Agilent Technologies 4155C Bedienungsanleitung

Agilent Technologies

Agilent 4155C

Semiconductor Parameter

Analyzer

Agilent 4156C

Precision Semiconductor

Parameter Analyzer

User’s Guide

Silicon Investigations

Repair Information - Contact Us

920-955-3693

www.siliconinvestigations.com

Notices

No part of this manual may be reproduced in

any form or by any means (including elec-

tronic storage and retrieval or translation

into a foreign language) without prior agree-

ment and written consent from Agilent

Technologies, Inc. as governed by United

States and international copyright laws.

Manual Part Number

04156-90000

Edition

Edition 1, January 2001

Edition 2, March 2001

Edition 3, September 2001

Edition 4, December 2001

Edition 5, January 2003

Edition 6, August 2003

Edition 7, October 2004

Edition 8, January 2005

Edition 9, July 2006

Edition 10, March 2008

Edition 11, July 2009

Agilent Technologies, Inc.

5301 Stevens Creek Blvd

Santa Clara, CA 95051 USA

Warranty

The material contained in this docu-

ment is provided “as is,” and is sub-

ject to being changed, without notice,

in future editions. Further, to the max-

imum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not

limited to the implied warranties of

merchantability and fitness for a par-

ticular purpose. Agilent shall not be

liable for errors or for incidental or

consequential damages in connec-

tion with the furnishing, use, or per-

formance of this document or of any

information contained herein. Should

Agilent and the user have a separate

written agreement with warranty

terms covering the material in this

document that conflict with these

terms, the warranty terms in the sep-

arate agreement shall control.

Technol o gy Licenses

The hardware and/or software described in

this document are furnished under a license

and may be used or copied only in accor-

dance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a

U.S. Government prime contract or subcon-

tract, Software is delivered and licensed as

“Commercial computer software” as

defined in DFAR 252.227-7014 (June 1995),

or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer soft-

ware” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or

contract clause. Use, duplication or disclo-

sure of Software is subject to Agilent Tech-

nologies’ standard commercial license

terms, and non-DOD Departments and

Agencies of the U.S. Government will

receive no greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive

no greater than Limited Rights as defined in

FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as

applicable in any technical data.

DECLARATION OF CONFORMITY

According to EN ISO/IEC 17050-1:2004

Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd.

Manufacturer’s Address: No. 1 Yishun Ave 7

SINGAPORE 768923

Singapore

Declares under sole responsibility that the product as originally delivered

Product Name:

Semiconductor Parameter Analyzer

Precision Semiconductor Parameter Analyzer

SMU and PGU Generator Expander

Model Number:

Agilent 4155C

Agilent 4156C

Agilent 41501B

Product Options: This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries

the CE marking accordingly:

Low Voltage Directive (2006/95/EC)

EMC Directive (2004/108/EC)

and conforms with the following product standards

EMC Standard

IEC 61326-1:2005 / EN 61326-1:2006

CISPR 11:2003 / EN55011:1998+A1:1999+A2 :2002

IEC 61000-4-2:2001 /EN 61000-4-2:1995+A1:1998+A2:2001

IEC 61000-4-3:2002+A1:2002/EN 61000-4-3:2002+A1:2002

IEC 61000-4-4:2004 / EN 61000-4-4:2004

IEC 61000-4-5:2001/EN 61000-4-5:1995+A1:2001

IEC 61000-4-6:2003 / EN 61000-4-6:1996+A1:2001

IEC 61000-4-11:2004 / EN 61000-4-11:2004

Canada: ICES/NMB-001:2004

Australia/New Zealand: AS/NZS CISPR 11:2004

Limit

Group 1 Class A

4 kV CD, 8 kV AD

3 V/m / 80 MHz-1 GHz / 1.4-2 GHz, 1 V/m / 2-2.7 GHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground

3 V, 0.15-80 MHz

0 % for 1/0.5 cycle, 0 % for 250/300 cycles,

70 % for 25/30 cycles

Safety

IEC 61010-1:2001 / EN 61010-1:2001

Canada: CAN/CSA-C22.2 No. 1010.1-92, NRTL/C

Supplementary Information:

The product was tested in a typical configuration with Agilent Technologies test systems.

