Olympus MX63 Bedienungsanleitung

Instructions

Notes

This instruction manual is for the Olympus microscope.

To ensure safety, obtain optimum performance and to familiarize yourself fully with the use of this

product, we recommend that you study this manual thoroughly before operating this product, and

always keep this manual at hand when operating this product.

Retain this instruction manual in an easily accessible place near the work desk for future reference.

For details of products included in the configuration of this microscope, see page 18.

Semiconductor/FPD/Industrial Inspection

Microscopes

MX63/MX63L

Optical Microscope and Accessory

In accordance with European Directive on Waste Electrical and Electronic Equipment, this

symbol indicates that the product must not be disposed of as unsorted municipal waste, but

should be collected separately.

Refer to your local Olympus distributor in EU for return and/or collection systems available in

your country.

NOTE: This product has been tested and found to comply with the limits for a Class A digital device,

pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection

against harmful interference when the product is operated in a commercial environment. This product

generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance

with the instruction manual, may cause harmful interference to radio communications.

Operation of this product in a residential area is likely to cause harmful interference in which case the

user will be required to correct the interference at his own expense.

FCC WARNING: Changes or modifications not expressly approved by the party responsible for compliance

could void the user’s authority to operate the product.

For Korea only

이기기는 업무용 환경에서 사용할 목적으로 적합성평가를 받은 기기로서 가정용

환경에서 사용하는 경우 전파간섭의 우려가 있습니다.

This product is applied with the requirements of standard IEC/EN61326-1 concerning

electromagnetic compatibility.

- Emission Class A, applied to industrial environment requirements.

- Immunity Applied to industrial environment requirements.

Some interference may occur if this product is used in domestic location.

MX63/MX63L

Introduction....................................................................................................................................................... 1

Safety precautions...................................................................................................................................... 2

1 Nomenclature of units......................................................................................................................13

2 List of combinable units .................................................................................................................18

3 Observation procedures................................................................................................................22

3-1 Reflected light brightfield/darkfield observation procedures...................................22

3-2 Main switch........................................................................................................................................................... 24

3-3 Selecting the observation method (BF/DF)..............................................................................25

3-4 Selecting between the eyepiece light path and the camera light path ..................26

3-5 Placing a sample............................................................................................................................................. 27

1Placing a sample........................................................................................................................................................................27

2Moving the stage........................................................................................................................................................................27

3-6 Selecting the objective............................................................................................................................... 28

3-7 Focusing ..................................................................................................................................................................29

1Focusing.............................................................................................................................................................................................29

2Adjusting the tension of the coarse focusing knob....................................................................................29

3Attaching/detaching the fine focusing knob.....................................................................................................29

4Using the pre-focusing lever............................................................................................................................................30

5Using the focus aid (MX-FA) ............................................................................................................................................31

3-8 Adjusting the brightness........................................................................................................................... 32

1When the LED lamp housing is combined.........................................................................................................32

2When the mercury lamp housing is combined...............................................................................................32

3When the halogen lamp housing is combined ..............................................................................................32

4When the light source is combined..........................................................................................................................33

5Using the LIM/SET switch ..................................................................................................................................................33

Contents

3-9 Adjusting the observation tube...........................................................................................................35

1Adjusting the interpupillary distance........................................................................................................................35

2Adjusting the diopter...............................................................................................................................................................35

3Using the eye shades............................................................................................................................................................37

4Adjusting the tilt...........................................................................................................................................................................37

3-10 Adjusting the aperture diaphragm.................................................................................................38

3-11 Using the filter for reflected light illumination.......................................................................39

3-12 Setting the glare prevention................................................................................................................40

3-13 Observation using the mercury burner ......................................................................................41

3-14 Using the oil immersion objective.................................................................................................. 42

4 Image acquisition................................................................................................................................43

4-1 Image acquisition diagram......................................................................................................................43

5 Observation methods......................................................................................................................44

5-1 Transmitted light brightfield observation procedures.....................................................44

1Notes for observation.............................................................................................................................................................46

2Adjusting the transmitted light illumination ........................................................................................................46

3Using the field diaphragm for transmitted light illumination...............................................................47

4Using the aperture diaphragm for transmitted light illumination.....................................................48

5Using the filters for transmitted light illumination..........................................................................................49

5-2

Reflected light differential interference contrast (DIC) observation procedures..........50

1Setting the analyzer (when using U-MDICAF3)...............................................................................................51

2Setting the DIC slider..............................................................................................................................................................52

3Adjusting the prism of the DIC slider........................................................................................................................53

5-3 Reflected light simple polarization observation procedures ...................................54

5-4 Reflected light fluorescence observation procedures...................................................55

5-5 Reflected light IR (infrared) observation procedures.......................................................56

MX63/MX63L

5-6

Reflected light simultaneous observation for BF/DF observation procedures.............57

1Inserting the MIX slider for reflected light observation.............................................................................58

2Turning ON the illumination of the MIX slider for reflected light observation.......................58

