Inficon Ecotec E3000 Versionshinweis

TECHNICAL HANDBOOK

kina22e1-p (1206) Translation of the original instruction

Catalog No.

530-001

530-002

530-103

530-104

530-105

530-106

from software version V 2.4

Ecotec E3000

Multi-Gas Leak Detector

0-2

kina22eIVZ.fm Technical Handbook(1206)

Content 0-3

kina22eIVZ.fm Technical Handbook(1206)

Content

1 General Information 1-1

1.1 Introduction 1-1

1.1.1 Intended Use 1-1

1.2 Support by INFICON 1-2

1.2.1 Service Centers 1-5

1.3 Unpacking 1-7

1.3.1 Supplied Equipment 1-7

1.3.2 Technical Data 1-8

1.3.3 Accessories 1-9

1.4 Notes on How to Use This Handbook 1-11

1.4.1 Numbering of Figures 1-11

1.4.2 Symbols of Vacuum Technology 1-11

1.4.3 Definition of Terms 1-11

1.5 Instrument Views of the Ecotec E3000 1-13

1.6 Installation 1-13

1.6.1 Set up 1-13

1.6.2 Mechanical Connections 1-15

1.6.3 Electrical Connections 1-18

1.6.4 RS232 Interface 1-19

1.6.5 I/O Port 1-19

2 How the Instrument Works 2-1

2.1 Description of the Functions 2-1

2.2 Description of the Subassemblies 2-2

2.2.1 Backing Pump 2-2

2.2.2 Turbo Molecular Pump (TMP) 2-2

2.2.3 Mass Spectrometer 2-2

2.2.4 Quadrupole Supply 2-2

2.2.5 Control 2-2

2.3 Displays and User Interfaces 2-3

2.3.1 Main unit display 2-3

2.3.2 Sniffer line with probe display 2-4

2.3.3 Built-in ECO-Check reference leak 2-6

3 Operation of the Ecotec E3000 3-1

3.1 Start-Up 3-1

3.2 Controls on the main display unit 3-2

3.3 Controls on the probe display unit 3-5

3.4 Performing measurements 3-6

3.4.1 Standard Operation Mode 3-6

3.4.2 I•Guide Operating Mode 3-8

3.4.2.1 Starting the I•Guide Mode 3-8

3.4.2.2 Selecting an I•Guide Program 3-9

3.4.2.3 Using an I•Guide Program 3-9

3.4.3 The Info Page 3-12

3.5 Calibration and Self-Test 3-14

0-4 Content

kina22eIVZ.fm Technical Handbook(1206)

3.5.1 Verifying a calibration (proof function) 3-15

3.5.2 Internal calibration 3-16

3.5.3 External calibration 3-17

3.6 Shutdown 3-19

4 Equipment Settings 4-1

4.1 Menu Structure 4-1

4.2 Sleep Mode 4-3

4.3 The Service Menu 4-3

4.4 Selecting gases and setting gas triggers 4-3

4.4.1 Editing gas parameters 4-4

4.4.2 Removing / adding a working gas 4-4

4.4.3 Selecting trigger values and units of measurement 4-7

4.4.4 Selecting the search level and the lower display limit 4-8

4.4.5 Enabling / disabling internal calibration 4-8

4.4.6 Selecting an alternative mass position 4-9

4.4.7 Activating the Interfering Gas Suppression (IGS) 4-10

4.4.8 Setting up a user-definable gas 4-10

4.5 Settings Sub-menu 4-12

4.5.1 Vacuum & Access Menu 4-12

4.5.2 Audio Functions 4-14

4.5.3 Display Settings 4-16

4.5.4 Setting-up / editing an I•Guide Program 4-18

4.5.5 Miscellaneous Settings 4-21

4.6 Interfaces 4-23

4.6.1 Control location 4-23

4.6.2 Recorder outputs 4-23

4.6.3 RS232 Protocol 4-26

4.6.4 Baud rate & end sign 4-27

4.6.5 Select PLC Inputs 4-27

4.6.6 Select PLC Outputs 4-28

4.6.7 ECO-Check (only available in Advanced Mode) 4-29

4.7 The Info Menu 4-30

4.8 History & Maintenance 4-34

4.9 Monitoring Sensitivity 4-39

5 Ecotec E3000 Messages 6-1

5.1 Error Messages and Warnings 6-1

6 Detecting Specific Gases 5-1

6.1 R134a / Cyclopentane 5-1

6.2 R134a / R245fa 5-1

6.3 R600a / Cyclopentane / Isopentane 5-1

6.4 Helium 5-1

6.5 Hydrogen / Forming gas 5-2

6.6 Methan 5-2

Content 0-5

kina22eIVZ.fm Technical Handbook(1206)

7 Equipment Connections 7-1

7.1 I/O Port (Control Inputs and Outputs) 7-1

7.1.1 Ground connectors 7-2

7.1.2 24V Output 7-2

7.1.3 PLC Inputs 7-2

7.1.4 PLC Outputs 7-3

7.1.4.1 Relay outputs 7-4

7.1.4.2 Recorder Outputs 7-5

7.1.5 How to perform a calibration 7-6

7.2 RS232 interface 7-7

8 Maintenance 8-1

8.1 Maintenance schedule 8-1

8.2 Adjusting the IGS function 8-2

8.3 Exchanging the air filter 8-3

8.4 Replacing the Operation Fluid Reservoir 8-5

8.5 Exchanging the mains fuses 8-8

8.6 Replacing filters in the sniffer line 8-9

8.6.1 Replacing the felt discs of the capillary filter 8-9

8.6.2 Replacing the felt discs (with water protection tip) 8-11

8.6.3 Checking / replacing the sinter filter 8-11

8.7 Switching the capillary filter 8-12

8.7.1 Switching from metal to plastic capillary filter 8-13

8.7.2 Switching from plastic to metal capillary filter 8-14

8.8 Replacing the gas reservoir of the

ECO-Check 8-14

9 Annex 9-1

9.1 The gas library 9-1

9.2 Declaration of Conformity 9-10

0-6 Important Safety Precautions

kina22eIVZ.fm Technical Handbook(1206)

Important Safety Precautions

Notice Indicates special requirements the user must comply with.

