Pfeiffer Vacuum EVN 116 Bedienungsanleitung

BP 5005 BEN (2011-11)

A PASSION FOR PERFECTION

EVN 116

Dosing Valve

Operating Instructions

2BP 5005 BEN (1111) EVN 116.oi

In all communications with Pfeiffer Vacuum, please

specify the information on the product nameplate. For

convenient reference copy that information into the

space provided below.

Type:

No:

F-No:

Pfeiffer Vacuum, D-35614 Asslar

This document applies to products with part number

PF I32 031.

The part number (No) can be taken from the product

nameplate.

The manually actuated EVN 116 Dosing valve is used

for both, gas dosing and shutting off a defined gas flow

without changing the gas flow setting.

The EVN 116 must not be used in connection with liquid

gases.

Dosing knob

for setting the gas flow

Open/close ring

for opening and closing the valve

Rotating the dosing knob translates into a linear

movement and places the dosing needle reproducibly in

the desired position.

Rotating the Open/close ring positions the valve plate.

These movements are independent of each other.

Product Identification

Validity

Intended Use

Functional Principle

BP 5005 BEN (2011-11) EVN 116.oi 3

1× valve

1× Operating Instructions German

1× Operating Instructions English

1× Safety Guide

Scope of Delivery

4BP 5005 BEN (1111) EVN 116.oi

Contents

Product Identification 2

Validity 2

Intended Use 2

Functional Principle 2

Scope of Delivery 3

1Safety 5

1.1 Symbols Used 5

1.2 Personnel Qualifications 5

1.3 General Safety Instructions 6

1.4 Liability and Warranty 6

2Technical Data 7

3Installation 9

4Operation 11

5Gas Flow 13

5.1 Gas Flow Curve 13

5.2 Conversion Table 13

6Deinstallation 14

7Maintenance 16

8Repair 19

9Accessories 20

10 Storage 21

11 Returning the Product 21

12 Disposal 22

For cross-references within this document, the symbol

(→XY) is used, for cross-references to other docu-

ments, the symbol (→[Z]).

BP 5005 BEN (2011-11) EVN 116.oi 5

1 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and

environmental damage.

Caution

Information on correct handling or use. Disregard can

lead to malfunctions or minor equipment damage.

Skilled personnel

All work described in this document may only be

carried out by persons who have suitable technical

training and the necessary experience or who have

been instructed by the end-user of the product.

1.1 Symbols Used

1.2 Personnel

Qualifications

6BP 5005 BEN (1111) EVN 116.oi

•Adhere to the applicable regulations and take the

necessary precautions for the process media used.

•Adhere to the applicable regulations and take the

necessary precautions for all work you are going to

do and consider the safety instructions in this docu-

ment.

•Before beginning to work, find out whether any

vacuum components are contaminated. Adhere to

the relevant regulations and take the necessary pre-

cautions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty

becomes null and void if the end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications,

alterations etc.) on the product

•use the product with accessories not listed in the

corresponding product documentation.

The end-user assumes the responsibility in conjunction

with the process media used.

Failures due to contamination or wear and tear, as well

as expendable parts (e.g. seals, filter), are not covered

by the warranty.

1.3 General Safety

Instructions

1.4 Liability and

Warranty

BP 5005 BEN (2011-11) EVN 116.oi 7

2 Technical Data

Connection flanges DN 16 ISO-KF

Mounting orientation any

Dosing range 5×10-6 … 1000 mbar l/s

Tightness 1×10-9 mbar l/s

Pressure difference ≤2.5 bar

Operating temperature

Bakeout temperature

Storage temperature

≤80 °C

≤150 °C *)

5 … 40 °C

Dead volume 0.032 cm³

Materials

Housing, needle, filter

Dosing sleeve

Seal

stainless steel

fluor plastomer

FPM75

Weight 400 g

*) at the flange connections

Gas flow with standard filter 1250 mbar l/s

Gas flow without standard filter 3100 mbar l/s

117.5

DN 16 ISO-KF

130

ø42

Preferred flow

direction

Valve seat

Inlet filter (standard)

Dimensions

8BP 5005 BEN (1111) EVN 116.oi

Gas flow 700 mbar l/s

Filter vacuum side

Accessories → 19

Inlet filter (standard)

Gas flow 1000 mbar l/s

Filter vacuum side

Accessories → 19

6.2

ø10

Inlet filter (standard)

Accessories

Filter

BP 5005 BEN (2011-11) EVN 116.oi 9

3 Installation

DANGER

DANGER: overpressure in the vacuum

system >1 bar

Injury caused by released parts and harm

caused by escaping process gases can result

if clamps are opened while the vacuum

system is pressurized.

Do not open any clamps while the vacuum

system is pressurized. Use the type of

clamps which are suited to overpressure.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with

bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

Caution

Caution: vacuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take

appropriate measures to ensure cleanliness

and prevent damages.

Keep the protective lids.

10 BP 5005 BEN (1111) EVN 116.oi

Preferred

flow direction

Remove the protective lids and connect the valve to the

vacuum system using the small flange connections.

Seal with

centering ring

DN 16 ISO-KF

Clamp

Protective lid

Flow direction

Vacuum connection

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