This DoC applies to above-listed products placed on the EU market after:

March 20, 2010

Date

Toshiyuki Kawaji

QA Manager

Agilent Technologies

For further information, please contact your local Agilent Technologies sales office, agent or distributor,

or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.

•Herstellerbescheinigung

GEÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T. 19

•Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme à la norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements.

The affixed label indicates that you must not discard this electrical/ electronic product

in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive

Annex I, this product is classed as a “Monitoring and Control instrumentation”

product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Agilent office, or see

www.agilent.com/environment/product/ for more information.

Microsoft, Windows, Excel, MS-DOS, and Windows NT are registered trademarks of Microsoft Corporation.

Lotus and 1-2-3 are registered trademarks of Lotus Development Corporation. NFS is a trademark of Sun

Microsystems, Inc. UNIX is a registered trademark in the United States and other countries, licensed

exclusively through X/Open Company Limited. All other trademarks are the property of their respective

owners.

Safety Summary

The following general safety precautions must be observed during all phases of

operation, service, and repair of this instrument. Failure to comply with these

precautions or with specific warnings elsewhere in this manual may impair the

protections provided by the equipment. In addition, it violates safety standards of

design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.

assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent 4155C/4156C/41501B comply with INSTALLATION CATEGORY II for mains

input and INSTALLATION CATEGORY I for measurement input terminals, and

POLLUTION DEGREE 2 defined in IEC 61010-1.

Agilent 4155C/4156C/41501B are INDOOR USE products.

•GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument chassis

and cabinet must be connected to an electrical ground. The power terminal and the

power cable must meet International Electrotechnical Commission (IEC) safety

standards.

•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a

definite safety hazard.

•KEEP AWAY FROM LIVE CIRCUITS

Operation personnel must not remove instrument covers. Component replacement

and internal adjustments must be made by qualified maintenance personnel. Do

not replace components with power cable connected. Under certain conditions,

dangerous voltages may exist even with the power cable removed. To avoid

injuries, always disconnect power and discharge circuits before touching them.

•DO NOT SERVICE OR ADJUST ALONE

Do not attempt internal service or adjustment unless another person, capable of

rendering first aid and resuscitation, is present.

•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute

parts or perform any unauthorized modification to the instrument. Return the

instrument to a Agilent Technologies Sales and Service Office for services and

repair to ensure that safety features are maintained.

•DANGEROUS PROCEDURE WARNINGS

Warnings, such as example below, precede potentially dangerous procedures

throughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use

extreme caution when handling, testing, and adjusting.

Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are listed

below.

Instruction manual symbol: the product will be marked with this symbol when it is

necessary for the user to refer to the instruction manual in order to protect against

damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals

that have this symbol when instrument is on.

Protective conductor terminal. For protection against electrical shock in case of a fault.

Used with field wiring terminals to indicate the terminal which must be connected to

ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which

normally includes all exposed metal structures.

Indicates earth (ground) terminal.

Alternating current.

Direct current.

ON (Supply).

OFF (Supply).

STANDBY (Supply).

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply

with INSTALLATION CATEGORY I.

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition

or the like, which, if not correctly performed or adhered to, could result in injury or

death to personal.

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could

result in damage to or destruction of part or all of the product.

CAT 1

HIGH VOLTAGE SHOCK HAZARD

The Agilent 4155C/4156C/41501B can force dangerous voltages (200 V for

HPSMU, and 100 V for MPSMU) at the force, guard, and sense terminals. To

prevent electric shock hazard, the following safety precautions must be observed

during the use of the Agilent 4155C/4156C/41501B.

