Agilent Technologies Agilent E5250A Bedienungsanleitung

Agilent Technologies

Agilent E5250A

Low Leakage Switch

Mainframe

User’s Guide

Notices

No part of this manual may be reproduced

in any form or by any means (including

electronic storage and retrieval or transla-

tion into a foreign language) without prior

agreement and written consent from Agi-

lent Technologies, Inc. as governed by

United States and international copyright

laws.

Manual Part Number

E5250-90000

Edition

Edition 1, October 1995

Edition 2, January 1997

Edition 3, August 1997

Edition 4, January 2000

Edition 5, May 2000

Edition 6, January 2001

Edition 7, August 2003

Edition 8, July 2005

Edition 9, May 2008

Edition 10, July 2009

Edition 11, August 2011

Agilent Technologies, Inc.

5301 Stevens Creek Blvd

Santa Clara, CA 95051 USA

Warranty

The material contained in this docu-

ment is provided “as is,” and is sub-

ject to being changed, without notice,

in future editions. Further, to the max-

imum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not

limited to the implied warranties of

merchantability and fitness for a par-

ticular purpose. Agilent shall not be

liable for errors or for incidental or

consequential damages in connection

with the furnishing, use, or perfor-

mance of this document or of any

information contained herein. Should

Agilent and the user have a separate

written agreement with warranty

terms covering the material in this

document that conflict with these

terms, the warranty terms in the sep-

arate agreement shall control.

Technology Licenses

The hardware and/or software described in

this document are furnished under a

license and may be used or copied only in

accordance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of

a U.S. Government prime contract or sub-

contract, Software is delivered and licensed

as “Commercial computer software” as

defined in DFAR 252.227-7014 (June 1995),

or as a “commercial item” as defined in

FAR 2.101(a) or as “Restricted computer

software” as defined in FAR 52.227-19

(June 1987) or any equivalent agency regu-

lation or contract clause. Use, duplication

or disclosure of Software is subject to Agi-

lent Technologies’ standard commercial

license terms, and non-DOD Departments

and Agencies of the U.S. Government will

receive no greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive

no greater than Limited Rights as defined in

FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as

applicable in any technical data.

DECLARATION OF CONFORMITY

According to EN ISO/IEC 17050-1:2004

Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd.

Manufacturer’s Address: No. 1 Yishun Ave 7

SINGAPORE 768923

Singapore

Declares under sole responsibility that the product as originally delivered

Product Name: Low Leakage Switch Mainframe 10x12 Matrix

Switch24(8x3)CH Multiplexer

24(8x3)CH Multiplexer

Model Number: Agilent E5250A

Agilent E5252A

Agilent E5255A

Product Options: This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries

the CE marking accordingly:

Low Voltage Directive (2006/95/EC)

EMC Directive (2004/108/EC)

and conforms with the following product standards

EMC Standard

IEC 61326-1:2005 / EN 61326-1:2006

CISPR 11:2003 / EN55011:1998+A1:1999+A2 :2002

IEC 61000-4-2:2001 /EN 61000-4-2:1995+A1:1998+A2:2001

IEC 61000-4-3:2002+A1:2002/EN 61000-4-3:2002+A1:2002

IEC 61000-4-4:2004 / EN 61000-4-4:2004

IEC 61000-4-5:2001/EN 61000-4-5:1995+A1:2001

IEC 61000-4-6:2003 / EN 61000-4-6:1996+A1:2001

IEC 61000-4-11:2004 / EN 61000-4-11:2004

Canada: ICES/NMB-001:2004

Australia/New Zealand: AS/NZS CISPR 11:2004

Limit

Group 1 Class A

4 kV CD, 8 kV AD

3 V/m / 80 MHz-1 GHz / 1.4-2 GHz, 1 V/m / 2-2.7 GHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground

3 V, 0.15-80 MHz

0 % for 1/0.5 cycle, 0 % for 250/300 cycles,

70 % for 25/30 cycles

Safety

IEC 61010-1:2001 / EN 61010-1:2001

Canada: CAN/CSA-C22.2 No. 1010.1-92, NRTL/C

Supplementary Information:

The product was tested in a typical configuration with Agilent Technologies test systems.

This DoC applies to above-listed products placed on the EU market after:

March 20, 2010

Date

Toshiyuki Kawaji

QA Manager

Agilent Technologies

For further information, please contact your local Agilent Technologies sales office, agent or distributor,

or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.

