Pfeiffer Vacuum UVH 016 VI Bedienungsanleitung

BP 5277 BEN (2010-11)

A PASSION FOR PERFECTION

UVH 016 … 063 VI

Angle Valve, manually operated, bellows sealed, FPM valve seat seal

Operating Instructions

2BP 5277 BEN (2010-11) UVH 016 … 063 VI

In all communications with Pfeiffer Vacuum, please specify the information on the

product nameplate. For convenient reference copy that information into the space

provided below.

Typ:

No:

F-No:

Pfeiffer Vacuum, D-35614 Asslar

This document applies to products with part numbers

PF C32 032 (UVH 016 VI DN 016 CF)

PF C52 032 (UVH 040 VI DN 040 CF)

PF C62 032 (UVH 063 VI DN 063 CF)

The part number (No) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document apply to

valves with the nominal diameter DN 040. They apply to valves with other nominal

diameters by analogy.

We reserve the right to make technical changes without prior notice.

The product is used as shut-off valve for UHV and HV applications. It can be baked

out at 180 °C. The welded housing is suited for high-purity and toxic gases.

Product Identification

Validity

Intended Use

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 3

Contents

Product Identification 2

Validity 2

Intended Use 2

1Description 4

2Safety 5

2.1 Symbols Used 5

2.2 Personnel Qualifications 5

2.3 General Safety Instructions 5

2.4 Liability and Warranty 5

3Technical Data 6

4Installation 8

4.1 Installation 8

4.1.1 Space Requirements 8

4.1.2 Flange Connection 9

5Start-Up 10

5.1 Bakeout 10

5.2 Bringing the Valve Plate Into the Defined Position 11

6Operation 12

6.1 Closing the Angle Valve 12

6.2 Opening the Angle Valve 14

6.3 Installing/Removing the Rotary Knob 14

7Deinstallation 15

8Maintenance 16

8.1 Bakeout 16

8.2 Replacing the O-Ring of the Valve Plate 16

8.2.1 Deinstalling the Valve Plate 16

8.2.2 Replacing the O-Ring of the Valve Plate 18

8.2.3 Reinstalling the Valve Plate 19

8.3 Cleaning the Angle Valve 20

8.4 Actuator 20

8.5 Leak Detection 21

9Repair 21

10 Spare Parts 21

11 Accessories 22

12 Storage 22

13 Returning the Product 22

14 Disposal 23

For cross-references within this document, the symbol (→XY) is used, for cross-

references to further documents the symbol (→[Z]).

4BP 5277 BEN (2010-11) UVH 016 … 063 VI

1 Description

Valve plate

Valve plate base

Rotary knob (removable)

O-ring

CF flange DN 16 ... 63 CF-R

(rotatable)

Leak detection bore

Mechanical stop

Bellows

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 5

2 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

•Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions between the materials (→6) and the process

media.

•Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are con-

taminated. Adhere to the relevant regulations and take the necessary precau-

tions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the

end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media

used.

Failures due to contamination or wear and tear, as well as expendable parts (e.g.

seals), are not covered by the warranty.

2.1 Symbols Used

2.2 Personnel Qualifications

2.3 General Safety

Instructions

2.4 Liability and Warranty

6BP 5277 BEN (2010-11) UVH 016 … 063 VI

3 Technical Data

Connection flanges, rotatable

UVH 016 VI

UVH 040 VI

UVH 063 VI

DN 16 CF-R

DN 40 CF-R

DN 63 CF-R

Installation angle any

Flow direction any

Tightness 1×10-9 mbarl/s

Pressure range

Bursting pressure

1×10-8 mbar … 4 bar (absolute)

8 bar

Conductance

UVH 016 VI

UVH 040 VI

UVH 063 VI

3 l/s

38 l/s

100 l/s

Temperatures

Ambiance

Operation

Bakeout

Without rotary knob

With rotary knob

Rotary knob

Continuous

Temporary

Storage

Temperature increase

UVH 016 VI

UVH 040 VI

UVH 063 VI

0 °C … 55 °C

≤180 °C

≤100 °C

100 … 110 °C

+5 … +45 °C

-15 … +45 °C 1)

≤4 °C/minute

Closing torque

UVH 016 VI

UVH 040 VI

UVH 063 VI

0.1 … 0.3 Nm

0.2 … 0.4 Nm

0.4 … 0.8 Nm 2)

Service life O-ring

cold closing operations

50'000 cycles 3)

Lift (opening)

UVH 016 VI

UVH 040 VI

UVH 063 VI

12 mm

23 mm

33 mm

Materials

Housing

Spindle

Spindle flange

Bellows

Valve plate base

Valve plate

Sealing plate

O-ring

Rotary knob

stainless steel 1.4301

CuSn8 2.1030.26 4)

stainless steel 1.4301

stainless steel 1.4541

stainless steel 1.4301 ESU

stainless steel 1.4301

FPM75

PA 15% GF

Weight

UVH 016 VI

UVH 040 VI

UVH 063 VI

0.35 kg

1.8 kg

4.8 kg

1) Ambiance free of condensable gases.

2) Preliminary information.

3) Cycles without expandable parts (seals) and under clean operating conditions. If the

valve is operated under harsh or dirty conditions, it should be cleaned / maintained before

the specified service time to maintenance has been reached.

