Olympus MX61A Bedienungsanleitung

ASSEMBLY/SETUP

MANUAL

This manual is for assembly and setup of the Olympus MX61A Semiconductor/FPD Inspection

Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself fully with the

use of this microscope, we recommend that you study this manual thoroughly before operating the

microscope. As this manual will be needed when you replace the lamp or fuses or modify a setup,

retain it in an easily accessible place near the work desk for future reference.

A X 7 6 7 7

MX61A

MOTORIZED 300 mm COMPATIBLE

SEMICONDUCTOR/FPD INSPECTION

MICROSCOPE

MX61A

IMPORTANT – Be sure to read this section for safe use of the equipment. – 1-8

1 NOMENCLATURE 9-11

2 ASSEMBLY 12-25

2-1 Assembly Diagram ........................................................................................................................................................................... 12

2-2 Detailed Assembly Procedures ........................................................................................................................... 13-24

2-3 Modules Installed by Olympus...................................................................................................................................... 25

CONTENTS

CENTRATION OF REFLECTED LIGHT APERTURE IRIS DIAPHRAGM

5 CENTRATION OF MERCURY/XENON BURNER 38,39

6 EXTERNAL CONTROL OF REVOLVING NOSEPIECE 40

3 SETUP OF MX-OPU61A OPERATION UNIT 26-36

7 MAINTENANCE PARTS LIST 41

PROPER SELECTION OF THE POWER SUPPLY CORD ............................................................ 42,43

1Initialization 2USER Screen Setup

3CONFIG 1/6 Screen Setup 4CONFIG 2/6 Screen Setup

5CONFIG 3/6 Screen Setup 6CONFIG 4/6 Screen Setup

7CONFIG 5/6 Screen Setup 8CONFIG 6/6 Screen Setup

1Connector Used 2Pin Layout and Signal Names

3Revolving Nosepiece Position Numbers (Index Nos. on the Center of Revolving Nosepiece)

3. Do not light the mercury or xenon burner while it is not mounted on the microscope because the UV rays in their light are

harmful to your eyes.

The used mercury burner should be disposed of as an industrial waste.

4. The eye point of this microscope can be adjusted in the range between 408 and 560 mm above the desktop surface (with

basic combination). According to the SEMI standard guidelines (SEMI S8-0705), prepare a microscope desk with an

optimum height for the application of the customer.

IMPORTANT

This microscope employs a UIS2 (UIS) (Universal Infinity System) optical design, and should be used

only with eyepieces, objectives, observation tubes, etc. specified for use with the UIS2 (UIS) optics.

Less-than-optimal performance may result if inappropriate accessories are used.

The MX61A microscope is compatible with stage strokes of 200 mm (8 inches) and 300 mm (12

inches). Its control can be motorized by using the MX-OPU61A Operation Unit (with built-in computer)

and a PC in which the MX2-BSW Control Software is installed. The motorized control is also available

using the MX-HS61A Hand Switch with the jog dial control capability (the MX-OPU61A or the MX2-BSW

software should also be used in combination with the MX-HS61A Hand Switch).

SAFETY PRECAUTIONS

1. Always use the power cord provided by Olympus. If no power cord is provided, please select the power cord by referring

to the section “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of this instruction manual. If the proper

power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment. Lay out the

power cord at a sufficient distance from the sources of heat such as the power supply unit/light source and lamp housing

to avoid contact with these heat sources.

2. To avoid potential shock hazard, always set the main switch of the BX-UCB control box to “ ” (OFF) and disconnect the

power cord before replacing the bulb/burner or connecting/disconnecting motorized parts. And since the system contains

motorized parts, do not plug in the power cord until all of the assembly procedures have completed.

}Always use the lamp bulb or burner supplied by Olympus.

Halogen bulb for light guide

light source

Bulb/Burner Model Average Life

Halogen bulb · 12V100WHAL-L (Long life type)

(PHILIPS 7724) 2000 hrs.

· 12V100WHAL (High-resolution type)

(PHILIPS 7023) 50 hrs.

Mercury burner · USH-103OL

(USHIO) 300 hrs.

· HBO103W/2

(OSRAM) 300 hrs.

Xenon burner · UXL-75XB-A

(USHIO) 200 hrs.

· JCR12V-100WB

(USHIO) 1000 hrs.

