Pfeiffer Vacuum TC 110 Bedienungsanleitung

OPERATING INSTRUCTIONS

Translation of the Original

TC 110

Electronic drive unit

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/48

Table of contents

1 About this manual 7

1.1 Validity 7

1.2 Applicable documents 7

1.3 Target group 7

1.4 Conventions 7

1.4.1 Instructions in the text 7

1.4.2 Pictographs 7

1.4.3 Stickers on the product 8

1.4.4 Abbreviations 8

2 Safety 9

2.1 General safety instructions 9

2.2 Safety instructions 9

2.3 Safety precautions 10

2.4 Limits of use of the product 11

2.5 Proper use 11

2.6 Foreseeable improper use 11

2.7 Functional safety 11

3 Product description 13

3.1 Identifying the product 13

3.2 Product features 13

3.3 Function 13

3.4 Scope of delivery 13

3.5 Connections 13

4 Installation 14

4.1 Connection diagram 14

4.2 Connection "X3" 16

4.2.1 Voltage supply 17

4.2.2 Inputs 17

4.2.3 Outputs 18

4.2.4 RS-485 18

5 Interfaces 19

5.1 Interface RS-485 19

5.1.1 Connection options 19

5.1.2 Cross-linked via the RS-485 connection 20

5.2 Pfeiffer Vacuum protocol for RS-485 interface 20

5.2.1 Telegram frame 20

5.2.2 Telegram description 21

5.2.3 Telegram example 1 21

5.2.4 Telegram example 2 21

5.2.5 Data types used 22

6 Parameter set 23

6.1 General 23

6.2 Control commands 23

6.3 Status requests 26

6.4 Set value settings 27

6.5 Additional parameter for the DCU 28

7 Operation 30

7.1 Configuring the connections with the Pfeiffer Vacuum parameter set 30

7.1.1 Configure digital inputs 30

7.1.2 Configure the digital outputs 30

7.1.3 Configure analog output 31

Table of contents

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7.1.4 Configuring the accessory connections 31

7.1.5 Select interfaces 32

7.2 Operating modes 32

7.2.1 Gas type-dependent operation 32

7.2.2 Set value power consumption 33

7.2.3 Run-up time 33

7.2.4 Rotation speed switch points 34

7.2.5 Rotation speed setting mode 35

7.2.6 Standby 35

7.2.7 Confirming the rotation speed set value 36

7.2.8 Backing pump operating modes 36

7.2.9 Backing pump standby mode 37

7.2.10Operation with accessories 37

7.2.11Venting modes 38

7.3 Switching on the turbopump 38

7.4 Switching off the turbopump 39

7.5 Operation monitoring 39

7.5.1 Operating mode display via LED 39

7.5.2 Temperature monitoring 39

8 Malfunctions 41

8.1 General 41

8.2 Error codes 41

8.3 Warning and error messages when operating with DCU 43

9 Service solutions from Pfeiffer Vacuum 45

Declaration of conformity 47

Table of contents

4/48

List of tables

Tbl. 1: Stickers on the product 8

Tbl. 2: Abbreviations used in this document 8

Tbl. 3: Permissible ambient conditions 11

Tbl. 4: Data for use in safety-related applications in accordance with IEC 61508

and IEC 62061

Tbl. 5: Data for use in safety-related applications in accordance with

EN ISO 13849-1

Tbl. 6: Features of the device variants 13

Tbl. 7: Connection description of the electronic drive unit 13

Tbl. 8: Terminal layout of the 15-pin connection "X3" 17

Tbl. 9: Features of the RS-485 interface 19

Tbl. 10: Explanation and meaning of the parameters 23

Tbl. 11: Control commands 26

Tbl. 12: Status requests 27

Tbl. 13: Set value settings 28

Tbl. 14: Parameter for DCU functions 29

Tbl. 15: Configure parameters [P:062] and [P:063] 30

Tbl. 16: Configure parameters [P:019] and [P:024] 31

Tbl. 17: Configure parameter [P:055] 31

Tbl. 18: Configuring the accessory connections 32

Tbl. 19: Parameter [P:060] 32

Tbl. 20: Characteristic nominal rotation speeds of the turbopumps 36

Tbl. 21: Backing pump operating modes 36

Tbl. 22: Behavior and meaning of the LEDs on the electronic drive unit 39

Tbl. 23: Error messages of the electronic drive unit 42

Tbl. 24: Warning messages of the electronic drive unit 43

Tbl. 25: Warning and error messages when using a DCU 44

List of tables

5/48

List of figures

Fig. 1: TC 110 connection panel 13

Fig. 2: Connection diagram for TC 110 with connection cable 15

Fig. 3: Connection diagram for TC 110 with connection cable and accessories 15

Fig. 4: Connection diagram for TC 110 with external wiring 16

Fig. 5: Connection of the electronic drive unit via “X3” 19

Fig. 6: Cross-link via connection “X3” using connection cables 20

Fig. 7: Schematic diagram of power characteristics, example of heavy gases

[P:027] = 0

Fig. 8: Rotation speed switch point 1 active 34

Fig. 9: Rotation speed switch points 1 & 2 active, [P:701] > [P:719] 34

Fig. 10: Rotation speed switch points 1 & 2 active, [P:701] < [P:719] 35

List of figures

6/48

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the

designated product and provide the most important information for safe usage of the product. The de-

scriptions comply with applicable directives. All information provided in these operating instructions refer

to the current development status of the product. The documentation remains valid as long as the cus-

tomer does not modify the product in any way.

