MKS Spectra-Physics HighQ-2 Bedienungsanleitung

©Newport Corporation MKS Spectra-Physics Confidential 1of 11

Pre-InstallationGuide

For all Spirit & HighQ-2

Laser Models

Spectra-Physics,Inc.

3635 Peterson Way

Santa Clara, CA 95054

April 2020

©Newport Corporation MKS Spectra-Physics Confidential 2of 11

Table of Contents

Introduction........................................................................................................................3

When the system Arrives...................................................................................................4

Inspection ...........................................................................................................4

Review Instruction Manuals................................................................................4

Laser Safety Considerations...............................................................................4

Diagnostics.........................................................................................................4

Pre-Installation Considerations..........................................................................................5

Locationand Environment...................................................................................5

Physical Description

.............................................................................................6

Utility Requirements...........................................................................................................7

Computer Requirements.....................................................................................8

Pre-InstallationChecklist....................................................................................................9

Physical Locations:.............................................................................................9

Maintenance Agreement .................................................................................................10

Nalco Mixture....................................................................................................10

Filters

...............................................................................................................................10

Chiller Fluid.......................................................................................................11

GeneralProcedures..........................................................................................11

©Newport Corporation MKS Spectra-Physics Confidential 3of 11

Introduction

Congratulations on your purchase of a Spectra-Physicssystem. This guide describes pre-

installation information for your laser system.

Some preliminary planning is essential to avoid unnecessary delays during installation

and to ensure easy operation and access to your system. You are requested to carefully

consider your operating environment prior to installation. Proper water, power and room

temperature are required for each system.

A checklist of pre-installation considerations is provided in this guide. You are responsible

for meeting these requirements prior to installation, with due consideration given to all

applicable building and safety codes.

We at Spectra-Physics intend to provide you with responsive support so that you can

derive great satisfaction and value in using our systems for your applications. We are

available to you at 1-800-456-2552.

©Newport Corporation MKS Spectra-Physics Confidential 4of 11

When the system Arrives

Inspection

When the system arrives, any sign of damage to the shipping crates should be brought

to the attention of the delivering freight company. A claim must be filed with that

commercial carrier (usually within 30 days). Notify the originating Spectra-Physics office

of any shipping damage. Shipping damage is not covered by Spectra-Physics.

Your packing list will show all items that you have ordered. Open all the packages and

check each item for possible damage during shipping. Check the items against your

packing list. Some items may have been installed at the factory.

Each system comes with a manual; verify that you have received this item.

Please report any missing or damaged items to Spectra-Physics, or you may contact your

Spectra- Physics Sales Engineer.

Review Instruction Manuals

Please read the manual to get vital information about your system. Familiarize yourself

with the system. You are encouraged to spend as much time as possible reviewing the

system components before your Spectra-Physics Service Engineer arrives for the

installation and training.

Laser Safety Considerations

In addition to reviewing the sections in the manual regarding laser safety; be sure to

have

the proper safety glasses available for ALL lab personnel present during the installation

and testing of your system. For more information, please call Spectra- Physics at 1-800-

456-2552.

Diagnostics

During the course of installation, power measurements will be demonstrated on all of

the appropriate wavelengths. Your Service Engineer can identify which specifications

will be demonstrated and the equipment necessary to conduct such tests. A non-

standard system will require special consideration.

To have other published specifications demonstrated, consult with your Service Engineer

to determine whether additional diagnostic equipment will be required.

©Newport Corporation MKS Spectra-Physics Confidential 5of 11

Pre-Installation Considerations

Location and Environment

The location of the system and environment of your lab should have the following features:

A safe location that meets all applicable building codes.

Easy access with adequate clearance around the instrument.

An optical table that will meet the space requirement of the instruments

to be installed.

Proper air conditioning could be critical for the performance of the laser.

For certain applications ambient room temperature changes may be an important

factor for the laser system’s performance. Air ducts should not blow directly on

laser or optical path.

To ensure stable day-to-day operation, the recommended minimum and maximum

operating room temperatures are 20 - 25°C. Room temperature should ideally be

22°C and should not fluctuate ±1°C during any two-hour period.

In some applications vibration isolation may be required for your system.

Structural integrity of the flooring could play an important role.

Please note that the laser head is very heavy and requires a sturdy and stable

optical table.

Consider room requirements for future maintenance and upgrades by your Spectra-

Physics Field Service Engineer.

©Newport Corporation MKS Spectra-Physics Confidential 6of 11

Physical Description

Dimensions and Weights

inches (L,W,H) mm (L,W,H) pounds kilograms

HighQ-2

Laser Head 8.74 x 8.03 x 4.06 222 x 204 x 103 13.6 6.2

Controller 18.9 x 19.0 x 3.5 479 x 483 x 88 28.2 12.8

Spirit One models

1040-8 / ps10 Laser Head 26.9 x 12.2 x 6.4 683 x 310 x 163 88.0 40.0

1040-8-SHG Laser Head 29.9 x 12.2 x 6.4 759 x 310 x 163 99.0 45.0

Power Supply 11.0 x 5.7 x 1.9 280 x 144 x 48.5 < 8.60 < 3.9

Chiller 15.7 x 19.0 x 10.5 400 x 483 x 267 68.0 31.0

Spirit 4, 8, 16, 16HE, 30HE

Laser Head 34.4 x 13.4 x 7.3 874 x 340 x 185 155.0 70.0

Controller / Chiller 25.6 x 22.1 x 29.4 650 x 560 x 746 176.0 80.0

Spirit 70 & 100

Laser Head 39.7 x 14.6 x 9.0 1009 x 370 x 229 >154.4 >70.00

Controller / Chiller 31.5 x 21.8 x 43.4 800 x 553 x 1103 220.5 100.0

Dimensions

Weight

Laser

©Newport Corporation MKS Spectra-Physics Confidential 7of 11

Utility Requirements

Water

The Spirit is a closed loop cooled system. If a water-to-water chiller model is ordered, utility

water services with a flow speed of 13 to 20 liters per minute (3.4 to 5.3 GPM) might be

required.