The INFICON Ecotec E3000 leak detector has been designed for safe and efficient

operation when used properly and in accordance with this Technical Handbook.

It is the responsibility of the user to carefully read and strictly observe all safety

precautions described in this chapter and throughout this Technical Handbook.

The Ecotec E3000 must only be operated in the proper condition and under the

conditions described in this Technical Handbook.

It must be operated and maintained by trained personal only. Consult local, state,

and national agencies regarding specific requirements and regulations.

Adress any further safety, operation and / or maintenance questions to our nearest

office.

Notice This can e. g. be the case if:

• the unit has visible damage,

• fluid has gotten into the device,

• the device is no longer working,

• the device has been stored for an extended period of time under unfavorable

conditions or

• after significant moving or transportation stresses.

Warning

Indicates procedures that must be strictly observed to prevent hazards to persons.

Caution

Indicates procedures that must strictly be observed to prevent damage to or

destruction of the Ecotec E3000 leak detector.

Warning

Presumed Risk:

If it is to be assumed that safe operation is no longer possible, the device is to be

taken out of service and secured against unsupervised operation.

Important Safety Precautions 0-7

kina22eIVZ.fm Technical Handbook(1206)

Failure to observe the following precautions could result in serious personal

injury:

Warning

Only 3-core mains cables having a protective ground conductor must be used.

Operation of the Ecotec E3000 with the ground conductor unconnected is not

permissible.

Warning

Do not stare into the LEDs of the sniffer line intentionally for extended times or at a

close distance as this may cause permanent damage to the eye.

Warning

Danger of electric shock.

Don’t touch voltaged parts with the sniffer tip. Test samples need to be

disconnected from electricity before leak testing.

Warning

For all contacts of the I/O Port a maximum voltage of 60 V DC or 25 V AC must not

be exceeded or reached to ground or ground equipment conductors.

According to the type of in- or outputs lower voltages had to be accepted. For this,

please refer to the information given in the responding chapters.

Warning

For all maintenance on the Ecotec E3000, the Ecotec E3000 must be disconnected

from power.

Warning

Before exchanging the air filter the Ecotec E3000 must be disconnected from

power.

Warning

Before exchanging the fuses the Ecotec E3000 must be disconnected from power.

0-8 Important Safety Precautions

kina22eIVZ.fm Technical Handbook(1206)

Failure to observe the following precautions could result in damage to the

equipment:

Warning

Before exchanging the lubricant reservoir the Ecotec E3000 must be disconnected

from power.

Warning

Dangerous gases pollute the machine.

So you must not use the machine for detecting toxical, acidity, microbiological,

explosive, radioactive or other noxious matters.

Warning

Caution: Danger of explosion

Hydrogen forms a highly explosive gas mixture with air.

Great caution is necessary when using hydrogen! No smoking, no naked flames,

avoid sparks.

Warning

Danger of explosion!

To use the Ecotec E3000 in explosion hazard areas could cause ignition of

flammable mixtures.

The Ecotec E3000 must only be operated outside of explosion hazard areas.

Caution

The Ecotec E3000 must not be operated while standing in water or when exposed

to drip water. The same applies to all other kinds of liquids.

This Ecotec E3000 should only be used in rooms.

Caution

Avoid contact of the Ecotec E3000 with bases, acids and solvents as well as

exposure to extreme climatic conditions.

Important Safety Precautions 0-9

kina22eIVZ.fm Technical Handbook(1206)

Caution

Ensure sufficient air cooling (see also Section 1.2)

Caution

Before installation remove the transportation lock.

Caution

In order to ensure adequate ventilation of the Ecotec E3000, a space of at least

20 cm 8) (8 in.) must be kept unobstructed to the sides. The clearance at the rear

must be no less than 10 cm (4 in.). Moreover, the Ecotec E3000 handles for

carrying the leak detector at the sides of the main unit must not be covered at any

time as these acts as air inlet and outlet. Avoid the presence of heat sources in the

vicinity of the Ecotec E3000.

Caution

Before connecting the Ecotec E3000 to the mains you must make sure that the

mains voltage rating of the Ecotec E3000 coincides with the locally available mains

voltage.

Caution

Do not suck in any liquids.

Caution

Permissible maximum input voltage PLC 28 V.

Caution

Permissible max. voltage and current for open collector outputs are: 28 V; 50 mA.

Caution

Maximum load rating relay outputs is 60 V DC / 25 V AC and 1 A per relay.

0-10 Important Safety Precautions

kina22eIVZ.fm Technical Handbook(1206)

Caution

The air filter should be checked for contamination at least every 6 months and

should be definitely exchanged after 2 years.

Caution

The lubricant reservoir may contain toxic substances from the pumped media.

Please dispose of lubricant reservoir as required by local regulations. A Safety Data

sheet for the lubricant is available on request.

Caution

Caution: Abrupt movements.

Abrupt movements can damage the running turbo pump.

Avoid abrupt movement and vibration of the instrument (e.g. running over cables,

door sills) during operation and up to 4 minutes after switching off since the turbo

pump can be damaged.

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