Agilent Technologies TriScroll 620 INV Series Bedienungsanleitung

INSTALLATION AND

OPERATION MANUAL

Vacuum Products Division

DRAFT 11/28/16

TriScrollTM 620 INV

Series

Dry Scroll

Vacuum Pump

Manual No. X3828-90620

Revision A

September 2016

TriScroll 620 INV Series Vacuum Pump

Agilent, Inc.

DRAFT 11/28/16

TriScroll™620 INV

Dry Scroll Vacuum Pump

TriScroll is a trademark of Agilent, Inc.

TriScroll 620 INV Series Vacuum Pump

Contents

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Warranty Replacement and Adjustment . . . . . . . . 5

Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

General Information . . . . . . . . . . . . . . . . . . . . . . . . . 7

Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Pump Safety Symbols . . . . . . . . . . . . . . . . . . . . . . 7

Preparation for Installation . . . . . . . . . . . . . . . . . . 8

Installation Requirements . . . . . . . . . . . . . . . . . . . . . 9

Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 9

Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 9

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Technical Information . . . . . . . . . . . . . . . . . . . . . . . . 10

Pump Electrical Controller . . . . . . . . . . . . . . . . . . . 12

Technical Specifications . . . . . . . . . . . . . . . . . . . 12

Serial Interface Specification RS485 and RS232 . 13

Connect the Serial and I/O Ports to an External Cable

Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Exhaust Silencer Kit . . . . . . . . . . . . . . . . . . . . . . . . 15

Vibration Isolation Kit. . . . . . . . . . . . . . . . . . . . . . . 15

HEPA Inlet filter . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Cleaning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Unpacking and Inspection . . . . . . . . . . . . . . . . . . . 17

Installation Requirements . . . . . . . . . . . . . . . . . . . . 18

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Mechanical Connections . . . . . . . . . . . . . . . . . . . . 20

Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Vacuum Pump Isolation Valve . . . . . . . . . . . . . . 20

Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Bearing Purge . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

General Information . . . . . . . . . . . . . . . . . . . . . . 24

Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 24

Maintenance and Tooling Kits . . . . . . . . . . . . . . 24

Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . 25

Request for Return Health and Safety Certification

List of Figures

Figure Caption Page

1 Interface Drawing with Dimensions . . . . . . 11

2 Pumping Speed Curves . . . . . . . . . . . . . . . 11

3 Driving Frequency vs. Analog Input . . . . . . 12

4 T+ Pumps List . . . . . . . . . . . . . . . . . . . . . . . 14

5 T-Unknown Pump. . . . . . . . . . . . . . . . . . . . 14

6 Serial and I/O Ports to External Cable . . . . . 15

7 TriScroll 620 INV Vacuum Pump . . . . . . . . 17

List of Tables

Table Title Page

1 Specifications . . . . . . . . . . . . . . . . . . . . . . . 10

2 P1 I/O-1 Interlock . . . . . . . . . . . . . . . . . . . . 12

3 J1 - Serial Port . . . . . . . . . . . . . . . . . . . . . . . 13

4 P2 I/O-2 Port on DB9 Male Connector . . . . 13

5 T-Plus Software Variables . . . . . . . . . . . . . . 13

6 Status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . 14

7 Circuit Breaker Requirements . . . . . . . . . . . 19

8 Troubleshooting Chart. . . . . . . . . . . . . . . . . 22

9 Other Related Manuals . . . . . . . . . . . . . . . . 24

10 Maintenance and Tooling Kits. . . . . . . . . . . 24

11 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 25

TriScroll 620 INV Series Vacuum Pump

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TriScroll 620 INV Series Vacuum Pump

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any

warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements

made by any person, including representatives of Seller, which are inconsistent or in conflict with the

terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an

officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or

adjustment, written authorization from Seller or its authorized representative for the return and

instructions as to how and where these Products should be returned must be obtained. Any Product

returned to Seller for examination shall be prepaid via the means of transportation indicated as

acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and

any warranty claim on any item that has been altered or has been returned by non-acceptable means of

transportation. When any Product is returned for examination and inspection, or for any other reason,

Customer shall be responsible for all damage resulting from improper packing or handling, and for loss

in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole

responsibility for determining the cause and nature of failure, and Seller’s determination with regard

thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at its expense; in addition, a charge for testing and examination

may be made on Products so returned.

TriScroll 620 INV Series Vacuum Pump

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TriScroll 620 INV Series Vacuum Pump

DRAFT 11/28/16

Instructions for Use

General Information

This equipment is designed for use by professionals. The

user should read this instruction manual and any other

additional information supplied by Agilent before

operating the equipment. Agilent will not be held

responsible for any events that occur due to

non-compliance with these instructions, improper use by

untrained persons, non-authorized interference with the

equipment, or any action contrary to that provided for by

specific national standards.

The TriScroll™ 620 INV is a dry scroll vacuum pump

specifically optimized for helium leak detection

equipment. This pump is suitable for pumping air or inert

gases. The pump is not intended to pump toxic, corrosive,

explosive, or particulate-forming gases.

The following paragraphs contain all the information

necessary to guarantee the safety of the operator when

using the equipment. Detailed information is supplied in

“Technical Information” on page 10.

This manual uses the following standard safety protocol:

Storage

When transporting and storing the pump, the following

environmental requirements should not be exceeded:

Pump Safety Symbols

The following symbols are used to designate pump parts,

operations and hazards:

WARNING The warning messages are for attracting

the attention of the operator to a partic-

ular procedure or practice which, if not

followed correctly, could lead to serious

injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important informa-

tion taken from the text.

