Inficon UL5000 Versionshinweis

Catalog-No.

from software version

TECHNICAL HANDBOOK

UL5000

Helium Leak Detector

550-500A,

550-501A

V 5.14

iina74e1-h (1408) Translation of the original handbook

2Table of contents

iina74e 0.fm technical handbook(1408)

Table of contents

1 General Information 6

1.1 Notes on the Use of this Handbook 6

1.1.1 Safety Symbols 6

1.1.2 Indications 7

1.1.3 Symbols of Vacuum Technology 7

1.1.4 Definition of Terms 7

1.2 Support from INFICON Service 9

1.2.1 Service Centers 10

1.3 Introduction 12

1.3.1 Purpose 12

1.3.2 Technical Data 13

1.3.2.1 Physical Data 13

1.3.2.2 Electrical Data 14

1.3.2.3 Other Data 14

1.3.2.4 Ambient Conditions 14

1.4 Unpacking 14

1.4.1 Supplied Equipment 15

1.4.2 Accessories and Options 16

1.4.2.1 Sniffer line SL200 16

1.4.2.2 Toolbox 16

1.4.2.3 Helium Bottle Holder 16

1.4.2.4 ESD Mat 16

1.4.2.5 RC1000 Remote control 17

2 Installation 18

2.1 Transportation 18

2.2 Working Location 20

2.3 Electrical Connections 21

2.3.1 Mains Power 21

2.3.2 Connections for the Data Acquisition Systems 23

2.3.2.1 Accessories 24

2.3.2.2 Digital Out 24

2.3.2.3 Digital In 25

2.3.2.4 Recorder 26

2.3.2.5 RS232 26

2.3.2.6 Remote Control RC1000 / Wireless Transmitter 26

2.4 Vacuum Connections 27

2.4.1 Inlet Port 27

2.4.2 Exhaust 27

2.4.3 Vent 27

2.4.4 Purge 27

2.5 Default parameters 28

3 First Operation Check 29

3.1 Needed Equipment 29

3.2 Description of the Initial Operation 29

Table of contents 3

iina74e 0.fm technical handbook(1408)

3.2.1 Startup and Measure 29

3.2.2 Internal Calibration 32

3.2.3 Verification 32

4 Description and Working Principle 33

4.1 Introduction 33

4.2 Components of the UL5000 33

4.2.1 Vacuum System 33

4.2.2 Control Panel 35

4.2.2.1 LC Display 35

4.2.2.2 START Button 35

4.2.2.3 STOP Button 36

4.2.2.4 ZERO Button 36

4.2.2.5 MENU Button 37

4.2.2.6 Soft Keys 37

4.2.2.7 Numerical Entries 38

4.3 Working Modes 39

4.3.1 Vacuum Mode 39

4.3.2 Sniffer Mode 40

5 Operation of the UL5000 41

5.1 Display 41

5.2 The Screen in Run-Up Mode 41

5.3 Display in stand-by mode 41

5.3.1 Purging 42

5.4 The Screen in Measurement Mode 42

5.4.1 Call for Calibration 42

5.4.2 Speaker Volume 43

5.4.3 Status Line in the Display 43

5.4.4 Numerical Display Mode 44

5.4.5 Trend Mode 44

5.4.6 HYDRO•S on / off 44

6 Description of the Menu 45

6.1 Main Menu 45

6.2 View 47

6.2.1 Scale linear/logarithmic 47

6.2.2 Display-range auto/manual 48

6.2.3 Time axis 48

6.2.4 Contrast 49

6.2.5 Background in Stand-by 49

6.2.6 Decimal places 50

6.2.7 Lower display limit 50

6.3 Mode 51

6.4 Trigger & Alarms 52

6.4.1 Trigger Level 1 52

6.4.2 Trigger Level 2 53

6.4.3 Volume 53

6.4.4 Units 54

4Table of contents

iina74e 0.fm technical handbook(1408)

