Agilent Technologies TwisTorr 305 FS Series Bedienungsanleitung

Agilent TwisTorr 305 FS Remote Controller

User Manual

2 Agilent TwisTorr 305 FS Remote Controller User Manual

Notices

Manual Part Number

87-901-059-01

Edition A.00, December 2021

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Manufactured by Agilent Technologies

Italia S.p.A., Vacuum Products Division

Via F.lli Varian, 54, 10040 Leinì (TO),

ITALY

Printed in Italy

Operating Temperature

Operating Temperature: +5°C ÷ +45°C

Storage Temperature: -20°C ÷ +70°C

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

warranties of merchantability and

fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

connection with the furnishing, use, or

performance of this document or of

any information contained herein.

Should Agilent and the user have a

separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance with

the terms of such license.

Restricted Rights Legend

U.S. Government Restricted Rights.

Software and technical data rights

granted to the federal government

include only those rights customarily

provided to end user customers.

Agilent provides this customary

commercial license in Software and

technical data pursuant to FAR 12.211

(Technical Data) and 12.212

(Computer Software) and, for the

Department of Defense, DFARS

252.227-7015 (Technical Data -

Commercial Items) and DFARS

227.7202-3 (Rights in Commercial

Computer Software or Computer

Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

Agilent TwisTorr 305 FS Remote Controller User Manual 3

Contents

1Istruzioni per l’uso 15

Informazioni su questo manuale 16

Validità 16

Definizioni e terminologia 17

Definizione di Attenzione, Avvertenza e Nota 17

Simboli di avvertenza 18

Sicurezza 20

Uso corretto 20

Uso improprio 21

Attrezzatura di protezione 22

Linee guida di sicurezza per i Controller di pompe turbomolecolari 22

Trasporto & Immagazzinamento 23

Descrizione del prodotto 23

Installazione 24

Preparazione per l’installazione 24

Set-up

Fissaggio del TwisTorr 305 FS Remote Controller

Comandi, Indicatori e Connettori

Descrizione pannello frontale

Avvio e funzionamento del Controller TwisTorr 305 FS Remote 29

Accensione del Controller 29

Avvio della Pompa 29

Arresto della Pompa 29

Contents

4 Agilent TwisTorr 305 FS Remote Controller User Manual

Soft Start 30

Messaggi di errore 33

Manutenzione 35

Smaltimento 36

Servizio Post Vendita 37

2Betriebsanleitung 38

Informationen über diese Betriebsanleitung 39

Gültigkeit 39

Definitionen und Terminologie 40

Definition von Vorsicht, Warnung und Hinweis 40

Warnsymbole 41

Sicherheit 43

Sachgemäße Verwendung 43

Unsachgemäße Anwendung 44

Schutzausrüstung 45

Sicherheitsrichtlinien für Turbomolekularpumpen-Steuergeräte 45

Transport und Lagerung 46

Produktbeschreibung 46

Installation 47

Vorbereitung zum Einbau 47

Set-up 48

Montage von TwisTorr 305 FS Remote Controller 49

Steuerungen, Anzeigen und Verbinder des Controllers 50

Fronttafel der Controller 50

Inbetriebnahme und Betrieb des Controller TwisTorr 305 FS Remote 52

Einschalten des Controllers 52

Contents

Agilent TwisTorr 305 FS Remote Controller User Manual 5

Pumpenstart 52

Pumpenstopp 52

Sanftanlauf (Soft Start) 53

Fehlermeldungen 56

Wartung 58

Entsorgung 59

Service 60

3Mode d’emploi 61

À propos de ce manuel 62

Validité 62

Définitions et terminologie 63

Signification des messages d’attention, d’avertissement et des notes 63

Symboles d'avertissement 64

Sécurité 66

Utilisation appropriée 66

Utilisation inappropriée 67

Équipements de protection individuelle 68

Consignes de sécurité relatives aux contrôleurs de pompes

turbomoléculaires 68

Transport et Emmagasinage 69

Description du produit 69

Installation 70

Préparation pour l’installation 70

Set-up 71

Montage du Contrôleur TwisTorr 305 FS Remote 72

Commandes, Indicateurs et Connecteurs 73

Contents

6 Agilent TwisTorr 305 FS Remote Controller User Manual

Description du Tableau avant 73

Démarrage et utilisation du Contrôleur TwisTorr 305 FS Remote 75

Allumage du Contrôleur 75

Mise en marche de la Pompe 75

Arrêt de la Pompe 75

Démarrage progressif 76

Messages d'erreur 79

Entretien 81

Élimination 82

Service 83

4Instrucciones de uso 84

Acerca del manual 85

Validez 85

Definiciones y terminología 86

Definición de Precaución, Advertencia y Nota 86

Símbolos de advertencia 87

Seguridad 89

Uso correcto 89

Uso incorrecto 90

Equipo de protección 91

Pautas de seguridad para Controler de bombas turbomoleculares 91

Transporte y almacenamiento 92

Descripción del producto 92

Instalación 93

Preparación para instalación 93

Puesta en marcha 94

Contents

Agilent TwisTorr 305 FS Remote Controller User Manual 7

Montaje del TwisTorr 305 FS Remote Controller 95