Temperature: –20 °C to 60 °C (–4 °F to 140 °F)

Relative humidity: 0 to 95% (non-condensing)

Caution, Hot surface: Danger of

burns if hot parts are touched.

Warning: See

Installation/Operating mode

instructions.

Caution: Risk of electrical shock.

DRAFT 11/28/16

TriScroll 620 INV Series Vacuum Pump

Preparation for Installation

The pump is supplied in a special protective packing. If

this shows signs of damage, which may have occurred

during transport, contact your local sales office.

Total weight of the packing, including the pump, is

approximately 40 kg (87 lbs).

WARNING When unpacking the pump, be sure not

to drop it, and avoid any kind of sudden

impact or shock vibration to it.

WARNING The TriScroll 620 INV weighs 32 kg

(70 lbs). Use extreme caution when

handling heavy parts. A two person lift

is recommended. Failure to perform a

two person lift may result in personal

injury.

WARNING The System must be installed in a way

that allows an easy interruption of the

line voltage.

WARNING Power supply cord: The correct cable

for electrical wiring is a three wires

(Ph+N+Earth) cable. The wire section

has to be at least 0.75 mm2 (AWG18).

CAUTION Assure a free space all around the sys-

tem at minimum of 20 cm () to allow

proper air circulation.

NOTE Normal exposure to the environment

cannot damage the pump. Neverthe-

less, it is advisable to keep the pump

inlet closed until the pump is installed

in the system.

TriScroll 620 INV Series Vacuum Pump

DRAFT 11/28/16

Installation Requirements

Do not install or use the pump in an environment

exposed to atmospheric agents (rain, snow, ice), dust,

aggressive gases, or in explosive environments or those

with a high fire risk.

During operation, the following environmental

conditions must be respected:

Operation

In order to reach ultimate vacuum, the pump must be left

running for about an hour with the inlet sealed.

Unlike conventional oil-sealed pumps, Agilent’s dry scroll

pumps do not have fluid to cleanse them of accumulated

dust and debris. Run the pump periodically at atmosphere

for a minute or two to flush out the pump. Flush the pump

regularly and adjust this schedule according to your

specific conditions.

Start up Procedure

1. Be sure that the vacuum system isolation valve is

closed.

2. Turn on power to the pump.

3. Open the isolation valve.

Shutdown Procedure

1. Close the vacuum system isolation valve. This

prevents debris in pump from being transported into

the vacuum system.

2. Turn off power to the pump.

Maintenance

Personnel responsible for pump operation and

maintenance must be well-trained and aware of the

accident prevention rules.

If a pump is to be discarded, it must be disposed of in

accordance with specific national and local standards.

Temperature: +5 °C to +40 °C (41 °F to 104 °F)

Relative humidity: 0 to 95% (non-condensing)

WARNING During operation the outer surface of

the motor housing can become hot.

Avoid touching the motor housing

during pump operation.

WARNING When employing the pump for pump-

ing toxic, flammable, or radioactive

gases, please follow the required proce-

dures for each gas disposal. Do not use

the pumping system in presence of

explosive gases.

CAUTION Use inert gas free from dust, particles or

humidity (like Nitrogen) for venting the

pump. The pressure at the vent port

must be less than 2 bar (above atmo-

spheric pressure).

WARNING The pump is designed for operation

with neutral or noncorrosive fluids. It

is absolutely forbidden to use it with

potentially explosive, inflammable or

poisonous substances.

WARNING ❑Death may result from contact with

high voltages. Always take extreme care

and observe the accident prevention

regulations in force.

❑When the machine is powered up,

be careful of moving parts and high

voltages.

❑If you have to perform maintenance

on the pump after a considerable time

in operation, allow the pump to cool as

the temperature of the outer surface

may be in excess of 55 °C (131 °F).

❑Always disconnect your power

supply to the pump before beginning

maintenance work.

NOTE Before returning the pump to the factory

for repair, the “Health and Safety” sheet

attached to this instruction manual must

be completed and sent to the local sales

office. A copy of the sheet must be

inserted in the pump package before

shipping.

DRAFT 11/28/16

TriScroll 620 INV Series Vacuum Pump

Technical Information

Table 1 Specifications

Model TriScroll™ 620 INV Dry Scroll Vacuum Pump

Interface dimensions See Figure 2

Peak pumping speed 50 Hz: 420 l/m, 25.2 m3/hr (14.8 cfm)

60 Hz: 500 l/m, 30 m3/hr (17.7 cfm)

Media Clean air. No toxic, corrosive, explosive or particulate forming gases

Ultimate pressure (Torr) 7.0 x 10-3 Torr (9.3 x 10-3 mbar)

Maximum inlet pressure 1.0 atmosphere (0 psig)

Maximum continuous inlet pressure 100 Torr

Maximum outlet pressure 1.1 atmosphere (1.5 psig)

Inlet connection NW40

Exhaust connection Female 3/8" National Pipe Thread (NW25 adapter provided)

Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)

Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)

Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)

Motor rating 1.0 HP (0.75 kW)

Operating voltages 50-60 Hz/100-200 VAC

Motor thermal protection Automatic

Operating speed 35-64 Hz Factory setting: 62 Hz

Cooling system Air-cooled

Weight Pump only: 32 kg (71 lbs)

Shipping weight: 42 kg (92 lbs)

Noise level (per ISO 11201) Variable with frequency, 58-71 dB(A)

Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec

Installation Pollution Degree: 2

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