Agilent Technologies VacIon Plus 20 Bedienungsanleitung

acIon Plus 20 pumps

Models

919-1115/919-1125/919-1145

919-1146/919-1114/919-1124

919-1144

Manuale di Istruzioni

Bedienungshandbuch

Notice de Mode D’Emploi

User Manual

87-900-106-01 (E)

05/2011

Notices

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and retrieval or translation into a

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agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Manual Part Number

Publication Number: 87-900-106-01 (E)

Edition

Edition 05/2011

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

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registered trademarks of Microsoft

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Safety Notices

CAUTION

A CAUTION notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

WARNING

A WARNING notice denotes a

hazard. It calls attention to an

operating procedure, practice, or the

like that, if not correctly performed

or adhered to, could result in

personal injury or death. Do not

proceed beyond a WARNING notice

until the indicated conditions are

fully understood and met.

VacIon Plus 20 pumps User Manual / 87-900-106-01 (E)

VacIon Plus 20

VacIon Plus 20 pumps User Manual / 87-900-106-01 (E) 3/90

VacIon Plus 20

4/90 VacIon Plus 20 pumps User Manual / 87-900-106-01 (E)

Contents

1Procedura per l’installazione 9

Informazioni Generali 10

Preparazione per l’installazione 11

Installazione 13

Uso14

Procedure di uso 15

Manutenzione 17

Smaltimento 17

2Anleitung zur Installation 19

Allgemeine Hinweise 20

Vor der Installation 21

Installation 23

Gebrauch 24

Bedienungsschritte 25

Wartung 26

Entsorgung 27

3Procédure pour l’installation 29

Indications Generales 30

Préparation de l'installation 31

VacIon Plus 20 pumps User Manual / 87-900-106-01 (E) 5/90

Contents

Installation 33

Utilisation 34

Procédure d’utilisation 35

Maintenance 37

Mise au rebut 37

4Installation Procedure 39

General Information 40

Preparation for Installation 41

Installation 43

Use 44

Operating Procedure 45

Maintenance 47

Disposal 47

5Technical Information 49

VacIon Plus Pump Replacement Parts and Accessories 50

Description of the VacIon Pump 51

Technical Specification 53

Vaclon Plus 20 Starcell 55

Vaclon Plus 20 Noble Diode 57

Vaclon Plus 20 Diode 59

Outline Drawing 60

Stray Magnetic Field 61

6/90 VacIon Plus 20 pumps User Manual / 87-900-106-01 (E)

Contents

VacIon Plus Pump Installation 63

Typical Installation 66

Inlet Flange Connection 68

Control Unit Connection 71

Safety Interlock 72

Heater Installation 72

Heater Replacement 74

Bakeout Operation 74

Operating Procedure 76

Maintenance 77

Exchange of the High Voltage Feedthrough 78

Pump Troubleshooting 81

VacIon Plus Pump Replacement Parts and Accessories 82

VacIon Plus Pump Controllers 83

VacIon Plus 20 pumps User Manual / 87-900-106-01 (E) 7/90

Contents

8/90 VacIon Plus 20 pumps User Manual / 87-900-106-01 (E)

VacIon Plus 20 pumps User Manual

Procedura per l’installazione

Informazioni Generali 10

Preparazione per l’installazione 11

Installazione 13

Uso 14

Procedure di uso 15

Manutenzione 17

Smaltimento 17

Traduzione delle istruzioni originali

9/90

1Procedura per l’installazione

Informazioni Generali

Questa apparecchiatura è destinata ad uso professionale.

L'utilizzatore deve leggere attentamente il presente manuale di

istruzioni ed ogni altra informazione addizionale fornita dalla Agilent

prima dell'utilizzo dell'apparecchiatura. La Agilent si ritiene sollevata

da eventuali responsabilità dovute all'inosservanza totale o parziale

delle istruzioni, ad uso improprio da parte di personale non

addestrato, ad interventi non autorizzati o ad uso contrario alle

normative nazionali specifiche.

Le pompe della serie VacIon Plus sono pompe ioniche utilizzate

comunemente per applicazioni di ultra alto vuoto, grazie alla loro

pulizia, capacità di pompare qualsiasi tipo di gas, e del loro

funzionamento senza vibrazioni e necessità di manutenzione.

Nei paragrafi seguenti sono riportate tutte le informazioni necessarie

a garantire la sicurezza dell'operatore durante l'utilizzo

dell'apparecchiatura. Informazioni dettagliate sono fornite

nell'appendice “Technical information”.

Questo manuale utilizza le seguenti convenzioni:

AVVERTENZA!

I messaggi di avvertenza attirano l'attenzione dell'operatore su una procedura

o una pratica specifica che, se non eseguita in modo corretto, potrebbe

provocare gravi lesioni personali.

ATTENZIONE! I messaggi di attenzione sono visualizzati prima di procedure che, se non

osservate, potrebbero causare danni all'apparecchiatura.

NOTA Le note contengono informazioni importanti estrapolate dal testo.

10/90 VacIon Plus 20 pumps User Manual / 87-900-106-01 (E)

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