Inficon CDG045D2 Bedienungsanleitung

Communication Protocol

tira68e1 (2013-05) 1

EtherCAT®

for Capacitance Diaphragm Gauges

CDG045D, CDG045D2, CDG100D,

CDG100D2, CDG160D, CDG200D

2tira68e1 (2013-05) CDGxxxD.cp

Caution

Caution: data transmission errors

Any attempt to simultaneously operate the gauge via the RS232C

Serial Interface and EtherCAT interface or the diagnostic port may

result in incorrect data and data transmission errors.

Therefore, it is inadmissible to simultaneously operate the gauge via

the RS232C Serial Interface and EtherCAT interface, or the diagnostic

port.

This Communication Protocol contains instructions for operating EtherCAT inter-

faces (slaves) together with a master.

For safety information, specifications and operation instructions of the

vacuum gauges refer to the appropriate documents (→[1], [2], [3]).

The following description of the EtherCAT interface is compliant to the EtherCAT

specification of the EtherCAT Technology Group (ETG) and to the "EtherCAT

Semiconductor Device Profile".

This manual describes the functionality of a EtherCAT slave and supports

•ETG.5003 Part 1: Common Device Profile (CDP) V0.9.0 (→[12]) and

•ETG.5003 Part 2080: Specific Device Profile (SDP) Vacuum Pressure Gauge

V0.4.4 (→[13]).

We reserve the right to make technical changes without prior notice.

In all communications with INFICON, please specify the information on the product

nameplate. For convenient reference copy that information into the space provided

below.

Model:

PN:

SN:

V W

INFICON AG, LI-9496 Balzers

General Information

Intended Use

EtherCAT–Interface

Product Identification

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This document applies to products of the temperature controlled CDG045D,

CDG045D2, CDG100D, CDG100D2, CDG160D and CDG200D series with

EtherCAT interface.

Part numbers of standard products are indicated below. OEM products have other

part numbers and different parameter settings (e.g. factory setting of setpoint) as

defined in the corresponding ordering information.

3Cx1-xxx-2380

1 DN 16 ISO-KF

3 DN 16 CF-R

9 1/2" tube

E 8VCR female

H 8VCR female long tube

C 45°

D 100°

E 160°

F 200°°

3 0.1

4 0.25

5 0.5

6 1

7 2

8 5

9 10

A 20

B 50

C 100

D 200

E 500

F 1000 (Torr only)

G 1100 (mbar only)

5 Torr (x 133 Pa; x 1.3 mbar)

6 mbar (x 100 Pa)

Measurement range

(F.S.)

Unit

Sensor temperature

Flange

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document corres-

pond to CDG045D gauges with the DN 16 ISO-KF vacuum connection. They apply

to other vacuum connections and to the other gauges by analogy.

We reserve the right to make technical changes without prior notice.

EtherCAT®Beckhoff Automation GmbH, Deutschland

EP 1070239 B1, 1040333 B1

US Patents 6528008, 6591687, 7107855, 7140085

Validity

Trademark

Patents

4tira68e1 (2013-05) CDGxxxD.cp

Contents

General Information 2

Intended Use 2

EtherCAT–Interface 2

Product Identification 2

Validity 3

Trademark 3

Patents 3

Contents 4

1Technical Data 6

2Interface Connection 7

3Operation 8

3.1 Introduction 8

3.2 Front View 8

3.3 Indicators and Switches 9

3.3.1 <RUN> LED 9

3.3.2 <ERR> LED 9

3.3.3 <LA> LED (<IN> Port) 9

3.3.4 <LA> LED (<OUT> Port) 9

3.3.5 Device Address Switch 10

4Object Structure 11

4.1 Object Dictionary structure 11

4.2 Communication Profile Objects (0x1000…0x1FFF) 12

4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF) 13

4.3.1 Manufacturer Information Common 13

4.3.2 Manufacturer Status 13

4.3.3 Manufacturer Configuration Module 1 14

4.3.4 Manufacturer Configuration Module 2 15

4.4 Input Area (0x6000…0x6FFF) 15

4.4.1 Input Common 15

4.4.2 Input Capacitance Diaphragm 15

4.4.3 Input Common 16

4.4.4 Input Piezo 16

4.4.5 Input Trip Point 1 16

4.5 Configuration Area (0x8000…0x8FFF) 17

4.5.1 Configuration Capacitance Diaphragm 17

4.5.2 Configuration Trip Point 1 17

4.5.3 Configuration Trip Point 2 19

4.6 Information Area (0x9000…0x9FFF) 20

4.6.1 Information Capacitance Diaphragm 21

4.6.2 Information Common 21

4.6.3 Information Piezo 21

4.6.4 Information Trip Point 1/2 22

4.7 Device Area (0xF000...0xAFFF) 22

4.7.1 Semiconductor Device Profile 22

4.7.2 Module Profile List 22

4.7.3 Exceptions 22

4.7.4 Active Exception Status 22

4.7.5 Active Device Warning Details 23

4.7.6 Active Device Error Details 23

4.7.7 Latched Device Warning Details 24

4.7.8 Latched Device Error Details 25

4.7.9 Device Warning Mask 25

4.7.10 Device Error Mask 25

4.7.11 Trip Point Output All 26

4.7.12 Input Latch Local Timestamp 26

4.7.13 Configure Device 26

4.7.14 Information Device 27

4.7.15 Command Zero Adjust 28

4.7.16 Full Scale Adjust 28

4.7.17 Device Reset Command 29

4.7.18 Exception Reset Command 30

4.7.19 Store Parameters Command 30

tira68e1 (2013-05) CDGxxxD.cp 5

Appendix 32

A: Literature 32

For cross-references within this document, the symbol (→XY) is used, for cross-

references to further documents, listed under literature, the symbol (→[Z]).

