Agilent Technologies VS PD03 Bedienungsanleitung

DRAFT 2/25/09

FIELD INSTALLATION

INSTRUCTIONS

vacuum technologies

VS PD03 Scroll Pump

and Components

Replacement

Part Number 699910017

Rev. A

February 2009

NOTICE:ThisdocumentcontainsreferencestoVarian.

PleasenotethatVarian,Inc.isnowpartof Agilent

Technologies.Formoreinformation,goto

www.agilent.com/chem.

NOTICE: This document contains references to Varian.

Please note that Varian, Inc. is now part of Agilent

Technologies. For more information, go to

www.agilent.com/chem.

Varian Field Instruction Sheet

Prepared by Checked by Approved by Document No. Revision

Date Date Date

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VS PD03 Scroll Pump and Components Replacement

Preface

Documentation Standards

This manual uses the following documentation standards:

NOTE Notes contain important information.

CAUTION Cautions appear before instructions, which if not followed, could cause damage to

the equipment or data loss.

WARNING Warnings appear for a particular procedure or practice which, if not followed

correctly, could lead to serious injury or death.

Hazard and Safety Information

The common international symbols used in this manual and on the equipment are defined below.

OFF Supply (Power) Earth (Ground) Terminal

ON Supply (Power) Caution, Hot Surface

AC – Alternating Current Caution, Risk of Electrical

Shock

Warning, Risk of danger Protective Conductor Terminal

Frame or chassis Terminal

VS PD03 Scroll Pump and Components Replacement

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Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to

recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of

unskilled, improper, or careless operation of the equipment can be serious. Every operator or service person must read

and thoroughly understand operation/maintenance manuals and any additional information provided by Varian. All

warning and cautions must be read carefully and strictly observed. Consult local, state, and national agencies

regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your

nearest Varian office.

Solvents

WARNING The mechanical components of leak detectors may be cleaned with one of the

recommended solvents. When heated, sprayed, or exposed to high-temperature

equipment, these solvents become flammable and explosive, causing serious

injury or death. Do not use these solvents near a high-temperature source. Ventilate

the working area with a blower and work in a large, well-ventilated room.

Solvents are irritants, narcotics, depressants and/or carcinogens. Their inhalation

and/or ingestion may produce serious side effects. Prolonged or continued contact

with the skin results in absorption through the skin and moderate toxicity. Always

ensure that cleaning operations are carried out in large, well-ventilated rooms, and

wear eye shields, gloves, and protective clothing.

Due to the effective cleaning nature of VacuSolv solvent and its residue-free

properties, Varian’ Component and Spectrometer Cleaning Kit (Part Number

670029096), used in accordance with the kit instructions, is recommended for

cleaning spectrometer components. The kit can also be used for fine cleaning of

other parts in the leak detector’s vacuum system such as valves and fittings. No

rinsing steps or high-temperature drying is required following cleaning with

VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible

with most materials and does not contain toxic chemicals or CFCs

(chlorofluorocarbons). Other acceptable solvents are isopropyl alcohol (IPA) or

Dow Corning®OS-20.

To clean the leak detector plastic enclosure, the LCD display and Front Panel

buttons, use only a soft cloth slightly dampened with water or a mild soap.

Do NOT use excess water or cleaning solvents of any kind.

Avoid splashing any cleaning solvents into the unit through the ventilation

openings or Front Panel buttons. Wipe the surface with a dry lint-free cloth.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques that are

more important in leak detector servicing than in general vacuum work:

CAUTION Wear non-powdered, ESD-safe Nitride or equivalent gloves to prevent skin oils from

getting on spectrometer internal components.

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O-ring Care

When removing, checking or replacing O-rings, keep in mind the following:

NOTE Varian recommends replacing all O-rings during routine maintenance or during any

maintenance procedure requiring that O-rings be removed.

CAUTION Remove O-rings carefully with your fingers. Do not use metal tools for this task; this

prevents scratching of any sealing surfaces.

• Wipe all O-rings clean with a lint-free cloth before installation to ensure that no

foreign matter is present to impair the seal.

• Do not use grease or any other substance on O-rings that will come in contact

with the vacuum surfaces.

• Do not use alcohol, methanol or other solvents on O-rings. Doing so causes

deterioration and reduces their ability to hold a vacuum.

• Varian does not recommend the use of vacuum grease. If applicable, apply a

small amount of Apiezon®L grease and wipe the O-rings shiny dry.

Metal Seal Care

CAUTION Metal Seals must be replaced any time a spectrometer is opened. All fasteners must

be installed and torqued per assembly procedure specifications. Remove Metal

Seals carefully with your fingers or a soft tool. Metal tools scratch sealing surfaces.