4) Permanent lubrication, requires no maintenance.

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 7

69.6

25.6

104.2

AF 8

ø 62

119.2

Spindle lift

DN 16 CF-R (rotatable)

107.6

34.6

Spindle lift

150.9

ø 62

177.9

AF 17

DN 40 CF-R (rotatable)

105

Spindle lift

231.2

ø100

267.2

ø74

182

AF 22

DN 63 CF-R (rotatable)

Dimensions [mm]

UVH 016 VI

UVH 040 VI

UVH 063 VI

8BP 5277 BEN (2010-11) UVH 016 … 063 VI

4 Installation

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the

desorption rate.

Always wear clean, lint-free gloves and use clean tools when working

in this area.

•The valve is delivered in closed condition and with the rotary knob installed.

•The protective packaging should not be removed until shortly before installa-

tion. Even the slightest contamination could cause leaks.

Make sure the valve can be operated without any risk of bodily injury.

Spindle lift

UVH 016 VI 15 mm

UVH 040 VI 27 mm

UVH 063 VI 36 mm

4.1 Installation

4.1.1 Space Requirements

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 9

Hex nut

Hex hesd srcew

Washer

Protective lid

Seal

CF flange

Keep the protective lids.

Flange Seal Pieces Ordering number

DN 16 CF Copper 10 PF 501 401-T

DN 40 CF Copper 10 PF 501 404-T

DN 63 CF Copper 10 PF 501 406-T

Flange Hex head screw Number of screws Required torque

DN 16 CF M4 × 20 mm 6 per flange 4 Nm

DN 40 CF M6 × 35 mm 6 per flange 10 Nm

DN 63 CF M8 × 50 mm 8 per flange 20 Nm

4.1.2 Flange Connection

Flange seals

(Accessories →22)

Screws

(Accessories →22) / Torque

10 BP 5277 BEN (2010-11) UVH 016 … 063 VI

5 Start-Up

It is good practice to bake out new valves and valves the inner parts of which have

been exposed to atmosphere for some time, e.g. with a heating jacket.

DANGER

DANGER: hot surface

Touching the hot surface (>55 °C) can cause burns.

Do not touch the hot surface.

Caution

Caution: bakeout at atmosphere

Bakeout with the inner parts of the valve exposed to atmosphere may

lead to the formation of oxides and thus cause leaks.

Bake out the valve only if

•the pressure in the vacuum system is <1×10-4 mbar or

•the vacuum system has been vented with inert gas.

nPrior to baking the valve at temperatures >100 °C, remove the rotary knob

(→15).

oBake the valve out.

p < 10-4 mbar or

vacuum system vented with inert gas

Heating sleave 1)

Temperature increase:

DN 016 ≤4 °C/minute

DN 040 ≤4 °C/minute

DN 063 ≤2 °C/minute

Maximum bakeout temperature: 180 °C

p < 10-4 mbar or

vacuum system vented with inert gas

1) Not enclosed in the delivery.

pIf the rotary knob has been removed, wait until the valve has cooled down

(<50 °C) and reinstall the rotary knob (→14).

5.1 Bakeout

Andere Handbücher für UVH 016 VI

Dieses Handbuch passt für folgende Modelle

Inhaltsverzeichnis

Andere Pfeiffer Vacuum Steuereinheit Handbücher

Pfeiffer Vacuum

Pfeiffer Vacuum EVB Series Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TVV 001 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 366 MAXIGAUGE Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB 063 PA Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum AVA 016 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum DualGauge TPG 262 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 500 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB 016 Series Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 361 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 366 MAXIGAUGE Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 256 A Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum N Series Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum PM Z01 310 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum DCU 002 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB Series Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB 16 P A Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVL 016 P Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum RME 005 A Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum DVB 016 PX Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum OmniControl Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum UDV 046 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVN 116 Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVL 063 P Bedienungsanleitung

Pfeiffer Vacuum

Pfeiffer Vacuum EVB 160 PA Bedienungsanleitung

Beliebte Steuereinheit Handbücher anderer Marken

Festo

Festo Compact Performance CP-FB6-E Stücklistenhandbuch

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Bedienungsanleitung

JS Automation

JS Automation MPC3034A Bedienungsanleitung

JAUDT

JAUDT SW GII 6406 Series Kurzanleitung

Spektrum

Spektrum Air Module System Bedienungsanleitung

BOC Edwards

BOC Edwards Q Series Bedienungsanleitung

KHADAS

KHADAS BT Magic Bedienungsanleitung

Etherma

Etherma eNEXHO-IL Bedienungsanleitung

PMFoundations

PMFoundations Attenuverter Bedienungsanleitung

GEA

GEA VARIVENT Bedienungsanleitung

Walther Systemtechnik

Walther Systemtechnik VMS-05 Bedienungsanleitung

Altronix

Altronix LINQ8PD Montageanleitung

Eaton

Eaton Powerware Series Bedienungsanleitung

WAGO

WAGO 750-407/040-000 Bedienungsanleitung

Sony

Sony CCU-590 Bedienungsanleitung

Graco

Graco 25D614 Bedienungsanleitung

Task Force Tips

Task Force Tips YE-RF-900 Programmierhandbuch

Shini

Shini SPV-U Series Bedienungsanleitung