Agilent Technologies FRG-700 Bedienungsanleitung

Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702

User Manual

2 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual

Notices

Manual Part Number

TQMa74e1

Edition A.00, January 2024

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Agilent Technologies LDA Malaysia

Sdn Bhd Bayan Lepas

Free Industrial Zone 11900 Bayan Lepas,

Penang Malaysia

Printed in Italy

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

warranties of merchantability and

fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

connection with the furnishing, use, or

performance of this document or of

any information contained herein.

Should Agilent and the user have a

separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance with

the terms of such license.

Restricted Rights Legend

U.S. Government Restricted Rights.

Software and technical data rights

granted to the federal government

include only those rights customarily

provided to end user customers.

Agilent provides this customary

commercial license in Software and

technical data pursuant to FAR 12.211

(Technical Data) and 12.212

(Computer Software) and, for the

Department of Defense, DFARS

252.227-7015 (Technical Data -

Commercial Items) and DFARS

227.7202-3 (Rights in Commercial

Computer Software or Computer

Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 3

Contents

1Instructions for Use 5

About this manual 6

Validity 6

Definitions and terminology 7

Definition of Caution, Warning and Note 7

Warning Symbols 8

Safety 10

Proper use 10

Improper use 11

Safety guideline for FRG-700 and FRG-702 12

Disposal 13

Service 14

2Technical Information 15

Product Description 16

Technical Specifications 17

FRG-700 and FRG-702 Outline 20

Installation 24

Vacuum Connection 24

Removing the Magnet Unit (only for Gauges with CF Flanges) 27

Electrical Connection 28

Use With an Agilent Controller 28

Use With Another Control Device 28

Contents

4 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual

Operation 29

Adjusting the Gauge 32

Deinstallation 34

Cleaning FRG-700 35

Replacing the Pirani element 36

Cleaning FRG-700, Replacing Parts 36

Disassembling FRG-700 37

Reassembling FRG-700 38

Cleaning FRG-702 39

Cleaning FRG-702, Replacing Parts 40

Disassembling FRG-702 41

Reassembling FRG-702 42

Troubleshooting 44

Spare Parts 45

Instructions for Use

Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 5

1 Instructions for Use

About this manual 6

Validity 6

Definitions and terminology 7

Definition of Caution, Warning and Note 7

Warning Symbols 8

Safety 10

Proper use 10

Improper use 11

Safety guideline for FRG-700 and FRG-702 12

Disposal 13

Service 14

Instructions for Use

6 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual

About this manual

Validity

This manual lists the instructions for the users of the FRG-700 and FRG-702, with

particular reference to the notions relating to safety, operation and first level

maintenance, limited to maintenance operations for which the user is responsible.

The maintenance operations, illustrated in the specific sections, with specific

provisions relating to the higher level of maintenance (personnel specifically trained

for maintenance operations) must not be carried out by the user.

For a correct installation and start/stop, please refer to "Installation" chapter.

For more detailed technical use, please refer to "Operations" chapter.

NOTE 1 This manual contains useful information so that all personnel using the

FRG-700 and FRG-702 can operate it safely and guarantee perfect efficiency,

for its entire life span.

2 Keep this manual, together with all the related publications, in an accessible

place known to all operators/maintenance personnel.

Instructions for Use

Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 7

Definitions and terminology

Definition of Caution, Warning and Note

Some important references of this manual are highlighted and framed in

contrasting color.

CAUTION Caution messages are displayed before procedures which, if not observed, could

cause damage to the equipment.

WARNING

Warning messages draw the operator's attention to a specific procedure or

practice which, if not performed correctly, could result in serious personal

injury.

NOTE Notes are intended to call attention to important information and provide more

detail regarding specific steps.

Instructions for Use

8 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual

Warning Symbols

The following is a list of symbols that appear in conjunction with warnings on the

FRG-700 and FRG-702. The hazard they describe is also shown.

A triangular symbol indicates a warning. The meanings of the symbols that may

appear alongside warnings in the documentation are as follows:

Generic hazard

ETL (Electrical Testing

Laboratories)

European Declaration

of Conformity

No access to pacemaker carriers

Magnetic Field

Waste Electrical and Electronic Equipment

Instructions for Use

Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual 9

The following symbol may be used on warning labels attached to the instrument.

When you see this symbol, refer to the relevant operation or service manual for the

correct procedure referred to by that warning label.

The following symbols appear on the instrument for your information.

CE certification

Waste Electrical and Electronic Equipment

Generic Hazard

No access to pacemaker carriers

Magnetic Field

ETL (Electrical Testing Laboratories)

Instructions for Use

10 Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual

Safety

This section contains the information, prescribed by the Low Voltage Directive

2014/35/EU, which is essential for the compliance and observance of the safety

regulations both generally and in relation to the specific use of the product.

Failure to comply with these instructions and the other instructions contained in this

manual may render the safety conditions envisaged in the design phase inefficient and

cause accidents to those operating the product.

Agilent Technologies declines all responsibility for damage to the product or for the

physical safety of the operator or third parties deriving from the non-observance of the

safety rules indicated in the technical documentation.

Proper use

This manual contains important warnings and safety instructions to be observed in

order for the unit to work safely.

The product described in this manual is intended exclusively for the area of

application specified in the instructions. The manual also provides indications

regarding the essential requirements for the application and operation of the

product as well as the safety measures that can be adopted to guarantee regular

operation. Agilent Technologies does not provide any guarantee or assume any

responsibility for applications other than those described in this manual or in which

the essential requirements and safety measures are not respected.

The product must only be used by qualified personnel who are able to take the

necessary safety measures under conditions that do not cause damage or injury.

Any accessories and equipment used with the product must be supplied or

approved by Agilent Technologies. Any adjustment or maintenance operation must

be performed by a professional technician informed about the risks.

Repairs on the product must be carried out exclusively by Agilent authorized

personnel.

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