Inficon PCG550 Bedienungsanleitung

tina56e1-f (2015-09) 1

Pirani Capacitance Diaphragm

Gauge

PCG550

PCG552

PCG554

Operating Manual

Incl. EU Declaration of Conformity

2tina56e1-f (2015-09)

Product Identification

In all communications with INFICON, please specify the infor-

mation given on the product nameplate. For convenient refer-

ence copy that information into the space provided below.

Model:

PN:

SN:

V W; LPS

INFICON AG, LI-9496 Balzers

tina56e1-f (2015-09) 3

Validity

This document applies to products of the PCG55x series.

Part numbers of standard products are indicated below. OEM

products have other part numbers and different parameter

settings (e.g. factory setting of setpoint) as defined in the

corresponding ordering information.

3PCx-0xx-xxxx

Flange 1 DN 16 ISO-KF

2 DN 16 ISO-KF long tube

4 DN 16 CF-F

5 DN 16 CF-R long tube

6 DN 25 ISO-KF

D 4 VCR female

E 8 VCR female

F 1/8" NPT

K Flange 29×29 mm

M 4 VCR 90° female

N 7/16-20 UNF male

0 mbar

1 Torr

2 Pa

3 micron

Unit

1 Tungsten

2 Nickel

3 Ceramic coated

6 Tungsten, galvanically isolated

7 Nickel, galvanically isolated

8 Ceramic coated,

galvanically isolated

Filament

4tina56e1-f (2015-09)

3PCx-0xx-xxxx

Measuring

signal

Interface

*) Solid state relays

**) Mechanical relays

0 0.61 ... 10.23 V

1 1.2 ... 8.68 V

2 0.375 ... 5.659

3 1.57 ... 9.05 V

Receptacle

0 None (analoge)

1 DeviceNet

2 Profibus

8 EtherCAT

0 None

1 Display

2 2 switching functions *)

3 ATM sensor &

2 switching functions *)

4 Display & 2 switching functions *)

5 Display & ATM sensor &

2 switching functions *)

6 2 switching functions **)

7 ATM sensor &

2 switching functions **)

Display

Switching function

0 FCC

1 D-Sub, 9-pin

2 D-Sub, 15-pin HD

4D-Sub, 15-pin HD, RS485 INF

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with the DN 16 ISO-KF vacuum

connection and display. They apply to gauges with other vacuum

connections by analogy.

We reserve the right to make technical changes without prior

notice.

tina56e1-f (2015-09) 5

Intended Use

The Pirani Capacitance Diaphragm Gauge PCG55x has been

designed for vacuum measurement of gases in the pressure

range of 5×10-5 … 1500 mbar.

It must not be used for measuring flammable or combustible

gases which react in air.

The gauge is intended for operation in connection with an

INFICON Vacuum Gauge Controller VCG401, 402, 403 or with

another suitable controller.

Functional Principle

The PCG gauge is a combination gauge consisting of a Pirani

sensor and a diaphragm capacitive sensor. Both sensors are

constantly active.

At low pressures, only the signal of the Pirani sensor is used for

pressure measurement; at high pressures, only the signal of the

diaphragm capacitive sensor. To determine the output signal in

the intermediate range, both signals are used proportionally to

the pressure.

Trademark

VCR®Swagelok Marketing Co.

Patents

EP 0689669 B1, 0689670 B1, 0658755 B1

US Patente 5608168, 4031997, 5583297

Scope of Delivery

1× gauge

1× pin for adjusting settings via buttons

1× Operating Manual English

1× Operating Manual German

6tina56e1-f (2015-09)

Contents

Product Identification 2

Validity 3

Intended Use 5

Functional Principle 5

Trademark 5

Patents 5

Scope of Delivery 5

1Safety 8

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2Technical Data 10

2.1 Output Signal vs. Pressure 19

2.2 Gas Type Dependence 24

3Installation 25

3.1 Vacuum Connection 25

3.2 Power Connection 28

3.2.1 FCC 68, 8-pin Connector 29

3.2.2 D-Sub, 9-pin Connector 30

3.2.3 D-Sub HD, 15-pin Connector 31

3.2.4 D-Sub HD, 15-pin, RS485 INF Connector 32

3.2.5 DeviceNet Connector 33

3.2.6 Profibus Connector 34

3.2.7 EtherCAT Connector 35

4Operation 36

4.1 Status Indication and Displays 36

4.2 Gas Type Dependence 40

4.3 Switching Functions SP1, SP2 40

4.4 ATM Setpoint 47

4.5 Diagnostic Port (RS232C Interface) 49

4.6 DeviceNet Operation 50

4.7 Profibus Operation 53

4.8 EtherCAT Operation 54

tina56e1-f (2015-09) 7

5Deinstallation 55

6Maintenance, Repair 57

6.1 Adjusting the Gauge 57

6.2 Adjusting the Atmospheric Pressure Sensor 59

6.3 Troubleshooting 59

6.4 Replacing the Sensor 62

7Returning the Product 63

8Disposal 64

9Accessories 65

10 Spare Parts 66

Further Information 69

ETL Certification 70

EU Declaration of Conformity 71

For cross-references within this document, the symbol (→XY)

is used, for cross-references to further documents, listed under

"Further Information", the symbol (→[Z]).

8tina56e1-f (2015-09)

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ-

mental damage.

Caution

Information on correct handling or use. Disregard can lead to

malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by

persons who have suitable technical training and the neces-

sary experience or who have been instructed by the end-user

of the product.

tina56e1-f (2015-09) 9

1.3 General Safety Instructions

•Adhere to the applicable regulations and take the necessary

precautions for the process media used.

Consider possible reactions with the product materials.

Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

•Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the

safety instructions in this document.

•Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations

and take the necessary precautions when handling contamin-

ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null

and void if the end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.)

on the product

•use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the

process media used.

Gauge failures due to contamination or wear and tear, as well as

expendable parts (e.g. filament) are not covered by the warranty.

10 tina56e1-f (2015-09)

2 Technical Data

For further technical data for gauges with DeviceNet and

Profibus interface →[3], [4], [5], [6].

Measurement range 5×10-5 … 1500 mbar

Measurement principle

10 mbar … 1500 mbar

diaphragm capacitive

sensor

1 … 10 mbar crossover range

5×10-5 … 1 mbar thermal conductance acc. to

Pirani

Accuracy (N2)

5×10-4 … 1×10-3 mbar

±50% of reading

1×10-3 … 100 mbar ±15% of reading

100 … 950 mbar ±5% of reading

950 … 1050 mbar ±2.5% of reading

Repeatability (N2)

1×10-3 … 1100 mbar

±2% of reading

Output signal (measurement signal)

Voltage range

3PCx-0xx-xxx0

0 … +10.23 V

3PCx-0xx-xxx1 0 … +8.68 V

3PCx-0xx-xxx2 0 … +5.659 V

3PCx-0xx-xxx3 0 … +9.05 V

Measurement range

3PCx-0xx-xxx0

+0.61 … +10.23 V

3PCx-0xx-xxx1 +1.2 … +8.68 V

3PCx-0xx-xxx2 +0.375 … +5.659 V

3PCx-0xx-xxx3 +1.57 … +9.05 V

Error signal 0 V (default)

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