1.2 Applicable documents

TC 110 Operating instructions

Declaration of conformity A component of these instructions

1.3 Target group

This operating instructions are aimed at all persons performing the following activities on the product:

●transport,

●setup (installation),

●usage and operation,

●decommissioning,

●maintenance and cleaning,

●storage or disposal.

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.4 Conventions

1.4.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.4.2 Pictographs

Pictographs used in the document indicate useful information.

About this manual

7/48

Note

Tip

1.4.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

Mod:

Mod.-Nr.:

Input:

Output:

Made in Germany 2019/01

TC 110

PM C01 790

24V DC 6,3A

0-24V 10A

0-1500Hz

Ser.-Nr.:12345678

Rating plate

The rating plate is located on the side of the electronic drive

unit.

warranty seal

Closure seal

The product is sealed ex factory. Damaging or removing a clo-

sure seal results in loss of the warranty.

Tbl. 1: Stickers on the product

1.4.4 Abbreviations

Abbreviation Meaning in this document

AI/AO Analog input/analog output

AIC Ampere Interrupting Capacity

DC Direct current

DCU Display Control Unit from Pfeiffer Vacuum

DI/DO Digital input/digital output

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HPU Handheld Programming Unit

IElectric current

LED Light emitting diode

[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in

square brackets. Frequently displayed in conjunction with a short description

Example: [P:312] software version

PElectrical power

PE Protective earth

RElectrical resistance

RS-485 Standard for a physical interface for asynchronous serial data transmission (Recom-

mended Standard)

tTime

TC Electronic drive unit (Turbo Controller)

TMS Temperature Management System

UElectric voltage

X3 15-pole D-Sub connecting socket on the electronic drive unit

Tbl. 2: Abbreviations used in this document

About this manual

8/48

2 Safety

2.1 General safety instructions

This document includes the following four risk levels and one information level.

DANGER

Imminent danger

Indicates a hazardous situation which, if not avoided, will result in death or serious injury.

►Instructions on avoiding the hazardous situation

WARNING

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in death or serious injury.

►Instructions on avoiding the hazardous situation

CAUTION

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

►Instructions on avoiding the hazardous situation

NOTICE

Danger of property damage

Notice is used to address practices not related to physical injury.

►Instructions on avoiding property damage

Notes, tips or examples indicate important information on the product or on this document.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Low Voltage Directive 2014/35/EU. Where applicable, all life cycle phases of the prod-

uct were taken into account.

Risks during installation

DANGER

Danger to life from electric shock

Power supply packs that are not specified or are not approved will lead to severest injuries up to

death.

►Make sure that the power supply pack meets the requirements for double isolation between

mains input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.

►Make sure that the power supply pack meets the requirements in accordance with IEC 61010

and IEC 60950.

►Where possible, use original power supply packs or only power supply packs that correspond

with the applicable safety regulations.

Safety

9/48

DANGER

Danger to life from electric shock

When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC

60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-

tric shock at the communication interfaces.

►Connect only suitable devices to the bus system.

WARNING

Risk of injury due to incorrect installation

Dangerous situations may arise from unsafe or incorrect installation.

►Do not carry out your own conversions or modifications on the unit.

►Ensure the integration into an Emergency Off safety circuit.

Risks in the event of malfunctions

WARNING

Risk of injury from parts moving after a power failure or troubleshooting

The "pumping station" function of the electronic drive unit will remain active after a power failure or if

errors occur that shut down the vacuum pump or the system. When power is restored or after ac-

knowledging a fault, the vacuum pump runs up automatically. There is a risk of injury to fingers and

hands if they enter the operating range of rotating parts.

►Always keep the mains connection freely accessible so you can disconnect it at any time.

►Remove present mating plugs or bridges from the electronic drive unit possibly before the mains

power returns, as these can cause an automatic run-up.

►Switch the pump off using the "Pumping station" function (parameter [P:010]).

2.3 Safety precautions

Duty to provide information on potential dangers

The product holder or user is obliged to make all operating personnel aware of dangers

posed by this product.

Every person who is involved in the installation, operation or maintenance of the product

must read, understand, and adhere to the safety-related parts of this document.

Infringement of conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the operator

changes the original product or installs additional equipment.

●Following installation into a system, the operator is required to check and re-evaluate

as necessary the conformity of the overall system in the context of the relevant Europe-

an Directives before commissioning that system.

General safety precautions when handling the product

►Use only power supply packs that comply with the applicable safety regulations.

►Observe all applicable safety and accident prevention regulations.

►Check that all safety measures are observed at regular intervals.

►Recommendation: Establish a secure connection to the earthed conductor (PE); protection class

III.

►Never disconnect plug connections during operation.

►Keep lines and cables away from hot surfaces (> 70 °C).

►Do not carry out your own conversions or modifications on the unit.

►Observe the unit protection class prior to installation or operation in other environments.

►Observe the protection class by ensuring the correct seating of the present sealing plugs.

►Disconnect the electronic drive unit only once everything has come to a complete standstill and

when the mains power supply of the turbopump is interrupted.

Safety

10/48

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