6.4.5 Alarm delay 54

6.4.6 Audio alarm type 55

6.4.6.1 Pinpoint 55

6.4.6.2 Leak rate prop. 55

6.4.6.3 Setpoint 56

6.4.6.4 Trigger alarm 56

6.5 Calibration 56

6.6 Settings 57

6.6.1 Vacuum settings 58

6.6.1.1 Automatic purge 58

6.6.1.2 Vent delay 59

6.6.1.3 Vacuum ranges 59

6.6.1.4 HYDRO•S 60

6.6.1.5 Leak rate internal test leak 60

6.6.1.6 Machine factor 61

6.6.1.7 Booster TMP mode 61

6.6.2 Zero & Background 61

6.6.2.1 Background Suppression 62

6.6.2.2 Calculate Inlet Area Background 62

6.6.2.3 Zero 63

6.6.3 Mass 63

6.6.4 Interfaces 64

6.6.4.1 Control Location 64

6.6.4.2 Recorder output 65

6.6.4.3 RS232 Protocol 66

6.6.4.4 Scaling Recorder Output 67

6.6.5 Miscellaneous 68

6.6.5.1 Time&Date 68

6.6.5.2 Language 68

6.6.5.3 Leak rate filter 69

6.6.5.4 Mains Frequency 69

6.6.5.5 Service interval exhaust filter 69

6.6.5.6 Service message exhaust filter 70

6.6.6 Parameter save / load 70

6.6.6.1 Save parameter set 71

6.6.6.2 Load parameter set 71

6.6.7 Monitoring functions 71

6.7 Information 74

6.7.1 Service 74

6.8 Access Control 75

6.8.1 Access to CAL function 75

6.8.2 Access to Trigger&Alarme menu 76

6.8.3 Change Device PIN 76

6.8.4 Change Menu-PIN 76

7 Calibration 77

7.1 Introduction 77

7.2 The calibration routines 77

7.2.1 Internal Calibration 78

7.2.1.1 Automatic Internal Calibration 78

Table of contents 5

iina74e 0.fm technical handbook(1408)

7.2.1.2 Manual Internal Calibration 78

7.2.2 External Calibration 78

7.3 Factor of Calibration - Range of Values 81

8 Error And Warning Messages 82

8.1 Hints 82

8.2 List of Errors & Warnings 83

9 Maintenance works 88

9.1 Hints 88

9.2 INFICON Service 89

9.3 Key for Maintenance Schedule 89

9.4 Maintenance Plan 90

9.5 Maintenance groups 91

9.5.1 1500 hours maintenance 91

9.5.2 4000 hours maintenance 92

9.5.3 8000 hours maintenance 93

9.5.4 16000 hours maintenance 94

9.6 Description of the maintenance work 95

9.6.1 Opening the UL5000 95

9.7 Check/Replace the filter cell 96

9.8 Replacing the Exhaust Silencer 98

9.9 Turbomolecular pump TMH 071 99

9.10 Scroll Pump 99

Appendix 100

Declaration of Conformity 102

6General Information

iina74e 01.fm technical handbook(1408)

1 General Information

Notice: We recommend that you carefully read this technical handbook to ensure

optimum operating conditions right from the start.

This technical handbook contains important informations on the functions, instal-

lation, start-up and operation of the UL5000.

General

We reserve the right to modify the design and the specified data. The illustrations are

not binding.

1.1 Notes on the Use of this Handbook

1.1.1 Safety Symbols

Important remarks concerning operational safety and protection are emphasised as

follows:

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor

equipment damage.

Warning

Information on preventing extensive equipment and environmental damage.

STOP Danger

Information on preventing any kind of physical injury.

Skilled personnel

Indicates procedures that must be performed by skilled personnel only.

General Information 7

iina74e 01.fm technical handbook(1408)

1.1.2 Indications

Tipp Information on helpful procedures.

Notice: Information on special technical requirements that the user must comply

with.

The references to diagrams consists of the Chapter number, figure number and the

item number in this order. For example: Fig. 2-4/7 refers to item 7 in the figure 4 of

Chapter 2.

1.1.3 Symbols of Vacuum Technology

Given in the following are some important vacuum symbols which are used in this

manual.

Vacuum pump in general

Turbomolecular pump

Pressure gauge

Valve

1.1.4 Definition of Terms

Autoranging

The range of the preamplifier and the vacuum ranges are selected automatically.

The autoranging feature of the UL5000 covers the entire range or leak rates

depending on the selected operating mode. Not only the leak rate signal, but also the

pressure in the test sample (inlet pressure P1) and the fore vacuum pressure (P2)

are used for control purposes. Range switching between the main ranges is

performed via valves. Fine range switching within the main ranges is implemented

by switching over the gain factor of the preamplifier.

Autotune Mass alignment

This function automatically aligns the mass spectrometer so that a maximum leak

rate is displayed. The control processor changes the voltage which erates the ions

in the selected mass range until a maximum ion current is detected by the ion

detector. During each calibration the mass alignment is run automatically.

8General Information

iina74e 01.fm technical handbook(1408)

Auto zero

Determination and automatic adaptation of the helium background.

Through this function, the internal zero level of the instrument is determined which is

then subtracted from the current leak rate signal. This function is run during the cali-

bration process or when operating the start pushbutton, provided the UL5000 has

been running previously for at least 20 seconds in the standby or vent mode. If the

helium background previously suppressedshould dropso that for the duration of the

zero time only the display limit will be displayed, the zero level is adapted automati-

cally.

Themenu allowsthe usertoprogramthe UL5000 according to his requirements.The

menu has a tree architecture.

Default

Status of the UL5000 when supplied by the factory.

GROSS

GROSS is a measurement mode which allows high inlet pressure (1 to 15 mbar).

The smallest detectable leak rate is 1×10-6 mbar l/s.

FINE

FINEisthemediummeasurementmodewithinletpressurebetween2and0,4 mbar.

Detection limit is 1×10-10 mbar l/s.

ULTRA

ULTRA is the most sensitive measuring range with inlet pressures below 0,4 mbar.

The minimum detectable leak rate is < 5×10-12 mbar l/s.

Foreline pressure

Pressure in the foreline between Turbo pump and scroll pump.

Minimum detectable leak rate

The smallest leak rate the UL5000 is able to detect (5E-12 mbar l/s).

