Agilent Technologies B1500A Installationsanleitung

Self-paced Training Manual

Agilent B1500A Semiconductor Device Analyzer

Agilent EasyEXPERT Software

Self-paced Training Manual

Agilent B1500A Semiconductor Device Analyzer

Agilent EasyEXPERT Software

In This Manual

1. Introduction

2. Performing Easy Tests

3. Data Display and Management

4. Modifying Application Test Definitions

5. Using Classic Test Environment

6. Creating Your Test Definitions

7. Advanced Definitions and Operations

8. Miscellaneous Operations

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and

retrieval or translation into a foreign language) without prior agreement and written consent from

Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

B1500-90041

Edition

Edition 1, September 2005

Edition 2, May 2006

Agilent Technologies, Inc.

395 Page Mill Road

Palo Alto, CA 94303 USA

1-1

Module 1. Introduction

1-2

In This Module

•New Features

•EasyEXPERT

•To Perform Easy Application Test

•User Interface

•Modular Mainframe

•SCUU/GSWU

•ASU

•B2200 Switch Control

•Desktop EasyEXPERT

•415x Setup File Converter

Note:

1-3

Comprehensive

application

library

Revolutionary

EasyEXPERT

environment

Semi-auto

prober control

10 Slots

variable module

configuration

SCUU/GSWU

for IV/CV

combination

Touch-screen

w/optional

USB keyboard

& mouse

Agilent B1500A Semiconductor Device Analyzer

B2200 switch

control

415x setup file

converter

ASU for

100 aA

The B1500A has many exciting new features and capabilities.

1-4

New Features

• EasyEXPERT software

• Application test environment (> 150 algorithms)

• Classic test environment – 415x like setup

• Quick test environment – multiple test execution

• Semi-auto prober control and B2200 switch control

• Modular mainframe

•MFCMUforC-Vsweep

• HPSMU, HRSMU, MPSMU for I/V sweep/sampling

• SMU CMU Unify Unit (SCUU)/Guard Switch Unit (GSWU)

• switching effortlessly between IV and CV measurement

• Atto Sense/Switch Unit (ASU)

• 100 aA level low current measurement

• Touch-screen, knob, and softkeys

• optional USB keyboard, mouse, and stylus pen

The EasyEXPERT software

•Task-oriented, “top-down” approach to device characterization

•Multiple test execution

•Automatic measurement, auto-analysis functions

•Test sequencing without programming

Application Library (>150 algorithms)

•Categorized and organized

•Easy-to-use

415x setup file converter program

Versatile Modular Mainframe

•Flexible & Expandable (10 slots)

•Multiple SMU types

•Atto-sense and Switch Unit (ASU)

•Multi-Frequency CMU

•SMU CMU Unify Unit for IV/CV Probing

•4.2 Amp Ground Unit

Convenient User Interface

•Touch screen operation (with optional stylus pen)

•Contextual softkeys & knob control

•Optional USB keyboard & mouse

1-5

EasyEXPERT

Measurement

resources

V/I on terminals

Device parameters

Device type

Technology

classifications

Vth Idon Idoff gm Igleak Rg

Vg Vd Vs Vsub

Ig Id Is Isub

SMU1 SMU2 SMU3 SMU4

Mode

GaAs WLR Nano-

tech

CMU

Mode

AC V

range

MOS

FET Res. Cap.

Bipolar

CMOS

Instead of setting up the instrument hardware, the EasyEXPERT software focuses on the real task

at hand for the engineer ---device characterization. All that you need to do is to connect the

instrument to the device terminals as shown in the EasyEXPERT test parameters area.

The EasyEXPERT software also provides the classic test mode that allows the 4155/4156 like

measurement setup operation.

1-6

To Perform Easy Application Test

List of test record

Step 1: Click Application Test tab.

Step 2: Select one or more technology categories, and select a desired test from the list of tests

associated with the selected technology categories.

Step 3: Change the setup parameters (Device parameters and Test parameters) if you want.

Step 4: Connect DUT, and click the Start button. The B1500A starts the selected test.

Step 5: Analyze the measurement result data displayed on the Data Display window automatically

opened after the test.

The measurement result record is automatically stored in the internal hard disk drive when the

Auto Recode mode is ON.

1-7

User Interface

•Touch panel

•Stylus pen (option)

•Rotary knob

•Softkeys

•USB keyboard (option)

•USB mouse (option)

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