6tira68e1 (2013-05) CDGxxxD.cp

1 Technical Data

Further technical data →[1], [2], [3].

Communication protocol protocol specialized for EtherCAT

Communication standards IEC 61158 -2 (Ed 4.0)

IEC 61158 -3/4/5/6-12 (Ed 1.0)

Data rate 100 Mbps

Node address Explicit Device Identification

Physical layer 100BASE-Tx (IEEE 802.3)

EtherCAT connector 2 × RJ45, 8-pin (socket)

<IN>: EtherCAT input

<OUT>: EtherCAT output

Cable shielded, special Ethernet Patch Cable

or Crossover Cable (CAT5e quality or

higher)

Cable length ≤100 m

Process data Fixed PDO mapping and configurable

PDO mapping

Mailbox (CoE) SDO requests, responses and

information

31.5

short

8-VCR

female

54.1

long

110.4 3.8

114.2

DN 16 ISO-KF

31.5

OD ½" tube

31.5

DN 16 CF-R

31.5

DIAG

SP ZERO

x100 x10

ERR RUN

LA LA

IN OUT

PWR

SP1

SP2

STATUS

EtherCAT interface

Dimensions [mm]

tira68e1 (2013-05) CDGxxxD.cp 7

2 Interface Connection

For operating the temperature controlled CDGxxxD gauge via EtherCAT, two

interface cables conforming to the EtherCAT standard are required.

If no such cables are available, make two according to the following indications.

Ethernet Patch Cable or Crossover Cable (CAT5e quality) with FCC68 connector.

Pin assignment:

FCC68, 8-pin,

male, soldering side

Pin Signal Description

1 TD+ Transmission Data +

2 TD- Transmission Data -

3 RD+ Receive Data +

4 nu not used

5 nu not used

6 RD- Receive Data -

7 nu not used

8 nu not used

Pin assignment of the D-Sub 15-pin sensor connector according to the

respective operating manual (→[1], [2], [3]).

Plug the EtherCAT (and sensor) cables connector into the gauge: From the

previous device the cable connected to OUT port has to be connected to the

CDGxxxD <IN> port. And the cable from the CDGxxxD <OUT> port has to

be connected to the next device's <IN> port.

Sensor cable

FCC68 cable

<IN> port

FCC68 cable

<OUT> port

Making an EtherCAT interface

cable

Cable type

Procedure

8tira68e1 (2013-05) CDGxxxD.cp

3 Operation

Via the EtherCAT interface, the following and further data are exchanged in the

standardized EtherCAT protocol:

•Pressure reading

•Pressure unit (Torr, mbar, Pa)

•Zero adjustment

•Status and error messages

•Status of the switching functions

•Set Trip Point for switching functions

Caution

Caution: data transmission errors

Any attempt to simultaneously operate the gauge via the RS232C

Serial Interface and EtherCAT interface or the diagnostic port may

result in incorrect data and data transmission errors.

Therefore, it is inadmissible to simultaneously operate the gauge via

the RS232C Serial Interface and EtherCAT interface or the diagnostic

port.

Position Label Function

1 IN EtherCAT IN connector

2 ERR Error LED

3 x100 Address Switch × 100, hexadecimal

4 LA Link activity EtherCAT IN

5 x10 Address Switch × 10, hexadecimal

6 x1 Address Switch × 1, hexadecimal

7 RUN EtherCAT Status LED

8 LA Link activity EtherCAT OUT

9 OUT EtherCAT OUT connector

10 PWR Sensor cable connector

(Power, analog I/O, RS232C I/O and Relay contacts)

3.1 Introduction

3.2 Front View

tira68e1 (2013-05) CDGxxxD.cp 9

Displays the operating status.

Color LED State Description

off INIT (initialization status) or no power applied to device.

blinking

(200 ms on

200 ms off)

PREOP (pre-operational status).

single flash

(200 ms on

1000 ms off)

SAFEOP (safe-operational status).

Communication of cyclic data transfer running. Input values

available, output values written to the device but not

updated on device output.

green

on OP (operational status).

Displays the error content.

Color LED State Description

off No error or no power applied to device.

blinking

(200 ms on

200 ms off)

Error occurred (see error parameter).

single flash

(200 ms on

1000 ms off)

Slave device application has changed the EtherCAT state

autonomously, due to local error (see error parameter).

double flash

(200 ms on

200 ms off

200 ms on

1000 ms off)

An application watchdog timeout has occurred.

Sync Manager Watchdog timeout or communication

timeout occurred.

red

on A critical communication or application controller error has

occurred. Application controller is not responding any more

(PDI Watchdog Timeout detected by ESC)

Displays the input status.

Color LED State Description

off Port not connected or no power applied to device.

blinking Port connected and communication active.

green

on Port not connected but no communication.

Displays the output status.

Color LED State Description

off Port not connected or no power applied to device.

blinking Port connected and communication active.

green

on Port not connected but no communication.

3.3 Indicators and Switches

3.3.1 <RUN> LED

RUN

3.3.2 <ERR> LED

ERR

3.3.3 <LA> LED (<IN> Port)

3.3.4 <LA> LED (<OUT> Port)

OUT

10 tira68e1 (2013-05) CDGxxxD.cp

During device initialization, the device address switches are read by the device

firmware. This device address is supported to the master as Explicit Device

Identification.

Example: Value of the Explicit Device ID = 0xDDD (dec 3549):

0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13)

x100 x10

3.3.5 Device Address Switch

x100 x10

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