3Adjusting the illumination brightness.......................................................................................................................59

4Selecting the illumination pattern................................................................................................................................60

5-7 Transmitted light simple polarization observation procedures.............................. 61

1Setting the analyzer and the polarizer for transmitted light illumination..................................62

6 Replacement of optical parts ...................................................................................................63

6-1 Removing and attaching the eyepiece ........................................................................................63

6-2 Replacing the objective .............................................................................................................................65

6-3 Replacing the halogen bulb...................................................................................................................68

6-4 Replacing the mercury burner............................................................................................................. 70

6-5 Replacing the filter.......................................................................................................................................... 75

7 Troubleshooting.................................................................................................................................... 76

8 Specifications..........................................................................................................................................82

9 Optical performance list <<UIS2 series>> ..........................................................................84

10 Assembly..................................................................................................................................................88

10-1 Assembly diagram .......................................................................................................................................88

10-2 Assembly procedures...............................................................................................................................89

1Attaching the stage..................................................................................................................................................................89

2Attaching the holders.............................................................................................................................................................90

3Attaching the objective .........................................................................................................................................................91

4Attaching the revolving nosepiece.............................................................................................................................91

5Attaching the MIX slider / DIC slider for reflected light observation ............................................91

6Attaching the observation tube.....................................................................................................................................91

7Attaching the eyepiece.........................................................................................................................................................91

8Attaching the light source for reflected light illumination.......................................................................92

9Attaching the breath shield MX-BSH-ESD-2 ......................................................................................................95

10 Connecting the cables..........................................................................................................................................................96

11 Setting the DIP switch / AS.PRESET switch .......................................................................................................98

12 Connecting the power cord...........................................................................................................................................101

13 Use of the adjuster ................................................................................................................................................................102

14 Seismic protection .................................................................................................................................................................102

15 Centering of the aperture diaphragm of reflected light illumination.........................................103

10-3 Connection with PC ................................................................................................................................ 104

1Connecting the interface cable..................................................................................................................................104

2Start procedures /Exit procedures..........................................................................................................................104

11 Maintenance parts........................................................................................................................ 105

12 Preventive inspection sheet for illumination devices..................................... 106

13 Proper selection of the power supply cord............................................................ 107

Appendix: Units attached by Olympus............................................................................... 109

1Transmitted light illumination unit (MX-TILLA/MX-TILLB).......................................................................109

2Setting the OP light path....................................................................................................................................................110

3Attaching the reflected light filter (26ND0.5) ....................................................................................................111

4Attaching the focus aid (MX-FA) ................................................................................................................................112

MX63/MX63L

Introduction

Configuration of instruction manuals

Read all instruction manuals provided with the units you purchased.

The following instruction manuals are prepared for the units to be used with this product.

Manual names Main contents

Semiconductor / FPD / Industrial

Inspection Microscopes

(this instruction manual)

Reflected brightfield observation, reflected darkfield observation,

reflected differential interference contrast observation, reflected

simple polarization observation, reflected fluorescence observation,

reflected infrared observation, reflected brightfield/darkfield

simultaneous observation, transmitted brightfield observation and

transmitted simple polarization observation

U-RFL-T power supply for mercury burner /

U-RX-T power supply for xenon burner Connection of the mercury lamp housing with the power supply

TH4 power supply for halogen bulb Connection of the halogen lamp housing with the power supply

Light guide illumination system Connection of the light guide illumination system with the liquid light

guide, etc.

This microscope employs the UIS2 optical systems. If you use an eyepiece, objective or condenser, etc. together with

this microscope, be sure to use those of UIS2 optical system series.

Using inappropriate units restricts the performance.

(There are other units usable with the UIS series. Contact Olympus or refer to the latest catalogs.)

This instruction manual applies to users of this product and Olympus distributors. However, some part at the end of this

instruction manual applies to Olympus distributors only.

Intended use

This product is designed to observe magnified images of samples for industrial applications.

Appropriate samples include semiconductors, electrical components, molded parts or mechanical parts.

Industrial applications include observation, inspection or measurements.

Do not use this product for any purpose other than its intended use.

Label of immersion oil

Read the label of the immersion oil you purchased.

Immersion oil Main contents

IMMOIL-F30CC Cautions and handling procedures of the immersion oil

SEMI

This device has been subjected to the compliance evaluations of the following guidelines under the

SEMIStandard.

· S2-0715: Safety Guidelines for Semiconductor Manufacturing Equipment

· S8-0915: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

Safety precautions

If the product is used in a manner not specified by this manual, the safety of the user may be imperiled. In addition, the product

may also be damaged.

Read this instruction manual carefully and always use this product according to this instruction manual.

The following symbols are used in this instruction manual.

CAUTION : Indicates a potentially hazardous situation which, if not avoided, may result in

minor or moderate injury.

NOTE

: Indicates a potentially hazardous situation which, if not avoided, may result in

damage to the equipment or other property.

TIP

: Indicates the useful knowledge or information for use.

CAUTION - Installation of the product -

Install the product on a sturdy, level table or bench.

