OPTO-EDU A63 .7080 Bedienungsanleitung

A63.7080

Scanning Electron Microscope

Std FEG SEM

Instruction Manual

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Content 
Overview ..............................................................................................4
1. Product Features....................................................................................4
2. Main uses and scope of application ....................................................5
3. Model & Product Name .........................................................................5
4. Composition of the model No. and its representative meaning ......5
5. Main technical data ................................................................................6
6. Dimension and weight ...........................................................................6
6.1. Instrument Dimension.....................................................................6
6.2. Instrument Weight ...........................................................................6
7. Environmental conditions for using .....................................................6
7.1. Equipment requirements for the room .........................................6
7.2. Requirements for temperature and humidity environment .......6
7.3. Requirements for power supply ....................................................7
7.4. Requirements for vibration.............................................................7
7.5. Requirements for low frequency stray magnetic fields..............7
8. Impact on the environment and energy ..............................................8
9. Security ....................................................................................................8
System composition and working principle .....................................9
1. Overall structure .....................................................................................9
2. Electron optical tube ..............................................................................9
2.1. Schottky field emission electron gun..........................................10 
2.2. Electron beam electromagnetic alignment system ..................10 
2.3. Lens system ...................................................................................10 
2.4. Scanning coil assembly................................................................10 
2.5. Astigmatism Device ......................................................................10 
2.6. Signal Detecting System..............................................................11 
2.7. A63.7080 Accessories..................................................................11 
3. Sample room and sample stage ........................................................11 
3.1. Standard sample room .................................................................11 
3.2. Large sample room .......................................................................11 
3.3. Standard sample stage ................................................................11 
3.4. Large sample stage ......................................................................12 
3.5. Standard sample room accessories...........................................12 

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4. Vacuum system ....................................................................................13 
5. Electrical cabinet control .....................................................................14 
5.1. Electrical cabinet ...........................................................................14 
5.2. Computer System..........................................................................15 
Use and operation of electron microscope software .....................17 
1. Familiar with the basic use of Windows 7 ........................................17 
2. Software Control Panel .......................................................................17 
2.1. Software Scan Control Window ..................................................18 
2.2. Starting and Shut down................................................................20 
2.3. Function buttons............................................................................20 
2.4. Electronic Gun Control .................................................................22 
2.5. Electrical alignment.......................................................................24 
2.6. Image electrical displacement.....................................................25 
2.7. Main function area.........................................................................25 
3. Image acquisition .................................................................................27 
3.1. Overview of the Software Interface ............................................27 
3.2. Scan Settings.................................................................................28 
3.3. File Management Menu ...............................................................29 
3.4. Getting images...............................................................................30 
SEM Microscope Operation Procedure...........................................31 
1. Preparation and inspection before use.............................................31 
1.1. Power Supply Check ....................................................................31 
1.2. Key position of the main rack panel ...........................................31 
1.3. Installed the panel correctly.........................................................31 
1.4. No people behind main unit & cabinet during work .................31 
2. Operating  procedures,  methods  and  precautions  for  starting  the 
electron microscope..........................................................................................31 
2.1. Starting the Electron Microscope from Standby.......................31 
2.2. Starting the electron microscope from the off state .................32 
2.3. Placing or replacing samples ......................................................33 
2.4. Turning on the gun power supply ...............................................34 
2.5. How to get images ........................................................................35 
2.6. Adjusting sample position ............................................................37 
2.7. Sample Preparation ......................................................................38 
2.8. Image Processing Operations.....................................................38 

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3. Monitoring and Recording in Operation............................................38 
3.1. Working of the vacuum system...................................................38 
3.2. Software Working Status..............................................................39 
4. Operating procedures, methods & precautions for shutdown.......39 
4.1. Daily standby status......................................................................39 
4.2. Shutdown Status ...........................................................................39 
4.3. Closing the electrical cabinet.......................................................39 
Maintenance ......................................................................................40 
1. Maintenance during operation............................................................40 
1.1. Replacing Scintillator of the Secondary Electron Detector.....40 
1.2. Cleaning the objective diaphragm and rod ...............................41 
1.3. Other maintenance work..............................................................44 
2. Maintenance cycle ...............................................................................44 
3. Normal maintenance procedures ......................................................44 
4. Maintenance during long-term parking .............................................44 
Transportation and Storage .............................................................45 
1. Lifting and transportation precautions...............................................45 
2. Storage conditions, storage period and precautions ......................45 
Unpacking and Inspection................................................................46 
1. Unpacking Precautions .......................................................................46 
2. Inspection contents ..............................................................................46 
2.1. A63.7080 Packing List (For Reference Only) ...........................46 
2.2. Instrument appearance inspection .............................................47 
Other ..................................................................................................48 
1. Guarantee, after-sales service, contact information.......................48 
1.1. Manufacturer's guarantee commitment .....................................48 
1.2. After-sales service.........................................................................48 
1.3. Contact information.......................................................................49 
2. User feedback.......................................................................................49 
3. Other matters that need to be explained to the user ......................49 
Appendix: Abbreviations, Glossary of Terminology ......................50 

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1. Overview

1.1. Product Features

A63.7080 Scanning Electron Microscope Std FEG SEM, is a digital Field

Emission Gun scanning electron microscope (referred to as A63.7080). It is a large-

scale precision electronic optical instrument for studying the microstructure of

objects. The focused electron beam can scan point by point on the surface of the

sample to receive the excited electronic signal to form an image：

1. It adopts field emission electron gun, which has the characteristics of high

brightness and large depth of field. It is suitable for the analysis and observation

of rough surface and fracture; the image is full of three-dimensional, realistic,

easy to identify and explain.