MX61A

5. The desktop surface on which the microscope system is installed should be almost horizontal with a tilting angle of less

than 20’ with a 300 mm (12-inch) stage or less than 1° with a 200 mm (8-inch) stage (to prevent spontaneous displace-

ment of the stage) and rigid.

(Weight of the microscope system with the basic combination for reflected light observation: 14x12-inch stage combination

— approx. 52 kg, 8x8-inch stage combination — approx. 45 kg)

}Although this microscope is designed with excellent vibration resistance, its maximum performance can be achieved

when an anti-vibration bench is used.)

6. The lamp housing surface at the rear of the microscope frame will become very hot during operation. When installing the

microscope, ensure that there are ample free spaces (of more than 100 mm) around and in particular above and below

the lamp housing. Also, the power cord and other cables should be laid out at distances from the microscope because

contact with them may result in their fusion and an electric shock due to it.

7. To avoid a potential shock hazard, make sure that the power cord is safety grounded/earthed.

8. To allow each microscope manifest its full performance, reserve an installation space having the minimum dimensions

described below before assembly and installation of the microscope. (Sizes in )

}The dimensions of the area enclosed in alternate long and two short dashes lines indicate the stage movement range.

The dimensions marked *are variable depending on the lamp housing used.

}When maintenance is required, a larger workspace can be prepared by changing the observation tube orientation or

moving the stage.

}The following installation space is set according to the SEMI standard guidelines (SEMI S8-0705). It is recommended that

you set the optimum installation space for each customer based on the SEMI standard guidelines (SEMI S8-0705).

MX61A installation space: When the 14x12-inch stage is combined

Unit: mm

MX61A

Stage movement

range

Installation footprint

Unit: mm

Installation space

(Note) The center of gravity is an approximate position when the microscope is equipped with the basic combination for

reflected light oservation. Note that the position is variable depending on the weight of specimen, position of the

stage and other modules used.

MX61A installation space: When the 8x8-inch stage is combined

MX61

Stage movement

range

MX61A external view, eye point and center of gravity: When the 14x12-inch stage is combined

Unit: mm

Eye point

Position of center of gravity

(Bottom view of microscope)

MX61A

MX61A external view, eye point and center of gravity: When the 8x8-inch stage is combined

Unit: mm

Eye point

Position of center of gravity

(Bottom view of microscope)

(Note) The center of gravity is an approximate position when the microscope is equipped with the standard module

combination for transmitted light observation. Note that the position is variable depending on the weight of speci-

men, position of the stage and other modules used.

9. To prevent toppling of the microscope system, keep the total height of the microscope below 1 meter (3.3 ft) when

attachments (including Olympus optional modules and the CCD camera prepared by the customer) are mounted.

Fig. 1

@²

10. Each microscope has screw holes (M5, depth 10 mm) for prevention of

toppling (in the case of an earthquake or microscope imbalance) on the

side panels @ (x 2 holes) and the rear panel ² (x 2 holes). Clamp the

microscope using L-shaped clamps and these screw holes as required.

When clamping the microscope using L-shaped clamps prepared

by the customer, be sure to use steel bolts (strength category 12.9)

with as long as possible threaded sections (8 mm or more is rec-

ommended).

Safety Symbols

The following symbols are found on the microscope. Study the meaning of the symbols and always use the equipment

in the safest possible manner.

Symbol Explanation

Be careful not to have your finger caught by the stage or stage holder.

Be careful against high voltage (1 kV or more) applied inside the unit.

Indicates that the surface becomes hot, and should not be touched with bare hands.

Before use, carefully read the instruction manual. Improper handling could result in injury to the

user and/or damage to the equipment.

lIndicates that the main switch is ON.

Indicates that the main switch is OFF.

Caution indications

Caution indications are affixed at parts where special precaution is required when handling and using the microscope.

Always heed the cautions.

Caution indication

positions

Lamp housing

/power supply unit [High temperature caution]

Light guide light source

(LG-PS2) [High temperature caution]

Front of base

(MX61A)

[Caution against finger

catching]

Power supply unit [High voltage caution]

MX61A

1Getting Ready

1. Do not use the microscope where it is subjected to direct sunlight, high

temperature and humidity, dust or vibrations. (For the operating conditions,

refer to the INSTRUCTIONS manual’s chapter 8, “SPECIFICATIONS” on

page 43.)