Power Requirements

HighQ-2

Controller 100 – 240 VAC, 50/60 Hz

Current: <2A

Spirit One

Power Supply 90 – 305VAC, 47 – 63 Hz

Current: <10A

Chiller (HECR008)100 – 240VAC, 50/60 Hz

Current: 10A

Spirit 4, Spirit 8, Spirit 16 (non-HE)

Controller/Chiller 100 – 230 VAC, 50/60 Hz

Current: <16A

Spirit 16HE, Spirit 30HE

Controller/Chiller 100 – 240 VAC, 50/60 Hz

Current: <14A

Spirit 70 and Spirit 100

Controller 208 – 230 VAC, 50/60 Hz, Single Phase (NEMA-6- 20 socket)

Current: <16A

Chiller 208 – 230 VAC, 50/60 Hz, Single Phase (NEMA-6- 20 socket)

Current: <16A

©Newport Corporation MKS Spectra-Physics Confidential 8of 11

Computer Requirements

• Pentium processor or newer, 1 GHz or higher

• 1 GB RAM, or greater

•

• 30 MB available disk space for installation, or greater

•

• a mouse or other Windows-compatible pointing device

•

• a video display with at least one of the following screen pixel resolutions: 800 x

600, 1024 x 768, 1280 x 768, 1280 x 800, 1280 vx 1024, 1600 x 1200, or 1680 x

1050.

•

• an available USB port for direct connection to the provided USB-CAN adaptor

(avoid using a USB splitter or hub).

•

• For Spirit 70/100 systems, an available ethernet port is required to utilize the

laser’s built-in GUI, via direct connection to the Spirit head’s ethernet port (RJ-45

connector).

HighQ-2, Spirit One, Spirit 4, Spirit 8, Spirit 16, Spirit 16HE, Spirit 30HE:

Spirit graphical user interface (GUI) control software loaded on a Windows7© or

Windows

10© 32-bit or 64-bit computer. For more information on the control software, refer

to the

User's Manual.

Spirit 70 & Spirit 100:

To access the GUI for the laser, any computer with network hardware and a patch

cable is sufficient (RJ-45 connectors). As software,

any browser software is suitable.

To access the GUI, please refer to the system manual of your Spirit laser system.

In order to maintain CDRH safety requirements, run only the GUI software on the control

computer during laser operation, i.e., do not run other software at the same time.

©Newport Corporation MKS Spectra-Physics Confidential 9of 11

Pre-Installation Checklist

Physical Locations:

❑

A location with adequate clearance around system to conduct service and

accessible by Spectra‐Physics personnel.

❑

A temperature-controlled room.

❑

Utility services have been installed.

❑

Local building and safety codes are in compliance and have been verified.

When Your System Arrives:

❑

Check crates for damage.

(If damaged, file a claim with the carrier and notify Spectra‐Physics.)

❑

Uncrate and place the system on your work surface.

(Two or more people may be required to lift some equipment.)

❑

Compare the packing list with your quotation. Call your Spectra-Physics

office about any discrepancies.

❑

Check that all manuals were received.

❑

Save all packing and shipping material until the installation has beencompleted.

❑

Obtain the correct safety glasses and a powermeter.

Customer Signature Date

Phone Number Fax Number

E-Mail

Sales Order Number

Before the arrival of your Spectra-Physics Service Engineer please review the

following pre- installation requirements. When all the requirements have been

met, initial the boxes and fax a signed copy to the Spectra-Physics Service

department at (408) 980-6921.

©Newport Corporation MKS Spectra-Physics Confidential 10 of 11

Maintenance Agreement

To maintain a valid warranty on your Spectra-Physics system, it is necessary for the

customer to assume the responsibility and perform the routine maintenance program.

Failure to do so may result in the warranty being voided.

Nalco Mixture

The Nalco Cleaner (P/N 1607-0547) is used to flush your system clean of ferrous metals

and copper alloys as a result of corrosion. It is recommended as a maintenance

procedure that the chiller/critical cooling loop in each piece of equipment is cleaned and

treated 1x per year. The laser does not have to be lasing. The cleaner should be

circulated for a minimum of 8 hours (the longer the better if time permits in order to

assure thoroughcleaning).

Filters

ALPS filter

All models except HighQ-2 and Spirit One:

When the laser cavity humidity reaches an unacceptable level, the ALPS air purge filter

(P/N 90074765) should be replaced.

This filter has an average lifetime 1.5 to two years,

depending on the relative

humidity and the temperature of the operating environment.

All models except HighQ-2:

The Chiller’s filter screen should be inspected and cleaned every 3 months, or else

changed when it can no longer be rinsed clean. You should also monitor the laser

Chiller temperature to make sure cooling is within specifications.

If the laser is not going to be used for an extended period of time, turn off the laser and

drain the cooling solution.

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