2. The surface structure of large solid samples can be observed. The sample

diameter is 0~15mm. The sample preparation method and sample

pretreatment process are simple.

3. The max resolution can reach 1.5nm.

4. The observation magnification range is large, from 15x of low magnification to

500,000x of high magnification; for multi-phase and multi-component non-

uniform materials, it is convenient for ordinary observation under low

magnification and fine observation analysis under high magnification.

5. Easy to operate, after a short period of training, user can operate the instrument.

6. The quality of the image can be appropriately improved by using electronic

methods and computer technology. For example, the image processor can

adjust the brightness and contrast of the image, etc., so that all light/dark parts

of the image can be improved to show clearly.

7. Provide more image viewing methods, such as using a dual magnification

device or a split image selector to simultaneously view images of different

magnifications or images of different signal detectors on the display.

8. According to the purpose of observation, it is possible to increase the dynamic

test using a sample stage such as high temperature, low temperature and

stretching, and observe the phase transformation and morphological changes

under different conditions.

9. The instrument has good expandability to make different analysis work by

adding different signal detection devices. For example, an X-ray energy

spectrometer (EDS) can be used to perform micro-regional component

analysis while observing the morphology, and to qualitatively and quantitatively

analyze the elemental composition of different micro-regions of the sample.

10. The operating system adopts Windows 7 operating system, the software

operation interface is user friendly, concise and intuitive; the images can be

displayed in same screen display, can be scaled and zoomed, and the image

resolution can be selected; it support USB2.0 standard communication

interface, support plug/play function.

11. The standard image processing software supports a variety of common image

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formats, and conversion between different image formats. The optional image

processing software enhanced a series of image processing functions such as

particle size analysis, on the basis of standard image processing software.

1.2. Main uses and scope of application

Scanning electron microscope is suitable tool for observation of surface

topography of metal, ceramic, semiconductor, mineral, biological, polymer,

composite materials and nanoscale one-dimensional, two-dimensional and three-

dimensional materials (secondary electron image, backscattered electron image);

Analysis of point, line and surface components of the micro-area. It is widely used

in petroleum, geology, minerals, electronics, semiconductor, medicine, biology,

chemical, polymer materials, public security criminal investigation, agriculture,

forestry and other fields.

Scanning electron microscope can perform microscopic morphology analysis.

If equipped with other analytical instruments, conventional micro-analysis of

components can be performed, including elemental quantification and qualitative

component analysis. When performing microscopic morphology analysis, the

spatial resolution can reach sub-micron level; it can measure the state of grain

boundary, or the phase identification of crystal/grain, and the measurement of

crystal and grain orientation; Distribution measurements can be made with fast

multi-element surface scanning and line scanning.

In modern industrial production and scientific research, the development of

scanning electron microscopy has become a necessary means for material

analysis, monitoring industrial and agricultural production, ensuring product quality,

and ensuring the safety and efficiency of large production processes. At the same

time, it is related to human survival and development in biology, environmental

protection and medicine. The application of the field is also changing with each

passing day; the development of military modern high-tech (such as biological

weapons, chemical weapons wars, on-site poison detection, life support tasks, etc.)

has played a huge role.

1.3. Model & Product Name

Product Name: Field Emission Gun Scanning Electron Microscope

Model No.：A63.7080

1.4. Composition of the model No. and its representative meaning

A63 .70 80 - X

Sub-Model No.

Model No.

Series No.

Scanning Electron Microscope

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1.5. Main technical data

Resolution 1.5nm@ 15kV or 30kV

Magnification 15x~500000x

Electron Gun Schottky Field Emission Gun

Accelerating Voltage 0~30kV

Lens System Electromagnetic lens

Objective Diaphragm Include 3 diaphragm, out of vacuum room, position

customized

Specimen Room Include 6 interface, can connect WDS、EDS、BSE and etc.

Standard Specimen Stage X 50mm/Y 50mm/Z 25mm, T=-5°~90°,R=360°

Large Specimen Stage X 80mm/Y 50mm/Z 30mm, T=-5°~90°,R=360°

Vacuum System Fully automatic ultra-high vacuum system

1.6. Dimension and weight

1.6.1. Instrument Dimension

Electron optical tube section：800×800×1380(mm)

Electrical cabinet control part：600×800×1600(mm)

Operator table： 800×1350（mm）

1.6.2. Instrument Weight

Total Weight： 550 Kgs

1.7. Environmental conditions for using

In order to obtain the best working condition of the instrument, ensure that the

environment's stray magnetic field, vibration, room temperature, humidity and

power supply meet the requirements of the installation environment before the

instrument is installed.