Internal helium background

The existing helium partial pressure in the measurement system. The level of the

internal helium background is measured in the Stand-by mode and subtracted from

the measured signal.

Measure Measurement mode

The UL5000 measures the leak rate of the test sample.

General Information 9

iina74e 01.fm technical handbook(1408)

1.2 Support from INFICON Service

If an instrument is returned to INFICON or an authorised representative of INFICON,

please indicate whether the instrument is free of substances damaging to health or

whether it is contaminated.Ifitiscontaminatedalsoindicatethenatureofthehazard.

INFICON must return any appliances without a Declaration of Contamination to the

sender’s address. A form for stating details as to the type of contamination is repro-

duced in Fig. 1-1.

A maintenance and service contract is recommended.

Fig. 1-1: Declaration of Contamination form

INFICON GmbH

Bonner Str. 498,50968 Cologne, Germany

Tel: +49 221 3474 2222 Fax: +49 221 3474 2221

www.inficon.com leakdetection.service

inficon.co

zisa01e1-a

Declaration of Contamination

Legally binding declaration:

I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may

arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

Name

Date and legally binding signature Companystamp

1) or not containing any amount

of hazardous residues that

exceed the permissible ex-

posure limits

Process related contamination of product:

toxic no 1) yes 

caustic no 1) yes 

biological hazard no yes 2)

explosive no yes

2)

radioactive no yes 2)

other harmful substances no 1) yes 

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has

been submitted. Non-completion will result in delay.

This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Copies:

Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name Chemical name

(or symbol)

Precautions associated

with substance

Action if human contact

Description of product

Type

Article Number

Serial Number

Reason for return

Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub-

stances which are damaging to

health yes 

This form can be downloaded

from our website.

2) Products thus conta mi-

nated will not be ac-

cepted without written

evidence of decontami-

nation!

10 General Information

iina74e 01.fm technical handbook(1408)

1.2.1 Service Centers

In case you urgently need assistance please get in touch with the local INFICON

Service in your country or the service hotline in Cologne, Germany:

Algeria [email protected] Finland [email protected]

Agramkow

Sonderborg

Phone: +45 741 236 36

Fax: +45 744 336 46

Agramkow

Sonderborg

Phone: +45 741 236 36

Fax: +45 744 336 46

Belarus [email protected] France Christophe.Zaffa[email protected]

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

OLV France

Orsay

Phone: +33 476 351 584

Fax: +33 476 351 584

Belgium [email protected] Germany [email protected]

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

Brazil [email protected] Hungary [email protected]

PV Pest Vácuo Ltda.

Santa de Parnaíba

Phone: +55 114 154 4888

Fax: +55 114 154 4888

Kontrade

Budaörs

Phone: +36 23 50 38 80

Fax: +36 23 50 38 96

Bulgaria leakdetection.service@inficon.com India [email protected]

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

Dashpute

400 064

Phone: +91 22 888 0324

Fax: +91 22 888 0324

Canada [email protected] Ireland r[email protected]

Vacuum Products Canada Ltd.

Ontario

Phone: +905.672.7704

Fax: +905.672.2249

INFICON

Blackburn

Phone: +44 1254 678 250

Fax: +44 1254 698 577

Central America [email protected] Italy [email protected]

MEISA S.a. de C.V.

Querètaro

Phone: +52 44 22 25 42 80

Fax: +52 44 22 25 41 57

INFICON GmbH

Castelnuovo

Phone: +39 045 6 40 25 56

Fax: +39 045 6 40 24 21

China [email protected] Israel [email protected]

INFICON LTD

Hong Kong

Phone: +852.2862.8863

Fax: +852.2865.6883

Mark Technologies Ltd.

Kiriat Ono

Phone: +972 35 34 68 22

Fax: +972 35 34 25 89

INFICON LTD

Beijing

Phone: +86.10.6590.0164

Fax: +86.10.6590.0521

Japan [email protected]

INFICON LTD

Guangzhou

Phone: +86.20.8723.6889

Fax: +86.20.8723.6003

INFICON Co. Ltd.

Yokohama

Phone: +81.45.471.3396

Fax: +81.45.471.3387

INFICON LTD

Shanghai

Phone: +86.21.6209.3094

Fax: +86.21.6295.2852

Czech Republic filip.lisec@inficon.com Korea [email protected]

INFICON GmbH

Pilsen

Phone +420 734 331 758

Fax: +420 604 203 037

INFICON Ltd.

Sungnam city

Phone: +82 312 062 890

Fax: +82 312 063 058

Denmark [email protected] INFICON Ltd.

Suwon City

Phone: +82 312 062 890

Fax: +82 312 063 058

Agramkow

Sonderborg

Phone: +45 744 336 36

Fax: +45 744 336 46

INFICON Ltd.

Cheonan City

Phone: +82 312 062 890

Fax: +82 312 063 058

Egypt [email protected] Latvia leakdetectio[email protected]

Agramkow

Sonderborg

Phone: +45 741 236 36

Fax: +45 744 336 46

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

Estonia [email protected] Lithuania [email protected]

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

INFICON GmbH

Cologne

Phone: +49 221 56788-112

Fax: +49 221 56788-9112

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