Agilent Technologies TPS-compact Bedienungsanleitung

TPS-compact User Manual

239/314

Instructions for Use

Safety Guideline for Turbomolecular Pumps 240

General Information 241

Symbols used 243

Storage 244

Preparation for Installation 245

Installation 246

Use 248

Switching on and Use of TPS-Compact 249

TPS-Compact Switching off 250

Emergency Stop 250

Maintenance 251

Disposal 252

Original Instructions

Instructions for Use

Safety Guideline for Turbomolecular Pumps

240/314 TPS-compact User Manual / 87-901-010-01 (H)

Safety Guideline for Turbomolecular Pumps

Turbomolecular pumps as described in the following operating

manual contain a large amount of kinetic energy due to the high

rotational speed in combination with the specific mass of their

rotors.

In case of a malfunction of the system for example rotor/stator

contact or even a rotor crash the rotational energy may be released.

WARNING!

To avoid damage to equipment and to prevent injuries to operating personnel

the installation instructions as given in this manual should be strictly

followed!

Instructions for Use

General Information

TPS-compact User Manual / 87-901-010-01 (H) 241/314

General Information

This equipment is destined for use by professionals. The user should

read this instruction manual and any other additional information

supplied by Agilent before operating the equipment. Agilent will not be

held responsible for any events occurring due to non-compliance, even

partial, with these instructions, improper use by untrained persons,

non-authorized interference with the equipment or any action contrary

to that provided for by specific national standards.

The TPS-compact is an integrated system with a turbo-molecular pump

for high and ultra-high vacuum applications associated with its relevant

controller and its primary pump. The system can pump any type of gas

or gas compound. It is not suitable for pumping liquids or solid particles.

The pumping action is obtained through a high speed turbine driven by

a high-performance 3-phase electric motor. The TPS-compact is free of

contaminating agents and, therefore, is suitable for applications

requiring a "clean" vacuum.

The TPS-compact is equipped with auxiliary connectors to control the

vent valve, to be controlled from a remote site by means of an host

computer connected through a serial line.

The following paragraphs contain all the information necessary to

guarantee the safety of the operator when using the equipment. Detailed

information is supplied in the appendix "Technical Information".

Instructions for Use

General Information

242/314 TPS-compact User Manual / 87-901-010-01 (H)

This manual uses the following standard protocol:

WARNING!

The warning messages are for attracting the attention of the operator to a

particular procedure or practice which, if not followed correctly, could lead to

serious injury.

CAUTION!

The caution messages are displayed before procedures which, if not followed,

could cause damage to the equipment.

NOTE

The notes contain important information taken from the text.

Instructions for Use

General Information

TPS-compact User Manual / 87-901-010-01 (H) 243/314

Symbols used

The following symbols are used consistently throughout in all

illustration:

Warning “see

installation/operating”

Protective conductor

terminal

Hot surface “Danger of

burns if hot parts are

touched”

On (Power)

Caution, risk of electric

shock

Off (Power)

WARNING!

When employing the pump for pumping toxic, flammable, or radioactive

gases, please follow the required procedures for each gas disposal. Do not

use the pump in presence of explosive gases. The pump is designed to pump

high throughput of N2, Ar and lighter gas. Should you need to pump gases

heavier than Ar, please contact Agilent technical support for informations.

Instructions for Use

Storage

244/314 TPS-compact User Manual / 87-901-010-01 (H)

Storage

In order to guarantee the maximum level of performance and

reliability of Agilent pumping systems, the following guidelines must

be followed:

▪when shipping, moving and storing pumps, the following

environmental specifications should not be exceeded:

▪temperature range: refer to the manuals of the single TPS

components

▪relative humidity range: refer to the manuals of the single

TPS components

▪the turbomolecular pumps must be always soft-started when

received and operated for the first time by the customer

▪the shelf life of a turbomolecular pump is 12 months from the

shipping date.

CAUTION!

If for any reason the shelf life time is exceeded, the pumping system has to be

returned to the factory. Please contact the local Agilent Vacuum Sales and

Service representative for informations.

Instructions for Use

Preparation for Installation

TPS-compact User Manual / 87-901-010-01 (H) 245/314

Preparation for Installation

The TPS-compact is supplied in a special protective packing. If this

shows signs of damage which may have occurred during transport,

contact your local sales office. When unpacking the system, be sure

not to drop it and avoid any kind of sudden impact or shock

vibration to it.

Do not dispose of the packing materials in an unauthorized manner.

The material is 100 % recyclable and complies with EEC Directive

85/399.

CAUTION!

In order to prevent outgassing problems, do not use bare hands to handle

components which will be exposed to vacuum. Always use gloves or other

appropriate protection.

NOTE

Normal exposure to the environment cannot damage the TPS-compact.

Nevertheless, it is advisable to keep it closed until it is installed in the system,

thus preventing any form of pollution by dust.

Instructions for Use

Installation

246/314 TPS-compact User Manual / 87-901-010-01 (H)

Installation

CAUTION!

Do not remove the adhesive and protective cap before connecting the turbopump

to the system.

Do not install or use the pumping system in an environment exposed

to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in

explosive environments or those with a high fire risk. During

operation, the following environmental conditions must be respected:

▪maximum pressure: 2 bar above atmospheric pressure

▪temperature: refer to the manuals of the single TPS components

▪relative humidity: refer to the manuals of the single TPS

components

In the presence of magnetic fields the pumping system must be

protected using a ferromagnetic shield.

The TPS-compact can be installed in any position. Fix the TPS-

compact in a stable position connecting the inlet flange of the

turbopump to a fixed counter-flange capable of withstanding a torque

of 50 Nm around its axis.

The turbopump with ISO inlet flange must be fixed to the vacuum

chamber by means of clamps or claws. The following table shows, for

each fixing device, the necessary number of clamps or claws and the

relevant fixing torque.

WARNING!

The System must be installed in a way that allows an easy interruption of the

line voltage.

Instructions for Use

Installation

TPS-compact User Manual / 87-901-010-01 (H) 247/314

Power supply cord: The correct cable for electrical wiring is a three

wires (Ph+N+Earth) cable. The wire section has to be at least 0.75

mm2(AWG18).

CAUTION!

Assure a free space all around the system at minimum of 20cm to allow proper

air circulation.

FLANGE

FIXING DEVICE

FIXING TORQUE

ISO 63

M10 clamps

22 Nm

ISO 100 K

M10 clamps

22 Nm

ISO 160 K

M10 clamps

22 Nm

The turbopump with ConFlat inlet flange must be fixed to the

vacuum chamber by means of the appropriate Agilent hardware. See

the appendix "Technical Information" for a detailed description.

NOTE

The TPS-compact cannot be fixed by means of its base.

For installation of optional accessories, see "Technical Information".

Instructions for Use

Use

248/314 TPS-compact User Manual / 87-901-010-01 (H)

Use

This paragraph details the fundamental operating procedures.

Make all electrical an pneumatic connections before the use of the

system. While heating the vacuum chamber, the temperature of the

inlet flange must not exceed 120 °C with ConFlat flanging and 80 °C

with ISO flanging.

WARNING!

Never use the pumping system when the turboinlet flange is not connected to

the vacuum chamber or is not blanked.

WARNING!

Do not touch the turbopump or any of its accessories during the heating

process. The high temperatures may cause burns.

WARNING!

Avoid impacts or harsh movements of the pump when in operation. The

bearings may become damaged and damages to the persons or the things

could be taken place.

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