Agilent Technologies TPS-mobile Bedienungsanleitung

Agilent TPS-mobile

User Manual

2 Agilent TPS-mobile User Manual

Notices

Manual Part Number

87-901-005-01

Edition G.00, November 2021

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Manufactured by Agilent Technologies

Italia S.p.A., Vacuum Products Division

Via F.lli Varian, 54, 10040 Leinì (TO),

ITALY

Printed in Italy

Operating Temperature

Operating Temperature: 5°C ÷35°C

Storage Temperature: -20°C to +70°C

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

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fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

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separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

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The hardware and/or software

described in this document are

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Commercial Items) and DFARS

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Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

Agilent TPS-mobile User Manual 3

Contents

1Istruzioni per l’uso 13

Informazioni su questo manuale 14

Validità 14

Definizioni e terminologia 15

Definizione di Attenzione, Avvertenza e Nota 15

Simboli di avvertenza 16

Sicurezza 18

Uso corretto 18

Uso improprio 19

Attrezzatura di protezione 20

Linee guida di sicurezza per pompe turbomolecolari 21

Trasporto & Immagazzinamento 22

Descrizione del prodotto 23

Installazione 24

Preparazione per l’installazione 24

Set-up 26

Fissaggio del TPS-mobile 27

Collegamento della flangia per alto vuoto 30

Installazione della flangia ISO-K 31

Installazione della flangia ConFlat 32

Avvio e funzionamento del TPS-mobile 33

Soft Start 37

Arresto del TPS-mobile 40

Arresto di emergenza 40

Contents

4 Agilent TPS-mobile User Manual

Unità Speciali 40

Manutenzione 41

Vita del rotore 41

Pulizia 41

Smaltimento 42

Servizio Post Vendita 43

2Betriebsanleitung 44

Informationen über diese Betriebsanleitung 45

Gültigkeit 45

Definitionen und Terminologie 46

Definition von Vorsicht, Warnung und Hinweis 46

Warnsymbole 47

Sicherheit 49

Sachgemäße Verwendung 49

Unsachgemäße Anwendung 50

Schutzausrüstung 51

Sicherheitsrichtlinie für Turbomolekularpumpen 52

Transport und Lagerung 53

Produktbeschreibung 54

Installation 55

Vorbereitung zum Einbau 55

Einrichten 57

Montage von TPS-mobile 58

Anschluss des Hochvakuumflansches 61

Installation des ISO-K-Flansches 62

Installation des ConFlat-Flansches 63

Contents

Agilent TPS-mobile User Manual 5

Inbetriebnahme und Betrieb des TPS-mobile 64

Sanftanlauf 68

Stoppen von Modell TPS-mobile 71

Not-Aus 71

Spezialeinheiten 71

Wartung 72

Rotordauer 72

Reinigung 72

Entsorgung 73

Service 74

3Mode d’emploi 75

À propos de ce manuel 76

Validité 76

Définitions et terminologie 77

Signification des messages d’attention, d’avertissement et des notes 77

Symboles d'avertissement 78

Sécurité 80

Utilisation appropriée 80

Utilisation inappropriée 81

Équipements de protection individuelle 82

Consignes de sécurité pour les pompes turbomoléculaires 83

Transport et entreposage 84

Description du produit 85

Installation 86

Préparation pour l’installation 86

Configuration 88

Contents

6 Agilent TPS-mobile User Manual

Montage du TPS-mobile 89

Raccordement de la bride à vide élevé 92

Installation de la bride ISO-K 93

Installation de la bride ConFlat 94

Démarrage et utilisation du TPS-mobile 95

Démarrage progressif 99

Arrêt du TPS-mobile 102

Arrêt d’urgence 102

Unités spéciales 102

Entretien 103

Durée de vie du rotor 103

Nettoyage 103

Élimination 104

Service 105

4Instrucciones de uso 106

Acerca del manual 107

Validez 107

Definiciones y terminología 108

Definición de Precaución, Advertencia y Nota 108

Símbolos de advertencia 109

Seguridad 111

Uso correcto 111

Uso incorrecto 112

Equipo de protección 113

Pautas de seguridad para bombas turbomoleculares 114

Transporte y almacenamiento 115

Contents

Agilent TPS-mobile User Manual 7

Descripción del producto 116

Instalación 117

Preparación para instalación 117

Puesta en marcha 119

Montaje de la TPS-mobile 120

Conexión de la brida de alto vaciado 123

Instalación de la brida ISO-K 124

Instalación de la brida ConFlat 125

Puesta en marcha y funcionamiento de TPS-mobile 126

Arranque suave (Soft Start) 130

Parada del TPS-mobile 133

Parada de emergencia 133

Unidades especiales 133

Mantenimiento 134

Vida del rotor 134

Limpieza 134

Eliminación 135

Servicio 136

5使用说明137

关于本手册 138

有效性 138

定义与术语 139

小心、警告和注意的定义139

警告符号 140

安全 142

Contents

8 Agilent TPS-mobile User Manual

正确使用 142

使用不当 143

防护设备 144

涡轮分子泵安全指南 145

运输及存储146

产品描述 147

安装 148

安装准备148

设置150

TPS-mobile 的安装 151

高真空法兰的连接155

ISO-K 法兰的安装 156

ConFlat 法兰的安装 157

TPS-mobile 的启动和运行 158

慢启动162

停止 TPS-mobile 165

紧急停止 165

修改的标准165

维护 166

转子寿命 166

清洁166

处置167

服务168

Contents

Agilent TPS-mobile User Manual 9

6取扱説明書 169

この説明書について 170

有効期 170

定義と用語 171

警告・注意・注の定義 171

警告の記号 172

安全性 174

適切な使用 174

不適切な使用 175

保護用装備 176

ターボ分子ポンプ用安全ガイドライン 177

輸送と保管 178

製品説明 179

取り付け 180

取り付けの準備 180

セットアップ 182

TPS-mobile 実装 183

高真空フランジの接続 186

ISO-K フランジの取り付け 187

ConFlat フランジの取り付け 188

TPS-mobile コンパクトの起動と操作 189

ソフトスタート 193

TPS-mobile コンパクトを停止する 196

非常停止 196

修正された標準 196

メンテナンス 197

ローターの寿命 197

クリーニング 197

処分 198

サービス 199

Contents

10 Agilent TPS-mobile User Manual

7Instructions for Use 200

About this manual 201

Validity 201

Definitions and terminology 202

Definition of Caution, Warning and Note 202

Warning Symbols 203

Safety 205

Proper use 205

Improper use 206

Protective equipment 207

Safety guideline for Turbomolecular Pumps 208

Transport & Storage 209

Product description 210

Installation 211

Preparation for installation 211

Set-up 213

TPS-mobile Mounting 214

Connection of the High Vacuum Flange 217

Installation of ISO-K Flange 218

Installation of ConFlat Flange 219

Startup and Operation of the TPS-mobile 220

Soft Start 224

Stopping the TPS-mobile 227

Emergency stop 227

Modified Standard 227

Maintenance 228

Rotor life 228

Cleaning 228

Disposal 229

Service 230

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