Overview 54

Figure 4-5: Attach the Coupling Adapter to the Motor Shaft 55

Figure 4-6: Attach the Motor the Stage 55

Figure 4-7: Tighten the Shaft Coupling to the Drive Screw 56

Figure 4-8: Belt Removal at the Attachment Pins 58

Figure 4-9: Spring Location Detail 59

Figure 4-10: PullThrough Method 60

Figure 4-11: Stage Table Cover Plate Removal 61

Figure 4-12: Manual Feed Method 62

Figure 4-13: Belt Wrap 62

Figure 4-14: Belt Alignment 63

Figure 4-15: Belt Trim 64

Figure 4-16: Foldback Motor Cover Removal 66

Figure 4-17: Foldback Motor Part Callouts 67

Figure 4-18: Lubricate the Pulley Flanges 67

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List of Tables

Table 1-1: Model Numbers and Ordering Options 15

Table 1-2: Environmental Specifications 17

Table 1-3: PRO165SL/SLESeries Specifications (-050 to -250) 19

Table 1-4: PRO165SL/SLE Series Specifications (-300 to -600) 20

Table 2-1: Stage Mounting Surface Flatness Requirement 28

Table 2-2: Stage to Mounting Surface Hardware 28

Table 2-3: Payload Mounting Surface Flatness Requirement 29

Table 3-1: Brushless Motor Connector Pinout 35

Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector 35

Table 3-3: Brushless Motor Feedback Connector Pinout 36

Table 3-4: Mating Connector Part Numbers for the Brushless Motor Feedback Connector 36

Table 3-5: Linear Encoder Connector Pinout (-SLE only) 37

Table 3-6: Mating Connector Part Numbers for the Encoder Connector 37

Table 3-7: Limit Connector Wiring 38

Table 3-8: Mating Connector Part Numbers for the Limit Connector 38

Table 3-9: Hall-Effect Sensor Specifications 41

Table 3-10: Thermistor Specifications (BMSMotor Options) 41

Table 3-11: Encoder Specifications 41

Table 3-12: Rotary Encoder Resolution Specifications 41

Table 3-13: Linear Encoder Resolution Specifications 42

Table 3-14: Limit Switch Specifications 42

Table 3-15: Brake Specifications 42

Table 3-16: PRO165SL/SLE Motor Specifications (BMS100) 43

Table 3-17: PRO165SL/SLE Motor Specifications (BM130) 44

Table 4-1: Hardware Requirements 54

Table 4-2: Side Seal Belt Replacement Kit Ordering Guide 57

Hardware Manual PRO165SL/SLE

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EU Declaration of Incorporation

Manufacturer Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

herewith declares that the product:

PRO165SL/SLE stage

is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC

as amended; and that the following harmonized European standards have been applied:

EN ISO 12100:2010

Safety of Machinery - Basic concepts, general principles for design

EN 60204-1:2010

Safety of Machinery - Electrical equipment of machines - Part 1:General

requirements

and further more declares that

it is not allowed to put the equipment into service until the machinery into which it is to

be incorporated or of which it is to be a component has been found and declared to

be in conformity with the provisions of the Directive 2006/42/EC and with national

implementing legislation, for example, as a whole, including the equipment referred

to in this Declaration.

This is to certify that the aforementioned product is in accordance with the applicable requirements

of the following directive(s):

EU 2015/863 Directive, Restricted Substances (RoHS 3)

Authorized

Representative: / Norbert Ludwig

Managing Director

Aerotech GmbH

Gustav-Weißkopf-Str.18

90768 Fürth

Germany

Engineer Verifying

Compliance / Alex Weibel

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

Date 7/20/2023

PRO165SL/SLE Hardware Manual

6 www.aerotech.com

UKCADeclaration of Incorporation

Manufacturer Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

herewith declares that the product:

PRO165SL/SLE stage

To which this declaration relates, meets the essential health and safety requirements and is in

conformity with the relevant UK Legislation listed below:

Supply of Machinery (Safety) Regulations 2008

Hazardous Substances in Electrical and Electronic Equipment Regulations

2012

Using the relevant section of the following UK Designated Standards and other normative

documents when installed in accordance with the installation instructions supplied by the

manufacturer.

