Agilent Technologies 5517B Bedienungsanleitung

Agilent Technologies

Agilent

5517B/BL/C/D/DL/FL

Laser Head

User’s Guide

Notices

No part of this manual may be reproduced

in any form or by any means (including

electronic storage and retrieval or transla-

tion into a foreign language) without prior

agreement and written consent from Agi-

lent Technologies, Inc. as governed by

United States and international copyright

laws.

Manual Part Number

05517-90077

Edition

First edition, June 2009

Printed in USA

Agilent Technologies, Inc.

5301 Stevens Creek Boulevard

Santa Clara, California 95052-8059

Warranty

The material contained in this docu-

ment is provided “as is,” and is subject

to being changed, without notice, in

future editions. Further, to the maxi-

mum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not lim-

ited to the implied warranties of mer-

chantability and fitness for a particular

purpose. Agilent shall not be liable for

errors or for incidental or consequen-

tial damages in connection with the

furnishing, use, or performance of this

document or of any information con-

tained herein. Should Agilent and the

user have a separate written agree-

ment with warranty terms covering the

material in this document that conflict

with these terms, the warranty terms

in the separate agreement shall con-

trol.

Technology Licenses

The hardware and/or software described in

this document are furnished under a

license and may be used or copied only in

accordance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of

a U.S. Government prime contract or sub-

contract, Software is delivered and

licensed as “Commercial computer soft-

ware” as defined in DFAR 252.227-7014

(June 1995), or as a “commercial item” as

defined in FAR 2.101(a) or as “Restricted

computer software” as defined in FAR

52.227-19 (June 1987) or any equivalent

agency regulation or contract clause. Use,

duplication or disclosure of Software is

subject to Agilent Technologies’ standard

commercial license terms, and non-DOD

Departments and Agencies of the U.S. Gov-

ernment will receive no greater than

Restricted Rights as defined in FAR

52.227-19(c)(1-2) (June 1987). U.S. Govern-

ment users will receive no greater than

Limited Rights as defined in FAR 52.227-14

(June 1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any

technical data.

Safety Notices

CAUTION

A CAUTION notice denotes a haz-

ard. It calls attention to an operat-

ing procedure, practice, or the like

that, if not correctly performed or

adhered to, could result in damage

to the product or loss of important

data. Do not proceed beyond a

CAUTION notice until the indi-

cated conditions are fully under-

stood and met.

WARNING

A WARNING notice denotes a haz-

ard. It calls attention to an operat-

ing procedure, practice, or the like

that, if not correctly performed or

adhered to, could result in personal

injury or death. Do not proceed

beyond a WARNING notice until

the indicated conditions are fully

understood and met.

Agilent 5517B/BL/C/D/DL/FL

Laser Head

User’s Guide

This guide describes how to use the Agilent 5517B/BL/C/D/DL/FL

Laser Head. The information in this guide applies to laser heads

having the serial prefix number listed below.

SERIAL PREFIX NUMBER US4627 for 5517B

US4605 for 5517BL

US4627 for 5517C

US4614 for 5517D

US4631 for 5517DL

US4636 for 5517FL

Agilent Technologies, Inc. 8.CD.L.03.11.97.R1.J.CW1FL

Santa Clara Site

5301 Stevens Creek Boulevard

Santa Clara, California 95052-8059

Certification

and Warranty

Certification

Agilent Technologies certifies that

this product met its published

specification at the time of

shipment from the factory. Agilent

further certifies that its calibration

measurements are traceable to

the United States National

Institute of Standards and

Technology (formerly National

Bureau of Standards), to the

extent allowed by the Institute’s

calibration facility, and to the

calibration facilities of other

International Standards

Organization members.

Warranty

Agilent warrants

Agilent hardware, accessories and

supplies against defects in

materials and workmanship for a

period specified by each product

from date of shipment. If Agilent

receives notice of such defects

during the warranty period, Agilent

will, at its option, either repair or

replace products which prove to

be defective. Replacement

products may be either new or

like-new.

Agilent warrants that

Agilent software will not fail to

execute its programming

instructions, for the period

specified above, due to defects in

material and workmanship when

properly installed and used. If

Agilent receives notice of such

defects during the warranty

period, Agilent will replace

software media which does not

execute its programming

instructions due to such defects.

For detailed warranty

information, see back matter.

Safety Considerations

General

This product and related

documentation must be reviewed

for familiarization with this safety

markings and instructions before

operation.

This product is a safety Class I

instrument (provided with a

protective earth terminal).

Before Applying Power

Verify that the product is set to

match the available line voltage

and the correct fuse is installed.

Before Cleaning

Disconnect the product from

operating power before cleaning.

Safety Earth Ground

An uninterruptible safety earth

ground must be provided from the

mains power source to the product

input wiring terminals or supplied

power cable.

Warning Symbols That May Be

Used In This Book

Instruction manual symbol; the

product will be marked with this

symbol when it is necessary for

the user to refer to the instruction

manual.

Indicates hazardous voltages.

Indicates earth (ground) terminal.

Indicates terminal is connected to

chassis when such connection is

not apparent.

Safety Considerations (contd)

Indicates Alternating

current.

Indicates Direct current.

BODILY INJURY OR DEATH

MAY RESULT FROM FAILURE

TO HEED A WARNING. DO

NOT PROCEED BEYOND A

WARNING UNTIL THE

INDICATED CONDITIONS ARE

FULLY UNDERSTOOD AND

MET.

