Agilent Technologies B1500A Bedienungsanleitung

Agilent Technologies

Agilent B1500A

Semiconductor Device

Analyzer

User’s Guide

Notices

No part of this manual may be reproduced in

any form or by any means (including elec-

tronic storage and retrieval or translation

into a foreign language) without prior agree-

ment and written consent from Agilent

Technologies, Inc. as governed by United

States and international copyright laws.

Manual Part Number

B1500-90000

Edition

Edition 1, July 2005

Edition 2, December 2005

Edition 3, April 2006

Edition 4, January 2007

Edition 5, June 2007

Edition 6, November 2007

Edition 7, October 2008

Edition 8, February 2009

Edition 9, June 2009

Edition 10, June 2010

Agilent Technologies, Inc.

5301 Stevens Creek Blvd

Santa Clara, CA 95051 USA

Warranty

The material contained in this docu-

ment is provided “as is,” and is sub-

ject to being changed, without notice,

in future editions. Further, to the max-

imum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not

limited to the implied warranties of

merchantability and fitness for a par-

ticular purpose. Agilent shall not be

liable for errors or for incidental or

consequential damages in connec-

tion with the furnishing, use, or per-

formance of this document or of any

information contained herein. Should

Agilent and the user have a separate

written agreement with warranty

terms covering the material in this

document that conflict with these

terms, the warranty terms in the sep-

arate agreement shall control.

Technol o g y Licenses

The hardware and/or software described in

this document are furnished under a license

and may be used or copied only in accor-

dance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a

U.S. Government prime contract or subcon-

tract, Software is delivered and licensed as

“Commercial computer software” as

defined in DFAR 252.227-7014 (June 1995),

or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer soft-

ware” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or

contract clause. Use, duplication or disclo-

sure of Software is subject to Agilent Tech-

nologies’ standard commercial license

terms, and non-DOD Departments and

Agencies of the U.S. Government will

receive no greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive

no greater than Limited Rights as defined in

FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as

applicable in any technical data.

DECLARATION OF CONFORMITY

According to EN ISO/IEC 17050-1:2004

Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd.

Manufacturer’s Address: No. 1 Yishun Ave 7

SINGAPORE 768923

Singapore

Declares under sole responsibility that the product as originally delivered

Product Name: Semiconductor Device Analyzer

High Power Source/Monitor Unit Module,

Medium Power Source/Monitor Unit Module,

High Resolution Source/Monitor Unit Module,

Multi Frequency Capacitance Measurement Unit Module,

High Voltage Semiconductor Pulse Generator Unit Module,

Waveform Generator/Fast Measurement Unit Module

Model Number: Agilent B1500A

Agilent B1510A, Agilent B1511A, Agilent B1517A,

Agilent B1520A, Agilent B1525A, Agilent B1530A

Product Options: This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries

the CE marking accordingly:

Low Voltage Directive (2006/95/EC)

EMC Directive (2004/108/EC)

and conforms with the following product standards

EMC Standard

IEC 61326-1:2005 / EN 61326-1:2006

CISPR 11:2003 / EN55011:1998+A1:1999+A2 :2002

IEC 61000-4-2:2001 /EN 61000-4-2:1995+A1:1998+A2:2001

IEC 61000-4-3:2002+A1:2002/EN 61000-4-3:2002+A1:2002

IEC 61000-4-4:2004 / EN 61000-4-4:2004

IEC 61000-4-5:2001/EN 61000-4-5:1995+A1:2001

IEC 61000-4-6:2003 / EN 61000-4-6:1996+A1:2001

IEC 61000-4-11:2004 / EN 61000-4-11:2004

Canada: ICES/NMB-001:2004

Australia/New Zealand: AS/NZS CISPR 11:2004

Limit

Group 1 Class A

4 kV CD, 8 kV AD

3 V/m / 80 MHz-1 GHz / 1.4-2 GHz, 1 V/m / 2-2.7 GHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground

3 V, 0.15-80 MHz

0 % for 1/0.5 cycle, 0 % for 250/300 cycles,

70 % for 25/30 cycles

Safety

IEC 61010-1:2001 / EN 61010-1:2001

Canada: CAN/CSA-C22.2 No. 1010.1-92, C/US

Supplementary Information:

The product was tested in a typical configuration with Agilent Technologies test systems.

This DoC applies to above-listed products placed on the EU market after:

March 20, 2010

Date

Toshiyuki Kawaji

QA Manager

Agilent Technologies

For further information, please contact your local Agilent Technologies sales office, agent or distributor,

or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany.

•Herstellerbescheinigung

GEÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T.19

•Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme àla norme NMB-001 du Canada.

Safety Summary

The following general safety precautions must be observed during all phases of

operation, service, and repair of this instrument. Failure to comply with these

precautions or with specific warnings elsewhere in this manual may impair the

protections provided by the instrument. In addition, it violates safety standards of

design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.

assumes no liability for customer’s failure to comply with these requirements.

Product manuals may be provided on CD-ROM or in printed form. Printed manuals are

an option for many products. Manuals may also be available on the Web. Go to

www.agilent.com and type the product model number in the Search field at the top of

the page.

NOTE Do not use this instrument in any manner not specified by the manufacturer. The

protective features of this instrument may be impaired if it is used in a manner not

specified in the operation instructions.

This instrument is an INDOOR USE product.

This instrument complies with INSTALLATION CATEGORY II for mains input and

INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION

DEGREE 2 defined in IEC 61010-1.

If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with

a measurement category, its inputs must not be connected to line-voltage mains.