EN ISO 12100:2010

Safety of Machinery - Basic concepts, general principles for design

EN 60204-1:2010

Safety of Machinery - Electrical equipment of machines - Part 1:General

requirements

and furthermore declares that it is not allowed to put the product into service until the machinery

into which it is to be incorporated or of which it is to be a component has been found and declared

to be in conformity with the provisions of the Supply of Machinery (Safety) Regulations 2008 UK

Legislation and with national implementing legislation, for example, as a whole, including the

equipment referred to in this Declaration.

Authorized

Representative: / Simon Smith

Managing Director

Aerotech Ltd

The Old Brick Kiln, Ramsdell, Tadley

Hampshire RG26 5PR

Engineer Verifying

Compliance / Alex Weibel

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

Date 7/20/2023

Hardware Manual PRO165SL/SLE

www.aerotech.com 7

Safety Procedures and Warnings

IMPORTANT: This manual tells you how to carefully and correctly use and operate the

stage.

lRead all parts of this manual before you install or operate the stage or before you do

maintenance to your system.

lTo prevent injury to you and damage to the equipment, obey the precautions in this

manual.

lAll specifications and illustrations are for reference only and were complete and

accurate as of the release of this manual. To find the newest information about this

product, refer to www.aerotech.com.

If you do not understand the information in this manual, contact Aerotech Global

Technical Support.

IMPORTANT: This product has been designed for light industrial manufacturing or

laboratory environments. If the product is used in a manner not specified by the

manufacturer:

lThe protection provided by the equipment could be impaired.

lThe life expectancy of the product could be decreased.

Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the

moment of the safety note or if you fail to obey the safety note.

Shock/Electrocution Hazard Pinch, Shear, or Crush Hazard

General/Conditional Awareness Rotational Machinery Hazard

Hot Surface Hazard Pinch/Entanglement Hazard

Magnetic Field Hazard Trip Hazard

Heavy, Bulky Lifting Hazard Appropriate Equipment Required

Pressure/Explosive Atmosphere

Hazard Electrostatic Discharge Hazard

A blue circle symbol is an action or tip that you should obey. Some examples include:

General tip Read the manual/section

Wear personal protective equipment

(PPE): Safety Glasses If applicable, do not lift unassisted

Wear personal protective equipment

(PPE): Gloves

Wear personal protective equipment

(PPE): Hearing Protection

PRO165SL/SLE Hardware Manual

8 www.aerotech.com

Installation and Operation

To decrease the risk of damage to the equipment, you must obey the precautions that follow.

DANGER: General Hazard Warning!

This product can produce high forces and move at velocities that could cause injury.

The user is responsible for its safe operation. The following general equation is

provided to assist with risk assessments in regards to contact and pinch points:

WARNING: General Hazard Warning!

lOnly trained operators should operate this equipment.

lAll service and maintenance must be done by approved personnel.

lUse this product only in environments and operating conditions that are approved in

this manual.

lNever install or operate equipment that appears to be damaged.

lOn stages with BMSmotors: the motor over-temperature sensor must be monitored

by the drive. Use it to shut down the drive if the motor overheats.

lMake sure that the product is securely mounted before you operate it.

lMake sure that all pneumatic lines are securely connected.

lUse care when you move the stage or you could negatively affect the performance of

it.

WARNING:Trip Hazard!

Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could

introduce trip hazards around the system that could result in physical injury or could

damage the equipment.

Hardware Manual PRO165SL/SLE

www.aerotech.com 9

Electrical Warnings

To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the

precautions that follow.

DANGER: Electrical Shock Hazard!

lStage motor phase voltage levels could be hazardous live.

lPersonnel are protected from hazardous voltages unless electrical interconnections,

protective bonding (safety ground), or motor/stage enclosures are compromised.

lDo not connect or disconnect stage/motor interconnections while connected to a live

electrical power source.

lBefore you set up or do maintenance, disconnect electrical power.

lIt is the responsibility of the End User/System Integrator to make sure that stages are

properly connected and grounded per Engineering Standards and applicable safety

requirements.

lIt is the responsibility of the End User/System Integrator to configure the system

drive or controller within the Aerotech motor/stage electrical and mechanical

specifications.

PRO165SL/SLE Hardware Manual

10 www.aerotech.com

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