Mandos, Indicadores y Conectores 96

Descripción del panel frontale 96

Puesta en marcha y funcionamiento del

TwisTorr 305 FS Remote Controller 98

Encendido del controler 98

Puesta en marcha de la Bomba 98

Parada de la Bomba 98

Arranque suave (Soft Start) 99

Mensajes de error 102

Mantenimiento 104

Eliminación 105

Servicio 106

5使用说明107

关于本手册 108

有效性 108

定义与术语 109

小心、警告和注意的定义109

警告符号 110

安全 112

正确使用 112

使用不当 113

防护装备114

涡轮分子泵控制器安全指南 114

运输及存储115

Contents

8 Agilent TwisTorr 305 FS Remote Controller User Manual

般信息 115

安装 116

安装准备116

设置117

TwisTorr 305 FS 遥控器安装 118

Controls, Indicators and Connectors 119

Front Panel Description 119

TwisTorr 305 FS Remote Controller 的启动和运行 121

控制器启动121

启动泵 121

Pump Shutdown 121

停止泵121

慢启动122

错误消息 125

维护 127

处置128

服务129

6取扱説明書 130

この説明書について 131

有効期 131

定義と用語 132

警告・注意・注の定義 132

警告の記号 133

Contents

Agilent TwisTorr 305 FS Remote Controller User Manual 9

安全性 135

適切な使用 135

不適切な使用 136

保護装具 137

运输及存储138

概要情報 138

取り付け 139

取り付けの準備 139

取り付け 140

TwisTorr 305 FS リモートコントローラー取り付け金具 141

コントロール、指示器、コネクター 142

フロントパネル説明 142

TwisTorr 305 FS Remote Controller コンパクトの起動と操作 144

コントローラーの起動 144

ポンプの開始 144

ポンプの停止 Pump Shutdown 144

ソフトスタート 145

エラーメッセージ 148

メンテナンス 150

処分 151

サービス 152

Contents

10 Agilent TwisTorr 305 FS Remote Controller User Manual

7Instructions for Use 153

About this manual 154

Validity 154

Definitions and terminology 155

Definition of Caution, Warning and Note 155

Warning Symbols 156

Safety 158

Proper use 158

Improper use 159

Protective equipment 160

Safety guideline for Turbomolecular Pump Controllers 160

Transport & Storage 161

Product description 161

Installation 162

Preparation for installation 162

Set-up 163

TwisTorr 305 FS Remote Controller Mounting 164

Controls, Indicators and Connectors 165

Front Panel Description 165

Startup and Operation of the TwisTorr 305 FS Remote Controller 167

Controller Startup 167

Starting the Pump 167

Pump Shutdown 167

Soft Start 168

Troubleshooting 171

Maintenance 173

Andere Handbücher für TwisTorr 305 FS Series

Inhaltsverzeichnis

Andere Agilent Technologies Steuereinheit Handbücher

Agilent Technologies

Agilent Technologies VXI 75000 C Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies HP E1355A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 75000 Series C Bedienungsanleitung

Agilent Technologies

Agilent Technologies G4239C Bedienungsanleitung

Agilent Technologies

Agilent Technologies 1100 Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies 6850 GC Bedienungsanleitung

Agilent Technologies

Agilent Technologies N5102A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 81662A Bedienungsanleitung

Agilent Technologies

Agilent Technologies E1476A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 1200 series Bedienungsanleitung

Agilent Technologies

Agilent Technologies VME VXI 75000 B Series Installations- und Betriebshandbuch

Agilent Technologies

Agilent Technologies 54753A Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V Bedienungsanleitung

Agilent Technologies

Agilent Technologies 81630B Bedienungsanleitung

Agilent Technologies

Agilent Technologies 81610A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 70341A Bedienungsanleitung

Agilent Technologies

Agilent Technologies E8482A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 54751A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 11713B Service-Handbuch

Agilent Technologies

Agilent Technologies G1157A Bedienungsanleitung

Agilent Technologies

Agilent Technologies G7050A Montageanleitung

Agilent Technologies

Agilent Technologies 75000 SERIES B Bedienungsanleitung

Agilent Technologies

Agilent Technologies G1360A Installations- und Betriebshandbuch

Agilent Technologies

Agilent Technologies E1339A Betriebsanleitung

Beliebte Steuereinheit Handbücher anderer Marken

Festo

Festo Compact Performance CP-FB6-E Stücklistenhandbuch

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Bedienungsanleitung

JS Automation

JS Automation MPC3034A Bedienungsanleitung

JAUDT

JAUDT SW GII 6406 Series Kurzanleitung

Spektrum

Spektrum Air Module System Bedienungsanleitung

BOC Edwards

BOC Edwards Q Series Bedienungsanleitung

KHADAS

KHADAS BT Magic Bedienungsanleitung

Etherma

Etherma eNEXHO-IL Bedienungsanleitung

PMFoundations

PMFoundations Attenuverter Bedienungsanleitung

GEA

GEA VARIVENT Bedienungsanleitung

Walther Systemtechnik

Walther Systemtechnik VMS-05 Bedienungsanleitung

Altronix

Altronix LINQ8PD Montageanleitung

Eaton

Eaton Powerware Series Bedienungsanleitung

WAGO

WAGO 750-407/040-000 Bedienungsanleitung

Sony

Sony CCU-590 Bedienungsanleitung

Graco

Graco 25D614 Bedienungsanleitung

Task Force Tips

Task Force Tips YE-RF-900 Programmierhandbuch

Shini

Shini SPV-U Series Bedienungsanleitung