2. A microscope is a precision instrument. Handle it with care and avoid

subjecting it to sudden or severe impacts. Never attempt to rotate the

motorized revolving nosepiece by hand; otherwise, the gear or other parts

may be damaged.

3. When moving the microscope, detach the observation tube, stage, lamp

housing and specimen to reduce the total system weight, then insert the

two provided carrying rods @ firmly into each of the left and right side

panels, and attach the two provided guarding parts ² on the two carrying

rods on the front.

If the guarding parts are not attached, the person holding the front

carrying rods may have a finger caught between the carrying rod

and the desktop.

Two persons are needed to carry the microscope; one should hold the

two front carrying rods and the other person should hold the rear carrying

rods. Be sure to move the microscope cautiously. (The microscope frame

weight is about 31 kg, or 68.2 lbs.)

}After movement, remove the guarding parts and carrying rods and retain

them carefully without losing. The carrying rods can be inserted in the

four threaded holes on the rear of the microscope. For the screw holes

left by removing the carrying rods, attach the provided screw caps on the

holes for the rear carrying rods and the cap seals on the holes for the

front carrying rods.

#Do not change the position of the microscope by sliding it on the

desktop surface; otherwise, the rubber feet will be damaged.

4. Be sure to attach the transport clamping plate(s) to the stage before

transporting it.

With the 14x12-inch stage combination, the center of gravity varies

greatly depending on the position of the stage. To ensure extra

stability, keep the two provided carrying rods attached to the mounting

holes on the front right side when using the microscope.

2Maintenance and Storage

1. To clean the lenses and other glass components, simply blow dirty away using a commercially available blower and wipe

gently using a piece of cleaning paper (or clean gauze).

If a lens is stained with fingerprints or oil smudges, wipe it gauze slightly moistened with commercially available absolute

alcohol.

Since the absolute alcohol is highly flammable, it must be handled carefully.

Be sure to keep it away from open flames or potential sources of electrical sparks –– for example, electrical

equipment that is being switched on or off.

Also remember to always use it only in a well-ventilated room.

2. If any part of the equipment (other than glass components) gets dirty, with it with a clean cloth.

If the part is extremely dirty, do not attempt to use organic solvents to clean it; instead, use a soft, lint-free cloth slightly

moistened with a diluted neutral detergent.

3. Never disassemble any part other than instructed of the microscope. This could result in malfunctions or reduced

performance.

4. When not using the microscope, keep it covered with a dust cover. Make sure the lamp housing is cool before covering

the microscope.

5. When disposing of the microscope. Check the regulations and rules of your local government and be sure to observe

them.

Fig. 2

@²

CE marking

This device complies with the requirements of both directive 89/336/EEC, 2004/108/EC concerning

electromagnetic compatibility and directive 2006/95/EC concerning low voltage. The CE marking indicates

compliance with the above directives.

FCC

This device has been subjected to the compliance evaluation of the following FCC regulation:

· FCC Part 15, Subpart B ClassA: Radio Frequency Equipment (Commercial and industrial areas)

NOTE: This equipment has been tested and found to comply with the limits for a Class A digital device,

pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection

against harmful interference when the equipment is operated in a commercial environment. This

equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in

accordance with the instruction manual, may cause harmful interference to radio communications.

Operation of this equipment in a residential area is likely to cause harmful interference in which case

the user will be required to correct the interference at his own expense.

FCC WARNING: Changes or modifications not expressly approved by the party responsible for compliance

could void the user’s authority to operate the equipment.

CALIFORNIA USA ONLY

This operation unit uses a Lithium Battery which contains Perchlorate Material - special handling may apply,

See www.dtsc.ca.gov/hazardouswaste/perchlorate.

SEMI

This device has been subjected to the compliance evaluations of the following guidelines under the S8 Standard.

· S2-0706: Safety Guidelines for Semiconductor Manufacturing Equipment

· S8-0705: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

3Applicable Standards

1. This device is in compliance with or certified by the following standards.

2. Although this device is designed for use in industrial environments, its full performances may not be manifested if it is not

operated properly. Be sure to handle it properly as instructed in this manual.

This device is designed for use in industrial environments (Class A device).

Using it in a residential environment may affect other equipment in the environment.

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