• Metal Seals are supplied in pre-cleaned condition. No cleaning is required. If

necessary, Metal Seals can be cleaned using the recommended solvents. Wipe

Metal Seals clean with a lint-free cloth before installation to ensure that no for-

eign matter impairs the seal.

• Do not use grease or any other substance on Metal Seals that will come in con-

tact with the spectrometer.

Spectrometer

CAUTION Store the Ion Source/Preamplifier sub-assembly in a cool, dry area in a tightly

sealed, ESD protected container. Wear non-powdered, ESD-safe Nitride or

equivalent gloves when handling the spectrometer. Wash hands thoroughly after

handling the spectrometer filaments and especially before smoking or eating.

The spectrometer and PCB’s are static sensitive devices. Wear a grounding strap

when performing any maintenance on these units and especially when performing

maintenance of static sensitive parts.

CAUTION The spectrometer operates at a very high vacuum produced by the high vacuum

turbomolecular pump. Service of the spectrometer requires that this vacuum be

vented to the atmosphere.

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Scroll Pump Replacement

Equipment Required

• Extended Length M5 Allen Wrench

• Metric Allen Wrench Set

• M3 Phillips Head Screw Driver

For clarity, some items have been omitted from views.

WARNING Disconnect power from the unit before performing any maintenance procedure

that requires physically disconnecting any part of the system.

1. Turn off the power switch located on the back of the unit and unplug.

2. Wait 30 seconds for the high voltage to dissipate.

3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 1: Rear

and Front Cover Screws) and detach the rear plastic cover from the unit.

Figure 1: Rear and Front Cover Screws

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4. Disconnect the NW 16 connection (Figure 2: NW 16 Connection).

Figure 2: NW 16 Connection

5. Tilt the unit and unscrew the four connections underneath that hold the pump (Figure 3: Scroll Pump Mounting Con-

nections). Place the unit flat again and remove the whole pump assembly.

Figure 3: Scroll Pump Mounting Connections

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6. Disconnect the exhaust hose (Figure 4: Exhaust Hose).

Figure 4: Exhaust Hose

7. Disconnect the diaphragm, fan and motor power connectors.

8. Remove the fan assembly bracket and lay it aside (Figure 5: Fan Assembly Mounts).

Figure 5: Fan Assembly Mounts

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9. Unscrew the four M2 screws and remove the manifold block (Figure 6: Manifold Block Connections).

Figure 6: Manifold Block Connections

10.Remove the exhaust valve unit. See “Exhaust Valve Replacement” on page 10.

11. Remove the diaphragm pump. See “Diaphragm Pump Replacement” on page 12.

12.Mount the new scroll pump using the four connections seen in “Figure 3: Scroll Pump Mounting Connections” on

page 5.

13.Reattach the diaphragm pump. See “Diaphragm Pump Replacement” on page 12.

14.Reattach the exhust valve. See “Exhaust Valve Replacement” on page 10.

15.Reattach the four M2 screws to remount the manifold block.

16.Reattach the fan assembly.

17.Reconnect the diaphragm, fan and motor power connectors.

18.Reconnect the exhaust hose.

19.Attach the front cover and secure to the frame using existing hardware.

20.Connect the power cord and power up the unit.

21.Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System

Ready within ten minutes.

22.Refer to the operator's manual if the system fails to reach the System Ready mode.

Varian recommends a full calibration of the unit prior to leak test operations.

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Clippard Valve Replacement

Equipment Required

• Extended Length M5 Allen Wrench

• Metric Allen Wrench Set

• M3 Phillips Head Screw Driver

For clarity, some items have been omitted from views.

WARNING Disconnect power from the unit before performing any maintenance procedure

that requires physically disconnecting any part of the system.

1. Turn off the power switch located on the back of the unit and unplug.

2. Wait 30 seconds for the high voltage to dissipate.

3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 7: Rear

and Front Cover Screws) and detach the rear plastic cover from the unit.

Figure 7: Rear and Front Cover Screws

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4. Disconnect the two spade connectors (red arrow in Figure 8: Spade Connectors):

•Red/black

• Black/black

Figure 8: Spade Connectors

5. Use an Allen wrench to loosen valve from housing (blue arrow in Figure 8: Spade Connectors).

6. Mount the new valve and tighten.

7. Reconnect the two spade connections.

8. Attach the front cover and secure to the frame using existing hardware.

9. Attach the rear cover and secure to the unit using existing hardware.

10.Connect the power cord and power up the unit.

11. Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System

Ready within ten minutes.

Refer to the operator's manual if the system fails to reach the System Ready mode.

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