1.7.1. Equipment requirements for the room

A63.7080 is required to be installed in an independent laboratory with strong

load-bearing capacity (floor load ≥ 246 Kg/m2) and good anti-vibration effect. The

room where the instrument is installed should be able to be shaded, and some work

needs to be done in the darkroom. At the same time, the user should be able to

provide a desk lamp for sample and photo inspection without illumination.

1.7.2. Requirements for temperature and humidity environment

In the laboratory where A63.7080 is installed, the room temperature is

required to be constant and the humidity is small. The temperature should be kept

between 20 °C and 25 °C, the relative humidity should be less than 70%, and

equipment that guarantees to meet these requirements, such as air conditioners,

dehumidifiers, wet and dry thermometers, etc.

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1.7.3. Requirements for power supply

1.7.3.1. Requirement for power

A63.7080’s main body (excluding X-ray analysis equipment), need to supply:

AC 220V, 50Hz, 15A, with UPS power supply, at least two power output sockets

(220V, 50Hz, 10A and 220V, 50Hz, 16A respectively) ). The experimental indoor air

equipment switch is: AC 220V, 40A.

In addition, the test equipment for the installation of A63.7080 and accessories

needs to be equipped with power: 220V, 50Hz, 10A. The power outlet should have

three cores and two cores and a terminal block.

1.7.3.2. Requirement for power supply quality

Like other high-precision electronic equipment, the A63.7080 is sensitive to

electrical noise and power drift. Required voltage AC 220V ± 10%, 50Hz ± 1 Hz,

standard distortion-free sine wave (waveform distortion less than ± 2%), no noise,

transients, oscillations and pulses. When there is a problem with the power supply,

the impact on the A63.7080 may be varied, sometimes affecting the resolution of

the instrument, and sometimes linear or stripe streaks may appear on the image.

If there is a device with large power and large power consumption, the power

supply line cannot be shared with A63.7080. At the same time, it is the responsibility

of the user to ask the professional to bury the independent ground wire. Other

equipment cannot share the ground wire with the instrument and ensure that the

grounding resistance is less than 3Ω.

1.7.4. Requirements for vibration

Although the electron optical tube of A63.7080 has a vibration isolating device,

vibration beyond the allowable range (frequency 0 to 200 Hz) will have a bad

influence on the normal operation of the instrument. In the mounting position of

A63.7080, the vibration in any direction should be less than 3μm. The CNC

engineer will perform a comprehensive measurement of the instrument and

perform data analysis before installation. If the analysis results indicate that there

is a problem with the environmental conditions, the user will be advised to make

improvements.

It is important to note that the vibrations caused by excessive sound can also

affect the high-resolution image of the A63.7080. It is the responsibility of the user

to provide a relatively "quiet" environment for the A63.7080. If it is found that the

sound in the installation environment affects the SEM image, it is the user's

responsibility to take action to correct it. Depending on the source of the sound that

affects the instrument, you can eliminate the sound source or find another suitable

place to install the instrument.

1.7.5. Requirements for low frequency stray magnetic fields

Special attention must be paid to transformers, motors, and power supply

lines near the A63.7080 installation environment to ensure that the magnetic

induction in any direction should be less than 1.5 × 10-7T (1.5 milligauss, P--P).

Any magnetic field that exceeds the limit must be corrected. If you can know what

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equipment is in your environment (adjacent, upstairs, downstairs, etc.), it is good

for measuring or correcting problems.

1.8. Impact on the environment and energy

The X-ray radiation of A63.7080 meets the standards required by the state

and does not affect the environment and energy

1.9. Security

A63.7080 is safe to use, it complies to Chinese national standards for

instrument safety requirements.

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2. System composition and working principle

2.1. Overall structure

A63.7080 interacts with an electron beam with a certain energy to excite a

physical signal. The imaging signal is collected, digitized, and the like by

means of a computer system and an electrical control system to form an

image. The overall structure of A63.7080 mainly includes electronic optical

tube, sample chamber, vacuum system and electrical cabinet control.

Picture 2-1 Electron Optical Tube

2.2. Electron optical tube

The A63.7080 electro-optical lens barrel is capable of generating and

focusing an electron beam, and finally forms a small-diameter beam spot on

the sample. The electron optical lens tube is composed of a Schottky field

emission electron gun, an electromagnetic centering system, a lens barrel

blocking valve, a lens system, a scanning coil assembly, an astigmatism device,

and a signal detecting system, as shown in Picture 2-1. There is an

electromagnetic shielding tube outside the entire optical path, which can

eliminate the interference of the external stray electromagnetic field on the

electron beam.。

Objective Iris

Schottky Field Emission Gun

Electromagnetic Centering System

Signal Detecting System

Scanning Coil Assembly

Astigmatism Device

Electromagnetic Lens System

Lens Barrel Blocking Valve

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