•DANGEROUS PROCEDURE WARNINGS

Warnings, such as example below, shall be complied. Procedures throughout in

this manual prevent you from potentially hazard. Their instructions contained in the

warnings must be followed.

WARNING Hazardous voltage of up to the instrument’s maximum voltage may appear at Force,

Guard, and Sense terminals if Interlock terminal is closed. Open the Interlock

terminal when the Force, Guard, and Sense terminals are accessible. Voltage

applied to the terminals will be limited up to ±40 V or ±42 V.

•BEFORE APPLYING POWER

Verify that all safety precautions are taken. Make all connections to the instrument

before applying power. Note the instrument's external markings described under

“Safety Symbols”.

•GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument chassis

and cabinet must be connected to an electrical ground. The power terminal and the

power cable must meet International Electrotechnical Commission (IEC) safety

standards.

•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a

definite safety hazard.

•KEEP AWAY FROM LIVE CIRCUITS

Operation personnel must not remove instrument covers. Component replacement

and internal adjustments must be made by qualified maintenance personnel. Do

not replace components with power cable connected. Under certain conditions,

hazardous voltages may exist even with the power cable removed. To avoid

injuries, always disconnect power and discharge circuits before touching them.

•DO NOT SERVICE OR ADJUST ALONE

Do not attempt internal service or adjustment unless another person, capable of

rendering first aid and resuscitation, is present.

•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute

parts or perform any unauthorized modification to the instrument. Return the

instrument to a Agilent Technologies Sales and Service Office for services and

repair to ensure that safety features are maintained.

•IN CASE OF DAMAGE

Instruments that appear damaged or defective should be made inoperative and

secured against unintended operation until they can be repaired by qualified

service personnel.

Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are listed

below.

Direct current.

Alternating current.

Protective conductor terminal. For protection against electrical shock in case of a fault.

Used with field wiring terminals to indicate the terminal which must be connected to

ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which

normally includes all exposed metal structures.

Grounded terminal which indicates the earth potential.

On supply.

Off supply.

Standby supply. The equipment will be marked with this symbol is not completely

disconnected from AC mains when power switch is in the standby position.

In position of a bi-stable push switch.

Out position of a bi-stable push switch.

Hazardous voltage and potential for electrical shock. Do not touch terminals that have

this symbol when the equipment is on.

Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.

Instruction manual symbol. The equipment will be marked with this symbol when it is

necessary for the user to refer to the instruction manual.

IEC Measurement Category I

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,

condition or the like, which, if not correctly performed or adhered to, could result in

injury or death to personal.

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could

result in damage to or destruction of part or all of the equipment.

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Power Supply and Measurement Safety

• Power Supply Safety

This instrument can output high currents and voltages. Make sure that the load or

device under test can safely handle the output current and voltage. Also, make sure

that the connection leads can safely withstand the expected currents and are

insulated for the expected voltages.

The instrument outputs may be connected so as to float relative to earth ground.

Isolation or floating voltage ratings are indicated on the instrument, near the

output terminal or the Circuit Common terminal.

• Voltage/Current Measurement Safety

Multimeters and other instruments capable of measuring high voltages and

currents are subject to specific safety concerns because of the circuits to which

they may be connected. To safely use these instruments, you need to understand

the markings on the instrument near the input terminals, which include the

Protection Limits and the IEC Measurement Category.

• Protection Limits

Agilent multimeters and other voltage measurement instruments provide

protection circuitry to prevent damage to the instrument and to protect against the

danger of electric shock, provided the Protection Limits are not exceeded. To

ensure safe operation of the instrument, do not exceed the Protection Limits

shown on the input terminals.

• Source/Monitor Terminals

Source/monitor unit, SMU, can simultaneously perform DC voltage or current

output and measurement. Typical SMU has the Force, Guard, Sense, and Circuit

Common terminals as shown below. Normally the Force, Guard, and Sense

terminals are the same potential. Voltage marked around the terminals indicates

the Protection Limits.

Force and Sense must be connected to a terminal of a device under test for the

Kelvin connection which is effective for high current measurement and low

resistance measurement. For the non-Kelvin connection to ease the connections,

connect Force only. Do not connect Sense. It must be opened.

Guard should be extended to around the device terminal for reducing leakage

current caused by a coaxial cable used. Guard must be never connected to

anything at the device side.

Circuit Common should be connected to shielding of the coaxial cable used.

The following image is the Kelvin triaxial connector of Agilent B1500A’s HPSMU.

¨O] +]«] ½;¨W

v¨O½v¶´

½;¨W

High Voltage Shock Hazard

Agilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for

MPSMU/HRSMU) at the force, guard, and sense terminals. To prevent electric

shock hazard, the following safety precautions must be observed during the use of

Agilent B1500A.

• Use a three-conductor AC power cable to appliance coupler (inlet) and the

instrument to an electric ground (safety ground).

• Prepare shielding box which covers interface to a device under test and equipped

with interlock circuit that opens when the door is opened.

• Before performing measurement, connect the interlock circuit to the Interlock

terminal of this instrument.

• Confirm periodically that the interlock function works normally.

• Before touching the connections of the Force, Guard, and Sense terminals, turn

the instrument off and discharge any capacitors of the measurement path. If you

do not turn the instrument off, complete “all” of the following items, regardless

of any instrument’s settings.

• Terminate measurement by pressing the Stop key, confirm that the

Measurement status indicator is not lit.

• Confirm that the High Voltage indicator is not lit.

• Open the shielding box access door (open the Interlock terminal).

• Discharge any capacitors if the capacitance is connected to an SMU.

• Warn workers in the vicinity of the instrument about hazardous conditions.

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