Agilent Technologies VHS-10 Bedienungsanleitung

DRAF T

Vacuum Products Division

VHS-10 & VHS-400

DiffusionPumps

Part No. 699901023

Rev. L

June 2013

D R A F T

Agilent, Inc.

VHS-10 & VHS-400 Diffusion Pumps

Santovac

5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC.

Viton

is a registered trademark of E. I du Pont de Nemours and Company.

VHS-10 & VHS-400 Diffusion Pumps

D R A F T

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of

humans, or is environmentally unsafe, it will be the responsibility of the Customer to have the product

cleaned by an independent agency skilled and approved in handling and cleaning contaminated

materials before the product will be accepted by Agilent, Inc. for repair and/or replacement.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any

warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements

made by any person, including representatives of Seller, which are inconsistent or in conflict with the

terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an

officer of Seller.

Disclaimer

Operation and maintenance of this equipment involves serious risk. It is the responsibility of the user to

maintain safe operating conditions at all times. Agilent assumes no liability for personal injury or

damage resulting from operation or service of the equipment.

Agilent has no control over the use of this equipment and is not responsible for personal injury or

damage resulting from its use. The safe use and disposal of hazardous or potentially hazardous

materials of any kind is the sole responsibility of the user. Observe all WARNINGS and CAUTIONS to

minimize the serious hazards involved.

It is the sole responsibility of the users of Agilent equipment to comply with all local, state and federal

safety requirements (laws and regulations) applicable to their system. Employ the services of an

industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and

use.

VHS-10 & VHS-400 Diffusion Pumps

D R A F T

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or

adjustment, written authorization from Seller or its authorized representative for the return and

instructions as to how and where these Products should be returned must be obtained. Any Product

returned to Seller for examination shall be prepaid via the means of transportation indicated as

acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and

any warranty claim on any item that has been altered or has been returned by non-acceptable means of

transportation. When any Product is returned for examination and inspection, or for any other reason,

Customer shall be responsible for all damage resulting from improper packing or handling, and for loss

in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole

responsibility for determining the cause and nature of failure, and Seller’s determination with regard

thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at its expense; in addition, a charge for testing and examination

may be made on Products so returned.

VHS-10 & VHS-400 Diffusion Pumps

D R A F T

Contents

Documentation Conventions ...................................................................................................... 11

Diffusion Pump Hazards ............................................................................................................. 11

Introduction .................................................................................................................................... 19

Operating Characteristics............................................................................................................. 19

Pump Air Speed and Throughput ................................................................................................. 23

Physical Specifications................................................................................................................. 24

Wiring Diagram ........................................................................................................................... 26

Installation ...................................................................................................................................... 27

Unpacking ................................................................................................................................... 27

Pump Oil Installation ................................................................................................................... 28

Vacuum System Connections....................................................................................................... 28

Cooling Water Connections ......................................................................................................... 29

Electrical Connections ................................................................................................................. 30

Thermal Switch Connections ....................................................................................................... 31

Operation ........................................................................................................................................ 33

Startup Procedure ........................................................................................................................ 34

Shutdown Procedure.................................................................................................................... 34

Troubleshooting ............................................................................................................................. 35

Leakage ....................................................................................................................................... 35

Outgassing................................................................................................................................... 35

Poor Pump or System Performance .............................................................................................. 36

Appendix A. Maintenance ............................................................................................................. 39

Periodic Inspections ............................................................................................................... 39

Cleaning ................................................................................................................................ 40

Disassembly and Reassembly Procedures............................................................................... 41

Appendix B. Parts ..........................................................................................................................47

Replacement Parts ....................................................................................................................... 47

VHS-10 & VHS-400 Diffusion Pumps

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D R A F T

VHS-10 & VHS-400 Diffusion Pumps

D R A F T

List of Figures

1-1 VHS-10 Speed and Throughput Curves ................................................................................. 23

1-2 VHS-400 Speed and Throughput Curves ............................................................................... 23

1-3 VHS-10 and VHS-400 Outline with ASA Flanges .................................................................. 24

1-4 Operating Characteristics...................................................................................................... 26

A-1 VHS-10 and VHS-400 Jet Assembly ...................................................................................... 42

A-2 VHS-10 and VHS-400 Heater Connections ........................................................................... 43

A-3 Solid Steel and Slotted Stainless Clamp Plate ........................................................................ 44

A-4 Fill and Drain Assemblies ..................................................................................................... 45

VHS-10 & VHS-400 Diffusion Pumps

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D R A F T

VHS-10 & VHS-400 Diffusion Pumps

D R A F T

List of Tables

1 General Hazards................................................................................................................... 12

2 Explosive Conditions............................................................................................................. 14

3 Pressurization Hazards.......................................................................................................... 15

1-1 VHS-10 Operating Specifications.......................................................................................... 19

1-2 VHS-400 Operating Specifications........................................................................................ 21

1-3 VHS-10 and VHS-400 Dimensions ....................................................................................... 24

4-1 Troubleshooting Guide ......................................................................................................... 36

B-1 Replacement Parts ............................................................................................................... 47

VHS-10 & VHS-400 Diffusion Pumps

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D R A F T

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