Agilent Technologies TwisTorr 305 FS Series Bedienungsanleitung

TwisTorr 305 FS

Pump models:

X3513-64008, X3513-64009,

X3513-64010, X3513-64011,

X3513-64012, X3513-64013,

X3513-64014, X3513-64015

Manuale di istruzioni

Bedienungshandbuch

Notice de mode d’emploi

Manual de istrucciones

用户手册

ユーザーマニュアル

User Manual

87-901-057-01

12/2019

TwisTorr 305 FS User Manual/ 87-901-057-01

Notices

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by United States and international

Manual Part Number

Publication Number: 87-901-057-01

Edition

Edition 12/2019

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

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WARNING

CAUTION

TwisTorr 305 FS

TwisTorr 305 FS User Manual / 87-901-057-01 3/258

TwisTorr 305 FS

4/258 TwisTorr 305 FS User Manual / 87-901-057-01

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Contents

Istruzioni per l’uso

Contents

TwisTorr 305 FS User Manual / 87-901-057-01 5/258

Contents

1Istruzioni per l’uso 15

Informazioni su questo manuale 17

Validità 17

Definizioni e terminologia 18

Definizione di Attenzione, Avvertenza e Nota 18

Simboli di Avvertenza 19

Sicurezza 21

Uso corretto 21

Uso improprio 22

Attrezzatura di protezione 23

Linee guida di sicurezza per pompe turbomolecolari 25

Transporto & Immagazzinamento 26

Descrizione del prodotto 27

Installazione 28

Preparazione per l’installazione 28

Apertura 30

Riparazione di TwisTorr 305 FS 32

Collegamento della flangia per alto vuoto 33

Installazione della flangia ISO-K 34

Installazione della flangia ConFlat 35

Collegamento della pompa del vuoto anteriore 36

Avvio e funzionamento di TwisTorr 305 FS 37

Arresto di TwisTorr 305 FS 38

Arresto di emergenza 38

 
Contents 
 
 
6/258 TwisTorr 305 FS User Manual / 87-901-057-01 
Manutenzione 39 
Vita del rotore 39 
Soft Start 40 
Pulizia 40 
Smaltimento 41 
Servizio post vendita 42 
2Gebrauchsanleitung 43 
Über dieses Handbuch 45 
Gültigkeit 45 
Begriffsbestimmungen und Terminologie 46 
Definition von Vorsicht, Warnung und Hinweis 46 
Warnsymbole 47 
Sicherheit 49 
Sachgemäße Verwendung 49 
Unsachgemäße Verwendung 50 
Schutzausrüstung 51 
Sicherheitsrichtlinie für Turbomolekularpumpen 53 
Transport und Lagerung 54 
Produktbeschreibung 55 
Installation 56 
Vorbereitung zum Einbau 56 
Einrichten 58 
Montage von TwisTorr 305 FS 60 
Anschluss des Hochvakuumflansches 61 
Installation des ISO-K-Flansches 62 
Installation des ConFlat-Flansches 63 
Anschluss der Vorvakuumpumpe 64 
Inbetriebnahme und Betrieb des TwisTorr 305 FS 65 

Contents

Istruzioni per l’uso

Contents

TwisTorr 305 FS User Manual / 87-901-057-01 7/258

Stoppen des TwisTorr 305 FS 66

Notausschaltung 66

Wartung 67

Rotordauer 67

Sanftanlauf 68

Reinigung 68

Entsorgung 69

Service 70

3Mode d’emploi 71

À propos de ce manuel 73

Validité 73

Définitions et terminologie 74

Définition des termes « Attention », « Avertissement » et « Note » 74

Symboles d’avertissement 75

Sécurité 77

Utilisation appropriée 77

Utilisation inappropriée 78

Équipement de protection 79

Directive de sécurité pour les pompes turbomoléculaires 81

Transport et entreposage 82

Description du produit 83

Installation 84

Préparation pour l’installation 84

Configuration 86

Montage du TwisTorr 305 FS 88

Raccordement de la bride à vide élevé 89

Installation de la bride ISO-K 90

 
Contents 
 
 
8/258 TwisTorr 305 FS User Manual / 87-901-057-01 
Installation de la bride ConFlat 91 
Raccordement de la bride à vide préliminaire 92 
Démarrage et utilisation du TwisTorr 305 FS 93 
Arrêt du TwisTorr 305 FS 94 
Arrêt d’urgence 94 
Entretien 95 
Durée de vie du rotor 95 
Démarrage progressif 96 
Nettoyage 96 
Mise au rebut 97 
Service 98 
4Instrucciones de Uso 99 
Acerca del manual 101 
Validez 101 
Definiciones y terminología 102 
Definición de Precaución, Advertencia y Nota 102 
Símbolos de advertencia 103 
Seguridad 105 
Uso correcto 105 
Uso incorrecto 106 
Equipo de protección 107
Pautas de seguridad para bombas turbomoleculares 109 
Transporte y almacenamiento 110 
Descripción del producto 111 
Instalación 112 
Preparación para instalación 112 
Puesta en marcha 114 
Montaje de la TwisTorr 305 FS 116 

Contents

Istruzioni per l’uso

Contents

TwisTorr 305 FS User Manual / 87-901-057-01 9/258

Conexión de la brida de alto vaciado 117

Instalación de la brida ISO-K 118

Instalación de la brida ConFlat 119

Conexión de la bomba pre-vaciado 120

Puesta en marcha y funcionamiento de TwisTorr 305 FS 121

Parada de la TwisTorr 305 FS 122

Parada de emergencia 122

Mantenimiento 123

Vida del rotor 123

Arranque suave 124

Limpieza 124

Eliminación 125

Servicio 126

5使用说明 127

关于这本手册 129

有效性 129

定义和术语 130

警告、警告和注释的定义 130

警告符号 131

安全 133

正确使用 133

使用不当 134

防护设备 135

涡轮分子泵安全指南 137

运输及存储 138

 
Contents 
 
 
10/258 TwisTorr 305 FS User Manual / 87-901-057-01 
产品描述 139 
安装 140 
安装准备140 
设置 142 
TwisTor 305 FS 的安装 144 
高真空法兰的连接 145 
ISO-K 法兰的安装 146 
ConFlat 法兰的安装 147 
前真空泵的连接 148 
TwisTorr 305 FS 的启动和运行 149 
停止 TwisTorr 305 FS 150 
紧急停止 150 
维护 151 
转子寿命 151 
慢启动 152 
清洗 152 
处置方式 153 
服务154 
6使用方法 155 
このマニュアルについて 157 
定義と用語 158 
警告の記号 159 
安全性 161 
適切な使用 161 

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