Inficon PSG550 Bedienungsanleitung
tina60e1-a (2011-04) 1
Pirani Standard Gauge
PSG550
PSG552
PSG554
Operating Manual
Incl. EC Declaration of Conformity
2tina60e1-a (2011-04)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V W; LPS
INFICON AG, LI-9496 Balzers
tina60e1-a (2011-04) 3
Validity
This document applies to products of the PSG55x series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
Flange 1 ⇒DN 16 ISO-KF
2 ⇒DN 16 ISO-KF long tube
4 ⇒DN 16 CF-F
5 ⇒DN 16 CF-R long tube
6 ⇒DN 25 ISO-KF
D ⇒4 VCR female
E ⇒8 VCR female
F ⇒1/8" NPT
K ⇒Flange 29×29 mm
M ⇒4 VCR 90° female
N ⇒7/16-20 UNF male
0 ⇒mbar
1 ⇒Torr
2 ⇒Pa
3 ⇒micron
Unit
1 ⇒Tungsten
2 ⇒Nickel
3 ⇒Al2O3coated
6 ⇒Tungsten, galvanically isolated
7 ⇒Nickel, galvanically isolated
8 ⇒Al2O3coated, galvanically isolated
Filament
3PIx-0xx-xxxx
4tina60e1-a (2011-04)
0 ⇒0.61 ... 10 V
1 ⇒1.2 ... 8.5 V
2 ⇒0.375 ... 5.529 V
3 ⇒1.57 ... 8.875 V
Measuring
signal
Interface
Receptacle
0 ⇒None (analoge)
1 ⇒DeviceNet
2 ⇒Profibus
3PIx-0xx-xxxx
0 ⇒None
1 ⇒Display
2 ⇒2 switching functions *)
4 ⇒Display & 2 switching functions *)
6 ⇒2 switching functions **)
*) Solid state relays
**) Mechanical relays
Display
Switching function
0 ⇒FCC
1 ⇒D-Sub, 9-pin
2 ⇒D-Sub, 15-pin HD
4⇒D-Sub, 15-pin HD, RS485 INF
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.
tina60e1-a (2011-04) 5
Intended Use
The Pirani Standard Gauge PSG55x has been designed for
vacuum measurement of gases in the pressure range of
5×10-5 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.
Trademark
VCR®Swagelok Marketing Co.
Patents
EP 0689669 B1, 0689670 B1
US Patent 5608168
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German
6tina60e1-a (2011-04)
Contents
Product Identification 2
Validity 3
Intended Use 5
Trademark 5
Patents 5
Scope of Delivery 5
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2Technical Data 10
2.1 Output Signal vs. Pressure 18
2.2 Gas Type Dependence 23
3Installation 24
3.1 Vacuum Connection 24
3.2 Power Connection 27
3.2.1 FCC 68, 8-pin Connector 28
3.2.2 D-Sub, 9-pin Connector 29
3.2.3 D-Sub, 15-pin HD Connector 30
3.2.4 D-Sub, 15-pin HD, RS485 INF Connector 31
3.2.5 DeviceNet Connector 32
3.2.6 Profibus Connector 33
4Operation 34
4.1 Status Indication and Displays 34
4.2 Gas Type Dependence 38
4.3 Switching Functions SP1, SP2 38
4.4 Diagnostic Port (RS232C Interface) 44
4.5 DeviceNet Operation 45
4.6 Profibus Operation 48
5Deinstallation 49
tina60e1-a (2011-04) 7
6Maintenance, Repair 51
6.1 Adjusting the Gauge 51
6.2 Replacing the Sensor 53
6.3 Troubleshooting 54
7Returning the Product 55
8Disposal 56
9Accessories 57
10 Spare Parts 58
Further Information 61
ETL Certification 62
EC Declaration of Conformity 63
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→[Z]).
8tina60e1-a (2011-04)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.
tina60e1-a (2011-04) 9
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.
10 tina60e1-a (2011-04)
2 Technical Data
For further technical data for gauges with serial inter-
faces →[3], [4], [5].
Measurement principle thermal conductance acc. to
Pirani
Measurement range 5×10-5 … 1000 mbar
Accuracy (N2)
5×10-4 … 1×10-3 mbar
±50% of reading
1×10-3 … 100 mbar ±15% of reading
100 … 1000 mbar ±50% of reading
Resolution (at 1000 mbar) ±0.15% of reading
Repeatability (N2)
1×10-3 … 100 mbar
±2% of reading
Output signal (measurement signal)
Voltage range
3PIx-0xx-xxx0
0 … +10 V
3PIx-0xx-xxx1 0 … +8.5 V
3PIx-0xx-xxx2 0 … +5.529 V
3PIx-0xx-xxx3 0 … +8.875 V
Measurement range
3PIx-0xx-xxx0
+0.61 … +10 V
3PIx-0xx-xxx1 +1.2 … +8.5 V
3PIx-0xx-xxx2 +0.375 … +5.529 V
3PIx-0xx-xxx3 +1.57 … +8.875 V
Error signal 0 … 0.05 V
Voltage vs. pressure
3PIx-0xx-xxx0
1.286 V/decade, logarithmic
3PIx-0xx-xxx1 1 V/decade, logarithmic
3PIx-0xx-xxx3 1 V/decade, logarithmic
3PIx-0xx-xxx2 →20
Dieses Handbuch passt für folgende Modelle
2
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