•Herstellerbescheinigung

GEÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T. 19

•Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme à la norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements.

The affixed label indicates that you must not discard this electrical/ electronic product

in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive

Annex I, this product is classed as a “Monitoring and Control instrumentation”

product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Agilent office, or see

www.agilent.com/environment/product/ for more information.

Microsoft, Windows, Visual C++, and Visual Basic are registered trademarks of Microsoft Corporation.

Borland C++ Builder is registered trademark of International, Inc. LabWindows and LabVIEW are registered

trademarks of National Instruments Corporation. All other trademarks are the property of their respective

owners.

Safety Summary

The following general safety precautions must be observed during all phases of

operation, service, and repair of this instrument. Failure to comply with these

precautions or with specific warnings elsewhere in this manual may impair the

protections provided by the equipment. In addition, it violates safety standards of

design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.

assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent E5250A complies with INSTALLATION CATEGORY II for mains input and

INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION

DEGREE 2 defined in IEC 61010-1.

Agilent E5250A is INDOOR USE products.

•GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument chassis

and cabinet must be connected to an electrical ground. The power terminal and the

power cable must meet International Electrotechnical Commission (IEC) safety

standards.

•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a

definite safety hazard.

•KEEP AWAY FROM LIVE CIRCUITS

Operation personnel must not remove instrument covers. Component replacement

and internal adjustments must be made by qualified maintenance personnel. Do

not replace components with power cable connected. Under certain conditions,

dangerous voltages may exist even with the power cable removed. To avoid

injuries, always disconnect power and discharge circuits before touching them.

•DO NOT SERVICE OR ADJUST ALONE

Do not attempt internal service or adjustment unless another person, capable of

rendering first aid and resuscitation, is present.

•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute

parts or perform any unauthorized modification to the instrument. Return the

instrument to a Agilent Technologies Sales and Service Office for services and

repair to ensure that safety features are maintained.

•DANGEROUS PROCEDURE WARNINGS

Warnings, such as example below, precede potentially dangerous procedures

throughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use

extreme caution when handling, testing, and adjusting.

Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are listed

below.

Instruction manual symbol: the product will be marked with this symbol when it is

necessary for the user to refer to the instruction manual in order to protect against

damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals

that have this symbol when insrument is on.

Affixed to product containing static sensitive devices--use anti-static handling

procedures to prevent electrostatic discharge damage to component.

Protective conductor terminal. For protection against electrical shock in case of a fault.

Used with field wiring terminals to indicate the terminal which must be connected to

ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which

normally includes all exposed metal structures.

Indicates earth (ground) terminal.

Alternating current.

Direct current.

ON (Supply).

OFF (Supply).

STANDBY (Supply).

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply

with INSTALLATION CATEGORY I.

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition

or the like, which, if not correctly performed or adhered to, could result in injury or

death to personal.

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could

result in damage to or destruction of part or all of the product.

CAT 1

In This Manual

This manual is a user’s guide for Agilent E5250A, and consists of the following

chapters.

•Introduction

Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A

10×12 Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.

• Installation

Describes requirements to install the E5250A and tasks for installation.

• Executing Self-Test and Leak Test

Describes how to execute the three Self-Test items (Controller Test, Front Panel

Interface Test, and Relay Test) and the Leak Test.

• Setting up Measurement Environment

Explains how to connect your instruments to the E5250A input, and how to connect

the E5250A output to your wafer prober or test fixture.

• Controlling the E5250A

Introduces several methods for controlling the E5250A, gives basic information for

controlling the relay switches on the plug-in cards, and describes how to use

Virtual Front Panel (VFP) utility furnished with the E5250A.

• Programming the E5250A

Describes how to create programs that contain SCPI commands to control the

E5250A.

• Command Reference

Describes the SCPI commands available to operate the E5250A via GPIB interface

and the status reporting structure.

•VXIplug&play Driver

Introduces the VXIplug&play driver available for the E5250A.

• Executing Sample Programs

Explains how to execute and modify the sample programs stored in the program

disk that is furnished with the E5250A.

• Specifications

Lists specifications, typical data, supplemental data, and reference data for the

E5250A, E5252A, and E5255A.

•ErrorMessages

Lists and describes the error messages for the E5250A.

• SCPI Command Summary

This is a quick reference for the SCPI subsystem commands available for the

E5250A.

Text Conv e n tions

The following text conventions are used in this manual:

Screen Text Represents text that appears on screen of the controller.

Italic Refers to a related document, or is used for emphasis.

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