• Use a three-conductor AC power cable to connect cabinet (if used) and Agilent

4155C/4156C/41501B to an electric ground (safety ground).

• If you do not use Agilent 16442 Test Fixture, make sure to connect the INTLK

terminal to a switch that turns off when the shielding box access door is opened.

• Confirm periodically that INTLK function works normally.

• Before touching the connections of the force, guard, and sense terminals, turn

the Agilent 4155C/4156C/41501B off and discharge any capacitors whenever

possible. If you do not turn the Agilent 4155C/4156C/41501B off, complete

“all” of the following items, regardless of any Agilent 4155C/4156C/41501B

settings.

• Terminate measurement by pressing Output key, confim that the Output

status indicator is not lit.

• Confirm that the HIGH VOLTAGE indicator is not lit.

• Open the shielding box access door (open the INTLK terminal).

• Discharge any capacitors if the capacitance is connected to an SMU.

• Warn workers in the vicinity of the Agilent 4155C/4156C/41501B about

dangerous conditions.

高電圧感電注意

Agilent 4155C/4156C/41501B のフォース、ガード、センス端子には、危険電圧が出

力されることがあります（HPSMU の場合は最大± 200 Vdc、MPSMU の場合は最大

±100 Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。

•3極電源ケーブルを使用して Agilent 4155C/4156C/41501B を設置すること。

• Agilent 16442 テスト・フィクスチャ以外のフィクスチャ、あるいはプローバを

使用する場合には、シールド・ボックスにインターロック回路を接続すること。

インターロック回路とは、シールド・ボックスの蓋を開けた時に Agilent

4155C/4156C/41501BのINTLK 端子を開放にすることができる回路のことをい

います。

•インターロック機能が正常であることを定期的に確認すること。

•フォース、ガード、センス端子に繋がる接続部に触れる前には、測定器の電源

を切ること。また、測定系にキャパシタが接続されている場合は、キャパシタ

を放電すること。電源を切らない場合は、以下の事項を全て実施すること。

•Outputキーを押して Output インジケータが消灯したことを確認すること。

•高電圧警告（HIGH VOLTAGE）インジケータが消灯していることを確認す

ること。

•シールド・ボックスの蓋を開ける（INTLK 端子を開放する）こと。

•キャパシタが SMU に接続されているならば、キャパシタを放電すること。

•周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底すること。

PRECAUTIONS POUR COMMOTION A HAUTE TENSION

Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU;

100 Vdc) émanant du dispositif Agilent 4155C/4156C/41501B peut être sortie aux

bornes de force, d'appareil de protection ou de détection. Les précautions suivantes

doivent être obserées contre commotion électrique accidentelle:

• Mettre à la terre le dispositif Agilent 4155C/4156C/41501B au moyen du câble

d'alimentation tripolair.

• En cas de hors service du dispositif d'essai, FIXTURE Agilent 16442, connecter

les bornes de verrouillage (INTLK) de façon à ce que soit ouverte lorsque le

couvercle de la boîte de blindage est ouvert.

• Essayer périodiquement le fonctionnement normal de verrouillage.

• Avant de toucher la partie connexion à partir des bornes de force, d'appareil de

protection et de détection, mettre hors tension le dispositif Agilent

4155C/4156C/41501B. Et, en cas de condensateurs connectés au circuit de

mesure, décharger ces condensateurs. Lorsque l'alimentation n'est pas mise hors

tension, les 4 instructions suivantes doivent être exécutées:

• Finir la mésure en appuyant sur la touche “Output”; verifier que l'indicateur

“Output” n'est pas allumé.

• S'assurer que soit allumé l'indicateur d'alarme de la haute tension.

• Ouvrir le convercle de la boîte de blindage (Ouvrir les bornes de

verrouillage).

• En cas de condensateurs connectés à SMU, décharger les condensateurs.

• Alerter d'autres personnes autour de vous contre le danger de haute tension.

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