Damage to equipment, or

incorrect measurement data,

may result from failure to heed

a caution. Do not proceed

beyond a CAUTION until the

indicated conditions are fully

understood and met.

These CAUTION labels are

required by the United States

Center for Devices and

Radiological Health. Failure to

follow their instructions may result

in personal injury.

This symbol indicates laser

radiation.

For additional safety and

acoustic noise information,

see back matter.

WARNING

CAUTION

CONTINOUS WAVE 1mW 670nm

CLASS II LASER PRODUCT

LASER RADIATION-DO NOT

STARE INTO BEAM

CAUTION

LASER RADIATION

(ALSO WHEN OPEN AND INTERLOCK

FAILED OR DEFEATED)

DO NOT STARE INTO BEAM

MAXIMUM OUTPUT: 1 mw

PULSE SPEC: continuous wave

LASER MEDIUM: helium neon

CLASS II LASER PRODUCT

CAUTION

AVOID EXPOSURE

LASER LIGHT EMISSION FROM THIS APERTURE

CAUTION

EXIT

PORT

THREE POSITION

SHUTTER CONTROL:

OPEN, REDUCED

APERTURE, CLOSED

DO NOT STARE

INTO BEAM.

ALIGNMENT

APERTURE

FOR REDUCED

BEAM

+ 15V POWER ON

- 15V POWER ON

READY

LASER ON

COMPLIES WITH

21 CFR 1040.10

AND 1040.11

5517D

HeNe Laser

Opt.

SN: US44444444

Power: 200 uW

Split Freq: 3.74 MHz

ISM 1 - A

ICES/NMB-001

Agilent Technologies Inc.

5301 Stevens Creek Blvd.

Santa Clara, CA 95051

July, 2005

Made in U.S.A. of domestic and

foreign content

N10149

LASER RADIATION

CAUTION

(ALSO WHEN OEPN AND INTERLOCK,

IF ANY, FAILED OR DEFEATED)

DO NOT STARE INTO BEAM

MAXIMUM OUTPUT: 1 mw

PULSE SPEC: continuous wave

LASER MEDIUM: helium neon

CLASS II LASER PRODUCT

LASER HEAD SAFETY LABELS

END PRODUCT LASER SAFETY CONSIDERATIONS

The Agilent 5517B/BL/C/D/DL/FL Laser Head complies with U.S.

National Center for Devices and Radiological Health regulations 21

CFR 1040.10 and 1040.11.

These regulations may also apply to the end product into which the

Agilent 5517B/BL/C/D/DL/FL Laser Head will be designed. Care

must be taken to insure that the end product complies with all

applicable national and local laser safety regulations.

FDA/CDRH Accession Number is 9020360.

Agilent 5517B/BL/C/D/DL/FL User’s Guide vii

Contents

1 General Information

Introduction 2

Description of the Agilent 5517B/BL/C/D/DL/FL

Laser Head 2

Manual Organization 5

Options 6

Accessories 7

Cables 7

Power Supply 9

Related Documents 9

2 Laser Head at a Glance

Laser Head Front Panel at a Glance 12

Laser Head Rear Panel at a Glance 13

3Installation

Introduction 16

Preparing the Laser Head for Use 16

Unpacking and Inspection 16

Warranty Claims 17

Installing the Laser Head 17

Connecting the Laser Head Cables 18

Electrical Considerations 25

Grounding considerations 25

Power supply requirements 25

Power dissipation 25

Fusing 25

Mounting Considerations 27

Orientation 27

Thermal isolation 27

Heat flow considerations 28

viii Agilent 5517B/BL/C/D/DL/FL User’s Guide

Contents

Vibration isolation 28

Magnetic shielding 28

Mounting plane tolerance 29

Mounting and clearance 29

Powering Up the Laser Head 30

4PerformanceTests

Introduction 32

Recommended Test Equipment 32

Performance Tests 33

Laser power output test 33

Split frequency test 35

Wavelength test 36

Performance Test Record 37

5 Adjustments

Introduction 40

Safety Considerations 40

Recommended Test Equipment 41

Laser Head Adjustments 41

Equipment needed 41

Preheat setting 42

Adjustment Test Record 49

6 Using the Laser Head in a System

Introduction 52

A one-axis example is used for simplicity 52

Basic steps apply to all laser systems 52

Agilent laser interferometer positioning systems at a glance 52

All Agilent laser systems share a similar configuration 53

A controller is required for all laser positioning systems 54

Setting Up the System Electronics 54

Install the laser electronics board in the PC 54

Connect the electronics cables 54

Power up the laser head 55

Agilent 5517B/BL/C/D/DL/FL User’s Guide ix

Contents

Aligning the Optics 56

Making Measurements — An Example 57

Solving Problems 60

7Service

Introduction 62

Unpacking and Inspection 62

Warranty Claims 62

Contacting Agilent Technologies 62

Laser Head Shipment 63

Tagging for Service 63

Packaging for Reshipment 63

Laser Head Troubleshooting 64

Exchange Laser Tube Assemblies 64

Troubleshooting 64

Disassembly Procedures 68

Tools Required 68

To remove the Front Panel and the Cover 69

To remove the A3 Controller/Reference Board 70

To remove the A1 Connector Board 70

To remove the A4 Sampler Board 71

To remove the A5 Laser Tube Assembly and A2 Power Supply 71

8 Specifications

Introduction 74

Calibration cycle 74

Specifications and characteristics 74

Specifications and Characteristics 74

Index

x Agilent 5517B/BL/C/D/DL/FL User’s Guide

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