· If you install the microscope on an unstable table or a tilted table, the microscope may topple and you may get

injured.

· Install the product on an desk where the tilt of the top surface of the desk meets following conditions.

Otherwise, the stage may move spontaneously.

・ MX63 : 1° or less

・ MX63L : 20′or less

· For safety, do not place a mat, etc. under the device.

Use of the adjuster.

The center of gravity changes depending on the sample weight, sample position or stage movement, etc.

In particular, as MX63L uses a large-size stage, the center of gravity changes significantly.

To prevent the microscope from unexpected overturning, adjust the adjuster at the bottom of the microscope to take

the overturning prevention actions.

For adjustment procedures, see “Use of the adjuster" (P.102).

Seismic protection

In order to prevent the microscope from overturning in case of seismic, etc., use the L-shape fixture to take the

reinforcement countermeasures.

For the seismic protection, see “Seismic protection" (P.102).

MX63/MX63L

Do not look directly at the light from the LED unit for a long time.

If you feel that the light from LED unit is too bright during observation, adjust the light intensity using the brightness

control knob before continuing the observation. The LED built in this product is basically eye-safe. However, do not

look directly at the light from the LED unit for a long time, since it may cause damage to your eyes.

Do not look directly at the light coming out from the objective or the specular reflection light from the

sample.

Do not look directly at the light coming out from the objective for a long time, since it may cause damage to your eyes.

Do not expose your skin to the light coming out from the objective for a long time.

If your skin is exposed to the light coming out from the objective for a long time, you may get burned.

CAUTION - LED (light emitting diode) -

Do not press the micro switch of the MIX slider for reflected

light observation (U-MIXR) with your finger.

If you press the micro switch aof the MIX slider for reflected light

observation with your finger, the MIX slider for reflected light observation

may emit the light.

Do not insert the MIX slider for reflected light observation

(U-MIXR) upside down.

Do not insert the MIX slider for reflected light observation upside down.

Otherwise, the light coming out from the MIX slider for reflected light

observation enters your eyes through the eyepiece and your eyes may

be damaged.

CAUTION - Electric safety -

Always use the power cord provided by Olympus.

If the proper the power cord and cables are not used, the electric safety and the EMC (Electro-Magnetic Compatibility)

performance of the product cannot be assured. If no power cord is provided, please select the proper power cord by

referring to the section “Proper selection of the power cord” at the end of this instruction manual.

Always connect the ground terminal.

Connect the ground terminal of the power cord and that of the power outlet. If the product is not grounded, our

intended electric safety and EMC performance of the product cannot be assured.

Do not use the product in close proximity to the sources of strong electromagnetic radiation.

Proper operation may be interfered. The electromagnetic environment should be evaluated prior to operation of the

product.

Disconnect the power cord in case of emergency.

In case of emergency, be sure to unplug the power cord from the power cord connector on the product or from the

wall power outlet. Install the product at the location where you can reach the power cord connector or the power outlet

at hand to disconnect the power cord quickly.

This product is designed with intension to be used in the industrial environment for the EMC performance. Using this

equipment in the residential environment may affect other equipment.

CAUTION - Lamp (halogen bulb and mercury burner) -

Remove the power cord from the product when replacing the

lamp.

To avoid electric shock hazards and burns when replacing the lamp,

set the main switch to (OFF), and disconnect the power cord from

the power supply in advance. When you replace the lamp immediately

after use of the microscope, wait until the lamp housing and the lamp

are sufficiently cooled down.

Applicable lamp

[For U-LH100L-3]

12V100WHAL-L (made by PHILIPS Co. 7724I)

12V100WHAL (made by PHILIPS Co. 7023)

[For U-LH100IR]

12V100WHAL-L (made by PHILIPS Co. 7724I)

[For U-LH100HGAPO, U-LH100HG]

USH-103OL (made by Ushio Co.)

[For U-HGLGPS]

SHI-130OL (made by Ushio Co.)

Secure the sufficient space when installing the lamp housing.

The surface of the lamp housing on the back of the microscope

gets very hot. Therefore, when installing the microscope, secure the

sufficient space (100mm or more) around the lamp housing, particularly

on the top and bottom surfaces. Also, if the power cord or cables

contact the lamp housing, they may melt and cause electric shock. Be

sure to lay out the power cord and cables sufficiently away from the

lamp housing.

· As the UV ray of the mercury burner is harmful to your eyes, do not

light the mercury burner when the lamp housing is not attached to the

microscope.

· The lifetime of the illumination device is influenced significantly by

operating conditions (ambient temperature/humidity, voltage of the

power supply, lighting time, etc.), but is approximately eight(8) years

or 20,000 illumination hours if operating it 8 hours a day, whichever is

shorter, as a rough standard.

· Since the lamp generates a high heat, perform the inspection

according to “12 Preventive inspection sheet for illumination devices"

on page 106. If you find the unexpected phenomena, e.g. smoke, etc.

during operation, turn OFF the power immediately and contact

Olympus.

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